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    • 31. 发明申请
    • TROUBLESHOOTING SUPPORT DEVICE, TROUBLESHOOTING SUPPORT METHOD AND STORAGE MEDIUM HAVING PROGRAM STORED THEREIN
    • 故障排除支持设备,故障排除支持方法和存储程序的存储介质
    • US20080178042A1
    • 2008-07-24
    • US11942284
    • 2007-11-19
    • Hiroaki MOCHIZUKIMasami Mochizuki
    • Hiroaki MOCHIZUKIMasami Mochizuki
    • G06F11/00
    • G05B19/4184G05B2219/32222G05B2219/45031Y02P90/14Y02P90/22
    • A troubleshooting support device includes a keyword file storage unit in which keyword files holding keywords constituted with character strings contained in logs related to trouble that occurs in the substrate processing apparatus stored in advance, are stored. A keyword to be used for log search, selected from a keyword file specified based upon input information provided via an input unit, is set and also, a category-specific log file to be used for log analysis is set based upon input information provided via the input unit. Logs in the category-specific log file having been set are extracted and incorporated, and an analysis log file is created by sorting the extracted logs in time sequence. When the logs in the analysis log file are displayed at a display unit, a log containing the keyword having been set is located by searching through the analysis log file and is displayed in a highlighted display.
    • 疑难解答支持装置包括关键字文件存储单元,其中存储了保存包含在与预先存储的基板处理装置中发生的故障相关的日志中的字符串构成的关键字的关键字文件。 设置用于从基于通过输入单元提供的输入信息指定的关键字文件中选择的用于日志搜索的关键字,并且还将基于通过以下方式提供的输入信息来设置用于日志分析的类别特定日志文件: 输入单元。 提取并合并已设置的特定于类别的日志文件中的日志,并按时间顺序排列提取的日志来创建分析日志文件。 当分析日志文件中的日志显示在显示单元上时,通过搜索分析日志文件来定位包含已设置的关键字的日志,并显示在突出显示中。