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31. 发明授权

US06257270B1 Fluid control device 失效
标题翻译：流体控制装置
公开(公告)号：US06257270B1
公开(公告)日：2001-07-10
申请号：US09389475
申请日：1999-09-03
申请人： Tadahiro Ohmi , Keiji Hirao , Yukio Minami , Michio Yamaji , Takashi Hirose , Nobukazu Ikeda
发明人： Tadahiro Ohmi , Keiji Hirao , Yukio Minami , Michio Yamaji , Takashi Hirose , Nobukazu Ikeda
IPC分类号： F16K1120
CPC分类号： F16K27/003 , Y10T137/4259 , Y10T137/87684
摘要： A fluid control device has formed in a valve main body a main channel communicating with an inlet of a channel within a massflow controller, and a relatively long subchannel and a relatively short subchannel both communicating with the main channel. The process gas to be assure of high purity is passed through the relatively long subchannel.
摘要翻译：流体控制装置在阀主体中形成有与质量流量控制器内的通道的入口连通的主通道，以及与主通道连通的相对长的子通道和相对短的子通道。要保证高纯度的工艺气体通过较长的子通道。

32. 发明授权

US06193212B1 Fluid control valve and fluid supply/exhaust system 有权
标题翻译：流体控制阀和流体供应/排气系统
公开(公告)号：US06193212B1
公开(公告)日：2001-02-27
申请号：US09308922
申请日：1999-07-23
申请人： Tadahiro Ohmi , Migaku Takahashi , Michio Yamaji , Tsuyoshi Tanikawa , Nobukazu Ikeda , Ryosuke Dohi , Kouji Nishino , Naofumi Yasumoto , Hiroyuki Fukuda , Tomio Uno , Yasuyuki Yanai
发明人： Tadahiro Ohmi , Migaku Takahashi , Michio Yamaji , Tsuyoshi Tanikawa , Nobukazu Ikeda , Ryosuke Dohi , Kouji Nishino , Naofumi Yasumoto , Hiroyuki Fukuda , Tomio Uno , Yasuyuki Yanai
IPC分类号： F16K3102
CPC分类号： F16K31/082 , F16K7/14 , F16K31/0655 , F16K31/0672 , Y10T137/8242
摘要： A fluid control valve, which can control a fluid having a pressure in the order of 10 kg/cm2, has a response time in the order of several milliseconds can be made small in size, and a fluid supply/exhaust system that provides less gas counter flow in the event of a plurality of valves being used. A fluid control valve of the invention controls a fluid moving in a valve body by closing and opening a portion between a valve seat and a valve holder by use of a drive unit. The drive unit has a rod-shaped shaft for application of pressure through the valve seat and the valve holder, and a member “a” fixed around the rod-shaped shaft. The member “a” is made from a magnetic material, and has a space between it and the shaft. A coil provided in parallel to the shaft, moves the shaft via the member “a” up and down by electromagnetic induction, and makes use of a spring force to close and open a portion between the valve seat and the valve holder.
摘要翻译：可以控制具有10kg / cm 2量级的压力的流体的流体控制阀具有大约几毫秒数量级的响应时间，并且可以使得提供较少气体的流体供应/排出系统在使用多个阀的情况下的逆流。本发明的流体控制阀通过使用驱动单元闭合和打开阀座和阀座之间的部分来控制在阀体中移动的流体。驱动单元具有用于通过阀座和阀保持器施加压力的杆状轴和围绕杆状轴固定的构件“a”。构件“a”由磁性材料制成，并且在其与轴之间具有空间。平行于轴设置的线圈通过电磁感应使组件“a”上下移动，并利用弹簧力来封闭和打开阀座与阀座之间的一部分。

