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    • 34. 发明授权
    • Humidity sensitive ceramics
    • 湿度敏感陶瓷
    • US4357426A
    • 1982-11-02
    • US332096
    • 1981-12-17
    • Michihiro MurataShinsei Okabe
    • Michihiro MurataShinsei Okabe
    • H01C7/00C04B35/00C04B35/01C04B35/46C04B35/462C04B35/468G01N27/12C04B35/50
    • C04B35/4682C04B35/01C04B35/462G01N27/121
    • A humidity sensitive ceramics comprises a sintered body consisting essentially of a semiconductive compound oxide with a perovskite structure and a compound oxide, said semiconductive compound oxide having a composition expressed by the general formula (I):A.sub.1-x A'.sub.x BO.sub.3-.delta.. . . (I)wherein A is at least one element selected from the group consisting of rare earth elements with atomic numbers 57 to 71, yttrium and hafnium, A' is at least one element selected from the group consisting of alkaline-earth metals, B is at least one element selected from the group consisting of transition elements with atomic numbers 23 to 30, x is a mole fraction and takes a value of the following range, 0.ltoreq.x.ltoreq.1, and .delta. is a non-stoichiometric parameter, said compound oxide having a composition expressed by the general formula (II):AMO.sub.3 . . . (II)wherein A is at least one element selected from the group consisting of alkaline earth elements, Zn, Cd, Fe, Co, Ni, Mn and Pb, M is at least one element selected from the group consisting of Ti, Zr, Hf and Sn.
    • 湿敏陶瓷包括基本上由具有钙钛矿结构的半导体复合氧化物和复合氧化物组成的烧结体,所述半导体复合氧化物具有由通式(I)表示的组成:A1-xA'xBO3-δ。 。 。 (I)其中A是选自原子序数57〜71的稀土元素,钇和铪中的至少一种元素,A'是选自碱土金属中的至少一种元素,B是 选自原子序数23至30的过渡元素中的至少一种元素,x是摩尔分数,并且取以下范围的值,0≤x≤1,δ是非化学计量的 参数,所述复合氧化物具有由通式(II)表示的组成:AMO 3。 。 。 (II)其中A是选自碱土元素,Zn,Cd,Fe,Co,Ni,Mn和Pb中的至少一种元素,M是选自Ti,Zr, Hf和Sn。
    • 36. 发明授权
    • Manufacturing method of semiconductor device
    • 半导体器件的制造方法
    • US07981804B2
    • 2011-07-19
    • US12364908
    • 2009-02-03
    • Michihiro Murata
    • Michihiro Murata
    • H01L21/302
    • H01L23/522H01L21/32135H01L2924/0002H01L2924/00
    • A method of forming a metal interconnection that has a favorable cross-sectional shape is provided without the fear of side etching, even in a sparse arrangement of metal interconnections. The method, the following structure is employed. A region for placing a dummy metal interconnection is provided close to a region in which a metal interconnection is formed. A trench is formed in the dummy metal interconnection region and a resist pattern for the metal interconnection is then formed, giving the resist above the trench a large surface area per unit area. The metal interconnection is subsequently formed by dry etching in which an organic component from the resist above the trench forms a solid sidewall protection film, permitting anisotropic etching. The metal interconnection can thus have a favorable cross-sectional shape.
    • 即使在金属互连的稀疏布置中,提供了形成具有良好横截面形状的金属互连的方法,而不用担心侧蚀。 该方法采用以下结构。 用于放置虚设金属互连的区域设置在形成金属互连的区域附近。 在虚拟金属互连区域中形成沟槽,然后形成用于金属互连的抗蚀剂图案,使得在沟槽上方的抗蚀剂具有大的每单位面积的表面积。 随后通过干蚀刻形成金属互连,其中来自沟槽上方的抗蚀剂的有机成分形成实心侧壁保护膜,从而允许各向异性蚀刻。 因此,金属互连可以具有有利的横截面形状。
    • 37. 发明申请
    • MANUFACTURING METHOD OF SEMICONDUCTOR DEVICE
    • 半导体器件的制造方法
    • US20090203210A1
    • 2009-08-13
    • US12364908
    • 2009-02-03
    • Michihiro Murata
    • Michihiro Murata
    • H01L21/467H01L23/52
    • H01L23/522H01L21/32135H01L2924/0002H01L2924/00
    • A method of forming a metal interconnection that has a favorable cross-sectional shape is provided without the fear of side etching, even in a sparse arrangement of metal interconnections. The method, the following structure is employed. A region for placing a dummy metal interconnection is provided close to a region in which a metal interconnection is formed. A trench is formed in the dummy metal interconnection region and a resist pattern for the metal interconnection is then formed, giving the resist above the trench a large surface area per unit area. The metal interconnection is subsequently formed by dry etching in which an organic component from the resist above the trench forms a solid sidewall protection film, permitting anisotropic etching. The metal interconnection can thus have a favorable cross-sectional shape.
