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41. 发明授权

US09377414B2 EUV high throughput inspection system for defect detection on patterned EUV masks, mask blanks, and wafers 有权
公开(公告)号：US09377414B2
公开(公告)日：2016-06-28
申请号：US14242802
申请日：2014-04-01
申请人： KLA-Tencor Corporation
发明人： Yung-Ho Chuang , Richard W. Solarz , David R. Shafer , Bin-Ming Benjamin Tsai , David L. Brown
IPC分类号： G01N21/95 , G01N21/956 , G01N21/88
CPC分类号： G01N21/95 , G01N21/8806 , G01N21/9501 , G01N21/956 , G01N2021/95676 , G01N2201/068 , G03F1/84 , G03F7/70616 , H05G2/008
摘要： Inspection of EUV patterned masks, blank masks, and patterned wafers generated by EUV patterned masks requires high magnification and a large field of view at the image plane. An EUV inspection system can include a light source directed to an inspected surface, a detector for detecting light deflected from the inspected surface, and an optic configuration for directing the light from the inspected surface to the detector. In particular, the detector can include a plurality of sensor modules. Additionally, the optic configuration can include a plurality of mirrors that provide magnification of at least 100× within an optical path less than 5 meters long. In one embodiment, the optical path is approximately 2-3 meters long.

42. 发明授权

US09354379B2 Light guide based optical system for laser line generator 有权
标题翻译：用于激光线发生器的光导光学系统
公开(公告)号：US09354379B2
公开(公告)日：2016-05-31
申请号：US14500902
申请日：2014-09-29
申请人： Palo Alto Research Center Incorporated
发明人： Patrick Y. Maeda , Timothy David Stowe
IPC分类号： F21V8/00 , G02B23/02 , H01S5/40
CPC分类号： G02B6/005 , G02B6/0068 , G02B23/02 , G02B27/0905 , G02B27/0994 , H01S5/4025
摘要： A laser line generator system that utilizes a light guide element to convert high energy coherent light generated by a high fill-factor laser diode bar into homogenous light, and utilizes one or more slow-axis relay lenses to image the homogenous light such that it forms a homogenous line illumination pattern on an illumination plane. The light guide utilizes parallel or down-tapered side walls to mix received coherent light in the slow-axis direction by way of total internal reflection. A Keplerian telescope including two cylinder lenses is optionally used in place of the slow-axis relay lens. Optional fast-axis lenses are used to assist in focusing the homogenous light at the illumination plane. The laser light generator forms, e.g., a single-pass imaging system for a scanning/printing apparatus in which the homogenous line illumination pattern is directed onto a linearly arranged series of spatial light modulators, such as Digital Micromirror Devices (DMDs).
摘要翻译：一种激光线发生器系统，其利用光导元件将由高填充因子激光二极管棒产生的高能相干光转换成均匀的光，并且利用一个或多个慢轴中继透镜来对均匀光进行成像，使得其形成照明平面上的均匀线照明图案。光导采用平行或下降锥形的侧壁，通过全内反射来混合慢轴方向的接收的相干光。可选地使用包括两个柱面透镜的开普勒式望远镜代替慢轴中继透镜。可选的快轴透镜用于帮助在照明平面上聚焦均匀的光。激光发生器形成例如用于扫描/打印设备的单遍成像系统，其中均匀线照明图案被引导到线性排列的空间光调制器系列，例如数字微镜器件（DMD）。

43. 发明授权

US09343781B2 Adaptive current-collector electrochemical system 有权
标题翻译：自适应集电极电化学系统
公开(公告)号：US09343781B2
公开(公告)日：2016-05-17
申请号：US14066639
申请日：2013-10-29
申请人： Palo Alto Research Center Incorporated
发明人： Eric J. Shrader , Robert Sean McHenry
IPC分类号： H01M2/20 , H01M10/42 , H01M10/04 , H01M10/0585 , H01M10/48 , H01M10/625 , H01M10/637 , H01M10/617 , H01M4/72 , H01M6/42
CPC分类号： H01M10/425 , H01M2/202 , H01M4/72 , H01M6/42 , H01M10/0413 , H01M10/0585 , H01M10/4257 , H01M10/48 , H01M10/617 , H01M10/625 , H01M10/637 , H01M2010/4271 , H01M2220/20
摘要： An Adaptive Current-collector Electrochemical (ACE) system utilizes an array of contact pads and associated current control transistors to control localized current generation in discrete regions of a battery. Each contact pad is formed on a battery electrode (anode or cathode) and coupled to an associated discrete battery region, and is connected by an associated transistor to a current collection plate. Sensors are used to monitor operating parameters (e.g., localized current flow and operating temperature) of each discrete battery region, and a control circuit uses the sensor data to control the operating state of the transistors, whereby localized current flow through each transistor is increased, decreased or turned off according to measured local operating parameters. The control circuit utilizes local control circuits that process local sensor data using “stand-alone” control logic, or a central controller that processes all sensor data and coordinates transistor operations.
摘要翻译：自适应集电极电化学（ACE）系统利用接触焊盘和相关的电流控制晶体管阵列来控制电池的离散区域中的局部电流产生。每个接触垫形成在电池电极（阳极或阴极）上并且耦合到相关联的分立电池区域，并且通过相关联的晶体管连接到电流收集板。传感器用于监测每个分立电池区域的操作参数（例如，局部电流和工作温度），并且控制电路使用传感器数据来控制晶体管的工作状态，从而增加通过每个晶体管的局部电流，根据测量的本地操作参数减少或关闭。控制电路利用本地控制电路，其使用“独立”控制逻辑处理本地传感器数据，或者处理所有传感器数据和坐标晶体管操作的中央控制器。

