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31. 发明授权

US07477388B1 Sample masking in ellipsometer and the like systems including detection of substrate backside reflections 有权
标题翻译：椭偏仪等样品系统中的样品掩蔽，包括衬底背面反射的检测
公开(公告)号：US07477388B1
公开(公告)日：2009-01-13
申请号：US11439491
申请日：2006-05-24
申请人： Martin M. Liphardt , James D. Welch , Corey L. Bungay , John A. Woollam
发明人： Martin M. Liphardt , James D. Welch , Corey L. Bungay , John A. Woollam
IPC分类号： G01J4/00
CPC分类号： G01N21/211
摘要： A system and method of preventing substrate backside reflected components in a beam of electromagnetic radiation caused to reflect from the surface of a sample in an ellipsometer or polarimeter system, involving placing a mask adjacent to the surface of the sample which allows electromagnetic radiation to access the sample over only a limited area, wherein the mask can include detector elements for collecting electromagnetic radiation reflected from the sample backside.
摘要翻译：防止在电磁辐射束中的基板背面反射部件在椭圆光度计或偏振计系统中从样品的表面反射的系统和方法，包括将掩模放置在与样品表面相邻的位置，允许电磁辐射进入仅在有限区域进行采样，其中掩模可以包括用于收集从样品背面反射的电磁辐射的检测器元件。

32. 发明授权

US07385698B1 System and method of selectively monitoring sample front and backside reflections in ellipsometer and the like systems 有权
标题翻译：选择性地监测椭偏仪等样品前后反射的系统和方法
公开(公告)号：US07385698B1
公开(公告)日：2008-06-10
申请号：US11288785
申请日：2005-11-30
申请人： James D. Welch , John A. Woollam , Martin M. Liphardt
发明人： James D. Welch , John A. Woollam , Martin M. Liphardt
IPC分类号： G01J4/00
CPC分类号： G01N21/211 , G01N21/55
摘要： A spectrophotometer, reflectometer, ellipsometer polarimeter or the like system having a detector means for independently intercepting electromagnetic radiation reflected from a sample frontside or backside, and methodology for pursuing less correlated determination of refractive index and thickness values.
摘要翻译：具有检测装置的分光光度计，反射计，椭圆偏振计等的系统，用于独立地截取从样品前侧或背面反射的电磁辐射，以及用于追求较低相关性的折射率和厚度值的确定的方法。

33. 发明授权

US07253900B1 Ellipsometer or polarimeter and the like system with multiple detector element detector in environmental control chamber including secure sample access 有权
标题翻译：椭圆光度计或偏振计等具有环境控制室中多个检测器元件检测器的系统，包括安全的样品存取
公开(公告)号：US07253900B1
公开(公告)日：2007-08-07
申请号：US10962353
申请日：2004-10-09
申请人： John A. Woollam , Gregory K. Pribil , Martin M. Liphardt , James D. Welch
发明人： John A. Woollam , Gregory K. Pribil , Martin M. Liphardt , James D. Welch
IPC分类号： G01J4/00
CPC分类号： G01J4/04 , G01J3/0286 , G01J3/0294 , G01N21/211 , G01N2021/213
摘要： A spectrophotometer, ellipsometer or polarimeter or the like system with a spectroscopic source of wavelengths and a detector with multiple detector elements for simultaneous monitoring of a number of wavelengths in an environmental control chamber which optionally provides for secured sample entry, and methodology of use.
摘要翻译：分光光度计，椭偏仪或偏振计等具有波长光谱源的系统和具有多个检测器元件的检测器，用于同时监测环境控制室中的多个波长，其可选地提供安全的样品入口和使用方法。

34. 发明授权

US07907280B2 Method of constructing a deviation angle self compensating substantially achromatic retarder to compensate beam traslation 有权
标题翻译：构造偏移角自补偿基本消色差延迟器以补偿光束扫描的方法
公开(公告)号：US07907280B2
公开(公告)日：2011-03-15
申请号：US12290787
申请日：2008-11-04
申请人： Blaine D. Johs , Steven E. Green , Craig M. Herzinger , Duane E. Meyer , Martin M. Liphardt
发明人： Blaine D. Johs , Steven E. Green , Craig M. Herzinger , Duane E. Meyer , Martin M. Liphardt
IPC分类号： G01J4/00 , G02B5/30
CPC分类号： G02B5/3083 , G01J4/00
摘要： A method of configuring a system for introducing a relative phase retardation into orthogonally polarized components of an electromagnetic beam entered thereinto, wherein the system involves a substantially achromatic multiple element retarder system for use in wide spectral range (for example, 190-1700 nm) rotating compensator spectroscopic ellipsometer and/or polarimeter systems.
摘要翻译：一种配置用于将相位相位延迟引入到其中输入的电磁波的正交极化分量的系统的方法，其中该系统包括用于在宽光谱范围（例如，190-1700nm）旋转的基本上无色多元素延迟器系统补偿光谱椭偏仪和/或偏振计系统。

