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    • 32. 发明授权
    • Exposing apparatus with mask alignment system and method of aligning,
exposing and transferring work
    • 露出具有面罩对准系统的设备和对准,曝光和传送工作的方法
    • US5563682A
    • 1996-10-08
    • US430912
    • 1995-04-27
    • Nobutoshi AikawaAkira Morita
    • Nobutoshi AikawaAkira Morita
    • G03B27/18G03F7/20G03F9/00H01L21/027G03B27/42G01B11/00G03B27/04
    • G03F7/70716G03F7/70875G03F7/70891G03F9/00
    • In an exposing apparatus including an alignment stage A, an exposing stage B, transferring mechanisms 10 and 11 provided in the alignment stage and the exposing stage, a light source device 9, and an image-taking device for taking the images of the work W from the top of the work, the exposing apparatus further including a retaining mechanism for holding a mask film M from the top of the mask film, the retaining mechanism comprising a suction unit 5a for sucking the mask film, a supporting arm 17 for supporting the suction unit so as to be movable up and down, a first driving device 14 for moving the supporting arm up and down, a second driving device vice 15 for moving the first driving device up and down, and a stopper supporting unit 20 for fixing and supporting the suction unit at a predetermined position of the suction unit, so that this apparatus occupies a small space, and the work is accurately aligned with the mask film, and the upper and lower frames do not need to be opened and closed in the alignment stage, and the positional deviation of the work and the mask film does not occur, and the causes of deteriorating a coherent film of an optical system in early stage is decreased, and the vertical light can irradiate the work in the exposing stage even though the apparatus is made small.
    • 在包括对准台A,曝光台B,设置在对准台和曝光台中的传送机构10和11的曝光装置中,光源装置9和用于拍摄作品W的图像的摄像装置 曝光装置还包括用于从掩模膜的顶部保持掩模膜M的保持机构,该保持机构包括用于吸附掩模膜的抽吸单元5a,用于支撑掩模膜的支撑臂17 上下移动支撑臂的第一驱动装置14,用于上下移动第一驱动装置的第二驱动装置虎钳15,以及用于固定的第二驱动装置, 将抽吸单元支撑在抽吸单元的预定位置,使得该装置占用较小的空间,并且工件与掩模膜精确对准,并且上框架和下框架不需要打开 并且在对准阶段中闭合,并且不会发生作业和掩模膜的位置偏移,并且使早期的光学系统的相干膜劣化的原因减少,并且垂直光可以照射在 曝光阶段即使该装置变小。
    • 37. 发明授权
    • Divided exposure method and device
    • 分体曝光方法和装置
    • US4323775A
    • 1982-04-06
    • US158773
    • 1980-06-12
    • Takanori HasegawaTakanobu ShimadaTakao SatoMasakazu KeraShuntaro YoshidaShinichi Shimoyama
    • Takanori HasegawaTakanobu ShimadaTakao SatoMasakazu KeraShuntaro YoshidaShinichi Shimoyama
    • G03B27/02B41L13/04B41M5/26G03B27/04G03B27/16G03B27/18G03C5/16
    • G03B27/04B41M5/26
    • A method for exposing a sheet to light radiation while it is under pressure, in which successive portions of the sheet which slightly overlap one another are sequentially clamped between a pressure plate and a light transmitting plate, and are irradiated with electromagnetic radiation through the light transmitting plate in the clamped condition. Further, a device for practicing the method is disclosed, which includes: a light source; a light transmitting plate arranged with the light source on one of its sides; a pressure plate which opposes the other side of the light transmitting plate; a member for relatively biasing the light transmitting plate or the pressure plate towards and away from each other; a device for transporting the sheet passing between the light transmitting plate and the pressure plate; and a control for controlling the light source, the biasing member, and the transporting device, which causes the light source to emit light when the pressure plate and the light transmitting plate are pressed against each other with the sheet between them, and which causes the transporting device to transport the sheet through a distance less than the width of the light transmitting plate, when the light transmitting plate and the pressure plate are separated by more than a certain predetermined distance.
