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31. 发明申请

US20150076118A1 System and Method of Polishing a Surface 审中-公开
标题翻译：抛光表面的系统和方法
公开(公告)号：US20150076118A1
公开(公告)日：2015-03-19
申请号：US14095926
申请日：2013-12-03
申请人： Kangmin Hsia
发明人： Kangmin Hsia
IPC分类号： B24B1/00 , B24B19/22 , B23H7/32 , H01L21/306 , B23H3/00
CPC分类号： H01L22/20 , B23H1/02 , B23H1/028 , B23H1/04 , B23H1/08 , B23H3/00 , B23H7/28 , B23H7/32 , B23H9/00 , B23H9/02 , B24B19/22 , H01L21/306 , H01L21/3065 , H01L21/31053 , H01L21/32115 , H01L21/3212 , H01L22/12
摘要： A method of polishing a surface of an object disposed within a gas chamber is provided. The method includes filling the gas chamber with a discharging medium to a predefined pressure, applying a voltage between an electrode and the surface, calibrating a height of the electrode relative to the surface so as to establish electrical breakdown threshold criteria, and scanning the electrode with respect to the surface so as to sequentially position the electrode over a plurality of locations on the surface, each location characterized by a surface error. When a respective location in the plurality of locations has a surface error that meets the electrical breakdown threshold criteria, electrical breakdown occurs, whereby the electrical breakdown results in a discharging pulse that polishes the surface.
摘要翻译：提供了一种抛光设置在气室内的物体的表面的方法。该方法包括将排出介质的气室填充到预定的压力，在电极和表面之间施加电压，校准电极相对于表面的高度，以便建立电击穿阈值标准，并用相对于表面，以便将电极顺序地定位在表面上的多个位置上，每个位置的特征在于表面误差。当多个位置中的相应位置具有满足电击穿阈值标准的表面误差时，发生电击穿，由此电击穿导致抛光表面的放电脉冲。

32. 发明授权

US07737381B2 Electric discharge apparatus for controlling the length of a carbon nanotube 失效
标题翻译：用于控制碳纳米管长度的放电装置
公开(公告)号：US07737381B2
公开(公告)日：2010-06-15
申请号：US11657615
申请日：2007-01-25
申请人： Hung-Ming Tai , Nang-Chian Shie , Tsan-Lin Chen
发明人： Hung-Ming Tai , Nang-Chian Shie , Tsan-Lin Chen
IPC分类号： B23H7/32
CPC分类号： G01Q70/16 , C01B32/16 , C01B2202/34 , G01Q70/12 , Y10S977/856
摘要： This invention relates to a method and apparatus for controlling the length of a carbon nanotube, in cooperation with a substrate having at least one reference level on a surface of the substrate on which at least one carbon nanotube is formed, comprising at least one positioning platform for mounting and calibrating the substrate; a discharging electrode mounted on one side of the positioning platform to cut the carbon nanotube wherein the position of the discharging electrode can be calibrated with the positioning platform; a piezoelectric actuator for calibrating the position of the discharging electrode or the height of the discharging electrode relative to the substrate reference level; a position sensor for detection of the height of the substrate; and a voltage pulse supplying means for applying a voltage pulse to the discharging electrode to cut the carbon nanotube.
摘要翻译：本发明涉及一种用于控制碳纳米管的长度的方法和装置，与在其上形成有至少一个碳纳米管的基底的表面上具有至少一个参考水平的基底配合，包括至少一个定位平台用于安装和校准基板; 放电电极安装在定位平台的一侧以切割碳纳米管，其中放电电极的位置可以用定位平台校准; 用于校准放电电极的位置或放电电极相对于衬底基准电平的高度的压电致动器; 用于检测基板的高度的位置传感器; 以及电压脉冲提供装置，用于向放电电极施加电压脉冲以切割碳纳米管。

33. 发明授权

US07594987B2 Method and device for electroerosive material machining of a workpiece 有权
标题翻译：工件电极材料加工方法及装置
公开(公告)号：US07594987B2
公开(公告)日：2009-09-29
申请号：US10495337
申请日：2002-11-12
申请人： Boris Lukic
发明人： Boris Lukic
IPC分类号： B23H7/18 , B23H7/26 , B23H7/28 , B23H7/32
CPC分类号： B23H7/265 , B23H7/30 , B23H9/14
摘要： A method and an apparatus for electroerosive material machining of a workpiece with an elongated tool electrode are described. The tool electrode is guided in an electrode guide, in which an oval void is embodied. The wire segment located in the void is exposed to a magnetic field, as a result of which the wire segment can be deflected laterally. The lateral deflection is converted into an axial motion of the wire segment located in the region of the workpiece, in order to create an optimal work gap between the workpiece and the free end part of the wire segment.
摘要翻译：描述了具有细长工具电极的用于电极材料加工工件的方法和装置。在电极引导件中引导工具电极，其中体现了椭圆形的空隙。位于空隙中的线段暴露于磁场，由此可以使线段横向偏转。横向偏转被转换成位于工件区域中的线段的轴向运动，以便在工件和线段的自由端部之间产生最佳的工作间隙。

