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    • 38. 发明申请
    • Doping method and method of manufacturing field effect transistor
    • 掺杂方法和制造场效应晶体管的方法
    • US20060177996A1
    • 2006-08-10
    • US11346378
    • 2006-02-03
    • Junichi KoezukaNaoki Suzuki
    • Junichi KoezukaNaoki Suzuki
    • H01L21/26H01L21/42
    • H01L29/78621H01L21/26513H01L29/66757
    • A doping method comprising the steps of; obtaining a proportion X of ions of a compound including a donor or an acceptor impurity in total ions from mass spectrum by using a first source gas of a first concentration; analyzing a peak concentration Y of the compound in a first processing object which is doped by using a second source gas of a second concentration equal to or lower than the first concentration, referring to a dose amount of total ions as Do and setting an acceleration voltage at a value, obtaining a dose amount D1 of total ions from a expression, Y=(D1/D0)(aX+b), and doping a second processing object with the donor or the acceptor impurity by a ion doping apparatus using a third source gas, wherein a dose amount of total ions is set at D1, and an acceleration voltage is set at the value.
    • 一种掺杂方法,包括以下步骤: 通过使用第一浓度的第一源气体从质谱获得包含供体或受体杂质的化合物的离子的比例X; 分析通过使用等于或低于第一浓度的第二浓度的第二源气体掺杂的第一处理对象中的化合物的峰浓度Y,参考总离子的剂量为Do并设定加速电压 从表达式获得总离子的剂量D D 1,其中Y =(D 1 / D O 0)(aX + b),并且通过使用第三源气体的离子掺杂装置用施主或受体杂质掺杂第二处理对象,其中总离子的剂量量设定为D 1,加速度 电压设定在该值。
    • 39. 发明授权
    • Intake system for engine
    • 发动机进气系统
    • US5351658A
    • 1994-10-04
    • US166385
    • 1993-12-13
    • Naoki Suzuki
    • Naoki Suzuki
    • F02B75/22F02M35/10F02M35/116
    • F02M35/10144F02M35/10045F02M35/116F02B75/22Y02T10/14
    • An intake pipe is connected to an upstream side of a throttle valve of an engine having first and second cylinder banks of a cylinder block formed in a V-like configuration. An intake path is branched, at its intermediate part on a downstream side of the throttle valve, into first and second branch paths by a branch tube, and the first and second branch paths are provided at their downstream end portions with first and second surge tanks, respectively. The first and second surge tanks are connected to each other through a communication pipe. An upper portion of the intake pipe is disposed between the first and second surge tank and under the communication pipe and is firmly secured directly to the communication pipe.
    • 进气管连接到具有V形构造的气缸体的第一和第二气缸组的发动机的节流阀的上游侧。 进气道在节流阀的下游侧的中间部分被分支,通过分支管分支成第一和第二分支路径,并且第一和第二分支路径在其下游端部设置有第一和第二调压罐 , 分别。 第一和第二缓冲罐通过连通管相互连接。 进气管的上部设置在第一和第二缓冲罐之间并在连通管下方,并且被牢固地固定在连通管上。