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31. 发明授权

US5867890A Method for making a thin film merged magnetoresistive read/inductive write head having a pedestal pole tip 失效
标题翻译：用于制造具有基座极尖的薄膜合并磁阻读/写写头的方法
公开(公告)号：US5867890A
公开(公告)日：1999-02-09
申请号：US992026
申请日：1997-12-17
申请人： Richard Hsiao , Cherngye Hwang , Neil Leslie Robertson , Hugo Alberto Santini
发明人： Richard Hsiao , Cherngye Hwang , Neil Leslie Robertson , Hugo Alberto Santini
IPC分类号： G11B5/31 , G11B5/39 , G11B5/42
CPC分类号： G11B5/3967 , G11B5/3116 , G11B5/3133 , G11B5/3163 , Y10T29/49044 , Y10T29/49046 , Y10T29/49052
摘要： A method is described for making a merged thin film read/write head where a common layer serves as both a magnetic shield for the magentoresistive read element and the first pole piece for the inductive write element, and where the first pole piece thus includes a pedestal pole tip portion that extends up from the first pole piece layer. During fabrication a nonmagnetic spacer layer is deposited over the second pole tip and the gap layer, and then reactive ion etching (RIE) removes the spacer layer from the top of the second pole tip and the gap layer not beneath the second pole piece, but leaves the spacer layer on the sidewalls of the second pole tip. The ion bombardment of the RIE process is perpendicular to the gap layer and is continued after removal of the spacer layer to also remove the gap layer in the region not beneath the second pole piece so that the first pole piece layer is exposed. The RIE uses a gas that is more reactive with the gap material than the material of the second pole tip so that the top surface of the second pole tip is not substantially removed during etching of the gap layer. Next, ion milling removes the material from the layer of the first pole piece to form a first pedestal pole tip beneath the gap. Material ejected from the first pole piece layer during ion milling that gets redeposited on the second pole piece is prevented from contacting the sidewalls of the second pole tip because of the spacer layer.
摘要翻译：描述了一种用于制造合并的薄膜读/写头的方法，其中公共层用作磁阻读取元件的磁屏蔽和用于感应写元件的第一极片，并且其中第一极片因此包括基座极尖部分，其从第一极片层向上延伸。在制造期间，在第二极尖和间隙层上沉积非磁性间隔层，然后反应离子蚀刻（RIE）从第二极尖顶部和第二极片下面的间隙层去除间隔层，但是将间隔层留在第二极尖的侧壁上。 RIE工艺的离子轰击垂直于间隙层，并且在去除间隔层之后继续移除在第二极靴下方的区域中的间隙层，以使第一极片层露出。 RIE使用比间隙材料更能反应的气体，而不是第二极尖的材料，使得在蚀刻间隙层期间第二极尖的顶表面基本上不被去除。接下来，离子铣削从第一极靴的层移除材料以在间隙下方形成第一基座极尖。由于间隔层，防止了离子研磨期间从第一极片层排出的材料再次沉积在第二极片上与第二极尖端的侧壁接触。

32. 发明授权

US5268806A Magnetoresistive transducer having tantalum lead conductors 失效
标题翻译：具有钽引线导体的磁阻换能器
公开(公告)号：US5268806A
公开(公告)日：1993-12-07
申请号：US823522
申请日：1992-01-21
申请人： Wolfgang M. Goubau , James K. Howard , Hung-Chang W. Huang , Cherngye Hwang , Robert O. Schwenker , James C. Uy
发明人： Wolfgang M. Goubau , James K. Howard , Hung-Chang W. Huang , Cherngye Hwang , Robert O. Schwenker , James C. Uy
IPC分类号： G01R33/09 , G11B5/39 , G11B5/127
CPC分类号： B82Y25/00 , G01R33/093 , G11B5/3903
摘要： A magnetoresistive (MR) sensor having electrically conductive lead structures which are in electrical contact with the MR element at spaced positions. The lead structures comprise a thin film layer of body-centered-cubic tantalum which is separated from the MR element by a thin film seed layer formed of a material taken from the group consisting of TiW, TaW, Cr and W.
摘要翻译：具有导电引线结构的磁阻（MR）传感器，其在间隔位置处与MR元件电接触。引线结构包括通过由从TiW，TaW，Cr和W组成的组中取出的材料形成的薄膜种子层与MR元件分离的体心立方体钽的薄膜层。

