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31. 发明申请

US20120259198A1 SUBJECT INFORMATION PROCESSING APPARATUS 审中-公开
标题翻译：主体信息处理装置
公开(公告)号：US20120259198A1
公开(公告)日：2012-10-11
申请号：US13518243
申请日：2011-02-14
申请人： Kenichi Nagae , Yoshitaka Baba
发明人： Kenichi Nagae , Yoshitaka Baba
IPC分类号： A61B6/00
CPC分类号： A61B5/0095 , A61B8/13 , G01S7/52034
摘要： There is provided a subject information processing apparatus including a first acoustic conversion element that receives an acoustic wave having a first frequency reflected inside a subject and converts the acoustic wave into an analog signal, a second acoustic conversion element that receives an acoustic wave having a second frequency generated when light is irradiated to a subject and converts the acoustic wave into an analog signal, an A/D converter that converts the analog signal into a digital signal, a data memory that retains the digital signal, and a controller that instructs the data memory to output the digital signal at a predetermined sampling frequency for each receiving axis.
摘要翻译：提供了一种被摄体信息处理设备，包括：第一声转换元件，其接收在对象内反射的第一频率的声波，并将声波转换为模拟信号;第二声转换元件，接收具有第二声当光照射到被摄体并将声波转换为模拟信号时产生的频率，将模拟信号转换为数字信号的A / D转换器，保存数字信号的数据存储器和指示数据的控制器存储器，用于以每个接收轴的预定采样频率输出数字信号。

32. 发明授权

US08143588B2 Deflector array, exposure apparatus, and device manufacturing method 有权
标题翻译：偏转器阵列，曝光装置和装置制造方法
公开(公告)号：US08143588B2
公开(公告)日：2012-03-27
申请号：US12815507
申请日：2010-06-15
申请人： Kenichi Nagae , Masatoshi Kanamaru
发明人： Kenichi Nagae , Masatoshi Kanamaru
IPC分类号： G21K1/087
CPC分类号： H01J37/1477 , B82Y10/00 , B82Y40/00 , H01J37/30 , H01J37/3174 , H01J2237/0437 , H01J2237/1518
摘要： A deflector array includes a plurality of deflectors, which deflect charged particle beams, arrayed on a substrate. Each of the plurality of deflectors includes a single opening formed in the substrate, and each of the plurality of deflectors includes a pair of electrodes that oppose each other through the opening and are configured to deflect a single charged particle beam. The plurality of deflectors are arrayed such that a length of the pair of electrodes in a longitudinal direction thereof is not less than a distance between centers of two of the plurality of deflectors that are located nearest to each other. The plurality of deflectors is arrayed to form a checkerboard lattice, and two openings of the two of the plurality of deflectors overlap in the longitudinal direction.
摘要翻译：偏转器阵列包括多个偏转器，其偏转排列在基板上的带电粒子束。多个偏转器中的每一个包括形成在基板中的单个开口，并且多个偏转器中的每一个包括通过开口彼此相对的一对电极，并且被配置为偏转单个带电粒子束。多个偏转器被排列成使得一对电极在其纵向方向上的长度不小于彼此最靠近的多个偏转器中的两个偏转器的中心之间的距离。排列多个偏转器以形成棋盘格格，并且多个偏转器中的两个的两个开口在纵向方向上重叠。

