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31. 发明授权

US09772317B2 Method for operating a portable electronic device 有权
公开(公告)号：US09772317B2
公开(公告)日：2017-09-26
申请号：US13558436
申请日：2012-07-26
申请人： Felix Mayer , Lukas Bürgi , Dominic Böni
发明人： Felix Mayer , Lukas Bürgi , Dominic Böni
IPC分类号： G01N33/00
CPC分类号： G01N33/0006
摘要： In a method for operating a portable electronic device comprising a chemical sensor, at least one reference reading is taken by the chemical sensor at least one predetermined point in time. At least one compensation value is determined based on at least one reference value wherein each reference value is derived from a result of a corresponding reference reading. A result of an operational reading of the chemical sensor is modified by the at least one compensation value.

32. 发明授权

US08815623B2 Method for manufacturing an intergrated pressure sensor 有权
标题翻译：集成压力传感器的制造方法
公开(公告)号：US08815623B2
公开(公告)日：2014-08-26
申请号：US12462582
申请日：2009-08-05
申请人： Johannes Bühler , Felix Mayer , Matthias Streiff , René Hummel , Robert Sunier
发明人： Johannes Bühler , Felix Mayer , Matthias Streiff , René Hummel , Robert Sunier
IPC分类号： H01L21/78 , H01L21/02 , B81C1/00 , G01L9/00
CPC分类号： G01L9/0073 , B81B2201/0264 , B81B2203/0127 , B81B2203/0315 , B81B2203/0353 , B81C1/00087 , B81C1/00801 , B81C2201/0143 , H01L2224/48091 , H01L2224/48247 , H01L2224/73265 , H01L2924/00014
摘要： A differential pressure sensor comprises a membrane arranged over a cavity on a semiconductor substrate. A lid layer is arranged at the top side of the device and comprises an access opening for providing access to the top side of the membrane. A channel extends laterally from the cavity and intersects with a bore. The bore is formed by laser drilling from the bottom side of the substrate and provides access to the bottom side of the membrane. The bore extends all through the substrate and optionally into the lid layer.
摘要翻译：差压传感器包括布置在半导体衬底上的腔上的膜。盖层布置在装置的顶侧，并且包括用于提供进入膜的顶侧的进入开口。通道从腔体横向延伸并与孔相交。该孔通过从基底的底侧的激光钻孔形成并且提供进入膜的底侧的通路。孔贯穿基底并任选地插入盖层。

33. 发明授权

US08408050B2 Method for measuring a fluid composition parameter by means of a flow sensor 有权
标题翻译：通过流量传感器测量流体成分参数的方法
公开(公告)号：US08408050B2
公开(公告)日：2013-04-02
申请号：US12583747
申请日：2009-08-25
申请人： Felix Mayer , Mark Hornung , Samuel Wehrli
发明人： Felix Mayer , Mark Hornung , Samuel Wehrli
IPC分类号： G01N25/00 , G01F1/68
CPC分类号： G01F1/692 , G01N27/18
摘要： The flow of a fluid of unknown composition is measured by leading the fluid over a first temperature sensor, a heater and a second temperature sensor. The temperature difference DTP between the temperature sensors is measured, as well as the temperature T of at least one of them. In addition, calibration data is used to store the temperature Tref of a known reference fluid. The offset T−Tref at a given temperature difference DTP is a direct measure of the composition of the fluid and allows to retrieve any parameter depending on the same.
摘要翻译：通过使流体通过第一温度传感器，加热器和第二温度传感器来测量未知组成的流体的流动。测量温度传感器之间的温度差DTP以及它们中的至少一个的温度T. 此外，校准数据用于存储已知参考流体的温度Tref。在给定温度差DTP处的偏移T-Tref是流体组成的直接测量，并允许根据相同的方式检索任何参数。

34. 发明授权

US07955645B2 Method for applying selectively a layer to a structured substrate by the usage of a temperature gradient in the substrate 有权
标题翻译：通过在衬底中使用温度梯度将层选择性地施加到结构化衬底的方法
公开(公告)号：US07955645B2
公开(公告)日：2011-06-07
申请号：US11791549
申请日：2005-11-23
申请人： Felix Mayer , Christoph Kleinlogel
发明人： Felix Mayer , Christoph Kleinlogel
IPC分类号： B05D1/26 , H01L21/283
CPC分类号： C23C16/481 , B81B2201/0214 , B81B2203/0127 , B81C1/00373 , C23C16/04 , C23C16/407 , C23C16/453 , C23C16/46 , G01N27/128
摘要： A semiconductor wafer (10) is structured such that fine structures (3), such as membranes, bridges or tongues, with a thickness d
摘要翻译：半导体晶片（10）被构造为形成具有厚度d << D的精细结构（如膜，桥或舌），其中D表示半导体晶片（10）的厚度。然后施加所需材料的颗粒。在半导体晶片（10）中产生时间或空间温度梯度，例如。通过逐步加热。在这样的加热过程中，由于微细结构具有比每个面积小的热容量并且不能快速地传递热量，所以细微结构比其余的晶片更加快速地变热，变得更热。以这种方式，可以将精细结构加热到允许颗粒烧结的温度。为了涂覆，使半导体晶片（10）进入反应器（11）。提供金属的前体化合物并将其进料到反应器（11），在反应器（11）中发生反应，在该反应过程中金属被转化成最终的化合物，并以颗粒的形式沉积在半导体晶片（10）上。

