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31. 发明授权

US07477884B2 Tri-state RF switch 有权
标题翻译：三态RF开关
公开(公告)号：US07477884B2
公开(公告)日：2009-01-13
申请号：US11345237
申请日：2006-02-02
申请人： Hyung Choi , Jiwel Jiao , Yuelin Wang , Xianglong Xing
发明人： Hyung Choi , Jiwel Jiao , Yuelin Wang , Xianglong Xing
IPC分类号： H04B1/06
CPC分类号： H01H59/0009 , H01H2001/0042 , H01P1/127
摘要： A tri-state RF MEMS switch includes: a first well formed in a first substrate; a first input signal line and a first output signal line forming a first gap therebetween in the first well; a post bar forming a boundary between the second well and third well in the second substrate; a second input signal line and a second output signal line, and a third input signal line and a third output signal line forming a second gap and a third gap in the second well and the third well, respectively; and a membrane disposed between the first substrate and the second substrate such that the membrane crosses the first, second and third gaps, the membrane including a first conductive pad, a second conductive pad, and a third conductive pad thereon to face the first, second and third gaps, respectively.
摘要翻译：三态RF MEMS开关包括：形成在第一衬底中的第一阱; 第一输入信号线和第一输出信号线，其在第一阱中形成第一间隙; 在第二基板中形成第二阱和第三阱之间的边界的柱条; 第二输入信号线和第二输出信号线，以及分别在第二阱和第三阱中形成第二间隙和第三间隙的第三输入信号线和第三输出信号线; 以及膜，其设置在所述第一基板和所述第二基板之间，使得所述膜跨越所述第一，第二和第三间隙，所述膜包括第一导电焊盘，第二导电焊盘和第三导电焊盘，和第三个差距。

32. 发明申请

US20080297564A1 INKJET PRINTHEAD 审中-公开
公开(公告)号：US20080297564A1
公开(公告)日：2008-12-04
申请号：US11935539
申请日：2007-11-06
申请人： Yong-won Jeong , Hyung Choi , Yong-seop Yoon , Moon-chul Lee , Dong-sik Shim
发明人： Yong-won Jeong , Hyung Choi , Yong-seop Yoon , Moon-chul Lee , Dong-sik Shim
IPC分类号： B41J2/14 , B41J2/04
CPC分类号： B41J2/17563 , B41J2/1404 , B41J2/14145 , B41J2002/14403
摘要： An inkjet printhead includes a substrate in which an ink feed hole is formed, a plurality of ejection devices formed on the substrate at sides of the ink feed hole, a chamber layer stacked on the substrate and in which a plurality of ink chambers, which correspond to the ejection devices and in which ink supplied from the ink feed hole is filled, are formed, and a nozzle layer in which a plurality of nozzles corresponding to the ink chambers are formed, wherein the ink feed hole includes a plurality of through holes formed through the substrate in the thickness direction thereof.
摘要翻译：喷墨打印头包括其中形成有供墨孔的基板，在供墨孔的侧面形成在基板上的多个喷射装置，堆叠在基板上的室层，其中对应于多个墨室形成喷墨装置并且从供墨孔供应的油墨被填充，并且形成有与油墨室相对应的多个喷嘴的喷嘴层，其中所述供墨孔包括形成的多个通孔通过基板的厚度方向。

33. 发明授权

US07416675B2 Method of fabricating inkjet print heads 有权
标题翻译：制造喷墨打印头的方法
公开(公告)号：US07416675B2
公开(公告)日：2008-08-26
申请号：US11453012
申请日：2006-06-15
申请人： Dong-sik Shim , Hyung Choi , Yong-seop Yoon
发明人： Dong-sik Shim , Hyung Choi , Yong-seop Yoon
IPC分类号： G01D15/00
CPC分类号： B41J2/1603 , B41J2/1626 , B41J2/1635 , B41J2/1639 , B41J2/1643
摘要： A method of fabricating inkjet print heads usable in an ink jet printer. The method of fabricating ink jet print heads includes preparing a plurality of ink jet print heads on a wafer while forming sub sidewalls around the ink jet print heads when the ink jet print heads are being prepared, attaching protection films onto the sub sidewalls of the wafer and the ink jet print heads, and dicing the ink jet print heads and detaching the individual ink jet print heads from the wafer. In the method, the ink jet print heads are diced in a wafer unit. Particularly, connect pads of the ink jet print heads can be prevented from being contaminated by the protection films.
摘要翻译：一种制造可用于喷墨打印机的喷墨打印头的方法。制造喷墨打印头的方法包括：当准备喷墨打印头时，在晶片上准备多个喷墨打印头，同时在喷墨打印头周围形成副侧壁，将保护膜附着在晶片的子侧壁上和喷墨打印头，并且对喷墨打印头进行切割并将各个喷墨打印头从晶片上分离出来。在该方法中，喷墨打印头在晶片单元中切割。特别地，可以防止喷墨打印头的连接垫被保护膜污染。