33. 发明授权

US5258884A Magnetoresistive read transducer containing a titanium and tungsten alloy spacer layer 失效
标题翻译：含有钛和钨合金间隔层的磁阻读取传感器
公开(公告)号：US5258884A
公开(公告)日：1993-11-02
申请号：US779419
申请日：1991-10-17
申请人： James K. Howard , Cherngye Hwang
发明人： James K. Howard , Cherngye Hwang
IPC分类号： G11B5/39
CPC分类号： G11B5/399
摘要： A magnetoresistive (MR) read transducer has a thin film MR layer of ferromagnetic material and a nonmagnetic spacer layer in contact with the MR layer. The thin film spacer layer comprises an alloy of titanium (Ti) and tungsten (W) having a high resistivity. A thin film of soft magnetic material is deposited in contact with the nonmagnetic spacer layer so that the soft magnetic material is positioned parallel to, but spaced from, the MR layer. A feature of the invention is that the resistivity of the nonmagnetic spacer layer can be a specific value selected from a broad range of resistivity values by selecting the thickness, the Ti content, and/or the nitrogen content of the nonmagnetic spacer layer.
摘要翻译：磁阻（MR）读取传感器具有铁磁材料的薄膜MR层和与MR层接触的非磁性间隔层。薄膜间隔层包括具有高电阻率的钛（Ti）和钨（W）的合金。沉积与非磁性间隔层接触的软磁性材料的薄膜，使得软磁性材料平行于MR层定位。本发明的特征在于，通过选择非磁性间隔层的厚度，Ti含量和/或氮含量，非磁性间隔层的电阻率可以是从广泛的电阻率值中选择的特定值。

34. 发明授权

US08679733B2 Patterning process for small devices 失效
标题翻译：小型设备的图案化处理
公开(公告)号：US08679733B2
公开(公告)日：2014-03-25
申请号：US13009758
申请日：2011-01-19
申请人： Robert G. Biskeborn , Cherngye Hwang , Calvin S. Lo
发明人： Robert G. Biskeborn , Cherngye Hwang , Calvin S. Lo
IPC分类号： G03F7/20
CPC分类号： G03F1/54 , G03F1/50 , G03F7/703 , G11B5/1871 , G11B5/255 , G11B5/3106 , G11B5/60
摘要： A method according to one embodiment includes applying a photoresist to a substrate; exposing the photoresist such that a local intensity of radiation applied to the photoresist at each pixel thereof is a function of a mathematically-generated representation of a target surface shape; developing the resist; and performing a subtractive process on the developed photoresist and the substrate for creating the target surface shape on the substrate. A method according to another embodiment includes applying a photoresist to a substrate; patterning the photoresist using a machine-readable profile; and performing a subtractive process to transfer the profile onto the substrate.
摘要翻译：根据一个实施方案的方法包括将光致抗蚀剂施加到基底上; 暴露光致抗蚀剂，使得在其每个像素处施加到光致抗蚀剂的局部辐射强度是目标表面形状的数学生成表示的函数; 开发抗蚀剂; 以及在显影的光致抗蚀剂和基板上进行减影处理，以在基板上产生目标表面形状。根据另一实施例的方法包括将光致抗蚀剂施加到基底; 使用机器可读轮廓图案化光致抗蚀剂; 以及执行减去处理以将轮廓转移到基底上。

35. 发明授权

US08526137B2 Head comprising a crystalline alumina layer 有权
标题翻译：头包括结晶氧化铝层
公开(公告)号：US08526137B2
公开(公告)日：2013-09-03
申请号：US12761394
申请日：2010-04-16
申请人： Robert G. Biskeborn , Cherngye Hwang , Calvin S. Lo , Andrew C. Ting
发明人： Robert G. Biskeborn , Cherngye Hwang , Calvin S. Lo , Andrew C. Ting
IPC分类号： G11B5/187
CPC分类号： G11B5/255 , G11B5/127 , G11B5/3106 , G11B5/3133
摘要： A magnetic head produced at low ambient temperatures that comprise a crystalline alumina layer for increasing the durability of the head is provided. According to one embodiment, a magnetic head for at least one of reading and writing data on to a magnetic data storage media. The magnetic head comprises a substrate, an at least partially crystalline alumina layer formed on the substrate, at least one of a write transducer and a read transducer formed on the substrate, and a surface for engaging the magnetic data storage media. In another embodiment, a method for forming an at least partially crystalline alumina film. The method comprises providing a substrate, and depositing alumina onto the substrate at an ambient temperature to form the at least partially crystalline alumina film.
摘要翻译：提供了一种在低环境温度下产生的包含结晶氧化铝层以提高头部耐用性的磁头。根据一个实施例，一种用于读取和写入数据到磁数据存储介质中的至少一个的磁头。磁头包括衬底，形成在衬底上的至少部分结晶的氧化铝层，形成在衬底上的写换能器和读换能器中的至少一个以及用于接合磁数据存储介质的表面。在另一个实施方案中，形成至少部分结晶的氧化铝膜的方法。该方法包括在环境温度下提供衬底和将氧化铝沉积到衬底上以形成至少部分结晶的氧化铝膜。