33. 发明申请

US20110083511A1 SIGNAL PROCESSING APPARATUS, ULTRASONIC APPARATUS, CONTROL METHOD FOR SIGNAL PROCESSING APPARATUS, AND CONTROL METHOD FOR ULTRASONIC APPARATUS 有权
标题翻译：信号处理装置，超声波装置，信号处理装置的控制方法及超声波装置的控制方法
公开(公告)号：US20110083511A1
公开(公告)日：2011-04-14
申请号：US12995536
申请日：2009-07-24
申请人： Hirofumi Taki , Kenichi Nagae , Toru Sato
发明人： Hirofumi Taki , Kenichi Nagae , Toru Sato
IPC分类号： G01N29/04
CPC分类号： G01S7/52036 , A61B8/0825 , A61B8/0833 , G01S7/52073 , G01S15/8977
摘要： A signal processing apparatus scans a beam of elastic waves into an object to be examined, acquires received waveform data of a plurality of scan lines, and performs signal processing to form a tomographic image of said object to be examined from the received waveform data of the plurality of scan lines. The signal processing apparatus includes a scan line correlation calculation part (009) that calculates a correlation value of received waveform data between a first scan line and a second scan line that has a prescribed correlation with the first scan line, for a plurality of positions on the scan lines, and a correlation change position extraction part (010) that extracts, from among the plurality of positions on said scan lines, a position at which the correlation value becomes a value different from a prescribed value as a position at which a unique region can exist.
摘要翻译：信号处理装置将弹性波束扫描成待检查对象，获取多条扫描线的接收波形数据，并根据接收到的波形数据进行信号处理，以形成要检查对象的断层图像多条扫描线。信号处理装置包括：扫描线相关计算部（009），对于多个位置，计算与第一扫描线具有规定相关性的第一扫描线与第二扫描线之间的接收波形数据的相关值扫描线以及从所述扫描线的多个位置中提取相关值成为与规定值不同的值的位置的相关变化位置提取部（010）区域可以存在。

34. 发明申请

US20100043546A1 SENSOR AND METHOD OF MANUFACTURING THE SAME 有权
标题翻译：传感器及其制造方法
公开(公告)号：US20100043546A1
公开(公告)日：2010-02-25
申请号：US12516007
申请日：2007-11-29
申请人： Atsushi Kandori , Masao Majima , Kenichi Nagae , Yasuyoshi Takai
发明人： Atsushi Kandori , Masao Majima , Kenichi Nagae , Yasuyoshi Takai
IPC分类号： G01C19/56 , H01L21/30
CPC分类号： G01C19/5719 , G01P15/0802 , G01P15/124 , G01P15/125
摘要： Provided is a sensor including a movably supported movable element and an opposing member. The sensor detects a relative positional relationship between the movable element and the opposing member which are provided with a spacing therebetween The opposing member has an impurity-doped portion which is provided to one of an opposing portion which is opposed to the movable element and an adjoining portion which adjoins the opposing portion. At least a part of the impurity-doped portion is formed on an opposite surface opposite to a surface which is opposed to the movable element, from which opposite surface an electrical wiring is led out.
摘要翻译：提供一种传感器，包括可移动支撑的可移动元件和相对构件。传感器检测可移动元件和相对构件之间的间隔的相对位置关系。相对构件具有杂质掺杂部分，该杂质掺杂部分设置在与可移动元件相对的相对部分中的一个上，邻接相对部分的部分。杂质掺杂部分的至少一部分形成在与可移动元件相对的表面相对的相对表面上，从该导体的相对表面引出电线。

35. 发明申请

US20080017807A1 DEFLECTOR ARRAY, EXPOSURE APPARATUS, AND DEVICE MANUFACTURING METHOD 有权
标题翻译：偏转器阵列，曝光装置和装置制造方法
公开(公告)号：US20080017807A1
公开(公告)日：2008-01-24
申请号：US11779498
申请日：2007-07-18
申请人： Kenichi Nagae , Masatoshi Kanamaru
发明人： Kenichi Nagae , Masatoshi Kanamaru
IPC分类号： G21K1/087
CPC分类号： H01J37/1477 , B82Y10/00 , B82Y40/00 , H01J37/30 , H01J37/3174 , H01J2237/0437 , H01J2237/1518
摘要： This invention discloses a deflector array in which a plurality of deflectors which deflect charged particle beams are arrayed on a substrate. Each deflector includes an opening formed on the substrate, and a pair of electrodes opposing each other through the opening. The length of the pair of electrodes in the longitudinal direction is not less than the distance between the centers of two deflectors equivalent to the plurality of deflectors, which are located nearest to each other.
摘要翻译：本发明公开了一种偏转器阵列，其中将带电粒子束偏转的多个偏转器排列在基板上。每个偏转器包括形成在基板上的开口和通过该开口相对的一对电极。一对电极在长度方向上的长度不小于彼此最靠近的多个偏转器等效的两个偏转器的中心之间的距离。

