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41. 发明申请

US20050167639A1 Electronic material composition, electronic product and method of using electronic material composition 审中-公开
标题翻译：电子材料成分，电子产品及使用电子材料成分的方法
公开(公告)号：US20050167639A1
公开(公告)日：2005-08-04
申请号：US10514499
申请日：2004-01-29
申请人： Takuro Hoshio , Takahiro Samata , Koichiro Wada , Hideki Ogawa , Shigeru Ishida , Atsushi Yamada
发明人： Takuro Hoshio , Takahiro Samata , Koichiro Wada , Hideki Ogawa , Shigeru Ishida , Atsushi Yamada
IPC分类号： C08K3/20 , C08G59/40 , C08G59/42 , C08K3/36 , C08L63/00 , H01F27/02 , H05K1/02 , H05K3/32 , H01C1/00
CPC分类号： C08G59/4269 , H05K1/0233 , H05K3/321
摘要： Disclosed are an electronic material composition, an electronic device to be obtained through the employment of this electronic material composition, and a method of using this electronic material composition, wherein the electronic material composition is featured in that, even if the electronic material composition is employed as one-pack type, the changes with time of viscosity would be such that would not bring about any substantial problem in practical use, and even if the electronic material composition is exposed to fluctuations in ambient temperature, there is little possibility of generating cohesive failure or peeling fracture, thereby making it possible to enhance the handling properties of the electronic material composition in a packaging step without any possibility of giving damage to the external appearance and to prevent the deterioration of magnetic/electric properties that can be improved through the provision of a packaging body to an electronic device even if the content of an inorganic filler in a cured coated layer is increased. This electronic material composition comprises epoxy resin, and a terminal carboxylic group modified polyether compound acting as a curable component.
摘要翻译：公开了电子材料组合物，通过使用该电子材料组合物获得的电子装置以及使用该电子材料组合物的方法，其中电子材料组合物的特征在于，即使使用电子材料组合物作为一包装型，粘度随时间的变化将不会在实际使用中产生任何实质性问题，并且即使电子材料组合物暴露于环境温度的波动，也几乎没有产生内聚力的可能性或剥离断裂，从而可以在包装步骤中提高电子材料组合物的处理性能，而不会对外观造成损害，并且防止可通过提供以下方式改善的磁/电特性的劣化电子设备的包装体即使c 固化涂层中的无机填料的增加。该电子材料组合物包含环氧树脂和作为可固化组分的末端羧基改性聚醚化合物。

42. 发明授权

US06727911B1 Method and apparatus for observing specimen image on scanning charged-particle beam instrument 有权
标题翻译：扫描带电粒子束仪器观察标本图像的方法和装置
公开(公告)号：US06727911B1
公开(公告)日：2004-04-27
申请号：US09563080
申请日：2000-04-24
申请人： Atsushi Yamada , Masaki Saito
发明人： Atsushi Yamada , Masaki Saito
IPC分类号： H01J3726
CPC分类号： H01J37/265 , H01J37/28 , H01J2237/20214 , H01J2237/20221 , H01J2237/20278 , H01J2237/20292
摘要： Method and apparatus for observing a specimen image on a scanning charged-particle beam instrument in such a way that the original observational position can be automatically resumed after movement of a specimen or its image. When an image is observed at the original position after a specimen or its image is rotated or moved, a keyboard or a pointing device is operated to command reconstruction of the image. In response to this, the CPU of the instrument reads data from a memory that indicates the history of rotations and movements of the specimen and image. For example, if the specimen has been mechanically rotated, the CPU controls a rotational drive circuit according to the data read from the memory, the data indicating amounts and directions of rotations. The specimen stage is rotated through a given angle in a direction opposite to the previous direction. As a result, the specimen can be returned to the position assumed prior to the rotation.
摘要翻译：用于在扫描带电粒子束仪器上观察样本图像的方法和装置，使得可以在样本或其图像移动之后自动恢复原始观察位置。当在样本或其图像被旋转或移动之后在原始位置观察到图像时，操作键盘或指示设备来命令重建图像。响应于此，仪器的CPU从存储器中读取指示样品和图像的旋转历史和运动的数据。例如，如果样本被机械旋转，则CPU根据从存储器读取的数据来控制旋转驱动电路，该数据指示数量和旋转方向。样品台沿与上一个方向相反的方向旋转给定的角度。结果，样品可以返回到在旋转之前假定的位置。

