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31. 发明申请

US20180086625A1 Silicon Carbide Microelectromechanical Structure, Device, and Method 审中-公开
公开(公告)号：US20180086625A1
公开(公告)日：2018-03-29
申请号：US15698604
申请日：2017-09-07
申请人： The Government of the United States of America, as Represented by the Secretary of the Navy , The Charles Stark Draper Laboratory, Inc.
发明人： Francis J. KUB , Karl D. HOBART , Eugene A. IMHOFF , Rachael L. MYERS-WARD , Eugene COOK , Jonathan BERNSTEIN , Marc WEINBERG
IPC分类号： B81B3/00 , B81C1/00 , G01C19/5656 , G01C19/5621 , G01C19/56
CPC分类号： B81B3/0072 , B81B7/0016 , B81B7/0019 , B81B2201/0235 , B81B2201/0242 , B81B2201/0271 , B81B2203/0109 , B81B2203/0118 , B81B2203/0127 , B81B2203/0163 , B81B2203/0307 , B81B2203/04 , B81C1/00666 , B81C2201/0132 , B81C2203/036 , G01C19/56 , G01C19/5621 , G01C19/5656 , G01C19/5783
摘要： Electromechanical device structures are provided, as well as methods for forming them. The device structures incorporate at least a first and second substrate separated by an interface material layer, where the first substrate comprises an anchor material structure and at least one suspended material structure, optionally a spring material structure, and optionally an electrostatic sense electrode. The device structures may be formed by methods that include providing an interface material layer on one or both of the first and second substrates, bonding the interface materials to the opposing first or second substrate or to the other interface material layer, followed by forming the suspended material structure by etching.

32. 发明授权

US09315376B2 Planar structure for a triaxial gyrometer 有权
标题翻译：三轴陀螺仪的平面结构
公开(公告)号：US09315376B2
公开(公告)日：2016-04-19
申请号：US13996344
申请日：2011-12-20
申请人： Iannis Roland , Steve Masson , Olivier Ducloux
发明人： Iannis Roland , Steve Masson , Olivier Ducloux
IPC分类号： G01C19/56 , B81B3/00 , G01C19/5656 , G01C19/5747
CPC分类号： B81B3/0018 , G01C19/5656 , G01C19/5747
摘要： An inertial sensor for measuring information relating to rotation in three orthogonal axes, comprising a support and a vibrating sensitive element secured to the support; the sensitive element having a deformable frame and at least two deformable projections which extend in a plane (X-Y); wherein the inertial sensor extends in the same plane; the deformable frame and the at least two deformable projections have a plane of symmetry parallel to the plane; the at least two projections are rectilinear beams which have an approximately square cross section, are not collinear and are preferably approximately orthogonal to one another; each of the deformable beams being connected by only one end to the deformable frame at a location at which the amplitude of the primary vibration mode is at a maximum; and in that the sensor has a device for detecting each of the secondary vibration modes.
摘要翻译：一种用于测量与三个正交轴旋转有关的信息的惯性传感器，包括支撑件和固定到支撑件的振动敏感元件; 所述敏感元件具有可变形框架和至少两个在平面（X-Y）中延伸的可变形突起部; 其中所述惯性传感器在同一平面内延伸; 所述可变形框架和所述至少两个可变形突起具有平行于所述平面的对称平面; 所述至少两个突起是直线梁，其具有大致正方形的横截面，不共线并且优选地彼此近似正交; 每个可变形梁在一次振动模式的幅度处于最大的位置处仅由一端连接到可变形框架; 并且传感器具有用于检测每个二次振动模式的装置。

33. 发明授权

US06938486B2 Semiconductor mechanical sensor 失效
公开(公告)号：US06938486B2
公开(公告)日：2005-09-06
申请号：US10899729
申请日：2004-07-27
申请人： Tetsuo Fujii , Masahito Imai
发明人： Tetsuo Fujii , Masahito Imai
IPC分类号： B81B7/00 , C07C303/32 , C07C303/44 , C07C309/17 , G01C19/56 , G01C19/5656 , G01C19/5719 , G01P15/125
CPC分类号： B81B7/0006 , B81B2201/0235 , C07C303/32 , C07C303/44 , G01C19/56 , G01C19/5656 , G01C19/5719 , G01P15/0802 , G01P15/125 , G01P2015/0817 , G01P2015/0828 , Y10T29/49002 , Y10T29/49004 , C07C309/17
摘要： A semiconductor mechanical sensor having a new structure in which a S/N ratio is improved. In the central portion of a silicon substrate 1, a recess portion 2 is formed which includes a beam structure. A weight is formed at the tip of the beam, and in the bottom surface of the weight in the bottom surface of the recess portion 2 facing the same, an electrode 5 is formed. An alternating current electric power is applied between the weight portion 4 and the electrode 5 so that static electricity is created and the weight is excited by the static electricity. In an axial direction which is perpendicular to the direction of the excitation of the weight, an electrode 6 is disposed to face one surface of the weight and a wall surface of the substrate which faces the same. A change in a capacitance between the facing electrodes is electrically detected, and therefore, a change in a physical force acting in the same direction is detected.