33. 发明授权

US06178995B2 Fluid supply apparatus 有权
标题翻译：流体供应装置
公开(公告)号：US06178995B2
公开(公告)日：2001-01-30
申请号：US09355872
申请日：1999-08-05
申请人： Tadahiro Ohmi , Tetu Kagazume , Kazuhiko Sugiyama , Ryousuke Dohi , Yukio Minami , Kouji Nishino , Kouji Kawata , Nobukazu Ikeda , Michio Yamaji
发明人： Tadahiro Ohmi , Tetu Kagazume , Kazuhiko Sugiyama , Ryousuke Dohi , Yukio Minami , Kouji Nishino , Kouji Kawata , Nobukazu Ikeda , Michio Yamaji
IPC分类号： G05D706
CPC分类号： G05D7/0635 , Y10T137/7759 , Y10T137/7761
摘要： A fluid feeding apparatus includes parallel flow passages connected at their downstream side, each parallel passage including a pressure flow controller (C) for regulating the flow of fluid and a fluid changeover valve (D) for opening and closing the passage on the downstream side of the pressure flow controller. A fluid feeding control unit (B) controls the pressure flow controllers and changeover valves so that when a changeover valve is closed a control valve (1) upstream of the changeover valve is also closed to prevent a pressure buildup at the changeover valve. In addition to the control valve (1), each pressure flow controller includes an orifice (5) downstream from the control valve, a pressure detector (3) for sensing pressure (P1) in the passage at a point between the control valve and the orifice, and a calculation control unit (6) for producing a control signal Qy for controlling the drive (2) for the control valve. The calculation control unit first calculates a flow rate signal Qc=KP1, where K is a constant and P1 is the pressure sensed by the pressure detector. The calculation control unit then calculates Qy as the difference between a set point or flow rate specifying signal Qs and the calculated value Qc. Thus, the flow rate on the downstream side of the orifice is controlled by regulating the pressure P1 on the upstream side of the orifice via the control valve. The fluid feeding apparatus avoids transient overshooting at the start of fluid feeding and at fluid changeover time and is suitable for use in semiconductor manufacturing facilities and other gas supply systems where high precision is required.
摘要翻译：流体供给装置包括在其下游侧连接的平行流路，每个平行通道包括用于调节流体流动的压力流量控制器（C）和用于打开和关闭流体的下游侧的通道的流体切换阀（D）压力流量控制器。流体供给控制单元（B）控制压力流量控制器和切换阀，使得当切换阀关闭时，转换阀上游的控制阀（1）也被关闭以防止在转换阀处产生压力。除了控制阀（1）之外，每个压力流量控制器包括在控制阀下游的孔口（5），压力检测器（3），用于感测通道中压力（P1）在控制阀和控制阀孔，以及用于产生用于控制用于控制阀的驱动器（2）的控制信号Qy的计算控制单元（6）。计算控制单元首先计算流量信号Qc = KP1，其中K是常数，P1是由压力检测器感测的压力。计算控制单元然后计算Qy作为设定点或流量指定信号Qs与计算值Qc之间的差。因此，通过控制阀调节孔口上游侧的压力P1来控制孔口下游侧的流量。流体供给装置在流体供给开始时和流体切换时间期间避免瞬时过冲，并且适用于需要高精度的半导体制造设备和其它气体供应系统。

34. 发明授权

US5988217A Shutoff-opening device 失效
标题翻译：开关装置
公开(公告)号：US5988217A
公开(公告)日：1999-11-23
申请号：US972436
申请日：1997-11-18
申请人： Tadahiro Ohmi , Keiji Hirao , Shigeaki Tanaka , Michio Yamaji , Hiroshi Morokoshi , Nobukazu Ikeda
发明人： Tadahiro Ohmi , Keiji Hirao , Shigeaki Tanaka , Michio Yamaji , Hiroshi Morokoshi , Nobukazu Ikeda
IPC分类号： F16K7/16 , F16K15/16 , F16K27/00 , F16K51/00 , F16K31/12
CPC分类号： F16K27/003 , F16K51/00 , Y10T137/7783 , Y10T137/87917 , Y10T137/88054
摘要： A valve body has a main body formed with an inflow channel for a first fluid, an inflow channel for a second fluid, and an outflow channel for the first and second fluids in common. The first fluid inflow channel is always in communication with the common outflow channel through a valve chamber. A valve element operates to bring the second fluid inflow channel into or out of communication with the first fluid inflow channel and the common outflow channel.
摘要翻译：阀体具有形成有用于第一流体的流入通道，第二流体的流入通道和用于第一流体和第二流体的流出通道的主体。第一流体流入通道总是通过阀室与公共流出通道连通。阀元件操作以使第二流体流入通道进入或流出与第一流体流入通道和公共流出通道的连通。

