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41. 发明授权

US4930442A Microwave plasma CVD apparatus having an improved microwave transmissive window 失效
标题翻译：具有改进的微波透射窗的微波等离子体CVD装置
公开(公告)号：US4930442A
公开(公告)日：1990-06-05
申请号：US173605
申请日：1988-03-25
申请人： Shigehira Iida , Takayoshi Arai , Junichiro Hashizume , Tetsuya Takei , Keishi Saitoh
发明人： Shigehira Iida , Takayoshi Arai , Junichiro Hashizume , Tetsuya Takei , Keishi Saitoh
IPC分类号： C23C16/511
CPC分类号： C23C16/511
摘要： An improved microwave plasma CVD apparatus for the formation of a thin film on a substrate by exciting glow discharge in a reaction chamber, comprising a substantially enclosed reaction chamber to receive the substrate, a means for supplying a film forming raw material gas into said reaction chamber and a means for introducing microwave energy into said reaction chamber, characterized in that said means for introducing microwave energy retains the gas atmosphere in said reaction chamber and as well as is constituted by a microwave transmissive material capable of introducing the microwave energy, said material being alumina ceramics containing glassy component such as SiO.sub.2, CaO and MgO in an amount of 1 wt. % to 10 wt. % and substantially as other component .alpha.-alumina.In the improved apparatus, the microwave transmissive window can be repeatedly used without being damaged for a long period of time and a desirable functional deposited film may be mass-produced at a high deposition rate.
摘要翻译：一种改进的微波等离子体CVD装置，用于通过在反应室中激发辉光放电，在基板上形成薄膜，其包括基本上封闭的反应室以接收基板，用于将成膜原料气体供应到所述反应室以及用于将微波能量引入所述反应室的装置，其特征在于，所述用于引入微波能量的装置将气体气氛保持在所述反应室中，并且由能够引入微波能量的微波透射材料构成，所述材料为含有1重量％的SiO 2，CaO和MgO等玻璃状成分的氧化铝陶瓷。％〜10重量％％和基本上作为其它组分α-氧化铝。在改进的装置中，可以重复使用微波透射窗而不会长期损坏，并且可以以高沉积速率大量生产所需的功能沉积膜。

42. 发明授权

US4812328A Method for forming deposited film 失效
标题翻译：沉积膜形成方法
公开(公告)号：US4812328A
公开(公告)日：1989-03-14
申请号：US945689
申请日：1986-12-23
申请人： Keishi Saitoh , Masaaki Hirooka , Junichi Hanna , Isamu Shimizu
发明人： Keishi Saitoh , Masaaki Hirooka , Junichi Hanna , Isamu Shimizu
IPC分类号： H01L31/04 , C23C16/24 , C23C16/30 , C23C16/44 , C23C16/452 , C23C16/48 , G03G5/08 , H01L21/205 , B05D5/12
CPC分类号： H01L21/02425 , C23C16/452 , H01L21/02422 , H01L21/0245 , H01L21/02532 , H01L21/0262
摘要： A method for forming a deposited film by introducing a gaseous starting material for formation of a deposited film and a gaseous halogenic oxidizing agent having the property of oxidation action on said starting material separately from each other into a reaction space to form a deposited film according to a chemical reaction, which comprises activating previously a gaseous substance (B) for formation of a band gap controller in an activation space to form an activated species and introducing said activated species into the reaction space to form a deposited film controlled in band gap on a substrate existing in the film forming space.
摘要翻译：通过将用于形成沉积膜的气态原料和对所述原料具有氧化作用的气态卤素氧化剂彼此分开引入反应空间形成沉积膜形成沉积膜的方法，以形成沉积膜化学反应，其包括先前激活用于在活化空间中形成带隙控制器的气态物质（B）以形成活化物质并将所述活化物质引入反应空间中以形成控制在带隙控制器上的沉积膜存在于成膜空间中的基板。