36. 发明授权

US06946662B2 Multi-charged beam lens, charged-particle beam exposure apparatus using the same, and device manufacturing method 有权
标题翻译：多光束透镜，使用其的带电粒子束曝光装置及其制造方法
公开(公告)号：US06946662B2
公开(公告)日：2005-09-20
申请号：US10615955
申请日：2003-07-10
申请人： Haruhito Ono , Kenichi Nagae , Masaki Takakuwa , Yoshinori Nakayama , Harunobu Muto
发明人： Haruhito Ono , Kenichi Nagae , Masaki Takakuwa , Yoshinori Nakayama , Harunobu Muto
IPC分类号： G21K1/08 , H01J3/14 , H01J37/12 , H01J37/317
CPC分类号： B82Y10/00 , B82Y40/00 , H01J37/12 , H01J37/3177 , H01J2237/1205
摘要： There is provided a multi-charged beam lens constituted by stacking, via fiber chips serving as insulator members along the optical path of a charged beam, a plurality of electrodes having a charged beam passing region where a plurality of charged beam apertures are formed. The electrodes have shield apertures between the charged beam passing region and the fiber chips. A conductive shield extends through the shield apertures without contacting the electrodes, and cuts off a straight path which connects the charged beam passing region and the fiber chips serving as insulator members. This prevents the influence of charge-up of the insulator members on an electron beam in the multi-charged beam lens.
摘要翻译：提供了一种多带电波束透镜，其通过沿着带电波束的光路用作绝缘体构件的光纤芯片堆叠，具有形成有多个带电束孔的带电光束通过区域的多个电极构成。电极在带电光束通过区域和光纤芯片之间具有屏蔽孔。导电屏蔽层不会接触电极而延伸通过屏蔽孔，并且切断连接充电光束通过区域和用作绝缘体构件的光纤芯片的直线路径。这样可以防止绝缘体的充电对多电荷束透镜中的电子束的影响。

37. 发明申请

US20050077475A1 Multi-charged beam lens and charged beam exposure apparatus using the same 有权
标题翻译：多光束透镜和使用其的带电束曝光装置
公开(公告)号：US20050077475A1
公开(公告)日：2005-04-14
申请号：US10902789
申请日：2004-08-02
申请人： Kenichi Nagae , Haruhito Ono , Sayaka Tanimoto
发明人： Kenichi Nagae , Haruhito Ono , Sayaka Tanimoto
IPC分类号： G03F7/20 , H01J37/02 , H01J37/12 , H01J37/14 , H01J37/305 , H01J37/317 , H01L21/027 , H01J3/14
CPC分类号： B82Y10/00 , B82Y40/00 , H01J37/023 , H01J37/12 , H01J37/3177
摘要： A multi-charged beam lens formed by stacking three or more electrode substrates via insulators comprises a voltage application portion arranged on at least one of said at least three substrates and an insulating portion which insulates said voltage application portion from said insulators.
摘要翻译：通过绝缘体堆叠三个或更多个电极基板而形成的多电荷束流透镜包括布置在所述至少三个基板中的至少一个基板上的电压施加部分和将所述电压施加部分与所述绝缘体绝缘的绝缘部分。

