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    • 36. 发明授权
    • Electron beam control method, electron beam generating apparatus, apparatus using the same, and emitter
    • 电子束控制方法,电子束发生装置,使用该装置的装置和发射极
    • US09257257B2
    • 2016-02-09
    • US12306635
    • 2006-06-30
    • Shin FujitaMohamed El-GomatiTorquil Wells
    • Shin FujitaMohamed El-GomatiTorquil Wells
    • G01N23/00H01J37/065H01J35/06
    • H01J37/065H01J35/06H01J2201/196H01J2237/06316H01J2237/3175
    • Provided is a Schottky emitter having the conical end with a radius of curvature of 2.0 μm on the emission side of an electron beam. Since a radius of curvature is 1 μm or more, a focal length of an electron gun can be longer than in a conventional practice wherein a radius of curvature is in the range of from 0.5 μm to not more than 0.6 μm. The focal length was found to be roughly proportional to the radius of the curvature. Since the angular current intensity (the beam current per unit solid angle) is proportional to square of the electron gun focal length, the former can be improved by an order of magnitude within a practicable increase in the emitter radius. A higher angular current intensity means a larger beam current available from the electron gun and the invention enables the Schottky emitters to be used in applications which require relatively high beam current of microampere regime such as microfocus X-ray tube, electron probe micro-analyzer, and electron beam lithography system.
    • 提供了一种在电子束的发射侧具有2.0μm的曲率半径的锥形端的肖特基发射体。 由于曲率半径为1μm以上,电子枪的焦距可以比曲率半径在0.5μm以上0.6μm以下的现有技术中长。 发现焦距与曲率半径成正比。 由于角电流强度(每单位立体角的射束电流)与电子枪焦距的平方成比例,所以前者可以在发射极半径的可行增加范围内提高一个数量级。 较高的角电流强度意味着可从电子枪获得的较大的束电流,并且本发明使肖特基发射体能够用于需要相对较高的微安电流束流的应用,如微焦X射线管,电子探针微量分析仪, 和电子束光刻系统。
    • 38. 发明申请
    • X-RAY SOURCE, HIGH-VOLTAGE GENERATOR, ELECTRON BEAM GUN, ROTARY TARGET ASSEMBLY, ROTARY TARGET, AND ROTARY VACUUM SEAL
    • X射线源,高压发生器,电子束枪,旋转靶组件,旋转靶和旋转真空密封
    • US20160020058A1
    • 2016-01-21
    • US14774424
    • 2014-03-12
    • NIKON METROLOGY NV
    • Roger HADLAND
    • H01J35/02H01J35/04H05G1/12F16C35/04H01J35/16F16J15/16F16C33/76H01J35/10H01J29/48
    • H01J35/025F16C33/768F16C35/042F16J15/16H01J29/48H01J35/04H01J35/06H01J35/101H01J35/106H01J35/108H01J35/16H01J37/065H01J2235/0236H01J2235/083H01J2235/086H01J2235/087H01J2235/1046H01J2235/1204H01J2235/1262H01J2235/20H01J2237/2482H02M1/32H02M7/106H05G1/12
    • Disclosed herein are a high-voltage generator (120) for an x-ray source, an x-ray gun, an electron beam apparatus, a rotary vacuum seal, a target assembly for an x-ray source, a rotary x-ray emission target (500), and an x-ray source. These various aspects may separately and/or together enable the construction of an x-ray source which can operate at energies of up to 500 kV and beyond, which is suitable for use in commercial and research x-ray applications such as computerised tomography. In particular, the high-voltage generator includes a shield electrode (123a, 123b) electrically connected intermediate of a first voltage multiplier (122a, 122b) and a second voltage multiplier (122b, 122c). The electron beam apparatus includes control photodetectors (202a, 202b—not shown) and photo emitters (201a, 202a) having a transparent conductive shield (203a and 203b, 203c—not shown) arranged therebetween. The rotary vacuum seal includes a pumpable chamber (302) at a position intermediate between high-pressure and low-pressure ends of a bore (301) for a rotating shaft (401). The rotary target assembly is configured such that when a torque between a bearing housing (403) and a vacuum housing exceeds a predetermined torque, the bearing housing rotates relative to the vacuum housing. The rotary x-ray emission target (500) has a plurality of target plates (560) supported on a hub, the plates being arranged on the hub to provide an annular target region about an axis rotation of the hub. The x-ray gun is provided with a shield electrode (123a) maintained at a potential difference relative to the x-ray target different to the electron beam emission cathode.
    • 本文公开了一种用于x射线源的高压发生器(120),x射线枪,电子束装置,旋转真空密封件,用于x射线源的靶组件,旋转x射线发射 目标(500)和x射线源。 这些各个方面可以单独地和/或一起实现能够在高达500kV及以上的能量下运行的x射线源,其适用于商业和研究的X射线应用如计算机断层摄影。 特别地,高电压发生器包括电连接第一电压倍增器(122a,122b)和第二电压倍增器(122b,122c)之间的屏蔽电极(123a,123b)。 电子束装置包括控制光电检测器(202a,202b,未示出)和具有布置在其间的透明导电屏蔽(203a和203b,203c-未示出)的光发射器(201a,202a)。 旋转式真空密封件包括位于用于旋转轴(401)的孔(301)的高压和低压端之间的位置的可泵送室(302)。 旋转目标组件被构造成使得当轴承壳体(403)和真空壳体之间的扭矩超过预定扭矩时,轴承壳体相对于真空壳体旋转。 旋转X射线发射目标(500)具有支撑在轮毂上的多个目标板(560),所述板布置在轮毂上以围绕轮毂的轴线旋转提供环形目标区域。 X射线枪设置有相对于与电子束发射阴极不同的x射线靶保持在电位差的屏蔽电极(123a)。
    • 39. 发明申请
    • DIGITAL X-RAY SOURCE
    • 数字X射线源
    • US20150332887A1
    • 2015-11-19
    • US14417546
    • 2013-07-12
    • UNIVERSITY-INDUSTRY COOPERATION GROUP OF KYUNG HEE UNIVERSITY
    • Hun Kuk ParkJe Hwang Ryu
    • H01J35/06H05G1/52
    • H01J35/06H01J35/04H01J35/065H01J2201/30469H01J2235/062H05G1/52
    • The present invention discloses a digital X-ray source. The digital X-ray source includes an X-ray generation unit that emits X-rays, wherein the X-ray generation unit includes a cathode electrode; an emitter formed above the cathode electrode; an anode electrode located above the emitter; a gate electrode located between the emitter and the anode electrode; first and second focusing electrodes located between the emitter and the anode electrode; and an electrode connecting unit configured to include one or more insulating tubes capable of fixing and adjusting the locations of the gate electrode and the first and second focusing electrodes on the cathode electrode, and also configured to individually insulate and connect the cathode electrode, the gate electrode and the first and second focusing electrodes from and with electric lines
    • 本发明公开了一种数字X射线源。 数字X射线源包括发射X射线的X射线产生单元,其中X射线产生单元包括阴极电极; 在阴极电极上方形成发射极; 位于发射体上方的阳极; 位于发射极和阳极之间的栅电极; 位于发射极和阳极之间的第一和第二聚焦电极; 以及电极连接单元,被配置为包括一个或多个绝缘管,所述绝缘管能够固定和调节所述栅电极和所述第一和第二聚焦电极在所述阴极上的位置,并且还被配置为单独地绝缘并连接所述阴极,所述栅极 电极以及来自和与电线的第一和第二聚焦电极