34. 发明授权

US5820744A Electrochemical machining method and apparatus 失效
标题翻译：电化学加工方法及装置
公开(公告)号：US5820744A
公开(公告)日：1998-10-13
申请号：US721761
申请日：1996-09-30
申请人： Clifton Vedantus Edwards , Frank P. Simkowski
发明人： Clifton Vedantus Edwards , Frank P. Simkowski
IPC分类号： B23H3/02 , B23H3/00 , B23H7/32 , B23H9/14
CPC分类号： B23H3/02
摘要： Electrochemical machining (ECM) techniques utilizing real-time parameter monitoring, alarms and feedback control for improved machining of a workpiece are disclosed. The ECM device utilizes one or more cathodes, an electrolyte and a positively charged workpiece to achieve electrolytic action. A number of controlling variables, such as cathode feed rate, electrolyte flow rate and voltage, are balanced in response to measured system parameters. The following parameters are preferably monitored in order to adjust the controlling variables: the drive parameters of feed rate and cathode depth; the pump parameters of flow rate and pressure; and the power components of voltage and current. The flow rate in each of the cathodes, or a corresponding Reynolds number, is preferably utilized to provide an alarm to the operator if a statistically significant change in flow is detected. The dynamic fluid resistance gradient across one or more of the gaps being machined is utilized to approximate the desired shape of the workpiece being machined in real time. The dynamic electrical resistance may be utilized to improve the shape approximation. The approximated shape values are utilized to provide feedback control of one or more of the controlling variables to obtain improved results. The dynamic fluid resistance is the difference between the total measured fluid resistance and the static fluid resistance, as obtained during a calibration procedure.
摘要翻译：公开了使用实时参数监测，报警和反馈控制来改进工件加工的电化学加工（ECM）技术。 ECM装置利用一个或多个阴极，电解质和带正电的工件来实现电解作用。响应于测量的系统参数，许多控制变量，例如阴极进料速率，电解质流速和电压被平衡。为了调整控制变量，最好监测以下参数：进给速度和阴极深度的驱动参数; 泵参数的流量和压力; 和电压和电流的功率分量。如果检测到流量的统计上显着的变化，则每个阴极中的流速或相应的雷诺数优选地用于向操作者提供警报。利用被加工的一个或多个间隙的动态流体阻力梯度来近似实时加工的工件的期望形状。动态电阻可用于改善形状近似。近似形状值用于提供一个或多个控制变量的反馈控制，以获得改进的结果。动态流体阻力是校准过程中获得的总测量流体阻力和静态流体阻力之间的差值。

35. 发明授权

US5676860A Electric discharge machine with electrode or object vibration and detection of abnormal gap condition 失效
标题翻译：放电机具有电极或物体振动，检测异常间隙情况
公开(公告)号：US5676860A
公开(公告)日：1997-10-14
申请号：US542823
申请日：1995-10-13
申请人： Masahiro Muro , Takeshi Masaki , Yoshihiro Ikemoto , Yoshinori Furusawa
发明人： Masahiro Muro , Takeshi Masaki , Yoshihiro Ikemoto , Yoshinori Furusawa
IPC分类号： B23H1/02 , B23H7/18 , B23H7/38 , B23H1/00 , B23H7/32
CPC分类号： B23H7/18 , B23H7/38
摘要： In an electric discharge machine and machining method for processing an object through electric discharge by impressing a voltage between a processing electrode and the object, the processing electrode and object are relatively vibrated by a vibrating part using a piezoelectric element while a gap between the processing electrode and object is properly retained at all times. The electric discharge is accelerated when the gap is small, whereas the insulated state is maintained when the gap is large. This kind of condition is stably produced in accordance with a frequency of the vibration. If the frequency is set in the range of 50-500 Hz, a shortcircuit or an arc state is less likely to occur. The vibration is effective to quickly discharge processing debris at the discharging gap.
摘要翻译：在通过在处理电极和物体之间施加电压而通过放电来处理物体的放电机和加工方法中，处理电极和物体通过使用压电元件的振动部件相对振动，同时处理电极对象在任何时候都被适当地保留。当间隙小时，放电加速，而当间隙较大时则保持绝缘状态。这种条件根据振动的频率稳定地产生。如果频率设定在50-500Hz的范围内，则不太可能发生短路或电弧状态。振动对于在放电间隙快速排放处理碎片是有效的。