35. 发明授权

US07900496B2 Method and device for calibration sensors 有权
标题翻译：校准传感器的方法和装置
公开(公告)号：US07900496B2
公开(公告)日：2011-03-08
申请号：US11899659
申请日：2007-09-07
申请人： Felix Mayer , Mathias Deschler , Urs Rothacher , René Hummel
发明人： Felix Mayer , Mathias Deschler , Urs Rothacher , René Hummel
IPC分类号： G01N21/00
CPC分类号： G01N33/54373 , G01N33/0006
摘要： A method and device are disclosed for calibrating sensors, which sensors are arranged on semiconductor chips and are e.g. to be used for detecting a substance in a fluid. The sensors are calibrated while they are still assembled on a semiconductor wafer by exposing the wafer to a calibration fluid containing a known amount of the substance to be measured. Hence, rather than first cutting the wafer, the sensors are calibrated at an early stage. For this purpose, they are placed on a chuck below a lid. The calibration fluid with known parameters is introduced between the wafer and the lid. This allows to test and calibrate a large number of sensors quickly.
摘要翻译：公开了用于校准传感器的方法和装置，传感器布置在半导体芯片上，用于检测流体中的物质。传感器在通过将晶片暴露于含有已知量的待测量物质的校准流体的同时将其组装在半导体晶片上时进行校准。因此，传感器不是首先切割晶片，而是在早期进行校准。为此，它们被放置在盖子下方的卡盘上。具有已知参数的校准流体被引入晶片和盖子之间。这允许快速测试和校准大量传感器。

36. 发明申请

US20100310343A1 Method and apparatus for processing individual sensor devices 有权
标题翻译：用于处理各个传感器装置的方法和装置
公开(公告)号：US20100310343A1
公开(公告)日：2010-12-09
申请号：US12798890
申请日：2010-04-13
申请人： Felix Mayer , Markus Graf , Dominik Niederberger , Martin Fitzi
发明人： Felix Mayer , Markus Graf , Dominik Niederberger , Martin Fitzi
IPC分类号： B25J11/00
CPC分类号： G01D18/00
摘要： To process a plurality of sensor devices, such as humidity sensors or gas sensors, the sensor devices are run through a testing station and a turret handler. In order to increase throughput of the testing station, several test cycles are operated simultaneously in a phase-shifted manner. The sensor devices are e.g. sequentially fed onto trays of the test station, on which they are assembled in batches. Each batch is subjected to a test cycle. After the test cycle, the sensor devices of a batch are sequentially fed back to the turret handler.
摘要翻译：为了处理诸如湿度传感器或气体传感器的多个传感器装置，传感器装置通过测试台和转塔处理器运行。为了提高测试站的吞吐量，以相移方式同时操作多个测试周期。传感器装置例如依次送入测试台的托盘上，批量组装。每个批次经受一个测试周期。在测试周期之后，批次的传感器装置被顺序地反馈到转塔处理器。

37. 发明申请

US20100089118A1 Method for measuring a fluid composition parameter by means of a flow sensor 有权
标题翻译：通过流量传感器测量流体成分参数的方法
公开(公告)号：US20100089118A1
公开(公告)日：2010-04-15
申请号：US12583747
申请日：2009-08-25
申请人： Felix Mayer , Mark Hornung , Samuel Wehrli
发明人： Felix Mayer , Mark Hornung , Samuel Wehrli
IPC分类号： G01F1/68 , G01F25/00
CPC分类号： G01F1/692 , G01N27/18
摘要： The flow of a fluid of unknown composition is measured by leading the fluid over a first temperature sensor, a heater and a second temperature sensor. The temperature difference DTP between the temperature sensors is measured, as well as the temperature T of at least one of them. In addition, calibration data is used to store the temperature Tref of a known reference fluid. The offset T−Tref at a given temperature difference DTP is a direct measure of the composition of the fluid and allows to retrieve any parameter depending on the same.
摘要翻译：通过使流体通过第一温度传感器，加热器和第二温度传感器来测量未知组成的流体的流动。测量温度传感器之间的温度差DTP以及它们中的至少一个的温度T. 此外，校准数据用于存储已知参考流体的温度Tref。在给定温度差DTP处的偏移T-Tref是流体组成的直接测量，并允许根据相同的方式检索任何参数。

