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    • 32. 发明授权
    • System and method of simultaneously fueling and mitigating debris for a plasma-based illumination source
    • 同时加油和减轻等离子体照明光源碎片的系统和方法
    • US09155180B1
    • 2015-10-06
    • US13647826
    • 2012-10-09
    • KLA-Tencor Corporation
    • Karl R. Umstadter
    • H05H1/00H01J27/08G03F7/20H01J17/30
    • H05H1/00G03F7/70916H01J17/30H01J27/08H05G2/003
    • The disclosure is directed to a system and method of fueling and mitigating debris for an illumination source. An illumination system may include a plasma-based illumination source. The illumination system may provide illumination along an illumination path emanating from an illumination origin of the illumination source. A gas jet nozzle may be disposed at a selected distance from the illumination origin or proximate to the illumination origin. The gas jet nozzle may be configured to provide fuel gas to fuel the plasma-based illumination source. The gas jet nozzle may be further configured to provide fuel gas in a selected direction substantially opposite to a direction of illumination emanating from the illumination origin to remove at least a portion of debris from the illumination path.
    • 本公开涉及一种用于加注和减轻照明源的碎屑的系统和方法。 照明系统可以包括基于等离子体的照明源。 照明系统可以沿着从照明源的照明原点发出的照明路径提供照明。 气体喷嘴可以设置在距照明原点或接近照明原点的选定距离处。 气体喷嘴可以被配置为提供燃料气体来燃料基于等离子体的照明源。 气体喷嘴可以进一步构造成在与从照明原点发出的照明方向基本相反的选定方向上提供燃料气体,以从照明路径去除至少一部分碎片。
    • 33. 发明授权
    • Double-capped short arc flash lamp
    • 双盖短弧闪光灯
    • US09153428B2
    • 2015-10-06
    • US14518256
    • 2014-10-20
    • USHIO DENKI KABUSHIKI KAISHA
    • Masahiko KaseTakayuki HiraishiHirohisa Ishikawa
    • H01J17/30H01J61/54H01J61/36
    • H01J61/545H01J61/361H01J61/366H01J61/86H01J61/90
    • A double-capped short arc flash lamp includes an arc tube, a pair of main electrodes disposed in the arc tube, and a pair of auxiliary electrodes disposed in the arc tube. The flash lamp also includes inner leads and outer leads associated with the two auxiliary electrodes, respectively. The flash lamp also includes a first sealing tube and a second sealing tube provided at opposite ends of the arc tube. A sealing glass tube is partly received in the second sealing tube. Grooves are formed in the outer surface of the sealing glass tube in a region where the sealing glass tube overlaps the second sealing tube. The grooves extend in the axial direction of the sealing glass tube, and are configured to receive the inner leads and the outer leads. Metallic foils electrically connect the inner leads with the outer leads, respectively.
    • 双盖短弧闪光灯包括电弧管,设置在电弧管中的一对主电极和设置在电弧管中的一对辅助电极。 闪光灯还分别包括与两个辅助电极相关联的内引线和外引线。 闪光灯还包括设置在电弧管的相对端的第一密封管和第二密封管。 密封玻璃管部分地容纳在第二密封管中。 在密封玻璃管与第二密封管重叠的区域中,在密封玻璃管的外表面形成槽。 凹槽在密封玻璃管的轴向方向上延伸,并且构造成接纳内引线和外引线。 金属箔分别将内引线与外引线电连接。
    • 35. 发明申请
    • Lighting method of light source apparatus
    • 光源设备的照明方法
    • US20100225232A1
    • 2010-09-09
    • US12659323
    • 2010-03-04
    • Taku SumitomoToshio Yokota
    • Taku SumitomoToshio Yokota
    • H01J17/30
    • H01J65/04G03F7/70016G03F7/70925
    • A method of lighting a light source apparatus that has a discharge lamp, a reflection mirror for reflecting light emitted from the discharge lamp, a light emission optical system for irradiating a work piece with light, one or more laser oscillator for emitting a laser beam to the discharge lamp, and a discharge starting unit for starting discharge. The method includes removing deposits adhering to an inner face of the discharge lamp by irradiating a discharge vessel with the laser beam from the first laser oscillator, starting discharge in the discharge vessel by the discharge starting unit, and condensing the laser beam from a second laser oscillator, into the discharge vessel.
    • 一种点亮具有放电灯的光源装置,用于反射从放电灯发出的光的反射镜,用于用光照射工件的发光光学系统,用于发射激光的一个或多个激光振荡器的方法 放电灯和用于开始放电的放电启动单元。 该方法包括通过用来自第一激光振荡器的激光束照射放电容器来去除附着在放电灯内表面的沉积物,通过放电启动单元在放电容器中开始放电,并将来自第二激光器的激光束 振荡器,进入放电容器。
    • 37. 发明授权
    • Gas Discharge surge tube with specific trigger wires arrangement
    • 气体放电浪涌管,具有特定的触发线布置
    • US6025672A
    • 2000-02-15
    • US44805
    • 1998-03-20
    • Kazuhiko Machida
    • Kazuhiko Machida
    • H05B41/04H01J17/30H01J17/46H01T1/20H01T2/02H01T4/12H01J17/26
    • H01J17/46H01J17/30H01T1/20H01T4/12
    • It is an object of the invention to provide a discharge tube in which the electrical insulating property between the discharge trigger wires is not deteriorated by the sputtering substance generated when discharge is conducted between the upper and the lower discharge electrode. There are provided sub-discharge trigger wires 50 at the center of the inner circumferential wall of the airtight cylinder 10 under the condition that the sub-discharge trigger wires 50 are electrically insulated from the upper and the lower discharge electrode. At the same time, there are provided discharge trigger wires 30a connected with the upper discharge electrode and discharge trigger wires 30b connected with the lower discharge electrode in the upper and the lower portion of the inner circumferential wall of the airtight cylinder 10 at which there is no possibility of adhesion of the sputtering substance 40 generated in the process of discharging conducted by the upper and the lower discharge electrode. A distance between the discharge trigger wires 30a, 30b is electrically reduced via the sub-discharge trigger wires 50. An initial discharge is stably generated at an early stage between the fore end portions of the discharge trigger wires 30a, 30b and the end portions of the sub-discharge trigger wires 50 located close to the discharge trigger wires 30a, 30b.