35. 发明授权

US5975112A Fluid control device 失效
标题翻译：流体控制装置
公开(公告)号：US5975112A
公开(公告)日：1999-11-02
申请号：US853347
申请日：1997-05-08
申请人： Tadahiro Ohmi , Keiji Hirao , Yukio Minami , Michio Yamaji , Takashi Hirose , Nobukazu Ikeda
发明人： Tadahiro Ohmi , Keiji Hirao , Yukio Minami , Michio Yamaji , Takashi Hirose , Nobukazu Ikeda
IPC分类号： F15B11/00 , F15B13/00 , F15B13/02 , F15B13/08 , F16K27/00 , H01L21/02 , F16K11/20
CPC分类号： F16K27/003 , Y10T137/4259 , Y10T137/87684
摘要： A fluid control device has formed in a valve main body a main channel communicating with an inlet of a channel within a massflow controller, and a relatively long subchannel and a relatively short subchannel both communicating with the main channel. The process gas to be assure of high purity is passed through the relatively long subchannel.
摘要翻译：流体控制装置在阀主体中形成有与质量流量控制器内的通道的入口连通的主通道，以及与主通道连通的相对长的子通道和相对短的子通道。要保证高纯度的工艺气体通过较长的子通道。

36. 发明授权

US07150444B2 Valve with an integral orifice 有权
标题翻译：带整体孔的阀
公开(公告)号：US07150444B2
公开(公告)日：2006-12-19
申请号：US11011379
申请日：2004-12-15
申请人： Tadahiro Ohmi , Kouji Nishino , Nobukazu Ikeda , Michio Yamaji , Ryousuke Dohi , Eiji Ideta , Takashi Hirose
发明人： Tadahiro Ohmi , Kouji Nishino , Nobukazu Ikeda , Michio Yamaji , Ryousuke Dohi , Eiji Ideta , Takashi Hirose
IPC分类号： F16K47/00 , F16K1/00
CPC分类号： F16K25/005 , F16K7/14 , F16K7/16 , F16K27/00 , H04W4/90 , H04W48/12 , H04W74/006 , H04W74/0833 , H04W76/50
摘要： A valve with an integral orifice for use in gas feeding equipment provided with a pressure-type flow volume control device to be employed for manufacturing of semi-conductors and chemical goods. The valve with an integral orifice has the excellent flow rate control characteristics by improving the processing accuracy of the orifice and preventing the distortion of the orifice at the time of assembling. The orifice is formed in a stainless steel made orifice disc. The metal-made orifice disc with the orifice formed by separate processing and the synthetic-resin-made valve seat body are removably assembled, wherein the orifice disc and the synthetic resin made valve seat body are fixed airtight to the valve main body by pressing the valve seat body via a metal inner disc.
摘要翻译：具有用于气体供给设备的整体孔口的阀，其具有用于制造半导体和化学制品的压力型流量控制装置。具有整体孔的阀具有优异的流量控制特性，通过提高喷嘴的加工精度并防止在组装时孔口的变形。孔口形成为不锈钢制的孔盘。具有通过分离处理形成的孔的金属制孔口盘和合成树脂制的阀座体可拆卸地组装，其中孔板和合成树脂制成的阀座体通过压制阀座而被气密地固定到阀主体阀座主体经由金属内盘。

