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31. 发明申请

US20060216930A1 Post ECP multi-step anneal/H2 treatment to reduce film impurity 有权
标题翻译：后期ECP多步退火/ H2处理以降低膜杂质
公开(公告)号：US20060216930A1
公开(公告)日：2006-09-28
申请号：US11347946
申请日：2006-02-06
申请人： Hsien-Ping Feng , Jung-Chih Tsao , Hsi-Kuei Cheng , Chih-Tsung Lee , Ming-Yuan Cheng , Steven Lin , Ray Chuang , Chi-Wen Liu
发明人： Hsien-Ping Feng , Jung-Chih Tsao , Hsi-Kuei Cheng , Chih-Tsung Lee , Ming-Yuan Cheng , Steven Lin , Ray Chuang , Chi-Wen Liu
IPC分类号： H01L21/4763
CPC分类号： H01L21/76877 , H01L21/2885
摘要： A method of forming a copper interconnect in a dual damascene scheme is described. After a diffusion barrier layer and seed layer are sequentially formed on the sidewalls and bottoms of a trench and via in a dielectric layer, a first copper layer is deposited by a first ECP process at a 10 mA/cm2 current density to fill the via and part of the trench. A first anneal step is performed to remove carbon impurities and optionally includes a H2 plasma treatment. A second ECP process with a first deposition step at a 40 mA/cm2 current density and second deposition step at a 60 mA/cm2 current density is used to deposit a second copper layer that overfills the trench. After a second anneal step, a CMP process planarizes the copper layers. Fewer copper defects, reduced S, Cl, and C impurities, and improved Rc performance are achieved by this method.
摘要翻译：描述了在双镶嵌方案中形成铜互连的方法。在扩散阻挡层和种子层依次形成在电介质层中的沟槽和通孔的侧壁和底部上之后，通过第一ECP工艺以10mA / cm 2 / >电流密度以填充通孔和部分沟槽。进行第一退火步骤以除去碳杂质，并且任选地包括H 2 O 3等离子体处理。使用在40mA / cm 2电流密度下的第一沉积步骤和以60mA / cm 2电流密度进行第二沉积步骤的第二个ECP工艺来沉积第二铜层超过沟槽。在第二退火步骤之后，CMP工艺使铜层平坦化。通过该方法可以实现更少的铜缺陷，降低的S，Cl和C杂质，以及Rc性能的提高。

32. 发明申请

US20060213778A1 Method for electrochemical plating on semiconductor wafers 审中-公开
标题翻译：半导体晶片电化学电镀方法
公开(公告)号：US20060213778A1
公开(公告)日：2006-09-28
申请号：US11089404
申请日：2005-03-23
申请人： Hsi-Kuei Cheng , Steven Lin , Chih-Chang Huang , Tzu-Ling Liao , Hsien-Ping Peng , Ming-Yuan Cheng , Ying-Jing Lu , Chieh-Tsao Wang , Ray Chuang , Chen-Peng Fan
发明人： Hsi-Kuei Cheng , Steven Lin , Chih-Chang Huang , Tzu-Ling Liao , Hsien-Ping Peng , Ming-Yuan Cheng , Ying-Jing Lu , Chieh-Tsao Wang , Ray Chuang , Chen-Peng Fan
IPC分类号： C25D5/18 , C25D5/02
CPC分类号： C25D5/18 , C25D5/02 , C25D7/123 , H01L21/2885
摘要： A method of electroplating conductive material on semiconductor wafers improves deposited film quality by providing greater control over the formation of the film grain structure. Better grain size control is achieved by applying a continuous DC plating current to the wafer which avoids sharp discontinuities in the current as the applied current is increased in successive stages during a plating cycle. Current discontinuities are avoided by gradually increasing the current in a ramp-like fashion between the successive plating stages.
摘要翻译：在半导体晶片上电镀导电材料的方法通过提供对薄膜晶粒结构的形成的更大控制来提高沉积膜质量。通过向晶片施加连续的直流电镀电流来实现更好的晶粒尺寸控制，其避免了在电镀循环期间的连续阶段中所施加的电流增加的电流中的尖锐的不连续性。通过在连续的电镀阶段之间以斜坡状的方式逐渐增加电流来避免电流不连续性。

