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    • 34. 发明授权
    • Liquid-phase growth method, liquid-phase growth apparatus, and solar cell
    • 液相生长方法,液相生长装置和太阳能电池
    • US06566277B1
    • 2003-05-20
    • US09664340
    • 2000-09-18
    • Katsumi NakagawaShoji Nishida
    • Katsumi NakagawaShoji Nishida
    • H01L2130
    • C30B19/06C30B19/02C30B29/06H01L21/02381H01L21/0245H01L21/02532H01L21/02573H01L21/02625H01L21/02628
    • The present invention provides a method for producing a semiconductor substrate which comprises the steps of growing a first semiconductor layer on a substrate in liquid phase at a properly controlled temperature for eliminating defects and growing a second semiconductor layer on the first semiconductor layer in liquid phase at a higher temperature; a solar cell produced by a method comprising a step of anodizing the surface of the first and second layer side of the semiconductor substrate produced by the liquid-phase growth method; a liquid-phase growth apparatus comprising means for storing a melt, means for changing the temperature of the stored melt, and means for bringing an oxygen-containing substrate into contact with the melt, wherein a substrate is brought into contact with the melt at a temperature so as to suppress the stacking faults contained in the semiconductor layer grown on the surface of the substrate.
    • 本发明提供一种制造半导体衬底的方法,其包括以下步骤:在适当控制的温度下在液相中在衬底上生长第一半导体层,以消除缺陷,并在液相中在第一半导体层上生长第二半导体层 更高的温度; 通过包括通过液相生长法生产的半导体衬底的第一层和第二层的表面进行阳极氧化的步骤的方法制造的太阳能电池; 液相生长装置,包括用于储存熔体的装置,用于改变所储存的熔体温度的装置,以及使含氧基材与熔体接触的装置,其中使衬底与熔体接触, 以抑制在衬底表面上生长的半导体层中包含的堆垛层错。
    • 35. 发明授权
    • Liquid-phase growth apparatus and method
    • 液相生长装置及方法
    • US07615115B2
    • 2009-11-10
    • US12168464
    • 2008-07-07
    • Masaki MizutaniKatsumi NakagawaTakehito YoshinoShoji Nishida
    • Masaki MizutaniKatsumi NakagawaTakehito YoshinoShoji Nishida
    • C30B19/00
    • C30B19/068C30B19/02C30B29/06Y10T117/10Y10T117/1024
    • A liquid-phase growth apparatus for growing a crystal on a substrate includes a crucible containing a solution that contains a raw material for forming the crystal, and a substrate holder for vertically holding the substrate. The substrate holder includes connectors, a receiving component, and a push component. The receiving component and the push component are opposite to each other and are connected by the connectors. The push component holds an upper portion of the substrate while the receiving component holds a lower portion of the substrate. The substrate holder containing the vertically held substrate is dipped into the solution. The receiving component ascends with buoyancy in the solution contained in the crucible, so that the substrate is now held securely and prevented from cracking due to thermal expansion.
    • 用于在基板上生长晶体的液相生长装置包括含有包含用于形成晶体的原料的溶液的坩埚和用于垂直保持基板的基板保持器。 衬底保持器包括连接器,接收部件和推动部件。 接收部件和推动部件彼此相对并且通过连接器连接。 推动部件保持基板的上部,而接收部件保持基板的下部。 将含有垂直保持的基板的基板保持器浸入溶液中。 接收部件在包含在坩埚中的溶液中浮力上升,使得基板现在被牢固地保持并且防止由于热膨胀而开裂。