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    • 31. 发明授权
    • Substrate drying device, drying method and substrate dried by the same
    • 底物干燥装置,干燥方法和基材干燥
    • US6151796A
    • 2000-11-28
    • US217778
    • 1998-12-21
    • Hamataro KaramatsuMasanao HoriSeiji Katayama
    • Hamataro KaramatsuMasanao HoriSeiji Katayama
    • F26B5/04H05K3/22F26B13/30
    • H05K3/227F26B5/04F26B5/042
    • A substrate drying device includes a reduced pressure enclosure including an airproof door, and an exhaustion device. Inside of the enclosure is caused to be a sealed state when the airproof door is closed. After a substrate to which an application material is applied is received into the reduced pressure enclosure, the airproof door is closed to make inside of the reduced pressure enclosure be an airproof state. Subsequently, inside of the reduced pressure enclosure is exhausted by the exhaustion device to perform for eliminating air bubbles in the application material and drying the application material on the substrates. The exhaustion device may include a reserve tank that has a volume capable of rapidly reducing a pressure of the internal volume of the reduced pressure enclosure to maintain a predetermined negative pressure. A rapid exhaustion of the inside of the reduced pressure enclosure is performed by connecting the reserve tank to the reduced pressure enclosure.
    • 基板干燥装置包括包括防空门的减压外壳和排气装置。 当防风门关闭时,外壳内部会成为密封状态。 在施加了应用材料的基板被接收到减压外壳中之后,防风门被关闭,使得减压外壳内部成为防风的状态。 随后,由减压装置排出减压外壳内部,以排除涂敷材料中的气泡并干燥基板上的涂敷材料。 排气装置可以包括备用罐,其具有能够快速降低减压外壳的内部容积的压力以保持预定的负压的容积。 通过将储备罐连接到减压外壳来进行减压外壳内部的快速耗尽。