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31. 发明授权

US09493343B2 Planar cavity MEMS and related structures, methods of manufacture and design structures 有权
标题翻译：平面腔MEMS及相关结构，制造方法和设计结构
公开(公告)号：US09493343B2
公开(公告)日：2016-11-15
申请号：US14840453
申请日：2015-08-31
申请人： INTERNATIONAL BUSINESS MACHINES CORPORATION
发明人： Russell T. Herrin , Jeffrey C. Maling , Anthony K. Stamper
IPC分类号： H05K3/00 , B81B3/00 , H01L41/113 , B81C1/00 , H01H57/00 , G06F17/50 , H01H1/00 , H01H59/00
CPC分类号： B81B3/0072 , B81B3/0021 , B81B2201/01 , B81B2201/014 , B81B2203/0118 , B81B2203/0315 , B81B2203/04 , B81C1/0015 , B81C1/00365 , B81C1/00476 , B81C1/00619 , B81C1/00626 , B81C1/00666 , B81C2201/0109 , B81C2201/013 , B81C2201/0167 , B81C2201/017 , B81C2203/0136 , B81C2203/0172 , G06F17/5068 , G06F17/5072 , H01H1/0036 , H01H57/00 , H01H59/0009 , H01H2057/006 , H01L41/1136 , H01L2924/0002 , Y10S438/937 , Y10T29/42 , Y10T29/435 , Y10T29/49002 , Y10T29/49105 , Y10T29/49121 , Y10T29/49126 , Y10T29/4913 , Y10T29/49155 , Y10T29/5313 , H01L2924/00
摘要： A method of forming at least one Micro-Electro-Mechanical System (MEMS) includes forming a beam structure and an electrode on an insulator layer, remote from the beam structure. The method further includes forming at least one sacrificial layer over the beam structure, and remote from the electrode. The method further includes forming a lid structure over the at least one sacrificial layer and the electrode. The method further includes providing simultaneously a vent hole through the lid structure to expose the sacrificial layer and to form a partial via over the electrode. The method further includes venting the sacrificial layer to form a cavity. The method further includes sealing the vent hole with material. The method further includes forming a final via in the lid structure to the electrode, through the partial via.
摘要翻译：形成至少一个微电子机械系统（MEMS）的方法包括在远离梁结构的绝缘体层上形成梁结构和电极。该方法还包括在光束结构上方并且远离电极形成至少一个牺牲层。该方法还包括在至少一个牺牲层和电极上形成盖结构。该方法还包括同时提供穿过盖结构的通气孔以暴露牺牲层并在电极上形成部分通孔。该方法还包括排出牺牲层以形成空腔。该方法还包括用材料密封通气孔。该方法还包括通过部分通孔在盖结构中形成最终通孔至电极。

32. 发明授权

US09449956B2 Optical apparatus 有权
公开(公告)号：US09449956B2
公开(公告)日：2016-09-20
申请号：US14743411
申请日：2015-06-18
申请人： ROHM CO., LTD.
发明人： Yuji Makimura , Okimoto Kondo
IPC分类号： H01L27/15 , H01L25/16 , H01L31/16 , H01L31/02 , H01L31/0352 , H01L31/173 , H01H57/00 , H01H59/00 , H01L31/0216 , G01V8/10
CPC分类号： H01L25/167 , G01V8/10 , H01H57/00 , H01H59/0009 , H01L31/02005 , H01L31/02164 , H01L31/035272 , H01L31/16 , H01L31/173 , H01L2224/48227 , H01L2224/49171 , H01L2924/3025 , H01L2933/0091 , H01L2924/00
摘要： An optical apparatus includes a substrate 1, a wiring pattern 8 formed on the substrate 1, a light-receiving element 3 and a light-emitting element 2 provided on the substrate 1 and spaced apart from each other in a direction x, a light-transmitting resin 4 covering the light-receiving element 3, a light-transmitting resin 5 covering the light-emitting element 2, and a light-shielding resin 6 covering the light-transmitting resin 4 and the light-transmitting resin 5. The wiring pattern 8 includes a first light-blocking portion 83 interposed between the light-shielding resin 6 and the substrate 1 and positioned between the light-receiving element 3 and the light-emitting element 2 as viewed in x-y plane. The first light-blocking portion 83 extends across the light-emitting element 2 as viewed in the direction x.

