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    • 35. 发明授权
    • Variable energy radio-frequency type charged particle accelerator
    • 可变能量射频型带电粒子加速器
    • US5801488A
    • 1998-09-01
    • US608738
    • 1996-02-29
    • Hiroshi Fujisawa
    • Hiroshi Fujisawa
    • H05H7/02H05H9/00
    • H05H7/02H05H9/00
    • A radio-frequency type charged particle accelerator includes a first Radio Frequency Quadrupole (RFQ) accelerator, a second RFQ accelerator and a rear stage Rf accelerator. The first RFQ accelerator has quadrupole electrodes positioned along a traveling path of a charged particle beam and bunches and accelerates the charged particle beam by receiving a radio-frequency power from a radio-frequency power source and resonating. The rear stage RF accelerator is disposed in a rear stage of the first RFQ accelerator and changes the energy of the charged particle beam by receiving the radio-frequency power from the radio-frequency power source and resonating. The second RFQ accelerator is disposed between the first RFQ accelerator, has quadrupole electrodes positioned along the traveling path of the charged particle beam and normally accelerates the charged particle beam by receiving a radio-frequency power from the radio-frequency power source and resonating. The accelerator is switched between an accelerating mode and a passing-through mode.
    • 射频型带电粒子加速器包括第一射频四极杆(RFQ)加速器,第二RFQ加速器和后级Rf加速器。 第一RFQ加速器具有沿着带电粒子束的行进路径定位的四极电极,并且通过从射频电源接收射频功率并谐振来加速带电粒子束。 后级RF加速器设置在第一RFQ加速器的后级中,通过从射频电源接收射频功率并谐振来改变带电粒子束的能量。 第二RFQ加速器设置在第一RFQ加速器之间,具有沿着带电粒子束的行进路径定位的四极电极,并且通过从射频电源接收射频功率并进行谐振来正常加速带电粒子束。 加速器在加速模式和通过模式之间切换。
    • 40. 发明申请
    • METHOD FOR INSPECTING ELECTROSTATIC CHUCK, AND ELECTROSTATIC CHUCK APPARATUS
    • 检查静电卡盘和静电卡盘装置的方法
    • US20110199093A1
    • 2011-08-18
    • US13124988
    • 2009-10-19
    • Hiroshi Fujisawa
    • Hiroshi Fujisawa
    • G01R31/02
    • H01L21/6833B23Q17/002
    • Provided are a method and an apparatus capable of determining which attracting electrode in an electrostatic chuck of bipolar type has a capacitance abnormality occurring in its vicinity. In this inspection method, a positive auxiliary electrode (12) and a negative auxiliary electrode (14) are provided in a dielectric body (6) of an electrostatic chuck (4), and are connected to a ground potential portion. Then, transient currents (I1 to I4) flowing through the attracting electrodes (8 and 10) and the auxiliary electrodes (12 and 14) are measured when direct current voltages (+V and −V) are applied or cease to be applied from a chuck power supply (26) to the electrostatic chuck (4) under a state in which an object (2) to be attracted is not mounted, and a transient current (I5) (=I1−I2 or I3−I4) is calculated. The obtained transient currents are compared to respective predetermined reference values, to thereby determine a capacitance abnormality in the electrostatic chuck (4).
    • 提供一种能够确定双极型静电卡盘中的哪个吸引电极在其附近发生电容异常的方法和装置。 在该检查方法中,在静电卡盘(4)的电介质体(6)中设置正极辅助电极(12)和负极辅助电极(14),并与地电位部分连接。 然后,当直流电压(+ V和-V)被施加或停止施加时,测量流过吸引电极(8和10)和辅助电极(12和14)的瞬态电流(I1至I4) 在没有安装待吸引物体2的状态下,将卡盘电源(26)配置到静电卡盘(4),计算出瞬时电流(I5)(= I1-I2或I3-I4)。 将获得的瞬态电流与相应的预定参考值进行比较,从而确定静电卡盘(4)中的电容异常。