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41. 发明申请

US20090291569A1 LASER IRRADIATION METHOD AND LASER IRRADIATION APPARATUS 有权
标题翻译：激光辐射方法和激光辐射装置
公开(公告)号：US20090291569A1
公开(公告)日：2009-11-26
申请号：US12536053
申请日：2009-08-05
申请人： Koichiro Tanaka , Hirotada Oishi
发明人： Koichiro Tanaka , Hirotada Oishi
IPC分类号： H01L21/268 , G02B27/12
CPC分类号： B23K26/0608 , B23K15/0093 , B23K15/10 , B23K26/0648 , B23K26/0732 , B23K26/0738 , B23K2103/56 , G02B3/0062 , G02B27/0927 , G02B27/0961 , G02B27/0966
摘要： The present invention is to provide a laser irradiation technique for irradiating the irradiation surface with the laser beam having homogeneous intensity distribution using a cylindrical lens array without being affected by the intensity distribution of the original beam. A laser beam emitted from a laser oscillator is divided by two kinds of cylindrical lens arrays into a plurality of beams, which are two kinds of linear laser beams with their energy intensity distribution inverted each other, and the two kinds of linear laser beams are superposed in a minor-axis direction. This can form the linear laser beam having homogeneous intensity distribution on the irradiation surface.
摘要翻译：本发明提供一种激光照射技术，其不受原始光束的强度分布的影响，使用柱面透镜阵列对具有均匀强度分布的激光束照射照射面。从激光振荡器发射的激光束被两种柱面透镜阵列分成多个光束，它们是能量强度分布相反的两种线性激光束，并且两种线性激光束被叠加在短轴方向。这可以形成在照射表面上具有均匀强度分布的线性激光束。

42. 发明授权

US07387954B2 Beam homogenizer, laser irradiation apparatus, and method for manufacturing semiconductor device 有权
公开(公告)号：US07387954B2
公开(公告)日：2008-06-17
申请号：US11240470
申请日：2005-10-03
申请人： Koichiro Tanaka , Hirotada Oishi
发明人： Koichiro Tanaka , Hirotada Oishi
IPC分类号： H01L21/428 , H01L21/84
CPC分类号： H01L21/02617 , G02B6/001 , G02B6/0048 , G02B6/0055 , G02B6/262 , G02B27/0927 , G02B27/095 , G02B27/0977 , G02B27/0994
摘要： The present invention is to provide a beam homogenizer, a laser irradiation apparatus, and a method for manufacturing a semiconductor device, which can suppress the loss of a laser beam and form a beam spot having homogeneous energy distribution constantly on an irradiation surface without being affected by beam parameters of a laser beam. A deflector is provided at an entrance of an optical waveguide or a light pipe used for homogenizing a laser beam emitted from a laser oscillator. A pair of reflection planes of the deflector is provided so as to have a tilt angle to an optical axis of the laser beam, whereby the entrance of the optical waveguide or the light pipe is expanded. Accordingly, the loss of the laser beam can be suppressed. Moreover, by providing an angle adjusting mechanism to the deflector, a beam spot having homogeneous energy distribution can be formed at an exit of the optical waveguide.

43. 发明申请

US20070195834A1 Laser irradiation apparatus, method of laser irradiation, and method for manufacturing semiconductor device 有权
标题翻译：激光照射装置，激光照射方法以及半导体装置的制造方法
公开(公告)号：US20070195834A1
公开(公告)日：2007-08-23
申请号：US11705794
申请日：2007-02-14
申请人： Koichiro Tanaka , Hirotada Oishi
发明人： Koichiro Tanaka , Hirotada Oishi
IPC分类号： H01S3/10
CPC分类号： B23K26/067 , B23K26/083 , G03F7/70291 , G03F7/70941
摘要： A laser irradiation apparatus and a method of laser irradiation which can improve use efficiency of a laser beam, eliminate an influence of stray light at a DMD, and form an irradiation pattern with a homogeneous beam spot are provided. The laser irradiation apparatus includes at least a laser oscillator, a diffractive optical element, and an optical element having many minute mirrors arranged two-dimensionally. A laser beam emitted from the laser oscillator is divided into plural laser beams by a diffractive optical element and the laser beams are deflected by plural micromirrors. The divided laser beams have equal energy to each other.
摘要翻译：提供了可以提高激光束的使用效率的激光照射装置和激光照射方法，消除DMD处的杂散光的影响，并且形成具有均匀束斑的照射图案。激光照射装置至少包括激光振荡器，衍射光学元件和具有二维布置的许多分钟的光学元件。从激光振荡器发射的激光束被衍射光学元件分成多个激光束，并且激光束被多个微镜偏转。分割的激光束具有彼此相等的能量。

44. 发明授权

US07187507B2 Optical component and laser irradiation apparatus 有权
标题翻译：光学部件和激光照射装置
公开(公告)号：US07187507B2
公开(公告)日：2007-03-06
申请号：US10852140
申请日：2004-05-25
申请人： Hirotada Oishi , Tomoaki Moriwaka
发明人： Hirotada Oishi , Tomoaki Moriwaka
IPC分类号： G02B7/02
CPC分类号： G02B7/026 , G02B7/025
摘要： The present invention provides an optical component for fixing a lens comprising a base, a holder, and a fastener. The base has a concave side surface and at least one first hole. The holder has a cylindrical shape and has a second hole penetrating through a center portion of at least one of the top surface and the bottom surface thereof. The lens is sandwiched between the holder and the part of the base which extends from the edge of the side surface to the inner side and which corresponds to the inner part of a circle drawn so as to circumscribe all the insertion holes. The base and the holder are fastened by the fasteners inserted in the first insertion hole and the second insertion hole.
摘要翻译：本发明提供一种用于固定包括基座，保持器和紧固件的透镜的光学部件。底座具有凹的侧表面和至少一个第一孔。保持器具有圆柱形形状并且具有穿过其顶表面和底表面中的至少一个的中心部分的第二孔。透镜被夹持在支架与从侧面的边缘延伸到内侧的基部的一部分之间，并且其对应于所画的圆的内部，以便包围所有的插入孔。基座和支架通过插入在第一插入孔和第二插入孔中的紧固件紧固。

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