37. 发明授权

US06273139B1 Fluid control apparatus 有权
标题翻译：流体控制装置
公开(公告)号：US06273139B1
公开(公告)日：2001-08-14
申请号：US09168858
申请日：1998-10-09
申请人： Tadahiro Ohmi , Michio Yamaji , Naoya Masuda , Takashi Hirose , Kosuke Yokoyama , Nobukazu Ikeda
发明人： Tadahiro Ohmi , Michio Yamaji , Naoya Masuda , Takashi Hirose , Kosuke Yokoyama , Nobukazu Ikeda
IPC分类号： F16K100
CPC分类号： F16K27/003 , Y10T137/87885
摘要： A fluid control apparatus having a plurality of fluid control members each further having, a blocklike body with an upper side and a lower side, at least one monofunctional member for controlling fluid mounted on the upper side of the blocklike body, and at least one fluid channel formed between the monofunctional member for controlling fluid and the bottom side of the blocklike body; a plurality of couplings each further having, a blocklike body mounted to the bottom surface of at least one fluid control member, at least one communication channel for fluids communicating between at least two fluid channels of at least two different fluid control members; and a base plate for supporting a plurality of couplings. Each of the plurality of fluid control members is mounted to each of the plurality of couplings so as to be individually removable therefrom.
摘要翻译：一种流体控制装置，具有多个流体控制构件，每个流体控制构件还具有：具有上侧和下侧的块状体，至少一个用于控制安装在所述块状体的上侧的流体的单功能构件，以及至少一个流体用于控制流体的单功能构件和块状体的底侧之间形成的通道; 多个联接器还具有安装到至少一个流体控制构件的底表面的块状体，至少一个连通通道，用于在至少两个不同流体控制构件的至少两个流体通道之间连通的流体; 以及用于支撑多个联接件的基板。多个流体控制构件中的每一个安装到多个联接器中的每一个，以便可以单独地从其中移除。

38. 发明授权

US5983933A Shutoff-opening device 失效
标题翻译：开关装置
公开(公告)号：US5983933A
公开(公告)日：1999-11-16
申请号：US974550
申请日：1997-11-19
申请人： Tadahiro Ohmi , Yuji Kawano , Keiji Hirao , Hisashi Tanaka , Naoya Masuda , Yukio Minami , Masayuki Hatano , Shigeaki Tanaka , Michio Yamaji , Hiroshi Morokoshi , Michio Kuramochi , Nobukazu Ikeda , Shigeru Itoi , Michihiro Kashiwa
发明人： Tadahiro Ohmi , Yuji Kawano , Keiji Hirao , Hisashi Tanaka , Naoya Masuda , Yukio Minami , Masayuki Hatano , Shigeaki Tanaka , Michio Yamaji , Hiroshi Morokoshi , Michio Kuramochi , Nobukazu Ikeda , Shigeru Itoi , Michihiro Kashiwa
IPC分类号： F16K27/00 , F15B13/00 , F15B13/08 , F17D1/02 , F16K3/00
CPC分类号： F15B13/0832 , F15B13/0817 , F15B13/0871 , F15B13/0892 , F15B13/0896 , F16K27/003 , Y10T137/87249 , Y10T137/87684 , Y10T137/87917
摘要： A valve mount having two valves removably installed thereon from above as arranged in a direction comprises an inflow channel forming member having a channel in communication with an inlet of the valve disposed at one end thereof, a communication channel forming member having a channel for causing an outlet of the valve at the end to communicate with an inlet of the other valve adjacent thereto, an outflow channel forming member having a channel in communication with an outlet of the other valve, and a subchannel forming member having a channel in communication with an inlet-outlet port formed in the other valve.
摘要翻译：具有两个可自由拆卸地安装在其上的阀的阀座具有一个流入通道形成构件，该流入通道形成构件具有与设置在其一端的阀的入口连通的通道;连通通道形成构件，具有通道，所述阀的端部的出口与与其相邻的另一阀的入口连通，具有与所述另一个阀的出口连通的通道的流出通道形成构件，以及具有与入口连通的通道的子通道形成构件 - 出口端口形成在另一个阀门中。

