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    • 35. 发明申请
    • STATION AND METHOD FOR MEASURING PARTICLE CONTAMINATION OF A TRANSPORT CARRIER FOR CONVEYING AND STORING SEMICONDUCTOR SUBSTRATES AT ATMOSPHERIC PRESSURE
    • 用于测量运输运载体在大气压力下输送和储存半导体基板的颗粒污染的站和方法
    • US20150276572A1
    • 2015-10-01
    • US14441669
    • 2013-11-29
    • ADIXEN VACUUM PRODUCTS
    • Cindy ThovexJulien BounouarArnaud Favre
    • G01N15/10H01L21/673
    • G01N15/10G01N2015/1062H01L21/67389
    • The present invention relates to a station for measuring particle contamination of a transport carrier for conveying and storing semiconductor substrates at atmospheric pressure, said transport carrier comprising a rigid casing (2) containing an aperture and a removable door (3) allowing the aperture to be closed, the measuring station comprising: a controlled environment chamber (4) comprising at least one load port (8) capable of coupling, on the one hand, to the rigid casing (2), and on the other hand, to the door (3) of the transport carrier, in order to move the door (3) into the controlled environment chamber (4) and bring the interior of the rigid casing (2) into communication with the interior of the controlled environment chamber (4); and a measuring module (5) comprising a particle measuring unit (14) and a casing-measuring interface (16) configured to couple to the rigid transport carrier casing (2) coupled to the controlled environment chamber (4) in the place of the door (3), characterized in that said casing-measuring interface (16) comprises a measuring head protruding from a base of the casing-measuring interface, bearing a first sampling orifice (12) connected to the particle measuring unit (14), and at least two injecting nozzles (20) configured to direct a gas jet onto at least two separate locations on the rigid casing (2) coupled to the controlled environment chamber (4), the respective orientations of the injecting nozzles (20) being fixed relative to the coupled rigid casing (2). The invention also relates to a method for measuring particle contamination of a transport carrier for conveying and storing semiconductor substrates at atmospheric pressure
    • 本发明涉及一种用于测量用于在大气压下输送和存储半导体衬底的运输载体的颗粒污染的站,所述运输载体包括容纳孔的刚性壳体(2)和允许孔径为 关闭的测量站包括:受控环境室(4),其包括至少一个负载端口(8),所述负载端口能够一方面联接到刚性壳体(2),另一方面与所述门 为了将门(3)移动到受控环境室(4)中并使刚性壳体(2)的内部与受控环境室(4)的内部连通; 以及包括粒子测量单元(14)和壳体测量接口(16)的测量模块(5),所述测量接口(16)被配置为耦合到耦合到所述受控环境室(4)的所述刚性输送载体壳体(2) 门(3),其特征在于,所述壳体测量接口(16)包括从壳体测量接口的底部突出的测量头,承载连接到颗粒测量单元(14)的第一采样孔(12),以及 至少两个注射喷嘴(20),其构造成将气体射流引导到耦合到受控环境室(4)的刚性壳体(2)上的至少两个分开的位置,注射喷嘴(20)的相应定向相对固定 耦合到刚性壳体(2)。 本发明还涉及用于测量在大气压下输送和存储半导体衬底的运输载体的颗粒污染的方法