44. 发明授权

US09331761B2 Method and apparatus for coding and interleaving for very high throughput wireless communications 有权
公开(公告)号：US09331761B2
公开(公告)日：2016-05-03
申请号：US14871834
申请日：2015-09-30
申请人： QUALCOMM Incorporated
发明人： Youhan Kim , Ning Zhang , Chin-Hung Chen
IPC分类号： H04B7/02 , H04B7/04 , H04L1/00 , H04L1/06 , H04L5/00 , H03M13/00 , H04L27/26
CPC分类号： H04B7/0456 , H03M13/6312 , H04B7/0413 , H04L1/0071 , H04L1/0606 , H04L5/0023 , H04L5/0046 , H04L5/0064 , H04L27/2626 , H04L27/2647
摘要： A wireless transmitter can include a plurality of bandwidth modules, each bandwidth module processing data based on a predetermined frequency band. In one embodiment, such a wireless transmitter can include encoding components for receiving transmit data and generating encoded data. A multiple-input multiple-output (MIMO) stream parser can receive the encoded data and generate a plurality of MIMO streams. A first module parser coupled to a first MIMO stream can generate a first plurality of partial MIMO streams. A first bandwidth module can include a first interleaver that interleaves bits of the first partial MIMO stream and generates first interleaved data. A second bandwidth module can include a second interleaver that interleaves bits of the second partial MIMO stream and generates second interleaved data. A first inverse fast Fourier transform (IFFT) unit can combine and process the first and second interleaved data and generate a first transmission MIMO stream.

45. 发明授权

US09330979B2 LDMOS transistor having elevated field oxide bumps and method of making same 有权
标题翻译：具有升高的场氧化物凸块的LDMOS晶体管及其制造方法
公开(公告)号：US09330979B2
公开(公告)日：2016-05-03
申请号：US12260806
申请日：2008-10-29
申请人： Sharon Levin , Alexey Heiman , Zohar Shaked , Gal Fleishon
发明人： Sharon Levin , Alexey Heiman , Zohar Shaked , Gal Fleishon
IPC分类号： H01L21/336 , H01L21/8234 , H01L21/8238 , H01L29/423 , H01L29/66 , H01L29/78 , H01L21/265 , H01L29/08 , H01L29/40
CPC分类号： H01L21/823462 , H01L21/26586 , H01L21/823418 , H01L21/823814 , H01L21/823857 , H01L29/086 , H01L29/402 , H01L29/42368 , H01L29/66689 , H01L29/7816
摘要： A low Rdson LDMOS transistor having a shallow field oxide region that separates a gate electrode of the transistor from a drain diffusion region of the transistor. The shallow field oxide region is formed separate from the field isolation regions (e.g., STI regions) used to isolate circuit elements on the substrate. Fabrication of the shallow field oxide region is controlled such that this region extends below the upper surface of the semiconductor substrate to a depth that is much shallower than the depth of field isolation regions. For example, the shallow field oxide region may extend below the upper surface of the substrate by only Angstroms or less. As a result, the current path through the resulting LDMOS transistor is substantially unimpeded by the shallow field oxide region, resulting in a low on-resistance.
摘要翻译：具有将晶体管的栅电极与晶体管的漏极扩散区分离的浅场氧化物区域的低Rdson LDMOS晶体管。浅场氧化物区域与用于隔离衬底上的电路元件的场隔离区域（例如，STI区域）分开形成。控制浅场氧化物区域的制造使得该区域在半导体衬底的上表面下方延伸到比景深隔离区域浅得多的深度。例如，浅场氧化物区域可以在衬底的上表面下方仅延伸一埃以下。结果，通过所产生的LDMOS晶体管的电流路径基本上不受浅场氧化物区域的阻碍，导致低的导通电阻。