43. 发明授权

US4795688A Layered photoconductive member comprising amorphous silicon 失效
标题翻译：包含非晶硅的层状感光体
公开(公告)号：US4795688A
公开(公告)日：1989-01-03
申请号：US39448
申请日：1987-04-17
申请人： Teruo Misumi , Kyosuke Ogawa , Junichiro Kanbe , Keishi Saitoh , Yoichi Osato , Shigeru Shirai
发明人： Teruo Misumi , Kyosuke Ogawa , Junichiro Kanbe , Keishi Saitoh , Yoichi Osato , Shigeru Shirai
IPC分类号： G03G5/082 , G03G5/14
CPC分类号： G03G5/08242
摘要： A photoconductive member comprises a support for a photoconductive member and an amorphous layer having photoconductivity and containing an amorphous material comprising silicon atom as a matrix, said amorphous layer having a first layer region containing oxygen atoms and a second layer region containing Group III atoms of the Periodic Table Such that said Group III atoms are continuously distributed in the direction of the layer thickness and enriched at the support side and wherein oxygen is absent from said amorphous layer exclusive of the first layer region, said first layer region being present internally in the support side portion of the amorphous layer, and there being the following relationship:To/T.ltoreq.1where To is the layer thickness of the first layer region and T results from subtracting To from the layer thickness of the amorphous layer.
摘要翻译：感光体包括用于感光体的支撑体和具有光电导性的非晶层，并且含有包含硅原子作为基体的非晶材料，所述非晶层具有含有氧原子的第一层区域和含有氧原子的第三层原子的第二层区域周期表使得所述III族原子沿着层厚度的方向连续分布并且在支撑侧富集，并且其中不含有第一层区域的所述非晶层中的氧，所述第一层区域存在于支撑体内部并且具有以下关系：To / T <1其中To为第一层区域的层厚度，T为从非晶层的层厚度减去To的结果。

44. 发明授权

US4705732A Member having substrate with projecting portions at surface and light receiving layer of amorphous silicon 失效
标题翻译：具有在表面具有突出部分的基底和非晶硅的光接收层的构件
公开(公告)号：US4705732A
公开(公告)日：1987-11-10
申请号：US726768
申请日：1985-04-24
申请人： Keishi Saitoh , Masahiro Kanai , Tetsuo Sueda , Teruo Misumi , Yoshio Tsuezuki , Kyosuke Ogawa
发明人： Keishi Saitoh , Masahiro Kanai , Tetsuo Sueda , Teruo Misumi , Yoshio Tsuezuki , Kyosuke Ogawa
IPC分类号： G03G5/082 , G03G5/10 , H01L31/09 , G03G5/085
CPC分类号： G03G5/08214 , G03G5/08228 , G03G5/10 , G03G5/102 , H01L31/095
摘要： A light-receiving member comprises a substrate having a large number of protruding portions on a surface thereof, each of said protruding portions having at a predetermined cut position a sectional shape comprising a main projection and a subprojection, the main projection and the subprojection overlapping each other, and a light-receiving layer of a multi-layer structure having a first layer comprising an amorphous material containing silicon atoms and germanium atoms and a second layer comprising an amorphous material containing silicon atoms and exhibiting photoconductivity provided on said substrate successively from the substrate side.
摘要翻译：光接收部件包括在其表面上具有大量突出部分的基板，每个所述突出部分在预定切割位置具有包括主投影和子投影的截面形状，所述主投影和子投影各自重叠以及具有第一层的多层结构的光接收层，所述第一层包括含有硅原子和锗原子的非晶态材料，以及第二层，包含含硅原子的非晶态材料，并且从所述衬底依次提供在所述衬底上。侧。

45. 发明授权

US4666807A Photoconductive member 失效
标题翻译：感光元件
公开(公告)号：US4666807A
公开(公告)日：1987-05-19
申请号：US814017
申请日：1985-12-20
申请人： Keishi Saitoh , Yukihiko Ohnuki , Shigeru Ohno
发明人： Keishi Saitoh , Yukihiko Ohnuki , Shigeru Ohno
IPC分类号： G03G5/082 , G03G5/14
CPC分类号： G03G5/08242
摘要： A light-receiving member comprises a substrate for light-receiving member and a light-receiving layer having photoconductivity provided on said substrate, said light-receiving layer comprising from the side of said substrate a first layer (I) comprising an amorphous material containing silicon atoms, a second layer (II) comprising an amorphous material containing silicon atoms and germanium atoms and a third layer (III) comprising an amorphous material containing silicon atoms and nitrogen atoms, and the germanium atoms contained in said second layer (II) being distributed ununiformly in the layer thickness direction of said layer.
摘要翻译：光接收部件包括用于光接收部件的基板和设置在所述基板上的具有光电导率的光接收层，所述光接收层包括从所述基板侧的第一层（I），所述第一层（I）包括含硅的非晶材料原子，包含含有硅原子和锗原子的无定形材料的第二层（II）和包含含有硅原子和氮原子的无定形材料的第三层（III），并且所述第二层（II）中包含的锗原子分布在所述层的层厚度方向上不均匀。