    • 即使在金属互连的稀疏布置中,提供了形成具有良好横截面形状的金属互连的方法,而不用担心侧蚀。 该方法采用以下结构。 用于放置虚设金属互连的区域设置在形成金属互连的区域附近。 在虚拟金属互连区域中形成沟槽,然后形成用于金属互连的抗蚀剂图案,使得沟槽上方的抗蚀剂在每单位面积上具有大的表面积。 随后通过干蚀刻形成金属互连,其中来自沟槽上方的抗蚀剂的有机成分形成实心侧壁保护膜,从而允许各向异性蚀刻。 因此,金属互连可以具有有利的横截面形状。
    • 38. 发明授权
    • Liquidometer
    • 液体计
    • US5263370A
    • 1993-11-23
    • US692726
    • 1991-04-29
    • Michihiro MurataAkira KumadaKenji MatsuoShigeo Yamazaki
    • Michihiro MurataAkira KumadaKenji MatsuoShigeo Yamazaki
    • G01F11/28A61B5/20G01F3/38G01F13/00G01F23/24G01F3/00
    • G01F23/242A61B5/208G01F3/38
    • A liquidometer composed of a siphon for emitting a sample liquid stored in a reservoir and a liquid level sensor for sensing the level of the sample remained in the reservoir. The siphon further includes a pair of sensors for counting the number of emission thereof, while the liquid level sensor includes two rows of resistive film with a plurality of sensing elements embedded therein. Outside the liquidometer, there are provided a counter connected to the emission sensor, a level calculator connected to the liquid level sensor, and a calculator coupled to both. A gross amount of the sample liquid having been measured for a period of hours is obtained by adding together a count signal from the counter which represents the quantity of the sample liquid fully stored in the reservoir and a signal from the level counter which represents the liquid level of the remaining sample liquid. Moreover, variations in the quantity of the sample for a predetermined period is computed by the calculator in response to its internal clock.
    • 由用于发射存储在储存器中的样品液体的虹吸管和用于感测残留在储存器中的样品水平的液位传感器构成的液体计量器。 虹吸进一步包括一对用于计数其发射次数的传感器,而液位传感器包括两行具有嵌入其中的多个感测元件的电阻膜。 在液位计之外,设置有连接到发射传感器的计数器,连接到液位传感器的液位计算器和耦合到两者的计算器。 通过将来自计数器的计数信号加在一起,该计数信号代表完全储存在贮存器中的样品液体的量和表示液体的液位计数器的信号, 剩余样品液体的水平。 此外,由计算器响应于其内部时钟计算预定时段内的样本量的变化。
    • 39. 发明授权
    • Sensor for sensing the presence of electrolyte solution
    • 用于感测电解质溶液的传感器
    • US5187444A
    • 1993-02-16
    • US383412
    • 1989-07-20
    • Akira KumadaEiichi TakataMichihiro Murata
    • Akira KumadaEiichi TakataMichihiro Murata
    • G01D5/24G01F23/26G01N27/22G01P13/00G01V3/08
    • G01D5/24G01F23/265G01F23/268G01N27/221G01P13/0006
    • A liquid sensor for detecting, in a non-contact manner, whether an electrolyte solution is flowing through a pipeline. A pair of electrodes, on which an AC voltage is impressed, are mounted on the outer surface of a pipeline formed of a material having a high dielectric constant, such as a ceramic, and a discrimination between the presence and the absence of the electrolyte solution in the pipeline is made based on variations in capacitance between the electrodes. In the presence of the electrolyte solution flowing through the pipeline, the capacitance between the electrodes is high because of the conductivity of the electrolyte solution. In the absence of the electrolyte solution flowing through the pipeline, the capacitance is determined by air and is, therefore, low. Since the electrodes are maintained in a non-contact relation with the electrolyte solution, degradation of characteristics due to corrosion is obviated. The absence of intermediates which, if present, would cause a lowering in detection sensitivity ensures an extremely high accuracy of detection.
    • 一种用于以非接触的方式检测电解质溶液是否流过管道的液体传感器。 在其上施加有交流电压的一对电极安装在由具有高介电常数的材料(例如陶瓷)形成的管道的外表面上,并且鉴别电解质溶液的存在和不存在 在管道中基于电极之间的电容的变化进行。 在流过管道的电解质溶液的存在下,由于电解质溶液的导电性,电极之间的电容很高。 在没有电解质溶液流过管道的情况下,电容由空气确定,因此是低的。 由于电极与电解质溶液保持非接触关系,所以消除了由于腐蚀引起的特性劣化。 如果不存在中间体(如果存在)将导致检测灵敏度降低,则确保极高的检测精度。