39. 发明授权

US08662471B2 Solenoid valve 有权
标题翻译：电磁阀
公开(公告)号：US08662471B2
公开(公告)日：2014-03-04
申请号：US12935119
申请日：2009-03-26
申请人： Tadahiro Ohmi , Kouji Nishino , Tsuyoshi Tanigawa , Michio Yamaji , Nobukazu Ikeda , Ryousuke Dohi
发明人： Tadahiro Ohmi , Kouji Nishino , Tsuyoshi Tanigawa , Michio Yamaji , Nobukazu Ikeda , Ryousuke Dohi
IPC分类号： F16K31/02
CPC分类号： F16K31/0658 , F16K31/0675 , H01F7/1816 , H01F2007/1822
摘要： There is provided a solenoid valve that realizes space-saving by reducing the size of a dedicated driving power source. There is provided a solenoid valve capable of instantaneously opening and closing that includes an electric double layer capacitor having a low direct current internal resistance and a low equivalent series resistance as a motive power supply. The electric double layer capacitor has single-cell electrical properties including a capacitance of 1 to 5 F, a rated voltage of 21 to 2.7 V, a direct current internal resistance of 0.01 to 0.1Ω, and an equivalent series resistance at 1 KHz of 0.03 to 0.09Ω, and includes a polarizable electrode made of glassy carbon having a specific surface area of 1 to 500 m2/g.
摘要翻译：提供了一种通过减小专用驱动电源的尺寸实现节省空间的电磁阀。提供了能够瞬时打开和关闭的电磁阀，其包括具有低直流内阻和作为动力源的低等效串联电阻的双电层电容器。双电层电容器具有单电池电特性，包括1至5F的电容，额定电压为21至2.7V，直流内阻为0.01至0.1Ome，1KHz的等效串联电阻为0.03 为0.09Omega，并且包括比表面积为1〜500m 2 / g的玻璃碳制的可极化电极。

40. 发明申请

US20110121217A1 SOLENOID VALVE 有权
标题翻译：电磁阀
公开(公告)号：US20110121217A1
公开(公告)日：2011-05-26
申请号：US12935119
申请日：2009-03-26
申请人： Tadahiro Ohmi , Kouji Nishino , Tsuyoshi Tanigawa , Michio Yamaji , Nobukazu Ikeda , Ryousuke Dohi
发明人： Tadahiro Ohmi , Kouji Nishino , Tsuyoshi Tanigawa , Michio Yamaji , Nobukazu Ikeda , Ryousuke Dohi
IPC分类号： F16K31/02
CPC分类号： F16K31/0658 , F16K31/0675 , H01F7/1816 , H01F2007/1822
摘要： There is provided a solenoid valve that realizes space-saving by reducing the size of a dedicated driving power source. There is provided a solenoid valve capable of instantaneously opening and closing that includes an electric double layer capacitor having a low direct current internal resistance and a low equivalent series resistance as a motive power supply. The electric double layer capacitor has single-cell electrical properties including a capacitance of 1 to 5 F, a rated voltage of 21 to 2.7 V, a direct current internal resistance of 0.01 to 0.1 Ω, and an equivalent series resistance at 1 KHz of 0.03 to 0.09 Ω, and includes a polarizable electrode made of glassy carbon having a specific surface area of 1 to 500 m2/g.
摘要翻译：提供了一种通过减小专用驱动电源的尺寸实现节省空间的电磁阀。提供了能够瞬时打开和关闭的电磁阀，其包括具有低直流内阻和作为动力源的低等效串联电阻的双电层电容器。双电层电容器具有单电池电特性，包括1至5F的电容，额定电压为21至2.7V，直流内阻为0.01至0.1Ω，OHgr为1KHz的等效串联电阻 0.03〜0.09＆OHgr，并且包括由比表面积为1〜500m 2 / g的玻璃碳制成的极化电极。

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