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    • 31. 发明授权
    • Microelectromechanical high pressure gas microvalve
    • 微机电高压气体微阀
    • US06883774B2
    • 2005-04-26
    • US10277028
    • 2002-10-21
    • Matthew C. NielsenLaura J. MeyerTodd G. WetzelStanton E. WeaverJeffrey B. FortinRenato Guida
    • Matthew C. NielsenLaura J. MeyerTodd G. WetzelStanton E. WeaverJeffrey B. FortinRenato Guida
    • F15C5/00F16K99/00F16K7/12
    • F16K99/0001F15C5/00F16K99/0007F16K99/0015F16K99/0048F16K99/0057F16K2099/0074
    • A microvalve and a method of forming a microvalve. The microvalve comprises first and second layers, a diaphragm member and a switching means. The first and second layers are secured together to form a valve body that forms an inlet opening for receiving fluid, an outlet opening for conducting fluid from the valve body, and a flow channel for conducting fluid from the inlet to the outlet. The diaphragm is disposed between the layers, and is movable between open and closed positions. In these position, the diaphragm, respectively, allows and blocks the flow of fluid from the inlet to the flow channel. The diaphragm is biased to the closed position, and moves from the closed position to the open position when the pressure of fluid in the inlet reaches a preset value. The switching means is connected to the valve body for moving the diaphragm to the closed position against the pressure of fluid in the inlet. Preferably, the microvalve is constructed out of SiC and stainless steel materials, allowing the microvalve to be used in a harsh environment.
    • 一种微型阀和形成微型阀的方法。 微型阀包括第一和第二层,隔膜构件和开关装置。 第一层和第二层被固定在一起以形成阀体,其形成用于接收流体的入口开口,用于从阀体传导流体的出口,以及用于将流体从入口传导到出口的流动通道。 隔膜设置在层之间,并且可在打开位置和关闭位置之间移动。 在这些位置上,隔膜分别允许和阻止流体从入口到流动通道的流动。 隔膜被偏压到关闭位置,并且当入口中的流体的压力达到预设值时,隔膜从关闭位置移动到打开位置。 切换装置连接到阀体,用于抵抗入口中的流体的压力将隔膜移动到关闭位置。 优选地,微型阀由SiC和不锈钢材料制成,允许微型阀在恶劣的环境中使用。
    • 32. 发明授权
    • High pressure, high speed actuator
    • 高压,高速执行器
    • US06774539B2
    • 2004-08-10
    • US10252886
    • 2002-09-23
    • Renato Guida
    • Renato Guida
    • H01L4108
    • H02N2/043F02M59/468F02M2200/21
    • An actuator for applying an actuating force through a total displacement. The actuator includes: an actuator body; n piezo members supported by the body where n is an integer greater than or equal to two, each of the piezo members generating a force and a displacement upon application of a voltage thereon; and n−1 levers rotatably disposed in the body and each having first and second ends corresponding to two of the n piezo members such that the displacements of the n piezo members are accumulated to generate the total displacement at the nth piezo member. Preferably, at least one of the n−1 levers are rotatably disposed in the body such that the displacement from one of the n piezo members acting on the first end of the at least one of the n−1 levers is amplified at the second end of the at least one of the n−1 levers.
    • 用于通过总位移施加致动力的致动器。 致动器包括:致动器主体; n个由身体支撑的压电构件,其中n是大于或等于2的整数,每个压电构件在施加电压时产生力和位移; 以及n-1个杠杆,其可旋转地设置在所述主体中,并且每个具有与所述n个压电构件中的两个对应的第一和第二端,使得所述n个压电构件的位移被累积以产生第n个压电构件的总位移。 优选地,n-1杆中的至少一个可旋转地设置在主体中,使得从作用于n-1杆中的至少一个的第一端的n个压电构件之一的位移在第二端被放大 的n-1个杠杆中的至少一个。
    • 36. 发明授权
    • High resolution micromachining of organic crystals and optical
modulators formed thereby
    • 有机晶体的高分辨率微加工和由此形成的光学调制器
    • US5396362A
    • 1995-03-07
    • US077698
    • 1993-06-18
    • Christopher P. YakymyshynYung S. LiuRenato Guida
    • Christopher P. YakymyshynYung S. LiuRenato Guida
    • G02F1/01G02F1/061G02F1/21G02F1/35G02F1/03
    • G02F1/011G02F1/0118G02F1/061G02F1/3525G02F2001/213
    • Micromachined organic crystals are used in electro-optic modulators to provide high speed modulation capability. Machined modulator blocks of organic crystal material, such as dimethylamino n-methylstilbazolium tosylate (DAST), have smooth surfaces adapted to couple light between the organic crystal and a medium adjoining the crystal in the electro-optic modulator. Electrodes are disposed with respect to the modulator block such that an electric field is generated along a selected axis corresponding to the polar axis of the organic crystal. A method of machining the soft organic crystal adapted for use as a modulator includes illuminating the organic crystal material via an opaque mask having a selected pattern corresponding to a desired machined pattern for the organic crystal. The light illuminating the organic crystal has a wavelength corresponding to strong absorption bands in the organic crystal and is pulsed so as to ablate the surface in correspondence with the pattern in a non-contact self-developing machining process.
    • 微加工有机晶体用于电光调制器以提供高速调制能力。 有机晶体材料的加工调制块,例如二甲基氨基正甲基甲硅烷基甲苯磺酸酯(DAST),具有适于在有机晶体和与电光调制器中的晶体相邻的介质之间耦合光的光滑表面。 相对于调制器块设置电极,使得沿着与有机晶体的极轴对应的选定轴产生电场。 适于用作调制器的软质有机晶体的加工方法包括通过具有对应于有机晶体的所需加工图案的选定图案的不透明掩模照射有机晶体材料。 照射有机晶体的光具有对应于有机晶体中的强吸收带的波长,并且被脉冲化以便在非接触自显影加工过程中与图案相对应地烧蚀表面。