35. 发明授权

US09347768B1 In line ellipsometer system and method of use 有权
标题翻译：在线椭偏仪系统及使用方法
公开(公告)号：US09347768B1
公开(公告)日：2016-05-24
申请号：US13385761
申请日：2012-03-06
申请人： Galen L. Pfeiffer , Blaine D. Johs , Brian D. Guenther , Martin M. Liphardt , Jeffrey S. Hale
发明人： Galen L. Pfeiffer , Blaine D. Johs , Brian D. Guenther , Martin M. Liphardt , Jeffrey S. Hale
IPC分类号： G01J4/00 , G01B11/14 , G01J3/02 , G01J1/02 , G01N21/01
CPC分类号： G01B11/14 , G01J1/0242 , G01J3/0278 , G01N21/01 , G01N21/21 , G01N21/211 , G01N21/55 , G01N21/8901 , G01N2021/8609
摘要： A system for monitoring, in real time, relatively large samples as they are caused to pass by an ellipsometer or the like system, and method of its use.
摘要翻译：一种用于通过椭偏仪或类似系统实时监测相对较大的样本的系统及其使用方法。

36. 发明申请

US20090091758A1 Method of constructing a deviation angle self compensating substantially achromatic retarder to compensate beam traslation 有权
标题翻译：构造偏移角自补偿基本消色差延迟器以补偿光束扫描的方法
公开(公告)号：US20090091758A1
公开(公告)日：2009-04-09
申请号：US12290787
申请日：2008-11-04
申请人： Blaine D. Johs , Steven E. Green , Craig M. Herzinger , Duane E. Meyer , Martin M. Liphardt
发明人： Blaine D. Johs , Steven E. Green , Craig M. Herzinger , Duane E. Meyer , Martin M. Liphardt
IPC分类号： G01J4/00
CPC分类号： G02B5/3083 , G01J4/00
摘要： A method of configuring a system for introducing a relative phase retardation into orthogonally polarized components of an electromagnetic beam entered thereinto, wherein the system involves a substantially achromatic multiple element retarder system for use in wide spectral range (for example, 190-1700 nm) rotating compensator spectroscopic ellipsometer and/or polarimeter systems.
摘要翻译：一种配置用于将相位相位延迟引入到其中输入的电磁波的正交极化分量的系统的方法，其中该系统包括用于在宽光谱范围（例如，190-1700nm）旋转的基本上无色多元素延迟器系统补偿光谱椭偏仪和/或偏振计系统。

37. 发明授权

US07492455B1 Discrete polarization state spectroscopic ellipsometer system and method of use 有权
标题翻译：离散偏振态光谱椭偏仪系统及其使用方法
公开(公告)号：US07492455B1
公开(公告)日：2009-02-17
申请号：US11483888
申请日：2006-07-10
申请人： Blaine D. Johs , Martin M. Liphardt , Ping He , Jeffrey S. Hale
发明人： Blaine D. Johs , Martin M. Liphardt , Ping He , Jeffrey S. Hale
IPC分类号： G01J4/00
CPC分类号： G01N21/211 , G01J3/02 , G01J3/0224 , G01J3/10 , G01N21/274 , G01N2021/213
摘要： A spectroscopic ellipsometer system comprising a plurality of individual sources which are sequentially energized to provide a sequence of beams, each of different polarization state but directed along a common locus toward a sample. The preferred spectroscopic ellipsometer system has no parts which move during data collection, and it provides a progressive plurality of sequentially discrete, rather than continuously varying, polarization states.
摘要翻译：一种分光椭偏仪系统，包括多个单独的光源，所述多个单独的光源被依次通电以提供不同极化状态的每一个光束序列，但是沿公共轨迹朝向样品。优选的光谱椭偏仪系统没有在数据采集期间移动的部件，并且其提供渐进多个顺序离散而不是连续变化的偏振状态。