34. 发明授权

US5859368A Tunneling-based rotation rate sensor 失效
标题翻译：基于隧道的旋转速率传感器
公开(公告)号：US5859368A
公开(公告)日：1999-01-12
申请号：US632186
申请日：1996-04-15
申请人： Donald R. Cargille
发明人： Donald R. Cargille
IPC分类号： G01C19/5656 , G01P9/04
CPC分类号： G01C19/5656
摘要： A high-accuracy, low-cost rotation rate sensor is based on a vibrating mechanical element induced to laterally oscillate. When rotated, the element, preferably a cantilever beam, is subjected to a Coriolis force that is proportional to the rate of rotation. The Coriolis force, if not counteracted, would cause the beam to move vertically. Vertical motion is detected with a highly sensitive tunneling tip sensor positioned below the beam. A wide bandwidth control circuit applies a counteracting force to the beam to keep the gap between tip and beam constant. This counteracting force varies with and provides an indication of the rotation rate. Lateral oscillation is induced by applying an electrostatic force to the beam with narrow, bipolar pulses that improve the sensor's stability and accuracy. A quadrature suppression circuit is employed if needed to prevent an oscillation that is tending to tilt due to imperfections in sensor construction, by activating electrodes positioned on a substrate below the oscillating beam to counteract the tendency. An alternative embodiment of the invention utilizes a tunneling tip to provide both lateral and vertical position sensing of an oscillating beam.
摘要翻译：高精度，低成本的旋转速率传感器是基于诱发横向振荡的振动机械元件。当旋转时，元件，优选地是悬臂梁，受到与旋转速率成比例的科里奥利力。科里奥利力量，如果没有抵消，将导致梁垂直移动。使用位于梁下方的高灵敏度隧道尖端传感器检测垂直运动。宽带宽控制电路向光束施加反作用力以保持尖端和光束之间的间隙恒定。该反作用力随着旋转速度而变化并提供旋转速率的指示。通过对具有改善传感器的稳定性和精度的窄双极性脉冲的光束施加静电力而引起横向振荡。如果需要，采用正交抑制电路，通过激活位于振荡束下方的衬底上的电极来抵消由于传感器结构中的缺陷而倾向于倾斜的振荡，以抵消倾向。本发明的替代实施例利用隧道尖端来提供摆动梁的横向和垂直位置感测。

35. 发明申请

US20220178696A1 PIEZOELECTRIC FREQUENCY-MODULATED GYROSCOPE 有权
公开(公告)号：US20220178696A1
公开(公告)日：2022-06-09
申请号：US17529693
申请日：2021-11-18
申请人： MURATA MANUFACTURING CO., LTD.
发明人： Ville KAAJAKARI
IPC分类号： G01C19/5762 , G01C19/5649 , G01C19/5656
摘要： A gyroscope includes a proof mass, and a first transduction/suspension structure coupled to the proof mass with a laterally flexible first coupling spring from a first coupling direction. A second transduction/suspension structure is coupled to the proof mass with a laterally flexible second coupling spring from a second coupling direction. A third transduction/suspension structure is coupled to the proof mass with a transversally flexible third coupling spring from a third coupling direction. A fourth transduction/suspension structure is coupled to the proof mass with a transversally flexible fourth coupling spring from a fourth coupling direction. Each transduction/suspension structure comprises elongated beams. Piezoelectric transducers are deposited on some elongated beams, and are configured to bend the corresponding elongated beams in the device plane and to measure the bending of the corresponding lateral elongated beams in the device plane.