36. 发明授权

US08444865B2 Magnetic recording head coating and method 失效
标题翻译：磁记录头涂层及方法
公开(公告)号：US08444865B2
公开(公告)日：2013-05-21
申请号：US12193107
申请日：2008-08-18
申请人： Robert G. Biskeborn , Calvin S. Lo , Gary M. Decad , Cherngye Hwang
发明人： Robert G. Biskeborn , Calvin S. Lo , Gary M. Decad , Cherngye Hwang
IPC分类号： G11B5/3163
CPC分类号： G11B5/3106 , G11B5/3169
摘要： A method for encapsulating a magnetic recording head including coating at least a portion of a magnetic recording head containing a recording gap with a first layer of at least one coating material, including silicon nitride, the first layer of at least one coating material having a first removal rate, coating at least a portion of the magnetic recording head containing a recording gap and coated with the first layer of at least one coating material with a second layer of at least one coating material, including aluminum oxide, the second layer of at least one coating material having a second removal rate higher than the first removal rate, and removing at least a portion of the second layer of at least one coating material via a removal process, including chemical-mechanical polishing, lapping, or vacuum processing to at least partially planarize the surface of the recording gap.
摘要翻译：一种用于封装磁记录头的方法，包括将包含记录间隙的磁记录头的至少一部分涂覆至少一层包括氮化硅的涂层材料的第一层，至少一层涂料的第一层具有第一层涂覆至少一部分包含记录间隙的磁记录头并涂覆有第一层至少一种涂层材料的第二层至少一层包括氧化铝的涂层材料，至少第二层一个涂层材料具有高于第一去除速率的第二去除速率，以及通过去除工艺去除至少一部分至少一种涂层材料的第二层，包括化学机械抛光，研磨或真空处理至少部分平面化记录间隙的表面。

37. 发明申请

US20120063034A1 CURRENT-PERPENDICULAR-TO-THE-PLANE (CPP) MAGNETORESISTIVE (MR) SENSOR WITH IMPROVED INSULATING STRUCTURE 审中-公开
标题翻译：具有改进的绝缘结构的电流 - 平面（CPP）磁传感器（MR）传感器
公开(公告)号：US20120063034A1
公开(公告)日：2012-03-15
申请号：US12880953
申请日：2010-09-13
申请人： Yimin Hsu , Cherngye Hwang , Simon Huangchung Liao , Stefan Maat
发明人： Yimin Hsu , Cherngye Hwang , Simon Huangchung Liao , Stefan Maat
IPC分类号： G11B5/127
CPC分类号： G11B5/3909 , B82Y10/00 , B82Y25/00 , G01R33/098 , G11B5/3932 , G11B2005/3996
摘要： A current-perpendicular-to-the-plane (CPP) magnetoresistive (MR) sensor, like a CPP MR disk drive read head, has an improved insulating structure surrounding the stack of layers making up the sensor. The sensor has a first silicon nitride layer with a thickness between about 1 and 5 nm on the side edges of the sensor and on regions of the bottom shield layer adjacent the sensor below the sensor's ferromagnetic biasing layer. The sensor has a second silicon nitride layer with a thickness between about 2 and 5 nm on the back edge of the sensor and on the region of the bottom shield layer adjacent the sensor back edge, and a substantially thicker metal oxide layer on the second silicon nitride layer. The insulating structure prevents edge damage at the perimeter of the sensor and thus allows for the fabrication of CPP MR read heads with substantially smaller dimensions.
摘要翻译：电流垂直平面（CPP）磁阻（MR）传感器，如CPP MR磁盘驱动器读头，具有围绕构成传感器的层叠层的改进的绝缘结构。传感器具有在传感器的侧边缘上的厚度在约1和5nm之间的第一氮化硅层以及与传感器的铁磁偏置层下方的传感器相邻的底部屏蔽层的区域。传感器具有在传感器的后边缘上和厚度在约2和5nm之间的第二氮化硅层，并且在与底部屏蔽层相邻的传感器后边缘的区域上，以及在第二硅上的基本上较厚的金属氧化物层氮化物层。绝缘结构防止传感器周边的边缘损坏，从而允许制造具有基本较小尺寸的CPP MR读取头。