46. 发明授权

US4650736A Light receiving member having photosensitive layer with non-parallel interfaces 失效
标题翻译：光接收元件具有非平行界面的感光层
公开(公告)号：US4650736A
公开(公告)日：1987-03-17
申请号：US699868
申请日：1985-02-08
申请人： Keishi Saitoh , Masahiro Kanai , Tetsuo Sueda , Teruo Misumi , Yoshio Tsuezuki , Kyosuke Ogawa
发明人： Keishi Saitoh , Masahiro Kanai , Tetsuo Sueda , Teruo Misumi , Yoshio Tsuezuki , Kyosuke Ogawa
IPC分类号： G03G5/082 , H01L31/09
CPC分类号： H01L31/095 , G03G5/08214 , G03G5/08228 , G03G5/08242
摘要： A light receiving member comprises a light receiving layer of a multi-layer structure having at least one photosensitive layer comprising an amorphous material containing silicon atoms on a substrate, said photosensitive layer having at least one pair of non-parallel interfaces within a short range and said non-parallel interfaces being arranged in a large number in at least one direction within a plane perpendicular to the layer thickness direction.
摘要翻译：光接收元件包括多层结构的光接收层，其具有至少一个感光层，该光敏层包含在基底上含有硅原子的无定形材料，所述感光层在短距离内具有至少一对非平行界面，所述非平行界面在垂直于层厚度方向的平面内以至少一个方向大量布置。

47. 发明授权

US4601964A Photoconductive member comprising layer of A-Si/A-Si(Ge)/A-Si(O) 失效
标题翻译：含有A-Si / A-Si（Ge）/ A-Si（O）层的感光体，
公开(公告)号：US4601964A
公开(公告)日：1986-07-22
申请号：US686700
申请日：1984-12-27
申请人： Keishi Saitoh , Yukihiko Ohnuki , Shigeru Ohno
发明人： Keishi Saitoh , Yukihiko Ohnuki , Shigeru Ohno
IPC分类号： G03G5/082 , G03G5/085
CPC分类号： G03G5/08242
摘要： A light-receiving member comprises a substrate for light-receiving member and a light-receiving layer having photoconductivity provided on said substrate, said light-receiving layer comprising from the side of said substrate a first layer (I) comprising an amorphous material containing silicon atoms, a second layer (II) comprising an amorphous material containing silicon atoms and germanium atoms and a third layer (III) comprising an amorphous material containing silicon atoms and oxygen atoms, and the germanium atoms contained in said second layer (II) being distributed ununiformly in the layer thickness direction of said layer.
摘要翻译：光接收部件包括用于光接收部件的基板和设置在所述基板上的具有光电导性的光接收层，所述光接收层包括从所述基板侧的第一层（I），所述第一层（I）包括含硅的非晶材料原子，包含含有硅原子和锗原子的无定形材料的第二层（II）和包含含有硅原子和氧原子的无定形材料的第三层（III），并且所述第二层（II）中包含的锗原子被分布在所述层的层厚度方向上不均匀。