33. 发明申请

US20060196765A1 Metallization target optimization method providing enhanced metallization layer uniformity 审中-公开
标题翻译：金属化目标优化方法提供增强的金属化层均匀性
公开(公告)号：US20060196765A1
公开(公告)日：2006-09-07
申请号：US11074524
申请日：2005-03-07
申请人： Hsi-Kuei Cheng , Chieh-Tsao Wang , Hsien-Ping Feng , Min-Yuan Cheng , Jung-Chin Tsao , Steven Lin , Ray Chuang , Chyi-Tsong NI
发明人： Hsi-Kuei Cheng , Chieh-Tsao Wang , Hsien-Ping Feng , Min-Yuan Cheng , Jung-Chin Tsao , Steven Lin , Ray Chuang , Chyi-Tsong NI
IPC分类号： C23C14/32 , C23C14/00
CPC分类号： C23C14/165 , C23C14/0641 , C23C14/0682 , C23C14/3421 , C23C14/54 , H01J37/32568 , H05K3/16
摘要： A method for forming a microelectronic layer while employing a sputtering method employs a reactor chamber. A sputtering target and a substrate are positioned within the reactor chamber, along with a sputtering target heater at a side of sputtering target opposite the substrate. At least one of: (1) a heater to sputtering target distance; (2) sputtering power; (3) deposition time; and (4) sputtering gas flow rate, is controlled in accord with a pre-determined function of sputtering target lifetime to provide enhanced uniformity of the deposited layer.
摘要翻译：采用溅射法形成微电子层的方法采用反应室。溅射靶和基板位于反应器室内，与溅射靶相对的基板上的溅射靶加热器一起。以下至少一个：（1）加热器以溅射目标距离; （2）溅射功率; （3）沉积时间; 和（4）溅射气体流速，根据溅射靶寿命的预定功能进行控制，以提供沉积层的均匀性。

34. 发明申请

US20050245064A1 Method for preventing voids in metal interconnects 有权
标题翻译：防止金属互连中空隙的方法
公开(公告)号：US20050245064A1
公开(公告)日：2005-11-03
申请号：US10835315
申请日：2004-04-28
申请人： Jung-Chih Tsao , Chi-Wen Liu , Si-Kua Cheng , Che-Tsao Wang , Steven Lin , Hsien-Ping Feng , Chen-Peng Fan
发明人： Jung-Chih Tsao , Chi-Wen Liu , Si-Kua Cheng , Che-Tsao Wang , Steven Lin , Hsien-Ping Feng , Chen-Peng Fan
IPC分类号： H01L21/00 , H01L21/4763 , H01L21/687 , H01L21/768
CPC分类号： H01L21/68728 , H01L21/67109 , H01L21/68707 , H01L21/76877
摘要： A novel method for preventing the formation of voids in metal interconnects fabricated on a wafer, particularly during a thermal anneal process, is disclosed. The method includes fabricating metal interconnects between metal lines on a wafer. During a thermal anneal process carried out to reduce electrical resistance of the interconnects, the wafer is positioned in spaced-apart relationship to a wafer heater. This spacing configuration facilitates enhanced stabilility and uniformity in heating of the wafer by reducing the presence of particles on and providing a uniform flow of heated air or gas against and the wafer backside. This eliminates or at least substantially reduces the formation of voids in the interconnects during the anneal process.
摘要翻译：公开了一种用于防止在晶片上制造的金属互连中空隙形成的新方法，特别是在热退火工艺期间。该方法包括在晶片上的金属线之间制造金属互连。在进行用于降低互连的电阻的热退火工艺期间，晶片以与晶片加热器隔开的关系定位。这种间隔结构通过减少加热的空气或气体抵靠和晶片背面的颗粒的存在而提高晶片加热的稳定性和均匀性。这在退火过程中消除或至少基本上减少了互连件中空隙的形成。