43. 发明授权

US06594289B2 Tunable laser source apparatus 失效
标题翻译：可调谐激光源设备
公开(公告)号：US06594289B2
公开(公告)日：2003-07-15
申请号：US09741275
申请日：2000-12-19
申请人： Atsushi Yamada , Shigenori Mattori
发明人： Atsushi Yamada , Shigenori Mattori
IPC分类号： H01S310
CPC分类号： H01S5/141 , H01S5/0687 , H01S5/16 , H01S5/164
摘要： A tunable laser source apparatus including an external cavity has a semiconductor laser and a wavelength selector. The semiconductor laser includes a reflection surface, a surface with an anti-reflection film and an active layer. The selector selects from laser light emitted from the laser through the surface with the anti-reflection film and feeding laser light of a desired wavelength back to the laser through the surface with the anti-reflection film. The semiconductor laser has a window region formed between a tip portion of the active layer extending toward the surface with the anti-reflection film and the surface with the anti-reflection film, the window region allowing the laser light of the desired wavelength fed back from the selector to be coupling thereon, while dilating the beam size of a portion of the laser light which is reflected from the surface with the anti-reflection film and reach the tip portion film.
摘要翻译：包括外部空腔的可调谐激光源设备具有半导体激光器和波长选择器。半导体激光器包括反射面，具有防反射膜的表面和有源层。选择器从激光器通过表面与防反射膜进行激光的选择，并将所需波长的激光通过表面与抗反射膜反射回激光。半导体激光器具有窗口区域，该窗口区域形成在有效层的顶端部分与抗反射膜之间朝向表面延伸，并且具有防反射膜的表面，窗口区域允许所需波长的激光从选择器在其上耦合，同时用抗反射膜扩大从表面反射的一部分激光的光束尺寸并到达尖端部分膜。

44. 发明授权

US06376842B1 Optical system for charged-particle-beam microlithography apparatus exhibiting reduced third- and fifth-order aberrations 失效
标题翻译：具有减小的三阶和五阶像差的带电粒子束微光刻装置的光学系统
公开(公告)号：US06376842B1
公开(公告)日：2002-04-23
申请号：US09270449
申请日：1999-03-16
申请人： Atsushi Yamada
发明人： Atsushi Yamada
IPC分类号： G01K108
CPC分类号： B82Y10/00 , B82Y40/00 , H01J37/153 , H01J37/3174
摘要： Charged-particle-beam (CPB) optical systems are disclosed, especially for use in CPB microlithography apparatus. A typical such system preferably includes first and second projection lenses (preferably in a Symmetric Magnetic Doublet configuration) and an aberration-correcting deflector system preferably comprising first and second deflector groups. Each deflector group preferably comprises multiple (e.g., three) deflectors displaced in an axial direction in association with the respective projection lenses. One or more deflectors in each group can comprise multiple micro-deflectors linearly arranged in an optical axis direction. The micro-deflectors can extend fully between the object surface and aperture surface of the projection lens and/or between the aperture surface and image surface of the projection lens. The deflectors in each group collectively form a deflection field that corrects off-axis third-order aberrations and on-axis third-order aberrations of the projection lenses substantially equally. The deflectors can also be configured to also minimize fifth-order blur generated by the deflection.
摘要翻译：公开了带电粒子束（CPB）光学系统，特别适用于CPB微光刻设备。典型的这样的系统优选地包括第一和第二投影透镜（优选为对称磁双曲面配置）以及优选地包括第一和第二偏转器组的像差校正偏转器系统。每个偏转器组优选地包括与各个投影透镜相关联的在轴向方向上移位的多个（例如，三个）偏转器。每个组中的一个或多个偏转器可以包括在光轴方向上线性排列的多个微偏转器。微导向器可以在投影透镜的物体表面和孔表面之间和/或投影透镜的孔表面和图像表面之间完全延伸。每组中的偏转器共同形成偏转场，该偏转场基本相等地校正投影透镜的离轴三次像差和轴上三阶像差。偏转器也可以被配置成最小化由偏转产生的五阶模糊。