34. 发明申请

US20070283585A1 Two-axis geomagnetic sensor and method for manufacturing the same 有权
标题翻译：二轴地磁传感器及其制造方法
公开(公告)号：US20070283585A1
公开(公告)日：2007-12-13
申请号：US11637767
申请日：2006-12-13
申请人： Hae-seok Park , Joo-ho Lee , Hyung Choi , Kyoung-won Na
发明人： Hae-seok Park , Joo-ho Lee , Hyung Choi , Kyoung-won Na
IPC分类号： E21B47/00
CPC分类号： G01C17/30 , G01R33/02 , Y10T29/49002
摘要： A two-axis geomagnetic sensor is disclosed. The two-axis geomagnetic sensor includes a first geomagnetic sensor part including a first wafer and a first geomagnetic sensor on a surface of the first wafer; and a second geomagnetic sensor part including a second wafer and a second geomagnetic sensor on a surface of the second wafer. The first and second geomagnetic sensor parts are bonded to each other, in which the first and second geomagnetic sensors positioned in an orthogonal relation to each other. Accordingly, an occupancy area of the geomagnetic sensor can be reduced. Further, the geomagnetic sensor on each axe can have the same magnetic material properties, and alignment deviation cannot be generated.
摘要翻译：公开了一种双轴地磁传感器。双轴地磁传感器包括第一地磁传感器部分，其包括在第一晶片的表面上的第一晶片和第一地磁传感器; 以及第二地磁传感器部分，其包括在第二晶片的表面上的第二晶片和第二地磁传感器。第一和第二地磁传感器部分彼此结合，其中第一和第二地磁传感器以彼此正交的关系定位。因此，可以减少地磁传感器的占用面积。此外，每个斧头上的地磁传感器可以具有相同的磁性材料性质，并且不能产生对准偏差。

35. 发明申请

US20070279458A1 Inkjet printhead and method of manufacturing the same 有权
标题翻译：喷墨打印头及其制造方法
公开(公告)号：US20070279458A1
公开(公告)日：2007-12-06
申请号：US11653371
申请日：2007-01-16
申请人： Moon-chul Lee , Dong-sik Shim , Hyung Choi , Yong-seop Yoon
发明人： Moon-chul Lee , Dong-sik Shim , Hyung Choi , Yong-seop Yoon
IPC分类号： B41J2/05
CPC分类号： B41J2/1603 , B41J2/1628 , B41J2/1629 , B41J2/1632 , B41J2/1639
摘要： An inkjet printhead and a method of manufacturing the inkjet printhead. The inkjet printhead includes a substrate including a trench formed to a predetermined depth in an upper portion of the substrate and an ink feed hole formed through a bottom surface of the trench to supply ink, an etch stop layer formed of a metal and formed on an inner surface of the trench, a plurality of heaters, to create bubbles by heating ink, formed on the substrate, a plurality of electrodes, to apply a current to the plurality of heaters, formed on the substrate, a chamber layer stacked on the substrate and including a plurality of ink chambers formed above respective heaters to receive ink from the ink feed hole via the trench, and a nozzle layer stacked on the chamber layer and including a plurality of nozzles to eject ink from the plurality of ink chambers.
摘要翻译：喷墨打印头和制造喷墨打印头的方法。喷墨打印头包括基板，该基板包括在基板的上部形成为预定深度的沟槽，以及通过沟槽的底表面形成供墨的供墨孔，由金属形成的蚀刻停止层，沟槽的内表面，多个加热器，通过加热形成在基板上的油墨产生气泡，多个电极，以形成在基板上的多个加热器施加电流，堆叠在基板上的室层并且包括形成在各个加热器上方的多个墨室，以经由所述沟槽从所述供墨孔接收墨;以及喷嘴层，其堆叠在所述腔室层上并且包括多个喷嘴以从所述多个墨室喷射墨。