35. 发明授权

US06884596B2 Screening and therapeutic methods for promoting wakefulness and sleep 失效
标题翻译：用于促进觉醒和睡眠的筛查和治疗方法
公开(公告)号：US06884596B2
公开(公告)日：2005-04-26
申请号：US09932161
申请日：2001-08-17
申请人： Olivier Civelli , Steven Lin
发明人： Olivier Civelli , Steven Lin
IPC分类号： A61K31/00 , A61P5/02 , A61P5/04 , A61P25/08 , G01N33/74 , G01N33/53 , A61K38/00 , G01N33/566 , G01N33/567
CPC分类号： G01N33/74 , A61K31/00
摘要： The invention provides methods of screening for a compound for promoting wakefulness in a mammal. The method is practiced by providing a compound that is a PrRP receptor agonist and determining the ability of the compound to promote wakefulness. Also provided by the invention are methods of screening for a compound for promoting sleep in a mammal. The methods are practiced by providing a compound that is a PrRP receptor antagonist and determining the ability of the compound to promote sleep. In addition, the invention provides a method of promoting wakefulness in a mammal. The method is practiced by administering to a mammal an effective amount of a PrRP receptor agonist. The invention further provides a method of promoting sleep in a mammal. The method is practiced by administering to a mammal an effective amount of a PrRP receptor antagonist.
摘要翻译：本发明提供筛选用于促进哺乳动物觉醒的化合物的方法。该方法通过提供作为PrRP受体激动剂的化合物并确定化合物促进觉醒的能力来实施。本发明还提供筛选用于促进哺乳动物睡眠的化合物的方法。该方法通过提供作为PrRP受体拮抗剂的化合物并确定化合物促进睡眠的能力来实施。此外，本发明提供了一种促进哺乳动物的觉醒的方法。该方法通过向哺乳动物施用有效量的PrRP受体激动剂来实施。本发明还提供一种促进哺乳动物睡眠的方法。该方法通过向哺乳动物施用有效量的PrRP受体拮抗剂来实施。

36. 发明授权

US6055364A Content-based filtering of multicast information 失效
标题翻译：基于内容的组播信息过滤
公开(公告)号：US6055364A
公开(公告)日：2000-04-25
申请号：US904219
申请日：1997-07-31
申请人： Tony Speakman , Alex G. Tweedly , Steven Lin , Dino Farinacci
发明人： Tony Speakman , Alex G. Tweedly , Steven Lin , Dino Farinacci
IPC分类号： H04L12/18 , H04L29/06 , H04L29/08 , H04L29/12 , H04L12/00
CPC分类号： H04L29/12047 , H04L12/1886 , H04L29/06 , H04L29/12009 , H04L61/15 , H04L12/185 , H04L67/2828 , H04L69/329
摘要： The invention provides a method and system for content-based filtering of multicast information. A set of sources (S) which desire to distribute potentially large numbers of categories of differing information each associates a content descriptor (CD) with messages including information in those categories, so that a set of recipients (R) can receive information in at least some of those categories. A mapping server (M) associates a multicast address (MA) and a content mask (CM) with each content descriptor, so that network elements (N), such as routers, in the network can distribute only those messages which are of interest to recipients in multicast distribution trees for those multicast addresses. Each source generates content descriptors for each differentiable topic in a tree structured hierarchy, and obtains a multicast address and a content mask for the broadest content descriptor it is capable of distributing. Each recipient obtains the associated source, multicast address, and content mask, for each content descriptor of interest, and uses that information to join the multicast distribution tree for that information. Each network element between the source and the recipient determines what information it must forward for further distribution in response to the content descriptors, content masks, multicast addresses, and multicast distribution trees.
摘要翻译：本发明提供了一种用于基于内容的组播信息过滤的方法和系统。一组希望分发潜在的大量不同信息类别的源（S），每个源将内容描述符（CD）与包括这些类别中的信息的消息相关联，使得一组接收者（R）可以至少接收信息其中一些类别。映射服务器（M）将多播地址（MA）和内容掩码（CM）与每个内容描述符相关联，使得网络中的诸如路由器的网络元素（N）可以仅分发那些感兴趣的消息这些组播地址的组播分发树中的接收者。每个源在树结构化层次中为每个可区分主题生成内容描述符，并获得能够分发的最广泛内容描述符的多播地址和内容掩码。每个收件人为每个感兴趣的内容描述符获取相关联的源，多播地址和内容掩码，并使用该信息加入该信息的多播分发树。源和接收方之间的每个网络元素确定响应于内容描述符，内容掩码，多播地址和多播分发树，它必须转发用于进一步分发的信息。