    • 一种用于在片材受压的同时将片材暴露于光辐射的方法,其中彼此稍微重叠的片材的连续部分被顺序地夹在压力板和透光板之间,并且通过透光板照射电磁辐射 板在夹紧状态。 此外,公开了一种用于实施该方法的装置,其包括:光源; 光源在其一侧上布置的透光板; 与透光板的另一侧相对的压板; 用于相对地使透光板或压板相对偏压的构件; 用于传送在透光板和压力板之间通过的片材的装置; 以及用于控制光源,偏置构件和输送装置的控制装置,当压板和透光板在它们之间彼此压靠时使光源发光,并且这导致 传送装置,以便当透光板和压板分开多于一定的预定距离时,将片材输送的距离小于透光板的宽度。
    • 38. 发明授权
    • Exposure station
    • 曝光站
    • US4157870A
    • 1979-06-12
    • US823931
    • 1977-08-12
    • William E. Roberts
    • William E. Roberts
    • G03B27/18G03D7/00G03B27/04
    • G03D7/00G03B27/18
    • A microfiche duplicator exposure station where a copy sheet lies facewise over a master while an elongated lamp shines light through the master to expose the copy sheet. A shutter that controls exposure, includes two plates lying over the lamp and a solenoid that quickly pivots the plates to positions beside opposite ends of the lamp to allow light from the lamp to reach the microfiche. The plates have mirror surfaces extending at an incline of about 60.degree. from the vertical when the plates are at opposite ends of the lamp, to shine light onto opposite ends of the microfiche, to thereby compensate for low illumination thereat produced by an elongated lamp.
    • 一个缩微胶片复印机曝光站,其中复印纸在主镜上面向上放置,而细长的灯通过主镜照射光以露出复印纸。 控制曝光的快门包括位于灯上的两个板,以及一个螺线管,其可快速地将板枢转到灯的两端的位置,以允许来自灯的光到达缩微胶片。 这些板具有当板在灯的相对端处从垂直方向以大约60°的倾斜面延伸的镜面,以将光照射到缩微胶片的相对端,从而补偿由细长的灯产生的低照度。
    • 39. 发明授权
    • Printing head assembly
    • 打印头组件
    • US4099869A
    • 1978-07-11
    • US750084
    • 1976-12-13
    • John W. Lang, Jr.
    • John W. Lang, Jr.
    • G03B27/18G03B27/10
    • G03B27/18
    • A printing head assembly for exposing raw stock film with a preprint film in a contact film printer including a dual roller gate assembly. The dual roller gate assembly includes a pair of rollers mounted on a roller frame for engaging the preprint film and raw stock film on opposite sides of the printing aperture for wrapping both the preprint and raw stock film about a segment of the printing sprocket of substantially greater length than the printing aperture. An adjustable biasing spring permits regulation of the tension applied through the rollers to the film runs. The dual roller gate assembly includes a selectively operable retraction device to withdraw the rollers away from the printing sprocket for loading and unloading the film printer. In an alternate embodiment, the dual roller gate assembly is pivotally mounted by an offset shaft which permits pivotal movement of the dual roller gate assembly to provide clearance for loading the film printer.
    • 一种用于在包括双辊门组件的接触式薄膜打印机中用预印薄膜曝光原料薄膜的打印头组件。 双辊门组件包括安装在辊架上的一对辊,用于接合预印膜和印刷孔的相对侧上的原料膜,用于将预印纸和原始胶卷围绕打印链轮的一段大致更大 长度大于打印孔径。 可调节的偏置弹簧允许调节通过辊施加到膜运行的张力。 双辊门组件包括有选择地可操作的收回装置,用于将辊离开打印链轮以将胶片打印机装载和卸载。 在替代实施例中,双辊门组件由偏移轴可枢转地安装,该偏移轴允许双辊门组件的枢转运动以提供用于装载胶片打印机的间隙。
    • 40. 发明授权
    • Photocopying apparatus with vacuum means
    • 具有真空装置的光电装置
    • US3834815A
    • 1974-09-10
    • US36785273
    • 1973-07-06
    • IPT CORP
    • GREIG A
    • G03B27/18G03B27/20
    • G03B27/18G03B27/20
    • A device for duplicating a high resolution master transparency onto a photosensitive copy sheet wherein both are placed in a spaced apart relation within a vacuum chamber while the pressure within the chamber is reduced to a very low level significantly less than that of atmospheric pressure. The master transparency and the photocopy sheet are then mechanically urged together followed by a light exposure of the photocopy sheet through the master transparency. Air bubbles do not form between the master transparency and the photocopy sheet with the result of much better copies being made. The photocopy sheet and the master transparency are made ready for exposure in a very short period of time.
    • 一种用于将高分辨率主透明度复制到感光复印纸上的装置,其中两者在真空室内以间隔的关系放置,同时室内的压力降低到明显低于大气压的非常低的水平。 然后将主透明度和复印纸机械地推动在一起,然后通过主透明度对复印纸的曝光。 在主透明度和复印纸之间不形成气泡,从而产生更好的副本。 复印件和主透明度在很短的时间内准备好曝光。