36. 发明申请

US20070264744A1 OPTICAL BENCH, SLIM OPTICAL PICKUP EMPLOYING THE SAME AND METHOD OF MANUFACTURING THE OPTICAL BENCH 审中-公开
标题翻译：使用其的光学平台，SLIM OPTICAL PICKUP及其制造方法
公开(公告)号：US20070264744A1
公开(公告)日：2007-11-15
申请号：US11671746
申请日：2007-02-06
申请人： Woong-lin Hwang , Hyung Choi , Jae-ho You , Yong-sung Kim
发明人： Woong-lin Hwang , Hyung Choi , Jae-ho You , Yong-sung Kim
IPC分类号： H01L21/00
CPC分类号： H01L31/14 , G11B7/123 , G11B7/131 , G11B7/1362 , G11B7/22 , H01L2224/48091 , H01L2224/73265 , H01L2924/00014
摘要： An optical bench is provided, as are a thin optical pickup that employs the optical bench, and a method of manufacturing the optical bench. The optical bench includes a light source for generating light for recording and reproducing information to and from an optical disc, a light source stand on which the light source is mounted, a mirror adjacent to the light source stand, and a bottom surface at a lower point than the light source stand and between the light source stand and the mirror surface. Sides of the light source stand besides the side facing the mirror are connected to the surface of the substrate by a flat sloped surface. Along the sloped surface, two electrodes for supplying power to the light source are connected to the light source stand. Since the metal wirings are formed along the sloped surface without trenches or windings between the light source stand and the silicon substrate, no disconnection of metal lines at a corner occurs.
摘要翻译：提供了一种光学台，以及使用光学台的薄型光学拾取器以及制造光学台的方法。光学台包括用于产生用于从光盘记录和再现信息的光的光源，安装有光源的光源支架，与光源支架相邻的反射镜，以及位于下部的底部表面点比光源支架和光源支架和镜面之间的点。除了面向镜的一侧之外，光源的侧面通过平坦的倾斜表面连接到基板的表面。沿着倾斜的表面，用于向光源供电的两个电极连接到光源支架。由于在光源支架和硅基板之间没有沟槽或绕组的倾斜表面形成金属布线，所以不会发生角落处的金属线断开。

37. 发明申请

US20070139139A1 Coupled resonator filter and fabrication method thereof 有权
标题翻译：耦合谐振滤波器及其制造方法
公开(公告)号：US20070139139A1
公开(公告)日：2007-06-21
申请号：US11455190
申请日：2006-06-19
申请人： Hao-seok Park , Joo-ho Lee , Byeoung-ju Ha , Seog-woo Hong , Hyung Choi , In-sang Song
发明人： Hao-seok Park , Joo-ho Lee , Byeoung-ju Ha , Seog-woo Hong , Hyung Choi , In-sang Song
IPC分类号： H03H9/54
CPC分类号： H03H9/584 , H03H3/04 , H03H9/587 , H03H9/588
摘要： A coupled resonator filter and a method of fabricating the coupled resonator filter are provided. The method includes: sequentially stacking a first electrode, a first piezoelectric layer, a second electrode, an insulating layer, a third electrode, a second piezoelectric layer, and a fourth electrode on a surface of a substrate; sequentially patterning the first electrode, the first piezoelectric layer, the second electrode, the insulating layer, the third electrode, the second piezoelectric layer, and the fourth electrode to expose areas of the first, second, and third electrodes; forming a plurality of connection electrodes respectively connected to the exposed areas of the first, second, and third electrodes and an area of the fourth electrode; and etching an area of the substrate underneath the first electrode to form an air gap.
摘要翻译：提供耦合谐振滤波器和制造耦合谐振滤波器的方法。该方法包括：在基板的表面上依次堆叠第一电极，第一压电层，第二电极，绝缘层，第三电极，第二压电层和第四电极; 顺序地构图第一电极，第一压电层，第二电极，绝缘层，第三电极，第二压电层和第四电极，以暴露第一，第二和第三电极的区域; 形成分别连接到第一，第二和第三电极的暴露区域和第四电极的区域的多个连接电极; 并且蚀刻在第一电极下方的衬底的区域以形成气隙。

38. 发明申请

US20070131648A1 METHOD OF FABRICATING INKJET PRINTHEAD 有权
标题翻译：制造喷墨打印机的方法
公开(公告)号：US20070131648A1
公开(公告)日：2007-06-14
申请号：US11423982
申请日：2006-06-14
申请人： Dong-sik Shim , Hyung Choi
发明人： Dong-sik Shim , Hyung Choi
IPC分类号： G01D15/00 , G11B5/127
CPC分类号： B41J2/14129 , B41J2/14137 , B41J2/1603 , B41J2/1626 , B41J2/1631 , B41J2/1639 , B41J2/1643 , Y10T29/49083 , Y10T29/49126 , Y10T29/49128 , Y10T29/4913 , Y10T29/49401
摘要： A method of fabricating an inkjet printhead. The method of fabricating an inkjet printhead includes sequentially forming an insulating layer, a heater, and an electrode on a substrate and forming a passivation layer on the insulating layer to cover the heater and the electrode; forming a trench that exposes the substrate by sequentially etching the passivation layer and the insulating layer; forming a sacrificial layer to form an ink chamber on the passivation layer to fill the trench; forming a seed layer to provide a plating on the sacrificial layer and the passivation layer; forming a nozzle mold on the seed layer positioned over the heater; forming a plating layer on the seed layer to a predetermined thickness; forming an ink feed hole by etching a rear surface of the substrate to expose the sacrificial layer which is filled in the trench; forming a nozzle by sequentially removing the nozzle mold and the seed layer positioned under the nozzle mold; and forming the ink chamber by removing the sacrificial layer which is exposed by the nozzle and the ink feed hole.
摘要翻译：一种制造喷墨打印头的方法。制造喷墨打印头的方法包括在基板上依次形成绝缘层，加热器和电极，并在绝缘层上形成钝化层以覆盖加热器和电极; 形成通过依次蚀刻钝化层和绝缘层而使衬底暴露的沟槽; 形成牺牲层以在所述钝化层上形成墨水腔以填充所述沟槽; 形成种子层以在所述牺牲层和所述钝化层上提供电镀; 在位于加热器上方的种子层上形成喷嘴模具; 在种子层上形成预定厚度的镀层; 通过蚀刻所述衬底的后表面以暴露所述沟槽中填充的所述牺牲层来形成供墨孔; 通过依次去除位于喷嘴模具下方的喷嘴模具和籽晶层形成喷嘴; 以及通过去除由喷嘴和供墨孔暴露的牺牲层来形成墨室。

