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    • 31. 发明授权
    • System and method for a charged particle beam
    • 带电粒子束的系统和方法
    • US07825386B2
    • 2010-11-02
    • US11923012
    • 2007-10-24
    • Xuedong LiuXu ZhangJoe WangEdward TsengZhongwei Chen
    • Xuedong LiuXu ZhangJoe WangEdward TsengZhongwei Chen
    • H01J37/244
    • H01J37/145H01J37/28H01J2237/0475H01J2237/12H01J2237/14H01J2237/24485H01J2237/2807
    • System and method for charged particle beam. According an embodiment, the present invention provides a charged particle beam apparatus. The apparatus includes a charged particle source for generating a primary charged particle beam. The apparatus also includes at least one condenser lens for pre-focusing the primary charge particle beam. Furthermore, the apparatus includes a compound objective lens for forming the magnetic field and the electrostatic field to focus the primary charged particle beam onto a specimen in the charged particle beam path. The specimen includes a specimen surface. The compound objective lens includes a conical magnetic lens, an immersion magnetic lens, and an electrostatic lens, the conical magnetic lens including an upper pole piece, a shared pole piece being electrically insulated from the upper pole piece, and an excitation coil.
    • 带电粒子束的系统和方法。 根据实施例,本发明提供一种带电粒子束装置。 该装置包括用于产生初级带电粒子束的带电粒子源。 该装置还包括用于预聚焦初级充电粒子束的至少一个聚光透镜。 此外,该装置包括用于形成磁场的复合物镜和静电场,以将初级带电粒子束聚焦到带电粒子束路径中的样本上。 样品包括样品表面。 复合物镜包括锥形磁性透镜,浸没式磁透镜和静电透镜,该圆锥形磁性透镜包括上极片,与上极片电绝缘的共用极片和励磁线圈。