36. 发明授权

US11220422B2 MEMS device 有权
公开(公告)号：US11220422B2
公开(公告)日：2022-01-11
申请号：US16353484
申请日：2019-03-14
申请人： TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY LTD.
发明人： Fan Hu , Wen-Chuan Tai , Hsiang-Fu Chen , Chun-Ren Cheng
IPC分类号： B81B3/00 , G01C19/5656
摘要： A micro-electro-mechanical system (MEMS) device includes a substrate, a proof mass, and a piezoelectric bump. The substrate has a surface. The proof mass is suspended over the surface of the substrate, wherein the proof mass is movable with respect to the substrate. The piezoelectric bump is disposed on the surface of the substrate and extends a distance from the surface of the substrate toward the proof mass.

37. 发明授权

US10809277B2 Single axis inertial sensor with suppressed parasitic modes 有权
公开(公告)号：US10809277B2
公开(公告)日：2020-10-20
申请号：US15845506
申请日：2017-12-18
申请人： NXP USA, Inc.
发明人： Jun Tang , Andrew C. McNeil , Kajal Rahimian Kordestani
IPC分类号： G01P15/08 , G01C19/5656 , G01P15/13 , G01P15/18 , G01C19/5755 , G01P15/125
摘要： A single axis inertial sensor includes a proof mass spaced apart from a surface of a substrate. The proof mass has first, second, third, and fourth sections. The third section diagonally opposes the first section relative to a center point of the proof mass and the fourth section diagonally opposes the second section relative to the center point. A first mass of the first and third sections is greater than a second mass of the second and fourth sections. A first lever structure is connected to the first and second sections, a second lever structure is connected to the second and third sections, a third lever structure is connected to the third and fourth sections, and a fourth lever structure is connected to the fourth and first sections. The lever structures enable translational motion of the proof mass in response to Z-axis linear acceleration forces imposed on the sensor.

38. 发明申请

US20200290863A1 MEMS DEVICE 审中-公开
公开(公告)号：US20200290863A1
公开(公告)日：2020-09-17
申请号：US16353484
申请日：2019-03-14
申请人： TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY LTD.
发明人： FAN HU , WEN-CHUAN TAI , HSIANG-FU CHEN , CHUN-REN CHENG
IPC分类号： B81B3/00 , G01C19/5656
摘要： A micro-electro-mechanical system (MEMS) device includes a substrate, a proof mass, and a piezoelectric bump. The substrate has a surface. The proof mass is suspended over the surface of the substrate, wherein the proof mass is movable with respect to the substrate. The piezoelectric bump is disposed on the surface of the substrate and extends a distance from the surface of the substrate toward the proof mass.

39. 发明授权

US10760908B2 Vibration device, angular velocity sensor, electronic device, and vehicle 有权
公开(公告)号：US10760908B2
公开(公告)日：2020-09-01
申请号：US15928472
申请日：2018-03-22
申请人： Seiko Epson Corporation
发明人： Ryuta Nishizawa , Shiro Murakami , Keiichi Yamaguchi , Keiji Nakagawa
IPC分类号： G01C19/5621 , G01C19/5628 , G01C19/5656 , G01C19/5663 , G01C19/56 , B60G17/019
摘要： A vibration device includes a vibration element that has a plurality of terminals, a base that has a plurality of electrical connection terminals, and a board that has a wiring portion which electrically connects the plurality of electrical connection terminal and the plurality of terminals to each other, and that supports the vibration element with respect to the base. The board has a base fixing portion fixed to the base, a vibration element mounting portion on which the vibration element is mounted, and at least one beam portion which couples the base fixing portion and the vibration element mounting portion to each other. At least the one beam portion has a first portion which extends in a first direction and a second portion which extends in a second direction intersecting the first direction.

40. 发明授权

US10712157B2 Physical quantity sensor, electronic device, and vehicle 有权
公开(公告)号：US10712157B2
公开(公告)日：2020-07-14
申请号：US15945328
申请日：2018-04-04
申请人： Seiko Epson Corporation
发明人： Ryuji Kihara
IPC分类号： G01C19/5656 , G01P15/125
摘要： A physical quantity sensor includes a base, a suspension beam facing the base, a fixing anchor fixing the suspension beam to the base, a fixed electrode extending orthogonally from the suspension beam, and a movable electrode facing the fixed electrode at an interval. The width of a distal end of the suspension beam distant from the fixing anchor is narrower than the width of a proximal end adjacent to the fixing anchor.

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