39. 发明申请

US20070007620A1 Fuse box of semiconductor device 失效
标题翻译：半导体器件保险丝盒
公开(公告)号：US20070007620A1
公开(公告)日：2007-01-11
申请号：US11321622
申请日：2005-12-30
申请人： Hyung Choi
发明人： Hyung Choi
IPC分类号： H01L29/00
CPC分类号： H01L23/5256 , H01L2924/0002 , H01L2924/00
摘要： A fuse box of a semiconductor device is provided. More specifically, provided is a device of forming a uniformly residual oxide film by rearranging fuse boxes in consideration of an etching ratio depending on plasma density of the semiconductor device to prevent a fuse attack. During a repair etching process to open a fuse box in a chip, an etching loading effect is evenly reflected depending on pattern density of the fuse box so that the residual oxide film is regularly distributed in each fuse of all fuse boxes regardless of the size of an open region. As a result, the fuse attack resulting from an excessive etching process on the oxide film on a small fuse is prevented in fuse blowing to improve yield of FTA (Fixed To Attempt) yield.
摘要翻译：提供半导体器件的保险丝盒。更具体地，提供了考虑到取决于半导体器件的等离子体密度的蚀刻比率来重新布置熔丝盒来形成均匀残留的氧化膜的装置，以防止熔丝攻击。在打开芯片中的保险丝盒的修复蚀刻工艺期间，根据保险丝盒的图案密度均匀地反射刻蚀负载效应，使得残余氧化膜规则地分布在所有保险丝盒的每个保险丝中，而不管其尺寸如何一个开放的地区。结果，在保险丝熔断时，防止了在小熔断器上对氧化膜进行过度蚀刻处理而引起的保险丝攻击，以提高FTA（固定尝试）产量的产量。

40. 发明授权

US07148141B2 Method for manufacturing metal structure having different heights 有权
标题翻译：具有不同高度的金属结构的制造方法
公开(公告)号：US07148141B2
公开(公告)日：2006-12-12
申请号：US11012312
申请日：2004-12-16
申请人： Dong-sik Shim , Chan-bong Jun , Hyung Choi , Hoon Song
发明人： Dong-sik Shim , Chan-bong Jun , Hyung Choi , Hoon Song
IPC分类号： H01L21/44
CPC分类号： H01L21/76885 , H01L21/2885 , H01L24/11 , H01L24/12 , H01L2224/0401 , H01L2224/0603 , H01L2224/13099 , H01L2224/1403 , H01L2924/01005 , H01L2924/01006 , H01L2924/01027 , H01L2924/01033 , H01L2924/01078 , H01L2924/181 , H01L2924/00
摘要： Disclosed is a method for forming a plurality of metal structures having different heights on a semiconductor substrate. The disclosed method for manufacturing a metal structure having different heights includes: forming a plurality of seed layers, to have heights corresponding to the metal structure to be formed, on a semiconductor substrate so that those layers can be electrically separated, performing a plating process using a plating mold, and applying different currents to the respective seed layers so that the plating thickness can be adjusted for each of the seed layers. Accordingly, a plurality of metal structures having different heights can be obtained by a plating mold forming process and a plating process that are performed just once, respectively.
摘要翻译：公开了一种在半导体衬底上形成具有不同高度的多个金属结构体的方法。所公开的制造具有不同高度的金属结构体的方法包括：在半导体衬底上形成多个种子层以具有与要形成的金属结构相对应的高度，使得这些层可以电分离，使用电镀模具，并且向相应的种子层施加不同的电流，使得可以针对每个种子层调整镀层厚度。因此，可以通过分别进行一次的电镀模具成型工序和电镀工序来获得具有不同高度的多个金属结构体。

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