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    • 35. 发明申请
    • Gap-Fill Keyhole Repair Using Printable Dielectric Material
    • 使用可印刷介质材料进行缺陷孔眼修复
    • US20130062709A1
    • 2013-03-14
    • US13232293
    • 2011-09-14
    • Paul ChangJosephine B. ChangMichael A. GuillornJeffrey W. Sleight
    • Paul ChangJosephine B. ChangMichael A. GuillornJeffrey W. Sleight
    • H01L29/51H01L21/28
    • H01L29/51H01L21/311H01L21/76825H01L21/76837H01L29/66545
    • Disposable gate structures are formed on a semiconductor substrate. A planarization dielectric layer is deposited over the disposable gate structures and planarized to provide a top surface that is coplanar with top surface of the disposable gate structures. The planarization dielectric layer at this point includes gap-fill keyholes between narrowly spaced disposable gate structures. A printable dielectric layer is deposited over the planarization dielectric layer to fill the gap-fill keyholes. Areas of the printable dielectric layer over the gap-fill keyholes are illuminated with radiation that cross-links cross-linkable bonds in the material of the printable dielectric layer. Non-crosslinked portions of the printable dielectric layer are subsequently removed selective to crosslinked portions of the printable dielectric layer, which fills at least the upper portion of each gate-fill keyhole. The disposable gate structures are removed to form gate cavities. The gate cavities are filled with a gate dielectric and a gate electrode.
    • 在半导体衬底上形成一次性栅极结构。 平坦化电介质层沉积在一次性栅极结构上并且被平坦化以提供与一次性栅极结构的顶表面共面的顶表面。 此时的平坦化电介质层包括狭缝间隔一次性栅极结构之间的间隙填充键孔。 在平坦化介电层上沉积可印刷介电层以填充间隙填充键孔。 在间隙填充键孔上的可印刷电介质层的区域被可印刷介电层的材料中交叉连接的辐射辐射照射。 可打印介电层的非交联部分随后被选择性地移除到可印刷介电层的交联部分,该可印刷电介质层至少填充每个栅极填充孔眼的上部。 去除一次性门结构以形成门腔。 栅极腔填充有栅极电介质和栅电极。
    • 40. 发明授权
    • Performing variable and/or bitwise shift operation for a shift instruction that does not provide a variable or bitwise shift option
    • 对不提供可变或位移选项的换档指令执行可变和/或逐位移位操作
    • US08024552B2
    • 2011-09-20
    • US12573876
    • 2009-10-05
    • Hyeonkuk JeongPaul Chang
    • Hyeonkuk JeongPaul Chang
    • G06F9/315
    • G06F5/01G06F9/30032G06F9/3017
    • Some embodiments present a method of performing a variable shift operation. This method can be used by a microprocessor that does not allow variable shift operation for certain operand sizes. The method simulates a shift instruction that shifts an operand by a shift count. The method identifies a first shift command and a second shift command. The method computes a mask value. The mask value depends on whether the shift count is less than half of the operand size or greater than or equal to half of the operand size. The method uses the mask value to cause one of the first shift command and the second shift command to produce no shift. In some embodiments, the method allows for the shift count to be specified in bytes or in bits.
    • 一些实施例提出了执行可变移位操作的方法。 该方法可以由微处理器使用,该微处理器不允许某些操作数大小进行可变移位操作。 该方法模拟一个将一个操作数移位一个移位计数的移位指令。 该方法识别第一移位指令和第二移位指令。 该方法计算一个掩码值。 掩码值取决于移位计数是否小于操作数大小的一半,或大于或等于操作数大小的一半。 该方法使用掩模值使第一移位指令和第二移位指令之一产生无移位。 在一些实施例中,该方法允许以字节或位指定移位计数。