33. 发明申请

US20160268084A1 DUAL SUBSTRATE ELECTROSTATIC MEMS SWITCH WITH MULTIPLE HINGES AND METHOD OF MANUFACTURE 有权
标题翻译：具有多个铰链的双基板静电MEMS开关及其制造方法
公开(公告)号：US20160268084A1
公开(公告)日：2016-09-15
申请号：US15060630
申请日：2016-03-04
申请人： Innovative Micro Technology
发明人： Christopher S. GUDEMAN , Paul J. RUBEL , Marin Sigurdson
IPC分类号： H01H59/00 , B81C1/00 , H01H49/00 , B81B7/00
CPC分类号： H01H59/0009 , B81B7/00 , B81B2201/012 , B81C1/00341 , H01H49/00 , H01H2001/0084
摘要： Systems and methods for forming an electrostatic MEMS switch include forming a movable cantilevered beam on a first substrate, forming the electrical contacts on a second substrate, and coupling the two substrates using a hermetic seal. Electrical access to the electrostatic MEMS switch may be made by forming vias through the thickness of the second substrate. The cantilevered beam may be formed by etching the perimeter shape in the device layer of an SOI substrate. An additional void may be formed in the movable beam such that it bends about an additional hinge line as a result of the additional void. This may give the beam and switch advantageous kinematic characteristics.
摘要翻译：用于形成静电MEMS开关的系统和方法包括在第一基板上形成可移动的悬臂梁，在第二基板上形成电触点，并且使用气密密封来连接两个基板。可以通过形成穿过第二基板的厚度的通孔来进行对静电MEMS开关的电接入。可以通过蚀刻SOI衬底的器件层中的周边形状来形成悬臂梁。可移动梁中可能形成一个额外的空隙，使其由于附加的空隙而围绕另外的铰链线弯曲。这可以给出光束并切换有利的运动特性。

34. 发明申请

US20160257555A1 MICRO-ELECTRO-MECHANICAL SYSTEM (MEMS) AND RELATED ACTUATOR BUMPS, METHODS OF MANUFACTURE AND DESIGN STRUCTURES 审中-公开
标题翻译：微电子机械系统（MEMS）及相关执行机构的制造，制造和设计结构的方法
公开(公告)号：US20160257555A1
公开(公告)日：2016-09-08
申请号：US15155409
申请日：2016-05-16
申请人： INTERNATIONAL BUSINESS MACHINES CORPORATION
发明人： Christopher V. JAHNES , Anthony K. STAMPER
IPC分类号： B81B3/00 , B81C1/00 , G06F17/50
CPC分类号： H01H59/0009 , B81B3/001 , B81B7/0006 , B81B2201/016 , B81B2203/0118 , B81B2203/04 , B81C1/0015 , B81C1/00293 , B81C2203/0145 , G06F17/5045 , G06F17/5068 , H01H1/0036 , H01H2001/0057 , Y10T29/49121
摘要： Micro-Electro-Mechanical System (MEMS) structures, methods of manufacture and design structures are provided. The method of forming a MEMS structure includes forming fixed actuator electrodes and a contact point on a substrate. The method further includes forming a MEMS beam over the fixed actuator electrodes and the contact point. The method further includes forming an array of actuator electrodes in alignment with portions of the fixed actuator electrodes, which are sized and dimensioned to prevent the MEMS beam from collapsing on the fixed actuator electrodes after repeating cycling. The array of actuator electrodes are formed in direct contact with at least one of an underside of the MEMS beam and a surface of the fixed actuator electrodes.
摘要翻译：提供微机电系统（MEMS）结构，制造方法和设计结构。形成MEMS结构的方法包括在基板上形成固定的致动器电极和接触点。该方法还包括在固定的致动器电极和接触点上形成MEMS光束。该方法还包括形成与固定致动器电极的部分对准的致动器电极阵列，其尺寸和尺寸被设计成防止MEMS光束在重复循环之后塌陷在固定的致动器电极上。致动器电极阵列形成为与MEMS光束的下侧和固定的致动器电极的表面中的至少一个直接接触。

35. 发明授权

US09390877B2 RF MEMS based large scale cross point electrical switch 有权
标题翻译：基于RF MEMS的大规模交叉点电开关
公开(公告)号：US09390877B2
公开(公告)日：2016-07-12
申请号：US14134373
申请日：2013-12-19
申请人： Google Inc.
发明人： Roy Michael Bannon , Leesa Marie Noujeim
IPC分类号： H01H59/00 , H01R4/00 , H04L12/931
CPC分类号： H01H59/0009 , H04L49/00 , Y10T307/76
摘要： This disclosure provides systems, methods, and apparatus for providing a crosspoint switch used in an optical fiber data network. The crosspoint switch can switch optical signals received from any of a plurality of input optical fibers to any one of a plurality of output optical fibers. The crosspoint switch converts the optical signals received from the input optical fibers into electrical signals, switches the electrical signals, and converts the switched electrical signals back into optical signals before transmitting them over the output optical fibers. A micro-electromechanical systems (MEMS) electrical switch array is utilized to switch the electrical signals. The MEMS electrical switch array includes MEMS switching elements that allow for high frequency and high bandwidth operation of the crosspoint switch. The crosspoint switch can utilize circuit switching methodology for switching decisions.
摘要翻译：本公开提供了用于提供在光纤数据网络中使用的交叉点开关的系统，方法和装置。交叉点开关可以将从多个输入光纤中的任一个接收的光信号切换到多个输出光纤中的任何一个。交叉点开关将从输入光纤接收的光信号转换为电信号，切换电信号，并将开关电信号转换回光信号，然后再将其传输到输出光纤上。利用微机电系统（MEMS）电开关阵列来切换电信号。 MEMS电气开关阵列包括允许交叉点开关的高频和高带宽操作的MEMS开关元件。交叉点开关可以利用电路交换方法进行交换决策。

