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    • 34. 发明授权
    • Transistors having buried N-type and P-type regions beneath the source region and methods of fabricating the same
    • 晶体管在源极区域下方埋有N型和P型区域及其制造方法
    • US07326962B2
    • 2008-02-05
    • US11012553
    • 2004-12-15
    • Saptharishi Sriram
    • Saptharishi Sriram
    • H01L29/04
    • H01L29/0619H01L29/1608H01L29/2003H01L29/41766H01L29/8128
    • The present invention provides a unit cell of a metal-semiconductor field-effect transistor (MESFET). The unit cell of the MESFET includes a source, a drain and a gate. The gate is disposed between the source and the drain and on an n-type conductivity channel layer. A p-type conductivity region is provided beneath the source and has an end that extends towards the drain. The p-type conductivity region is spaced apart from the n-type conductivity channel region and is electrically coupled to the source. An n-type conductivity region is provided on the p-type conductivity region beneath the source region and extending toward the drain region without extending beyond the end of the p-type conductivity region. Related methods of fabricating MESFETS are also provided.
    • 本发明提供了一种金属半导体场效应晶体管(MESFET)的单元。 MESFET的单元包括源极,漏极和栅极。 栅极设置在源极和漏极之间以及n型导电沟道层上。 在源极下方提供p型导电区域,并且具有朝向漏极延伸的端部。 p型导电区域与n型导电沟道区域间隔开并且电耦合到源极。 在源极区域下方的p型导电性区域上设置n型导电性区域,并且朝向漏极区域延伸,而不延伸超过p型导电性区域的端部。 还提供了制造MESFETS的相关方法。
    • 39. 发明授权
    • Silicon carbide power field effect transistor
    • 碳化硅功率场效应晶体管
    • US5821576A
    • 1998-10-13
    • US745975
    • 1996-11-08
    • Saptharishi Sriram
    • Saptharishi Sriram
    • H01L21/04H01L29/20H01L29/24H01L29/812H01L29/80
    • H01L29/1608H01L21/045H01L29/20H01L29/8128
    • The invention provides for a field effect transistor (FET) which includes a substrate and a buffer layer formed upon the substrate and an active layer formed upon the buffer layer. The active layer includes a gate region, drain region and source region. In addition, a channel region is formed in the active layer intermediate the source region and drain region. The channel region includes a first portion of reduced thickness adjacent the drain region. The active layer may include a recess adjacent the drain region to provide the thin channel region. Preferably, the thickness of the first portion of the channel region is equal to the undepleted channel thickness within the second portion of the channel region adjacent the first portion. The substrate, buffer layer, active layer, and degenerate layers are preferably fabricated of silicon carbide or gallium nitride. Further, the FET preferably includes a p type buffer, n type active layer, and n+ degenerate layers. The FET may also include a surface-effect-suppressive layer which preferably covers portions of the active layer and the degenerate layers.
    • 本发明提供一种场效应晶体管(FET),其包括衬底和形成在衬底上的缓冲层和形成在缓冲层上的有源层。 有源层包括栅极区,漏极区和源极区。 此外,在源极区和漏极区中间的有源层中形成沟道区。 沟道区域包括邻近漏极区域的厚度减小的第一部分。 有源层可以包括邻近漏极区的凹部以提供薄沟道区。 优选地,沟道区域的第一部分的厚度等于与第一部分相邻的沟道区域的第二部分内的未剥离通道厚度。 衬底,缓冲层,有源层和简并层优选由碳化硅或氮化镓制成。 此外,FET优选包括p型缓冲器,n型有源层和n +简并层。 FET还可以包括优选覆盖有源层和简并层的部分的表面效应抑制层。