38. 发明申请

US20090249869A1 Flow detector with a housing 有权
标题翻译：流量检测器带外壳
公开(公告)号：US20090249869A1
公开(公告)日：2009-10-08
申请号：US12383170
申请日：2009-03-20
申请人： Lorenz Meier , Mark Hornung , Eric Monnin , Felix Mayer
发明人： Lorenz Meier , Mark Hornung , Eric Monnin , Felix Mayer
IPC分类号： G01F1/68
CPC分类号： G01F1/6842 , G01F1/692 , G01F15/14 , G01F15/18
摘要： A flow detector has a housing (1) with tongues (8), which allow to anchor it to a support to withstand pulling forces. The housing further comprises pegs (41) provided to mate with openings or recesses in the same support, which allow to secure it against lateral forces. The tongues (8) and pegs (41) are mounted to a hull (7) of a housing (1) of the detector, which carries on its opposite side an inlet (4a) and an outlet (4b) for the fluid to be measured. Connectors (5) are provided on the same side as the tongues (8) and the pegs (41) for connecting the detector to an external system. This design is robust and allows to mount the detector to the support in quick and secure manner.
摘要翻译：流量检测器具有带舌片（8）的壳体（1），其允许将其锚定到支撑件以承受拉力。壳体还包括提供成与同一支撑件中的开口或凹部配合的销钉（41），其允许其抵抗横向力。舌部（8）和钉（41）安装到检测器的壳体（1）的船体（7）上，该壳体（1）的相对侧承载有流体的入口（4a）和出口（4b）测量。连接器（5）设置在与用于将检测器连接到外部系统的舌片（8）和钉子（41）相同的一侧。该设计坚固耐用，可以快速安全地将检测器安装到支架上。

39. 发明申请

US20080245145A1 Flow detector device with self check 有权
标题翻译：流量检测装置自检
公开(公告)号：US20080245145A1
公开(公告)日：2008-10-09
申请号：US12009679
申请日：2008-01-21
申请人： Felix Mayer , Mark Hornung , Marc von Waldkirch , Marcel Pluss
发明人： Felix Mayer , Mark Hornung , Marc von Waldkirch , Marcel Pluss
IPC分类号： G01F1/68
CPC分类号： G01F1/6845 , G01F1/6888 , G01F1/6965
摘要： A thermal flow sensor is equipped with a self-test unit that monitors the device and generates a fault signal in the presence of a malfunction. The self-test unit can e.g. monitor the integrity of a membrane carrying the heater and temperature sensors, or it can monitor various operational parameters of the device, thereby increasing the safety of the device.
摘要翻译：热流量传感器配备有自检单元，用于监测设备并在存在故障的情况下产生故障信号。自检单元可以例如监测携带加热器和温度传感器的膜的完整性，或者可以监测装置的各种操作参数，从而增加装置的安全性。

40. 发明申请

US20080016945A1 Humidity detector for detecting fogging on a window 有权
标题翻译：用于检测窗户雾化的湿度检测器
公开(公告)号：US20080016945A1
公开(公告)日：2008-01-24
申请号：US11807711
申请日：2007-05-29
申请人： Urs Rothacher , Felix Mayer , Moritz Lechner , Vincent Hess
发明人： Urs Rothacher , Felix Mayer , Moritz Lechner , Vincent Hess
IPC分类号： G01N7/00
CPC分类号： B60H1/00785
摘要： The humidity detector comprises a housing adapted to hold a humidity sensor towards the windscreen of a vehicle or any other type of window. A flexible printed circuit board is arranged between the humidity sensor and the windscreen and provides a connection between the humidity sensor and further circuitry of the detector. The humidity sensor is located under a cap, which is engaged by a glider member. A spring pushes the glider member towards the windscreen.
摘要翻译：湿度检测器包括适于将湿度传感器保持在车辆挡风玻璃或任何其它类型的窗户的壳体。在湿度传感器和挡风玻璃之间布置有柔性印刷电路板，并且在湿度传感器和检测器的另外的电路之间提供连接。湿度传感器位于由滑翔机构件接合的盖下方。弹簧将滑翔机构件推向挡风玻璃。

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