45. 发明授权

US06369675B2 Frequency multiplier capable of taking out efficiently and stably harmonics higher than fourth order 失效
标题翻译：频率倍增器能够高效高效地排除高于四阶的谐波
公开(公告)号：US06369675B2
公开(公告)日：2002-04-09
申请号：US09758366
申请日：2001-01-12
申请人： Atsushi Yamada
发明人： Atsushi Yamada
IPC分类号： H03H1104
CPC分类号： H03B19/14
摘要： One end of a first transmission line is connected to the collector of an HBT with the base connected to an output terminal of an input-side matching circuit and with the emitter grounded, and one end of an end-open stub for blocking the passage of the doubled wave is connected to the other end of the first transmission line. One end of a second transmission line is connected to the other end of the first transmission line, and one end of an end-open stub for blocking the passage of the fundamental wave is connected to the other end of the second transmission line. An input terminal of an output-side matching circuit is connected to the other end of the second transmission line. The fundamental wave is reflected toward the HBT at the connecting point of the end-open stub for blocking the passage of the fundamental wave, while the doubled wave is reflected toward the HBT at the connecting point of the end-open stub for blocking the passage of the doubled wave, by which only harmonics of quadrupled wave or higher-ordered waves are outputted via the output-side matching circuit. Thus, the frequency multiplier is capable of taking out fourth- or higher-ordered harmonics efficiently with a simple constitution using one high frequency transistor, and can be reduced in size and stabilized in operation.
摘要翻译：第一传输线的一端连接到HBT的集电极，其基极连接到输入侧匹配电路的输出端并且发射极接地，并且端开路短路的一端用于阻止双波连接到第一传输线的另一端。第二传输线的一端连接到第一传输线的另一端，并且用于阻挡基波通过的端部开路短截线的一端连接到第二传输线的另一端。输出侧匹配电路的输入端连接到第二传输线的另一端。基本波在端开路短路的连接点向HBT反射，阻止基波通过，而双波反射到终端开路短路的连接点处的HBT，阻挡通道通过输出侧匹配电路仅输出四倍波或高阶波的谐波。因此，倍频器能够通过使用一个高频晶体管的简单结构有效地取出第四或更高次谐波，并且可以减小尺寸并在操作中稳定。

46. 发明授权

US5609652A Method of manufacturing a synthetic resin part integrally formed with metal members 失效
标题翻译：制造与金属部件一体形成的合成树脂部件的方法
公开(公告)号：US5609652A
公开(公告)日：1997-03-11
申请号：US418410
申请日：1995-04-07
申请人： Atsushi Yamada , Tadayuki Okuda , Masaki Hagiwara , Yoshihide Yoshida
发明人： Atsushi Yamada , Tadayuki Okuda , Masaki Hagiwara , Yoshihide Yoshida
IPC分类号： B29C45/14 , B60Q3/02
CPC分类号： B60Q3/0226 , B29C45/14639 , B60Q3/0279 , B29K2995/0005 , Y10T29/49172 , Y10T29/49218 , Y10T29/4922 , Y10T29/49222 , Y10T29/49787 , Y10T29/4998
摘要： Disclosed are a method of manufacturing a synthetic resin part integrally formed with metal members, including the steps of: integrally forming a plurality of metal member sets through coupling portions, each of the metal member sets including a plurality of coupled together metal members; inserting the metal member sets into the molding dies of a forming machine; injecting synthetic resin for molding into the molding die, and forming a synthetic resin part integrally formed with metal members in sequence to form a synthetic resin part continuum where a plurality of synthetic resin parts are connected; and cutting off the coupling portions to manufacture the plurality of synthetic resin parts, and a synthetic resin part manufactured according to the above-mentioned manufacturing method. With this manufacturing method, the assembling accuracy of the synthetic resin part to metal members is enhanced, there is no danger of unnecessary contact between metal members, and the time for assembling metal members is saved to contribute to cost reduction.
摘要翻译：公开了一种制造与金属构件一体形成的合成树脂部件的方法，包括以下步骤：通过联接部分一体地形成多个金属构件组，每个金属构件组包括多个联接在一起的金属构件; 将金属构件组插入成型机的模具中; 将成型用合成树脂注入成型模具中，依次形成与金属部件一体形成的合成树脂部，形成连接有多个合成树脂部件的合成树脂部连续体; 切断联接部分以制造多个合成树脂部件，以及根据上述制造方法制造的合成树脂部件。通过该制造方法，合成树脂部件与金属部件的组装精度提高，金属部件没有不必要的接触的危险，节省组装金属部件的时间，有助于降低成本。