46. 发明授权

US09293882B2 Low noise, high stability, deep ultra-violet, continuous wave laser 有权
标题翻译：低噪音，高稳定性，深紫外线，连续波激光
公开(公告)号：US09293882B2
公开(公告)日：2016-03-22
申请号：US14080746
申请日：2013-11-14
申请人： KLA-Tencor Corporation
发明人： Yung-Ho Chuang
IPC分类号： H01S3/00 , G02F1/37 , G01N21/95 , G02F1/35
CPC分类号： H01S3/0092 , G01N21/33 , G01N21/9501 , G01N2021/95676 , G01N2201/067 , G02F1/35 , G02F1/37 , G02F2201/16 , H01S3/0085
摘要： A laser for generating deep ultra-violet (DUV) continuous wave (CW) light includes a second-harmonic generator and a fourth-harmonic generator. The fourth-harmonic generator includes a plurality of mirrors as well as first and second non-linear optical (NLO) crystals. The first NLO crystal generates the light having the fourth harmonic wavelength, and is placed in operative relation to the plurality of mirrors. The second NLO crystal is placed in operative relation to the first NLO crystal such that the light having the second harmonic wavelength passes through both the first and the second NLO crystals. Notably, the second optical axes of the second NLO crystal are rotated about a direction of propagation of the light within the second NLO crystal approximately 90 degrees relative to the first optical axes of the first NLO crystal. The second NLO crystal provides no wavelength conversion.
摘要翻译：用于产生深紫外（DUV）连续波（CW）光的激光器包括二次谐波发生器和四次谐波发生器。第四谐波发生器包括多个反射镜以及第一和第二非线性光学（NLO）晶体。第一NLO晶体产生具有第四谐波波长的光，并且与多个反射镜成为可操作的关系。将第二NLO晶体置于与第一NLO晶体的操作关系中，使得具有二次谐波波长的光通过第一和第二NLO晶体。值得注意的是，第二NLO晶体的第二光轴相对于第一NLO晶体的第一光轴围绕第二NLO晶体内的光的传播方向大约90度旋转。第二个NLO晶体不提供波长转换。

47. 发明授权

US09282418B2 Cognitive loudspeaker system 有权
标题翻译：认知扬声器系统
公开(公告)号：US09282418B2
公开(公告)日：2016-03-08
申请号：US13098237
申请日：2011-04-29
申请人： Kit S. Tam
发明人： Kit S. Tam
IPC分类号： G06F17/00 , H04S3/00
CPC分类号： H04S3/008 , H04R2227/005 , H04R2420/07
摘要： A cognitive loudspeaker system including a control station that communicates wirelessly and bi-directionally with a plurality of sound production stations. The control station and the sound production stations are initially synchronized to a conductor clock. Configuration information is then transmitted from the sound production stations to the control station. In response, the control station generates playback executables, which are transmitted to the sound production stations. The control station also transmits digital audio information to the sound production stations. Within each sound production station, the previously received playback executable is used to control the decoding and processing of the received digital audio information. Each sound production station generates digital audio output samples, which are converted to analog output signals. These analog output signals are amplified and are used to drive loudspeakers.
摘要翻译：一种认知扬声器系统，包括与多个声音产生站无线地且双向通信的控制站。控制站和声音产生站最初与导体时钟同步。然后，配置信息从声音生成站发送到控制站。作为响应，控制站产生被发送到声音产生站的播放可执行文件。控制台还将数字音频信息发送到声音产生站。在每个声音产生站内，先前接收的播放可执行程序用于控制所接收的数字音频信息的解码和处理。每个声音产生站产生数字音频输出样本，并将其转换为模拟输出信号。这些模拟输出信号被放大并用于驱动扬声器。