36. 发明授权

US4789447A Apparatus for working electrically conductive materials by electric erosion 失效
标题翻译：电蚀侵蚀导电材料的设备
公开(公告)号：US4789447A
公开(公告)日：1988-12-06
申请号：US57527
申请日：1987-07-13
申请人： Mohamed S. Ahmed , Geoffrey Robinson
发明人： Mohamed S. Ahmed , Geoffrey Robinson
IPC分类号： B23H1/02 , B23H7/18 , B23H9/04 , B23H7/32
CPC分类号： B23H9/04 , B23H7/18
摘要： An apparatus is provided for electrical erosion by electrical discharges across the gap between an electrode and workpiece being eroded. A sensor means provides information regarding the electrical condition in the gap.
摘要翻译： PCT No.PCT / GB86 / 00603 Sec。 371日期1987年7月13日 102（e）日期1987年7月13日PCT提交1986年10月6日PCT公布。第WO87 / 01981号公报日期为1987年4月9日。一种设备用于通过电极和被腐蚀的工件之间的间隙的放电进行电蚀。传感器装置提供关于间隙中的电气状况的信息。

37. 发明授权

US3335313A Spark erosion device with controllable electrode spacing 失效
标题翻译：具有可控电极间距的火花腐蚀装置
公开(公告)号：US3335313A
公开(公告)日：1967-08-08
申请号：US33487963
申请日：1963-12-31
申请人： PHILIPS CORP
发明人： GERRIT LUIMES , OSENBRUGGEN CORNELIS VAN
IPC分类号： B23H7/18 , B23H7/32
CPC分类号： B23H7/32 , B23H7/18

38. 发明授权

US11450530B2 Substrate processing apparatus and substrate processing method 有权
公开(公告)号：US11450530B2
公开(公告)日：2022-09-20
申请号：US17206289
申请日：2021-03-19
申请人： Tokyo Electron Limited
发明人： Rintaro Higuchi
IPC分类号： H01L21/3063 , H01L21/67 , H01L21/3213 , H01L21/465 , H01L21/308 , B23H3/04 , B23H7/26 , B23H7/32 , C25F7/00 , B23H7/36
摘要： A substrate processing apparatus includes a substrate rotator, a processing liquid supply, an anode and a cathode, and a controller. The substrate rotator is configured to hold and rotate a substrate. The processing liquid supply is configured to supply a processing liquid to the substrate held by the substrate rotator. The anode and the cathode are configured to apply a voltage to the processing liquid supplied from the processing liquid supply. The controller is configured to control the substrate rotator, the processing liquid supply, and the anode and the cathode. The controller allows, by contacting the anode and the cathode with the processing liquid independently, the processing liquid in contact with the anode and the processing liquid in contact with the cathode to be supplied to the substrate while being spaced apart from each other when the substrate is rotated.

39. 发明授权

US11033975B2 Wire electrical discharge machine and machining condition adjustment method 有权
公开(公告)号：US11033975B2
公开(公告)日：2021-06-15
申请号：US16438752
申请日：2019-06-12
申请人： FANUC CORPORATION
发明人： Hiroyuki Abe , Hiroyuki Furukawa
IPC分类号： B23H11/00 , B23H7/10 , B23H7/06 , B23H7/14 , B23H7/32 , B23H7/20
摘要： A wire electrical discharge machine for performing electrical discharge machining on a workpiece to be machined by applying voltage to an electrode gap formed between a wire electrode and the workpiece to generate electrical discharge at the electrode gap under predetermined machining conditions while conveying the wire electrode along a transfer path, includes: a wire breakage detector for detecting a breakage of the wire electrode; a position calculator for calculating the breakage position of the wire electrode in the transfer path; and an adjustment unit for adjusting the machining conditions when the breakage position is in a predetermined section of the transfer path.

40. 发明授权

US10730127B2 Control device for wire electrical discharge machine and control method of wire electrical discharge machine 有权
公开(公告)号：US10730127B2
公开(公告)日：2020-08-04
申请号：US16009323
申请日：2018-06-15
申请人： FANUC CORPORATION
发明人： Ryou Nishikawa
IPC分类号： B23H7/20 , B23H7/18 , G05B19/19 , B23H7/32 , B23H7/16 , B23H7/04
摘要： A control device includes a speed setting unit configured to set a relative movement speed of a wire electrode with respect to a workpiece depending on the average of gap voltage per unit time, i.e., average gap voltage, and set the relative movement speed so as to move the wire electrode backward when the average gap voltage is less than a threshold, and a map compensation unit configured to change the threshold from a first threshold that is set when the amount of change in the average gap voltage is lower than a predetermined variation, to a second threshold that is greater than the first threshold, when the average gap voltage has changed in a decreasing direction and the amount of change in the average gap voltage becomes equal to or greater than the predetermined variation.

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