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    • 31. 发明授权
    • Optical encoder for detecting changes in diffraction interference patterns
    • 用于检测衍射干涉图案变化的光学编码器
    • US06835924B2
    • 2004-12-28
    • US10229040
    • 2002-08-28
    • Katsunori KawanoTatsuya MaruyamaJiro MinabeShin Yasuda
    • Katsunori KawanoTatsuya MaruyamaJiro MinabeShin Yasuda
    • G01D534
    • G01D5/38
    • Laser light emitted from a laser light source is irradiated onto a transmission-type scale, and is diffracted by a polarization hologram recorded on the transmission-type scale. Only polarization directions of ±1-order diffracted lights, among diffracted lights, are rotated by 90°. The ±1-order diffracted lights interfere with one another such that interference fringes are formed on a light-receiving surface of a photo-detector. Interference light of the ±1-order diffracted lights is transmitted through a polarizing plate. A portion of transmitted light is passed through respective slits of a slit plate and is irradiated onto the photo-detector, and intensity of irradiated light is detected. On the other hand, 0-order diffracted light, ±2-order diffracted lights, and the like, whose polarization directions are not rotated, cannot pass through the polarizing plate, and are blocked before being detected at the photo-detector.
    • 从激光光源发射的激光照射到透射型标尺上,并被记录在透射型标尺上的偏振全息图衍射。 衍射光中只有±1级衍射光的偏振方向旋转90°。 ±1级衍射光彼此干涉,使得干涉条纹形成在光检测器的光接收表面上。 ±1级衍射光的干涉光透过偏光板。 透射光的一部分通过狭缝板的相应狭缝并照射到光检测器上,并且检测照射光的强度。 另一方面,偏振方向不旋转的0级衍射光,±2级衍射光等不能通过偏振片,并且在光检测器被检测之前被阻挡。