36. 发明申请

US20160181041A1 MEMS STRUCTURE WITH THICK MOVABLE MEMBRANE 审中-公开
标题翻译：具有厚度可移动膜的MEMS结构
公开(公告)号：US20160181041A1
公开(公告)日：2016-06-23
申请号：US14977488
申请日：2015-12-21
申请人： DELFMEMS SAS
发明人： Anne-Sophie Rollier , Antoine Bonnabel , Karim Segueni
IPC分类号： H01H59/00 , B81B3/00 , H01H49/00 , B81C1/00
CPC分类号： H01H59/0009 , B81B3/0051 , B81B2201/018 , B81B2203/0127 , B81C1/00158 , B81C2201/013 , H01H49/00 , H01H2059/0027 , H01H2059/0036 , H01H2227/004
摘要： The present invention relates to a method of manufacturing an MEMS device that comprises the steps of forming a first membrane layer over a sacrificial base layer, forming a second membrane layer over the first membrane layer, wherein the second membrane layer comprises lateral recesses exposing lateral portions of the first membrane layer and forming stoppers to restrict movement of the first membrane layer. Moreover, it is provided MEMS device comprising a movable membrane comprising a first membrane layer and a second membrane layer formed over the first membrane layer, wherein the second membrane layer comprises lateral recesses exposing lateral portions of the first membrane layer.
摘要翻译：本发明涉及一种制造MEMS器件的方法，该方法包括以下步骤：在牺牲基底层上形成第一膜层，在第一膜层上形成第二膜层，其中第二膜层包括暴露侧向部分的第一膜层并形成止挡件以限制第一膜层的运动。此外，提供了包括可移动膜的MEMS装置，其包括形成在第一膜层上的第一膜层和第二膜层，其中第二膜层包括暴露第一膜层侧向部分的侧向凹部。

37. 发明申请

US20160181040A1 MEMS STRUCTURE WITH MULTILAYER MEMBRANE 审中-公开
标题翻译：具有多层膜的MEMS结构
公开(公告)号：US20160181040A1
公开(公告)日：2016-06-23
申请号：US14977483
申请日：2015-12-21
申请人： DELFMEMS SAS
发明人： Renaud Robin , Nicolas Lorphelin , Karim Segueni
IPC分类号： H01H59/00 , B81B3/00 , H01H49/00 , B81C1/00
CPC分类号： H01H59/0009 , B81B3/0086 , B81B2201/018 , B81B2203/0127 , B81C1/00158 , B81C2201/0188 , H01H49/00 , H01H2059/0027 , H01H2059/0036 , H01H2227/004
摘要： Systems and methods for a MEMS device, in particular, a MEMS switch, and the manufacture thereof are provided. In one example, said MEMS device comprises posts and a conduction (transmission) line formed over a substrate and a membrane over the posts and the conduction line. The membrane comprises a first membrane layer and a second membrane layer formed over the first membrane layer in a region over one of the posts and/or a region over the conduction line such that the first membrane layer has a region where the second membrane layer is not formed adjacent to the region where the second membrane layer is formed.
摘要翻译：提供了用于MEMS器件，特别是MEMS开关的系统和方法及其制造。在一个示例中，所述MEMS器件包括柱和在衬底上形成的导电（透射）线，并且在柱和导电线上形成膜。所述膜包括第一膜层和第二膜层，所述第一膜层和所述第二膜层形成在所述第一膜上方的所述柱中的一个区域上和/或所述导电线上的区域中，使得所述第一膜层具有第二膜层不与形成有第二膜层的区域相邻地形成。