38. 发明授权

US06348427B1 High-thermal-expansion glass ceramic sintered product 有权
标题翻译：高热膨胀玻璃陶瓷烧结产品
公开(公告)号：US06348427B1
公开(公告)日：2002-02-19
申请号：US09495567
申请日：2000-02-01
申请人： Noriaki Hamada , Hideto Yonekura , Kenichi Nagae , Youji Furukubo , Yoshihiro Nakao , Masahiko Higashi
发明人： Noriaki Hamada , Hideto Yonekura , Kenichi Nagae , Youji Furukubo , Yoshihiro Nakao , Masahiko Higashi
IPC分类号： C03C100
CPC分类号： C03C10/0036 , H01L23/49894 , H01L2224/48091 , H01L2224/48227 , H01L2924/00011 , H01L2924/01047 , H01L2924/09701 , H01L2924/15311 , H01L2924/16195 , H05K1/0306 , H01L2924/00014 , H01L2924/00 , H01L2924/01005
摘要： A glass ceramic sintered product obtained by sintering a mixture powder containing a BaO-containing glass, metal oxide particles having a coefficient of linear thermal expansion at 40 to 400° C. of not smaller than 6 ppm/°C., and a Zr compound and, particularly, containing the Zr compound in an amount of from 0.1 to 30% by weight calculated as Zr02, and exhibiting a coefficient of linear thermal expansion at 40 to 400° C. of from 8.5 to 18 ppm/°C. The glass ceramic sintered product exhibits excellent resistance against chemicals and does not discolor even when subjected to treatment with an acidic or alkaline solution in the step of plating. A wiring board using the glass ceramic sintered product as an insulating substrate exhibits a coefficient of linear thermal expansion substantially similar to that of an external circuit board, effectively suppressing the occurrence of thermal stress and cracking.
摘要翻译：将通过烧结含有BaO的玻璃的混合粉末，40〜400℃的线性热膨胀系数的金属氧化物粒子为6ppm /℃以上的玻璃陶瓷烧结体和Zr化合物特别是含有以ZrO 2计为0.1〜30重量％的Zr化合物，在40〜400℃下的线热膨胀系数为8.5〜18ppm /℃。玻璃陶瓷烧结产品表现出优异的耐化学性，即使在电镀步骤中用酸性或碱性溶液进行处理也不会变色。使用玻璃陶瓷烧结体作为绝缘基板的布线基板具有与外部电路基板基本相似的线性热膨胀系数，有效地抑制了热应力和开裂的发生。

39. 发明授权

US10426440B2 Subject information obtaining apparatus, method for obtaining subject information, and program 有权
公开(公告)号：US10426440B2
公开(公告)日：2019-10-01
申请号：US14342342
申请日：2012-08-29
申请人： Kenichi Nagae , Hirofumi Taki , Takuya Sakamoto , Toru Sato
发明人： Kenichi Nagae , Hirofumi Taki , Takuya Sakamoto , Toru Sato
IPC分类号： A61B8/08 , G01S7/52 , G01S15/89
摘要： A subject information obtaining apparatus includes: a plurality of conversion elements configured to receive an elastic wave and convert the elastic wave into a plurality of received signals, a storage unit configured to store a plurality of reference signals corresponding to shapes of the object inside a subject, and an FDI adaptive processing unit configured to execute the FDI method and the adaptive signal processing using the plurality of received signals and two or more reference signals among the plurality of reference signals, in order to obtain two or more power intensity distributions for the two or more reference signals.

40. 发明授权

US09448100B2 Signal processing apparatus 有权
标题翻译：信号处理装置
公开(公告)号：US09448100B2
公开(公告)日：2016-09-20
申请号：US13981233
申请日：2012-02-01
申请人： Kenichi Nagae , Hirofumi Taki , Toru Sato
发明人： Kenichi Nagae , Hirofumi Taki , Toru Sato
IPC分类号： G01F17/00 , G01H1/00 , A61B8/14 , A61B8/00 , A61B8/08 , G01S7/52 , G01S15/89
CPC分类号： G01H1/00 , A61B8/14 , A61B8/4488 , A61B8/483 , A61B8/5207 , G01S7/52036 , G01S7/52073 , G01S15/8977
摘要： Provided is a signal processing apparatus including: a transducer that performs scanning through the interior of an object and acquires received waveform data of a plurality of scanlines; an intensity screening unit that outputs a high intensity position at which signal intensity calculated from the received waveform data is higher than a first predetermined value; a correlation calculation unit that calculates a correlation value in a constant-width division for received waveform data of a first scanline and of a second scanline having a predetermined correlation with the first scanline; a position extraction unit that extracts, as a candidate position of a singular region, a position which corresponds to a high intensity position and for which the correlation value is lower than a second predetermined value; and an image processor that performs signal processing of generating image data of the object on the basis of the received waveform data.
摘要翻译：提供一种信号处理装置，包括：换能器，其通过物体内部进行扫描并获取多条扫描线的接收波形数据; 强度筛选单元，其输出从接收波形数据计算出的信号强度高于第一预定值的高强度位置; 相关计算单元，计算与第一扫描线具有预定相关性的第一扫描线和第二扫描线的接收波形数据的恒定宽度除法的相关值; 位置提取单元，其提取与高强度位置对应的位置，并且所述相关值低于第二预定值的单个区域的候选位置; 以及图像处理器，其基于接收到的波形数据执行产生对象的图像数据的信号处理。

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