    • 本发明的目的是提供一种放电管,其中放电触发线之间的电绝缘性不会因在上下放电电极之间放电时产生的溅射物质而劣化。 在副放电触发线50与上部和下部放电电极电绝缘的条件下,在气密筒10的内周壁的中心设置有副放电触发线50。 同时,设置有与上部放电电极连接的放电触发线30a和与气密筒10的内周壁的上部和下部中的下部放电电极连接的放电触发线30b, 在由上下放电电极进行的放电处理中产生的溅射物质40没有粘附的可能性。 放电触发线30a,30b之间的距离通过副放电触发线50电性地减小。在放电触发线30a,30b的前端部分和前端部分之间的初始放电稳定地产生, 位于靠近放电触发线30a,30b的副放电触发线50。
    • 39. 发明授权
    • Discharge lamp having cesium compound
    • 具有铯化合物的放电灯
    • US5646483A
    • 1997-07-08
    • US452488
    • 1995-05-30
    • Minoru MyojoHaruo YamazakiToshiyuki Namura
    • Minoru MyojoHaruo YamazakiToshiyuki Namura
    • H01J61/28H01J61/54H01J17/30H01J17/46
    • H01J61/54H01J61/28H01J65/042
    • A discharge lamp or an electrodeless discharge lamp including a discharge gas filled inside a bulb, an electrode part present inside the bulb for emitting thermoelectrons into the discharge gas, and a cesium compound placed in a position other than the electrode part inside the bulb. According to this configuration, this discharge lamp has a short starting delay time even at a low temperature including room temperature, without using any starting auxiliary light source or a radioactive material. The cesium compound is contained on the surface of a metal mesh which is fixed via a supporting arm in a position avoiding the electrode part inside the bulb. It is preferable that the cesium oxide is in contact with the discharge space. In this way, starting property can be improved without using any starting auxiliary light source or a radioactive material. The electrodeless discharge lamp has the cesium compound at an optional position in the discharge space.
    • 一种放电灯或无电极放电灯,其包括填充在灯泡内的放电气体,存在于灯泡内的用于将热电子放射到放电气体中的电极部分,以及放置在灯泡内部的电极部分以外的位置的铯化合物。 根据该结构,即使在包括室温的低温下,该放电灯也具有短的启动延迟时间,而不使用任何启动辅助光源或放射性材料。 铯化合物被包含在通过支撑臂固定的金属网的表面上,避免了灯泡内部的电极部分。 氧化铯优选与放电空间接触。 以这种方式,可以在不使用任何起始辅助光源或放射性物质的情况下改善启动性能。 无电极放电灯在放电空间中的任意位置具有铯化合物。
    • 40. 发明授权
    • Switching apparatus
    • 开关装置
    • US5631524A
    • 1997-05-20
    • US279163
    • 1994-07-22
    • Kazuo MatsuzakiArika Amano
    • Kazuo MatsuzakiArika Amano
    • H01J21/10H01J3/02H01J17/06H01J17/14H01J17/30H01J17/40H01J21/02H01J21/06H01J21/18H03K17/54H01J11/04
    • H01J3/022H01J17/066H01J17/14H01J17/30H01J17/40H03K17/545
    • A switching apparatus obtains a large switching current by multiplying the number of electrons emitted by field emission from a cold cathode. The switching apparatus is driven by an optical wave and includes a recess portion of an insulation layer formed on a silicon substrate, a cold cathode formed on the insulation layer comprising many comb-tooth like tips extending from one side above the recess portion, a gate electrode disposed on the recess portion on the side of the cold cathode, an anode formed on the insulation layer and extending from another side opposed facing to the one side above the recess portion, an optically transparent sealing member comprising a recess portion on its under surface for enclosing a dilute nitrogen gas in a vacuum space, and a semiconductor laser, supported on the sealing member by a support member, for irradiating a laser beam through the sealing member into the space.
    • 开关装置通过将来自冷阴极的场发射发射的电子数乘以来获得大的开关电流。 开关装置由光波驱动,并且包括形成在硅衬底上的绝缘层的凹部,形成在绝缘层上的冷阴极,包括从凹部的上方一侧延伸的梳齿状尖端,栅极 设置在所述冷阴极侧的所述凹部的电极,形成在所述绝缘层上并从所述凹部的上方相对的另一侧延伸的阳极,在所述凹部的下表面上具有凹部的透光性密封构件 用于将稀氮气包围在真空空间中,以及半导体激光器,其通过支撑构件支撑在所述密封构件上,用于将激光束通过所述密封构件照射到所述空间中。