38. 发明授权

US06804004B1 Multiple-element lens systems and methods for uncorrelated evaluation of parameters in parameterized mathematical model equations for lens retardance, in ellipometry and polarimetry 有权
标题翻译：用于透镜延迟，椭圆测量和偏振测量的参数化数学模型方程中参数的不相关评估的多元素透镜系统和方法
公开(公告)号：US06804004B1
公开(公告)日：2004-10-12
申请号：US09583229
申请日：2000-05-30
申请人： Blaine D. Johs , Craig M. Herzinger , Ping He , Martin M. Liphardt
发明人： Blaine D. Johs , Craig M. Herzinger , Ping He , Martin M. Liphardt
IPC分类号： G01B1106
CPC分类号： G01N21/211 , G01J3/14 , G01J3/447
摘要： Disclosed are multi-element lenses which demonstrate reduced achromatic focal length and reduced electromagentic beam spot size dispersal effects in ellipsometer and polarimeter systems. Also disclosed is methodology for evaluating parameters in parameterized equations which enables calculating retardance entered to, or between, orthogonal components in a beam of electromagnetic radiation which is caused to pass through input and/or output optical elements and interact with a material system, by each of the input and output optical elements, substantially uncorrelated with retardation entered by the material system. Present invention input and/or output focusing lens(es) find application in spectroscopic ellipsometer mediated investigation of small spots on material systems, wherein a beam of electromagnetic radiation is caused to converge via an input lens, interact with a very small, chromatically undispersed spot area on a material system, then optionally re-collimate via an output lens, prior to entering a detector system. Present invention methodology provides benefit where it is necessary to separate out birefringent effects of input and/or output optical element focusing lens(es), optionally in combination with beam directing and/or window elements present in an ellipsometer system which are positioned with respect to input and/or output len(es) so as to be ellipsometrically indistinguishable therefrom, to arrive at material system characterizing ellipsometric PSI and DELTA results.
摘要翻译：公开了多元素透镜，其在椭偏仪和偏光计系统中表现出减少的消色差焦距和降低的电磁光束光斑尺寸分散效应。还公开了用于评估参数化方程式中的参数的方法，该方法能够计算在电磁辐射束中输入到或之间的正交分量的延迟，所述正交分量被引导通过输入和/或输出光学元件并与材料系统相互作用的输入和输出光学元件，与材料系统进入的延迟基本上不相关。本发明的输入和/或输出聚焦透镜在光谱椭偏仪介导的对材料系统上的小斑点的调查中的应用发现，其中使电磁辐射束通过输入透镜会聚，与非常小的，色散的未分散的点相互作用区域，然后在进入检测器系统之前可选地通过输出透镜重新校准。本发明的方法在需要分离输入和/或输出光学元件聚焦透镜的双折射效应（可选地与存在于椭圆偏振仪系统中的光束引导和/或窗口元件）相关联的位置方面提供了益处，所述光学元件聚焦透镜相对于输入和/或输出len（es）以便椭圆不能与其区分开来，以得到表征椭圆偏振PSI和DELTA结果的材料系统。

39. 发明授权

US08339603B1 Mapping ellipsometers and polarimeters comprising polarization state compensating beam directing means, and method of use 有权
标题翻译：映射偏振态补偿光束引导装置的椭圆计和偏光计及其使用方法
公开(公告)号：US08339603B1
公开(公告)日：2012-12-25
申请号：US12587190
申请日：2009-10-02
申请人： Martin M. Liphardt , Blaine D. Johs
发明人： Martin M. Liphardt , Blaine D. Johs
IPC分类号： G01J4/00
CPC分类号： G01N21/211
摘要： Mapping ellipsometer and polarimeter systems which comprise polarization state change compensating beam directing means.
摘要翻译：映射偏振态变化补偿光束引导装置的椭偏仪和偏振计系统。

40. 发明授权

US08223334B1 Method of improving ellipsometric and the like data 有权
标题翻译：改进椭圆等数据的方法
公开(公告)号：US08223334B1
公开(公告)日：2012-07-17
申请号：US12586692
申请日：2009-09-25
申请人： Blaine D. Johs , Martin M. Liphardt
发明人： Blaine D. Johs , Martin M. Liphardt
IPC分类号： G01J4/00
CPC分类号： G01J4/00 , G01N21/211
摘要： A system and method for improving data provided by ellipsometer, polarimeter and the like systems involving diminishing the effects of undesirable noise in the intensity of a beam of electromagnetic radiation caused by, for instance, random variations in intensity of a source provided beam of electromagnetic radiation and/or periodic or non-periodic variations in beam intensity resulting from wobble/wander of a moving sample, during investigation of the sample by the beam of electromagnetic radiation.
摘要翻译：一种用于改进由椭圆偏振仪，偏振计等提供的数据的系统和方法，包括减少由例如源的强度的随机变化引起的电磁辐射束的强度的不期望的噪声的影响，和/或由移动样品的摆动/漂移产生的束强度的周期性或非周期性变化，在通过电磁辐射束调查样品期间。

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