48. 发明授权

US09239584B2 Self-adjustable current source control circuit for linear regulators 有权
标题翻译：用于线性稳压器的自调节电流源控制电路
公开(公告)号：US09239584B2
公开(公告)日：2016-01-19
申请号：US14084538
申请日：2013-11-19
申请人： Tower Semiconductor Ltd.
发明人： Valentin Lerner , Danny Pollak
IPC分类号： G05F1/565 , G05F1/575 , G05F1/56
CPC分类号： G05F1/56 , G05F1/565
摘要： A self-adjustable current source control circuit utilizes a replica output stage, a sink current source that generates a reference current, and a negative feedback circuit to generate a sink current between a linear regulator output terminal and ground only when a load circuit connected to the linear regulator is in a low power consuming state. The replica output stage includes an 1:N scaled replica of the linear regulator's NMOS (or NPN) output stage transistor, and the negative feedback circuit utilizes two PMOS (or PNP) negative feedback transistors having the same N:1 size ratio and connected as a common gate amplifier, whereby one of the two negative feedback transistors turns on to draw the desired sink current from the regulator output terminal only when the load current falls below N times the reference current (i.e., only the load current is drawn through the output stage transistor during high load current conditions).
摘要翻译：自调节电流源控制电路利用复制输出级，产生参考电流的电流源电流和负反馈电路，以在线性调节器输出端和接地之间产生吸收电流，只有当负载电路连接到线性调节器处于低功耗状态。复制输出级包括线性稳压器的NMOS（或NPN）输出级晶体管的1：N缩放复本，负反馈电路利用具有相同N：1尺寸比的两个PMOS（或PNP）负反馈晶体管，并连接为公共栅极放大器，其中两个负反馈晶体管中的一个导通，仅当负载电流低于参考电流的N倍（即，仅负载电流通过输出在高负载电流条件下）。

49. 发明授权

US09209893B2 System and method for detecting packet synchronization 有权
标题翻译：用于检测数据包同步的系统和方法
公开(公告)号：US09209893B2
公开(公告)日：2015-12-08
申请号：US13802613
申请日：2013-03-13
申请人： QUALCOMM Incorporated
发明人： Gaspar Lee , Hao-Jen Cheng
IPC分类号： H04J3/06 , G01S19/23 , H04B7/212 , G01S19/24 , G01S19/33 , G01S19/27
CPC分类号： H04B7/2125 , G01S19/243 , G01S19/27 , G01S19/33
摘要： A method of providing frame synchronization for GPS signals can include performing coherent bit extraction on the GPS bits and then performing coherent frame boundary detection based on the bits of the coherent bit extraction. Concurrently, differential bit extraction on the GPS bits and differential frame boundary detection based on bits of the differential bit extraction can be performed. Whichever of the coherent frame boundary detection and the differential frame boundary detection first finds a frame boundary, then that frame boundary is used for the frame synchronization. A method of providing string synchronization for GLONASS signals includes performing coherent and differential bit extraction on the GLONASS bits.
摘要翻译：提供用于GPS信号的帧同步的方法可以包括对GPS位执行相干比特提取，然后基于相干比特提取的比特执行相干帧边界检测。同时，可以执行基于差分比特提取的比特的GPS比特差分比特提取和差分帧边界检测。无论哪个相干帧边界检测和差分帧边界检测首先找到帧边界，则该帧边界用于帧同步。为GLONASS信号提供串同步的方法包括在GLONASS位上执行相干和差分位提取。

50. 发明授权

US09188544B2 Protective fluorine-doped silicon oxide film for optical components 有权
标题翻译：用于光学元件的保护性氟掺杂氧化硅膜
公开(公告)号：US09188544B2
公开(公告)日：2015-11-17
申请号：US13855475
申请日：2013-04-02
申请人： KLA-Tencor Corporation
发明人： Gildardo Delgado
IPC分类号： G01N21/88 , G02B1/11 , G01N21/95 , G01N21/956 , G02B1/10 , G02B1/113 , H01L31/0216 , G02B7/16
CPC分类号： G01N21/8806 , G01N21/9501 , G01N21/956 , G01N2021/95676 , G02B1/105 , G02B1/11 , G02B1/113 , G02B1/115 , G02B1/14 , G02B7/16 , H01L31/02168 , Y02E10/50
摘要： An optical component includes a substrate and a fluorine-doped thin film formed on the substrate. This fluorine-doped thin film is dense, and thus very low absorbing and insensitive to various vacuum, temperature, and humidity conditions. This dense film has a high refractive index, which remains stable irrespective of environmental conditions. The fluorine-doped thin film can advantageously ensure low scattering, low reflectance, and high transmittance. Moreover, the fluorine-doped thin film is damage resistant to incident radiation density. The fluorine-doped thin film may be a fluorine-doped silicon oxide film having a thickness of approximately 1-10 nm and a fluorine concentration of 0.1% to 5%.
摘要翻译：光学部件包括在基板上形成的基板和氟掺杂薄膜。这种氟掺杂的薄膜是致密的，因此对各种真空，温度和湿度条件的吸收非常低和不敏感。该致密膜具有高折射率，不管环境条件如何，均保持稳定。氟掺杂薄膜可以有利地确保低散射，低反射率和高透射率。此外，氟掺杂薄膜对入射辐射密度具有抗损伤性。氟掺杂薄膜可以是厚度约为1-10nm，氟浓度为0.1％至5％的氟掺杂氧化硅膜。

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