48. 发明授权

US4595645A Photoconductive member having a-Ge and a-Si layers with nonuniformly distributed oxygen 失效
标题翻译：具有具有不均匀分布的氧的-Ge和a-Si层的感光体
公开(公告)号：US4595645A
公开(公告)日：1986-06-17
申请号：US666229
申请日：1984-10-29
申请人： Keishi Saitoh , Yukihiko Ohnuki , Shigeru Ohno
发明人： Keishi Saitoh , Yukihiko Ohnuki , Shigeru Ohno
IPC分类号： G03G5/082
CPC分类号： G03G5/08242 , G03G5/08292
摘要： A photoconductive member is provided which comprises a substrate for a photoconductive member and a light receiving layer provided on said substrate having a layer constitution comprising (1) a first layer in which a layer region (G) comprising an amorphous material containing germanium atoms and a layer region (S) exhibiting photoconductivity comprising an amorphous material containing silicon atoms are successively provided from the substrate side, and (2) a second layer which is constituted of an amorphous material comprising silicon atoms and at least one of carbon atoms and nitrogen atoms, said first layer containing oxygen atoms and having a first layer region, a third layer region and a second layer region, with oxygen atom distribution concentration in the layer thickness direction of C(1), C(3), and C(2), respectively, in the order mentioned from the substrate side with a proviso that C(3) does not solely take the maximum value and when either one of C(1) and C(2) is zero, the other two are not zero and not equal to each other, or when C(3) is zero, the other two are not zero, or when none of C( 1), C(2), and C(3) is zero, the three of C(1), C(2), and C(3) cannot be equal simultaneously and C(3) cannot solely take the maximum value.
摘要翻译：提供了一种感光元件，其包括用于光电导元件的基底和设置在所述基底上的光接收层，该光接收层具有层结构，该层结构包括：（1）第一层，其中包含含有锗原子的非晶态材料的层区域（G）从基板侧依次提供具有含有硅原子的非晶质材料的显示光电导性的层区域（S），（2）由包含硅原子和至少一个碳原子和氮原子的无定形材料构成的第二层，所述第一层含有氧原子并且具有在C（1），C（3）和C（2）的层厚度方向上具有氧原子分布浓度的第一层区域，第三层区域和第二层区域，分别以从衬底侧提到的顺序，条件是C（3）不仅取最大值，并且当C（1）和C（2）中的任一个为零时，或者当C（3）为零时，另外两个不为零，或当C（1），C（2）和C（3）都不为0时， C（1），C（2）和C（3）中的三个不能同时相等，C（3）不能只取最大值。

49. 发明授权

US4585721A Photoconductive member comprising amorphous germanium, amorphous silicon and nitrogen 失效
标题翻译：包含无定形锗，非晶硅和氮的感光体
公开(公告)号：US4585721A
公开(公告)日：1986-04-29
申请号：US646425
申请日：1984-08-31
申请人： Keishi Saitoh , Yukihiko Ohnuki , Shigeru Ohno
发明人： Keishi Saitoh , Yukihiko Ohnuki , Shigeru Ohno
IPC分类号： G03G5/082 , H01L29/165 , H01L31/09 , G03G5/08
CPC分类号： G03G5/08228 , G03G5/08221 , H01L29/165 , H01L31/095
摘要： A photoconductive member comprises a substrate for photoconductive member and a light receiving layer provided on said substrate having a layer constitution in which a first layer region (G) comprising an amorphous material containing germanium atoms and a second layer region (S) exhibiting photoconductivity comprising an amorphous material containing silicon atoms are successively provided from the substrate side, said light receiving layer containing nitrogen atoms.
摘要翻译：感光构件包括用于光导体的衬底和设置在所述衬底上的光接收层，其具有层结构，其中包含含有锗原子的非晶态材料的第一层区域（G）和显示光电导率的第二层区域（S）含有硅原子的无定形材料从衬底侧连续提供，所述光接收层含有氮原子。

50. 发明授权

US4571370A Amorphus silicon and germanium photoconductive member containing oxygen 失效
标题翻译：包含氧的非晶硅和锗光导体
公开(公告)号：US4571370A
公开(公告)日：1986-02-18
申请号：US640340
申请日：1984-08-13
申请人： Keishi Saitoh
发明人： Keishi Saitoh
IPC分类号： G03G5/04 , G03G5/08 , G03G5/082 , H01L31/0248 , H01L31/09 , G03G5/02
CPC分类号： G03G5/08 , G03G5/08228 , H01L31/095
摘要： A photoconductive member comprises a substrate for photoconductive member and a light receiving layer provided on said substrate having a layer constitution in which a layer region (G) comprising an amorphous material containing germanium atoms and a layer region (S) exhibiting photoconductivity comprising an amorphous material containing silicon atoms are successively provided from the substrate side, said light receiving layer having a layer region (O) containing oxygen atoms, the depth profile of oxygen atoms in said layer region (O) being increased smoothly and continuously toward the upper end surface of the light receiving layer.
摘要翻译：光电导元件包括用于光电导元件的衬底和设置在所述衬底上的光接收层，其具有层结构，其中包含含有锗原子的非晶态材料的层区域（G）和显示光电导率的层区域（S）包括非晶态材料所述光接收层具有含有氧原子的层区域（O），所述层区域（O）中的氧原子的深度分布平缓地且连续地向所述基底侧的上端面提供，光接收层。

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