47. 发明授权

US5472374A Polishing method and polishing device using the same 失效
标题翻译：抛光方法和使用其的抛光装置
公开(公告)号：US5472374A
公开(公告)日：1995-12-05
申请号：US103678
申请日：1993-08-10
申请人： Atsushi Yamada
发明人： Atsushi Yamada
IPC分类号： B24B7/22 , B24B13/015 , B24B21/04 , B24B37/04 , B24B21/00
CPC分类号： B24B21/04 , B24B13/015 , B24B37/04 , B24B7/228
摘要： A polishing method and apparatus for a silicon substrate or the like, the method including disposing a polishing cloth in contact with a surface of a work to be polished, pressing the polishing cloth using pressing rods against the surface of the work to be polished in a region with a smaller area than the area of the surface of the work to be polished while adjusting the pressure of contact, and polishing the entire surface to be polished while moving the work relative to the polishing cloth and putting it under circulating movement with a radius smaller than a diametrical length of the region along the surface to be polished without autorotation.
摘要翻译：一种用于硅基板等的抛光方法和装置，所述方法包括将抛光布布置成与待抛光工件的表面接触，使用压杆将抛光布压在待抛光工件的表面上区域，其面积比被研磨工件的表面面积小，同时调节接触压力，并在抛光工件相对于抛光布移动的同时抛光整个待抛光表面，并将其以半径小于沿着要抛光的表面的区域的直径长度，而无需自动。

48. 发明授权

US5313062A Automatic focusing and astigmatism correction for electron beam apparatus 失效
标题翻译：电子束装置的自动对焦和散光校正
公开(公告)号：US5313062A
公开(公告)日：1994-05-17
申请号：US16749
申请日：1993-02-11
申请人： Atsushi Yamada
发明人： Atsushi Yamada
IPC分类号： H01J37/153 , H01J37/21 , H01J37/28
CPC分类号： H01J37/21 , H01J2237/216
摘要： A method of automatically and accurately accomplishing focusing and astigmatism correction in an electron beam apparatus such as a scanning electron microscope. The electron beam is raster scanned to scan a specimen in two dimensions. If the obtained signal intensity distribution curve has only one peak, the peak position P2 of a curve obtained by raster scanning the beam vertically is detected. The peak position P1 of a curve obtained by raster scanning the beam horizontally is detected. An intermediate position P0 is calculated, using the formulaP0=(P1+P2)/2The intensity of excitation of the objective lens is adjusted to this intermediate position P0. In this way, if two peaks cannot be obtained by a horizontal raster scan of the beam, depending on the state of the surface of the specimen, it is possible to accurately bring the beam into focus at the position of the circle of least confusion. After this focusing operation, an automatic astigmatism correction is made.
摘要翻译：一种在扫描电子显微镜等电子束装置中自动准确地进行聚焦和像散校正的方法。光栅扫描电子束以扫描样本二维。如果获得的信号强度分布曲线仅具有一个峰值，则检测通过垂直扫描光束获得的曲线的峰值位置P2。检测通过水平扫描光束获得的曲线的峰值位置P1。使用公式P0 =（P1 + P2）/ 2计算中间位置P0。将物镜的激发强度调整到该中间位置P0。以这种方式，如果通过光束的水平光栅扫描不能获得两个峰值，则取决于样品表面的状态，可以将光束准确地使焦点放在最少混淆的圆的位置上。在该聚焦操作之后，进行自动像散校正。

