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    • 32. 发明授权
    • Method for making semiconductor device comprising a superlattice with upper portions extending above adjacent upper portions of source and drain regions
    • 一种用于制造半导体器件的方法,该半导体器件包括超晶格,上部部分在源极和漏极区域的相邻上部之上延伸
    • US07288457B2
    • 2007-10-30
    • US10940594
    • 2004-09-14
    • Scott A. Kreps
    • Scott A. Kreps
    • H01L21/336
    • H01L29/1054H01L21/823807H01L29/155H01L29/7833
    • A method for making a semiconductor device may include providing a semiconductor substrate and forming at least one MOSFET by forming spaced apart source and drain regions and a superlattice on the substrate so that the superlattice is between the source and drain regions. The superlattice may include a plurality of stacked groups of layers. The superlattice may have upper portions extending above adjacent upper portions of the source and drain regions, and lower portions contacting the source and drain regions so that a channel is defined in lower portions of the superlattice. Each group of layers of the superlattice may include a plurality of stacked base semiconductor monolayers defining a base semiconductor portion and an energy band-modifying layer thereon. The energy-band modifying layer may include at least one non-semiconductor monolayer constrained within a crystal lattice of adjacent base semiconductor. The method may further include forming a gate overlying the superlattice.
    • 制造半导体器件的方法可以包括提供半导体衬底并且通过在衬底上形成间隔开的源极和漏极区域和超晶格来形成至少一个MOSFET,使得超晶格位于源极和漏极区域之间。 超晶格可以包括多个堆叠的层组。 超晶格可以具有在源极和漏极区域的相邻上部之上延伸的上部,以及接触源极和漏极区域的下部,使得在超晶格的下部限定沟道。 超晶格的每组层可以包括在其上限定基极半导体部分和能带改性层的多个堆叠的基底半导体单层。 能带修改层可以包括约束在相邻基极半导体的晶格内的至少一个非半导体单层。 该方法还可以包括形成覆盖超晶格的栅极。
    • 35. 发明申请
    • Semiconductor Device Including a Channel with a Non-Semiconductor Layer Monolayer
    • 包括具有非半导体层单层的通道的半导体器件
    • US20070012910A1
    • 2007-01-18
    • US11457299
    • 2006-07-13
    • Robert MearsMarek HythaScott Kreps
    • Robert MearsMarek HythaScott Kreps
    • H01L29/06
    • H01L29/152H01L29/1054H01L29/78
    • A semiconductor device may include a semiconductor substrate, and at least one metal oxide semiconductor field-effect transistor (MOSFET) thereon. The MOSFET may include spaced-apart source and drain regions, a channel between the source and drain regions, and a gate overlying the channel defining an interface therewith. The gate may include a gate dielectric overlying the channel and a gate electrode overlying the gate dielectric. The channel may include a plurality of stacked base semiconductor monolayers, and at least one non-semiconductor monolayer constrained within a crystal lattice of adjacent base semiconductor monolayers. The at least one non-semiconductor monolayer may be positioned at depth of about 4-100 monolayers relative to the interface between the channel and the gate dielectric.
    • 半导体器件可以包括半导体衬底和至少一个金属氧化物半导体场效应晶体管(MOSFET)。 MOSFET可以包括间隔开的源极和漏极区域,源极和漏极区域之间的沟道,以及覆盖通道的栅极,其限定与其的界面。 栅极可以包括覆盖沟道的栅极电介质和覆盖栅极电介质的栅电极。 通道可以包括多个层叠的基底半导体单层,以及约束在相邻的基底半导体单层的晶格内的至少一个非半导体单层。 至少一个非半导体单层可以相对于沟道和栅极电介质之间的界面位于约4-100个单层的深度处。
    • 40. 发明授权
    • Method for making a semiconductor device comprising a superlattice channel vertically stepped above source and drain regions
    • 一种用于制造半导体器件的方法,该半导体器件包括在源极和漏极区域之上垂直阶梯形的超晶格沟道
    • US07018900B2
    • 2006-03-28
    • US10940418
    • 2004-09-14
    • Scott A. Kreps
    • Scott A. Kreps
    • H01L29/80H01L31/112
    • H01L29/1054H01L21/823807H01L29/155H01L29/7833
    • A method for making a semiconductor device may include providing a semiconductor substrate and forming at least one metal oxide semiconductor field-effect transistor (MOSFET). The at least one MOSFET may be formed by forming a superlattice channel including a plurality of stacked groups of layers on the semiconductor substrate. Each group of layers of the superlattice channel may include a plurality of stacked base semiconductor monolayers defining a base semiconductor portion and an energy band-modifying layer thereon. The energy-band modifying layer may include at least one non-semiconductor monolayer constrained within a crystal lattice of adjacent base semiconductor. The method may further include forming a gate overlying the superlattice channel, and forming source and drain regions in the semiconductor substrate on opposing sides of the superlattice channel so that the superlattice channel has upper surface portions vertically stepped above adjacent upper surface portions of the source and drain regions.
    • 制造半导体器件的方法可以包括提供半导体衬底并形成至少一个金属氧化物半导体场效应晶体管(MOSFET)。 可以通过在半导体衬底上形成包括多个层叠层的超晶格沟道来形成至少一个MOSFET。 超晶格通道的每组层可以包括在其上限定基极半导体部分和能带修饰层的多个层叠的基底半导体单层。 能带修改层可以包括约束在相邻基极半导体的晶格内的至少一个非半导体单层。 该方法还可以包括形成覆盖超晶格沟道的栅极,以及在超晶格沟道的相对侧上的半导体衬底中形成源极和漏极区域,使得超晶格沟道具有在源极的相邻上表面部分上方的上表面部分, 漏区。