38. 发明授权

US07741003B2 Photoresist transfer pads 失效
标题翻译：光阻传输垫
公开(公告)号：US07741003B2
公开(公告)日：2010-06-22
申请号：US10814933
申请日：2004-03-30
申请人： Nicholas I. Buchan , Cherngye Hwang , Timothy Reiley , Li Zheng
发明人： Nicholas I. Buchan , Cherngye Hwang , Timothy Reiley , Li Zheng
IPC分类号： G03C1/00 , G11B5/60
CPC分类号： G11B5/3163 , G11B5/313
摘要： A resist transfer pad and method of use are described for forming a uniform photoresist on the surface of a workpiece such as a slider. The resist transfer pad includes a layer of cured polydimethylsiloxane (PDMS) on a cushioning layer, e.g. silicone rubber, and an optional stiffening layer. The sliders are preferably mounted on a carrier or pallet. In one preferred embodiment the loaded resist transfer pads are applied to the slider surface by roll lamination where the loaded resist transfer pad is transported by a roller system using a cover-tape and pressed against the slider surface. Subsequently the cover-tape and the resist transfer pad are lifted off and the photoresist remains on the transducer. An alternative embodiment uses a vacuum, piston laminator to press the loaded resist transfer pad onto the surface of the transducer.
摘要翻译：描述了用于在诸如滑块的工件的表面上形成均匀光致抗蚀剂的抗蚀剂转移垫和使用方法。抗蚀剂传递垫包括缓冲层上固化的聚二甲基硅氧烷（PDMS）层，硅橡胶和可选的加强层。滑块优选地安装在托架或托盘上。在一个优选实施例中，负载的抗蚀剂转移垫通过辊压层施加到滑块表面，其中负载的阻挡层传送垫通过辊系统使用覆盖带传送并压靠在滑块表面上。随后，覆盖带和抗蚀剂传递垫被提起并且光致抗蚀剂保留在换能器上。替代实施例使用真空活塞层压机将负载的抗蚀剂转移垫压到换能器的表面上。

39. 发明申请

US20100047628A1 METHODS OF ION MILLING FOR MAGNETIC HEADS AND SYSTEMS FORMED THEREBY 有权
标题翻译：用于磁头和离子研磨的方法
公开(公告)号：US20100047628A1
公开(公告)日：2010-02-25
申请号：US12193834
申请日：2008-08-19
申请人： Robert Glenn Biskeborn , Cherngye Hwang , Calvin Shyhjong Lo , Andrew C. Ting
发明人： Robert Glenn Biskeborn , Cherngye Hwang , Calvin Shyhjong Lo , Andrew C. Ting
IPC分类号： G11B5/33 , C23C14/00
CPC分类号： G11B5/00826 , G11B5/3116 , G11B5/3163
摘要： A method according to one embodiment includes ion milling at a first angle of greater than about 25 degrees from normal relative to a media facing side of a thin film region of a magnetic head or component thereof for recessing the thin film region at about a constant rate for films of interest of the thin film region, planes of deposition of the films being oriented about perpendicular to the media facing side; and ion milling or plasma sputtering at a second angle of less than about 25 degrees from normal relative to the media facing side of the thin film region for recessing magnetic films therein faster than insulating films therein, the second angle being smaller than the first angle.
摘要翻译：根据一个实施例的方法包括离开正常相对于磁头或其部件的薄膜区域的介质相对侧大于约25度的第一角度的离子铣削，以以恒定速率凹陷薄膜区域对于薄膜区域感兴趣的薄膜，膜的沉积平面定向成垂直于介质面侧; 以及相对于薄膜区域相对于介质相对侧的法线小于约25度的第二角度的离子铣削或等离子体溅射，用于比其中的绝缘膜更快地使磁性膜凹陷，第二角度小于第一角度。

40. 发明申请

US20100027163A1 MAGNETIC RECORDING HEAD HAVING REINFORCING ISLANDS 失效
标题翻译：具有加固岛的磁记录头
公开(公告)号：US20100027163A1
公开(公告)日：2010-02-04
申请号：US12184357
申请日：2008-08-01
申请人： Robert G. Biskeborn , Calvin S. Lo , Cherngye Hwang
发明人： Robert G. Biskeborn , Calvin S. Lo , Cherngye Hwang
IPC分类号： G11B5/127
CPC分类号： G11B5/3106 , G11B5/3163 , G11B5/3169 , Y10T29/49039 , Y10T29/49041 , Y10T29/49048
摘要： A method for protecting a thin film structure including fabricating a plurality of island structures in a recording gap of a magnetic recording head, exposing a substantial portion of the plurality of island structures by removing at least a portion of the surrounding recording gap material via at least one etching process, including ion milling, coating the magnetic recording head containing the plurality of island structures with a coating material, including silicon nitride or aluminum oxide, and removing at least a portion of the coating material via a removal process, including chemical-mechanical polishing or lapping, to expose an uppermost region of at least a portion of said plurality of island structures.
摘要翻译：一种用于保护薄膜结构的方法，包括在磁记录头的记录间隙中制造多个岛状结构，通过至少除去周围的记录间隙材料的至少一部分而暴露多个岛结构的大部分一个蚀刻工艺，包括离子铣削，用包括氮化硅或氧化铝的涂层材料涂覆包含多个岛状结构的磁记录头，以及通过去除工艺去除至少一部分涂层材料，包括化学机械抛光或研磨，以暴露所述多个岛结构的至少一部分的最上部区域。

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