49. 发明授权

US5207501A Vanity mirror 失效
标题翻译：虚荣镜
公开(公告)号：US5207501A
公开(公告)日：1993-05-04
申请号：US770018
申请日：1991-10-01
申请人： Toranosuke Sakuma , Atsushi Yamada
发明人： Toranosuke Sakuma , Atsushi Yamada
IPC分类号： B60J3/02 , B60Q3/02
CPC分类号： B60Q3/0226 , B60J3/0282
摘要： A vanity mirror of the type including a mirror, an illuminating portion having a lamp, and a cover for covering and exposing the front surface of the mirror, with the lamp being turned on and off in response to opening and closing of the cover, and particularly adapted for incorporating in a sun visor of an automobile. A lens covering the front side of the lamp is displaceable in fore and aft directions, and there is provided a bias mechanism for biasing forward the lens and a mechanism for displacing the lens in response to the closing of the cover. The lens is displaced forward in response to the opening of the cover and by the bias mechanism, thus, the affect of the heat of the lamp on the lens can be minimized.
摘要翻译：包括镜子，具有灯的照明部分和用于覆盖和暴露反射镜前表面的盖的梳妆镜，响应于盖的打开和关闭来打开和关闭灯，以及特别适用于装在汽车的遮阳板上。覆盖灯的前侧的透镜可以在前后方向上移动，并且设置有用于向前偏置透镜的偏置机构和用于响应于盖的关闭而使透镜移位的机构。响应于盖的打开和偏置机构，透镜向前移位，因此可以使灯在镜头上的热量的影响最小化。

50. 发明授权

US5130540A Method and apparatus for automatic focusing of scanning electron microscope 失效
标题翻译：扫描电子显微镜自动对焦的方法和装置
公开(公告)号：US5130540A
公开(公告)日：1992-07-14
申请号：US731785
申请日：1991-07-17
申请人： Atsushi Yamada , Mitsuru Yamada , Kouichi Suefuji , Tsutomu Negishi , Kunihiko Uchida
发明人： Atsushi Yamada , Mitsuru Yamada , Kouichi Suefuji , Tsutomu Negishi , Kunihiko Uchida
IPC分类号： H01J37/141 , H01J37/21 , H01J37/28
CPC分类号： H01J37/21 , H01J2237/28
摘要： Method and an apparatus for automatically moving the focal plane of the electron beam produced by a scanning electron microscope to the position of specimen surface. An auxiliary coreless coil of a low inductance is disposed close to the objective lens. The exciting current fed to the coil is varied to move the focal plane of the electron beam toward the optical axis. At each of discrete positions of the focal plane, a specimen is scanned with the electron beam. The resulting secondary electrons are detected by a detector. Individual output signals from the detector are compared to select the maximum signal. Then, only the objective lens is excited. The exciting current fed to the objective lens is modified to move the focal plane along the position closest to the specimen surface.
摘要翻译：用于将由扫描电子显微镜产生的电子束的焦平面自动移动到样品表面的位置的方法和装置。低电感的辅助无芯线圈靠近物镜设置。馈送到线圈的励磁电流是变化的，以将电子束的焦平面朝向光轴移动。在焦平面的每个离散位置处，用电子束扫描样本。所得到的二次电子由检测器检测。将来自检测器的各个输出信号进行比较以选择最大信号。然后，只有物镜被激发。馈送到物镜的激励电流被修改以沿着最靠近样本表面的位置移动焦平面。

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