37. 外观设计

USD379057S Inlaid letter opener 失效
公开(公告)号：USD379057S
公开(公告)日：1997-05-06
申请号：US48553
申请日：1996-01-03
申请人： Steven Lin
设计人： Steven Lin

38. 外观设计

USD364892S Pen 失效
公开(公告)号：USD364892S
公开(公告)日：1995-12-05
申请号：US31622
申请日：1994-12-01
申请人： Steven Lin
设计人： Steven Lin

39. 发明授权

US09106506B2 Filter-based forwarding in a network 有权
标题翻译：网络中基于过滤器的转发
公开(公告)号：US09106506B2
公开(公告)日：2015-08-11
申请号：US12878849
申请日：2010-09-09
申请人： Ken Kuwabara , Steven Lin , Michael Langdon
发明人： Ken Kuwabara , Steven Lin , Michael Langdon
IPC分类号： H04L12/701 , H04L12/723 , H04L12/741 , H04L29/06
CPC分类号： H04L45/00 , H04L45/50 , H04L45/54 , H04L69/22
摘要： A router receives a packet at an ingress interface. The router classifies the received packet based on at least a first field value contained in the header of the packet. According to the classification of the received packet, the router associates one of the plurality of forwarding tables to the packet. The router then performs a lookup operation in the associated forwarding table according to at least a second field value contained in the header of the packet. Based on the lookup operation, the router determines an egress interface and transmits the received packet from the determined egress interface.
摘要翻译：路由器在入口接口接收数据包。所述路由器至少基于所述分组报头中包含的第一字段值对接收到的分组进行分类。根据接收到的分组的分类，路由器将多个转发表中的一个与该分组相关联。然后，路由器根据分组头部中的至少第二字段值在相关联的转发表中执行查找操作。基于查找操作，路由器确定出口接口并从确定的出口接口发送接收的分组。

40. 发明授权

US09032095B1 Routing device having multiple logical routers 有权
标题翻译：具有多个逻辑路由器的路由设备
公开(公告)号：US09032095B1
公开(公告)日：2015-05-12
申请号：US10753026
申请日：2004-01-06
申请人： Paul S. Traina , Manoj Leelanivas , Steven Lin , Nischal Sheth , Wing Eng , Andrew H. Heffernan
发明人： Paul S. Traina , Manoj Leelanivas , Steven Lin , Nischal Sheth , Wing Eng , Andrew H. Heffernan
IPC分类号： G06F15/173 , H04L12/751 , H04L29/06 , H04L12/701 , H04L12/24
CPC分类号： H04L45/02 , H04J14/0227 , H04J14/0241 , H04L12/2856 , H04L12/2874 , H04L29/06 , H04L41/0213 , H04L41/0813 , H04L41/0893 , H04L45/00 , H04L45/44 , H04L45/586 , H04L63/0272 , H04L67/34
摘要： Techniques are described for implementing one or more logical routers within a single physical routing device. These logical routers, as referred to herein, are logically isolated in the sense that they achieve operational and organizational isolation within the routing device without requiring the use of additional or redundant hardware, e.g., additional hardware-based routing controllers. The routing device may, for example, include a computing platform, and a plurality of software process executing within the computing platform, wherein the software processes operate as logical routers. The routing device may include a forwarding component shared by the logical routers to forward network packets received from a network in accordance with the forwarding tables.
摘要翻译：描述了用于在单个物理路由设备内实现一个或多个逻辑路由器的技术。这些逻辑路由器在逻辑上是隔离的，因为它们实现路由设备内的操作和组织隔离，而不需要使用额外的或冗余的硬件，例如附加的基于硬件的路由控制器。路由设备可以例如包括计算平台和在计算平台内执行的多个软件进程，其中软件进程作为逻辑路由器操作。路由设备可以包括由逻辑路由器共享的转发组件，以转发根据转发表从网络接收的网络分组。

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