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    • 47. 发明授权
    • Inspecting method by using mark partitioning
    • 使用标记分区检查方法
    • US08005291B2
    • 2011-08-23
    • US12291777
    • 2008-11-13
    • Hyonam JooJung Seob LeeKeun Ho Rew
    • Hyonam JooJung Seob LeeKeun Ho Rew
    • G06K9/00
    • G06K9/00G06K2209/01G06T7/001G06T2207/10056G06T2207/30148
    • The present invention relates to a mark partitioning inspection method. A reference image and an inspection image are respectively acquired, and a correlation in a character unit for the reference image and the inspection image is obtained, and then the correlation value is compared with a first threshold value that has been previously set. Then, when the correlation value is greater than the first threshold value, the relevant character is partitioned into a predetermined number of regions, and a correlation between the reference image and the inspection image is obtained for each of the partitioned regions, and then a difference between the maximum and minimum values of the correlation is compared with a second threshold value that has been previously set. Here, even if a low defectiveness is revealed, the mark partitioning inspection method is capable of precisely determining whether or not it is defective, by determining the inspection image to be defective if the difference between the maximum and minimum values of the correlation is greater than the second threshold value, and by determining the inspection image to be normal when the difference between the maximum and minimum values of the correlation is smaller than the second threshold value.
    • 本发明涉及一种标记分割检查方法。 分别获取参考图像和检查图像,并且获得用于参考图像和检查图像的字符单元的相关性,然后将相关值与先前设置的第一阈值进行比较。 然后,当相关值大于第一阈值时,相关字符被划分为预定数量的区域,并且针对每个分割区域获得参考图像和检查图像之间的相关性, 将相关的最大值和最小值之间的值与先前设置的第二阈值进行比较。 这里,即使显示低的缺陷,如果相关性的最大值和最小值之间的差异大于标准分割检查方法,则通过将检查图像确定为有缺陷,能够精确地确定其是否有缺陷 第二阈值,并且当相关的最大值和最小值之间的差小于第二阈值时,通过将检查图像确定为正常。
    • 49. 发明申请
    • MICROPLASMA CURRENT SWITCH
    • 麦克风电流开关
    • US20100207923A1
    • 2010-08-19
    • US12682043
    • 2008-09-26
    • Seung-Jun Yi
    • Seung-Jun Yi
    • G09G5/00H01J61/02H01J1/62H01L51/52H01J61/94
    • H05H1/2406H01L27/3241H05H2001/2418
    • The present invention relates to a microplasma current switch enabling to increase the amount of electric current passing through the microplasma current switch by adjusting the areas of electrodes exposed to plasmas. The present invention includes a plasma discharge space; a plasma generating means installed within the plasma discharge space; an exposed cathode electrode installed within the plasma discharge space; and an exposed anode electrode installed within the plasma discharge space apart from the exposed cathode electrode, wherein the exposed anode electrode is connected electrically to the exposed cathode electrode by generating a plasma, and the exposed area of the exposed anode electrode to the plasma is smaller than that of the exposed cathode electrode.
    • 本发明涉及一种能够通过调节暴露于等离子体的电极的面积来增加通过微型电流开关的电流量的微电流电流开关。 本发明包括等离子体放电空间; 安装在等离子体放电空间内的等离子体产生装置; 暴露的阴极电极安装在等离子体放电空间内; 以及暴露的阳极电极,其设置在等离子体放电空间内,与暴露的阴极电极隔开,其中暴露的阳极电极通过产生等离子体与暴露的阴极电连接,并且暴露的阳极电极对等离子体的暴露面积较小 比暴露的阴极电极。
    • 50. 发明申请
    • INTERFACE DEVICE FOR SEMICONDUCTOR EQUIPMENT AND MONITORING SYSTEM USING IT
    • 用于半导体设备的接口装置和使用它的监视系统
    • US20090024689A1
    • 2009-01-22
    • US11965562
    • 2007-12-27
    • Woo Sung KimIn Su HwangYong Muk Lim
    • Woo Sung KimIn Su HwangYong Muk Lim
    • G06F15/16
    • H04L67/2823H04L41/0226H04L67/125H04L67/28
    • An interface device for semiconductor equipment which converts messages of semiconductor equipment received and transmitted via different protocols to integral XML (extensible Markup Language) message format, and the monitoring system using same is capable of distributed or integral message monitoring of the semiconductor equipment. The monitoring system comprising an interface device for semiconductor equipment capable of converting messages of semiconductor equipment received and transmitted via different protocols to integral XML message format, and classifying the message converted to XML format based on message characteristic. A monitoring server provided with the XML messages classified and outputted by the interface device for semiconductor equipment to perform monitoring for each message characteristic, such that an integrated monitoring or a distributed monitoring for each message characteristic relative to the messages outputted from multiple semiconductor equipment can be made possible on the web portals.
    • 一种用于半导体设备的接口设备,其将通过不同协议接收和发送的半导体设备的消息转换成集成的XML(可扩展标记语言)消息格式,并且使用其的监视系统能够对半导体设备进行分布式或整体式消息监控。 所述监视系统包括用于半导体设备的接口设备,其能够将经由不同协议接收和发送的半导体设备的消息转换为集成的XML消息格式,并且基于消息特征对转换为XML格式的消息进行分类。 一种监视服务器,其具有由半导体设备的接口设备分类和输出的XML消息,以对每个消息特征执行监视,使得针对每个消息特性的综合监控或分布式监控相对于从多个半导体设备输出的消息可以是 使网路门户网站成为可能。