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    • 31. 发明授权
    • CMD and CMD-carrying CCD device
    • CMD和CMD携带CCD设备
    • US06862333B2
    • 2005-03-01
    • US10447827
    • 2003-05-29
    • Shunji KashimaKyoichi YahataIzumi Kobayashi
    • Shunji KashimaKyoichi YahataIzumi Kobayashi
    • H01L29/762G11C11/35G11C19/28H01L21/339H01L27/148H04N5/335H04N5/369H04N5/372
    • G11C19/282
    • This invention controls the signal amplification rate in a simple way with high precision in a CMD or CMD-carrying CCD device. CMD 12 has plural sections, such as M sections (U1-UM), each of which is a CMD unit U that can perform a charge multiplication operation, set in series. Each section of CMD unit Ui has plural (such as 4) electrodes G1, G2, G3, G4 set in a row via an insulating film, such as silicon oxide film 100, on a silicon insulating film. Among driving voltages P1, P2, P3, P4 applied on the electrodes G1, G2, G3 and G4, P1 and P2 are applied in the same cycle as the transfer clock, P4 for impact ionization is applied in intermittent cycles with respect to P1 and P2, and P3 is applied as a DC voltage at a prescribed level.
    • 本发明在具有CMD或CMD的CCD器件中以高精度以简单的方式控制信号放大率。 CMD12具有多个部分,例如M部分(U1-UM),其中每个部分是可以执行充电倍增操作的CMD单元U,其串联设置。 CMD单元Ui的每个部分在硅绝缘膜上具有通过绝缘膜(例如氧化硅膜100)在列中设置的多个(例如4个)电极G1,G2,G3,G4。 在施加在电极G1,G2,G3和G4上的驱动电压P1,P2,P3,P4中,P1和P2以与传送时钟相同的周期施加,用于冲击电离的P4相对于P1和P2间歇循环应用 P2和P3作为直流电压施加在规定的水平。