38. 发明授权

US09373447B2 Routing of MEMS variable capacitors for RF applications 有权
标题翻译：用于RF应用的MEMS可变电容器的布线
公开(公告)号：US09373447B2
公开(公告)日：2016-06-21
申请号：US14239115
申请日：2012-08-17
申请人： Roberto Gaddi , Robertus Petrus Van Kampen , Richard L. Knipe , Anartz Unamuno
发明人： Roberto Gaddi , Robertus Petrus Van Kampen , Richard L. Knipe , Anartz Unamuno
IPC分类号： H01G5/16 , H01G5/38 , H01H59/00 , H01G7/00
CPC分类号： H01G5/16 , H01G5/38 , H01G7/00 , H01H59/0009 , Y10T29/43
摘要： Utilizing a variable capacitor for RF and microwave applications provides for multiple levels of intra-cavity routing that advantageously reduce capacitive coupling. The variable capacitor includes a bond pad that has a plurality of cells electrically coupled thereto. Each of the plurality of cells has a plurality of MEMS devices therein. The MEMS devices share a common RF electrode, one or more ground electrodes and one or more control electrodes. The RF electrode, ground electrodes and control electrodes are all arranged parallel to each other within the cells. The RF electrode is electrically connected to the one or more bond pads using a different level of electrical routing metal.
摘要翻译：利用用于RF和微波应用的可变电容器可提供有利于减少电容耦合的多级腔内路由。可变电容器包括具有与其电耦合的多个单元的接合焊盘。多个单元中的每一个在其中具有多个MEMS器件。 MEMS器件共享公共RF电极，一个或多个接地电极和一个或多个控制电极。 RF电极，接地电极和控制电极都在电池内彼此平行布置。 RF电极使用不同级别的电路由金属电连接到一个或多个接合焊盘。

39. 发明申请

US20160163477A1 SWITCHES FOR USE IN MICROELECTROMECHANICAL AND OTHER SYSTEMS, AND PROCESSES FOR MAKING SAME 审中-公开
标题翻译：用于微电子和其他系统的开关及其制造方法
公开(公告)号：US20160163477A1
公开(公告)日：2016-06-09
申请号：US14883212
申请日：2015-10-14
申请人： HARRIS CORPORATION
发明人： John E. Rogers , Michael R. Weatherspoon
IPC分类号： H01H11/06
CPC分类号： H01H11/06 , H01H1/0036 , H01H59/0009 , H01H2001/0078 , H01H2011/065
摘要： Embodiments of switches (10) include first and second electrical conductors (34, 36) suspended within an electrically-conductive housing (28), and a contact element (16) having an electrically-conductive portion (53b) that establishes electrical contact between the first and second electrical conductors (34, 36) when the contact element (16) is in a closed position. The electrically-conductive portion (53b) is electrically isolated from a ground plane (27) of the switch (10) by adjacent electrically-insulative portions (53a, 53c) of the contact element (16).
摘要翻译：开关（10）的实施例包括悬挂在导电壳体（28）内的第一和第二电导体（34,36），以及具有导电部分（53b）的接触元件（16），该导电部分当接触元件（16）处于关闭位置时，第一和第二电导体（34,36）。导电部分（53b）通过接触元件（16）的相邻电绝缘部分（53a，53c）与开关（10）的接地平面（27）电隔离。

40. 发明授权

US09362608B1 Multichannel relay assembly with in line MEMS switches 有权
标题翻译：具有在线MEMS开关的多通道继电器组件
公开(公告)号：US09362608B1
公开(公告)日：2016-06-07
申请号：US14558990
申请日：2014-12-03
申请人： GENERAL ELECTRIC COMPANY
发明人： Yongjae Lee , Marco Francesco Aimi , Glenn Scott Claydon , Christopher Fred Keimel
IPC分类号： H01P5/18 , H01P1/10
CPC分类号： H01P1/127 , H01H59/0009 , H01H2001/0084
摘要： An ohmic RF MEMS relay includes a substrate with a capacitive coupling, Csub; two actuating elements electrically coupled in series, so as to define a channel, wherein the actuating elements are configured to be independently actuated or simultaneously operated. The actuating elements have their own capacitive coupling, Cgap; a midpoint on the channel is in electrical communication with the actuating elements; and an anchor mechanically coupled to the substrate and supporting at least one of the actuating elements. Also, an ohmic RF MEMS relay that includes an input port; a plurality of first MEMS switches that make up a first switching group in electrical communication with the input port, thereby defining a plurality of channels each leading from each of the MEMS switches; and at least one outlet port along each of the channels distal from the first switching group and in electrical communication with the input port.
摘要翻译：欧姆RF MEMS继电器包括具有电容耦合的衬底，Csub; 串联电耦合的两个致动元件，以便限定通道，其中所述致动元件构造成独立地致动或同时操作。致动元件具有自己的电容耦合，Cgap; 通道上的中点与致动元件电连通; 以及锚固件，其机械地联接到所述基板并且支撑所述致动元件中的至少一个。另外，包括输入端口的欧姆RF MEMS继电器; 多个第一MEMS开关，其构成与所述输入端口电连通的第一开关组，从而限定每个从所述MEMS开关导出的多个通道; 以及沿着远离第一开关组的每个通道的至少一个出口端口，并与输入端口电连通。

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