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    • 31. 发明授权
    • Color display apparatus using one panel diffractive-type optical modulator
    • 使用一个面板衍射型光调制器的彩色显示装置
    • US07248408B2
    • 2007-07-24
    • US11352743
    • 2006-02-13
    • Sang Kyeong Yun
    • Sang Kyeong Yun
    • G02B5/18
    • H04N9/3129G02B26/0808G03B21/008
    • Disclosed herein is a color display apparatus using a one-panel diffractive-type optical modulator. The color display apparatus includes a plurality of light sources, an illumination lens system, a diffractive-type optical modulator, a filter system, and a projection system. The light sources simultaneously emit the light beams of corresponding wavelengths. The illumination lens system allows respective light beams to be converted into linear parallel light. The diffractive-type optical modulator forms diffractive light by diffracting incident light when the locations of at least two neighboring reflection parts vary to a predetermined distance by an actuating means. The filter system allows diffractive light having a desired diffractive order for respective wavelengths to pass therethrough when diffractive light having a plurality of diffractive orders for the respective wavelengths enters from the diffractive-type optical modulator. The projection system generates an image on a target object by scanning diffractive light filtered by the filter system on the target object.
    • 这里公开了使用单面衍射型光调制器的彩色显示装置。 彩色显示装置包括多个光源,照明透镜系统,衍射型光调制器,滤光镜系统和投影系统。 光源同时发射相应波长的光束。 照明透镜系统允许各个光束被转换为线性平行光。 当至少两个相邻反射部分的位置通过致动装置改变到预定距离时,衍射型光调制器通过衍射入射光来衍射衍射光。 当从衍射型光学调制器进入具有各种波长的多个衍射级的衍射光时,滤光器系统允许具有期望的衍射级的各种波长的衍射光通过。 投影系统通过将由过滤系统过滤的衍射光扫描在目标物体上来生成目标物体上的图像。
    • 35. 发明授权
    • Method of manufacturing a nozzle plate
    • 制造喷嘴板的方法
    • US06423476B1
    • 2002-07-23
    • US09596145
    • 2000-06-16
    • Sang Kyeong Yun
    • Sang Kyeong Yun
    • B41J216
    • B41J2/1643B41J2/162B41J2/1628B41J2/1629B41J2/1631B41J2/1642B41J2/1645B41J2/1646
    • A method for manufacturing nozzle plate and produced nozzle plate thereby are disclosed which method is either sequence that comprises a step to provide silicon wafer; a step to form straight pipe part layer under the silicon wafer by doping impurity component, electroplating a metal or forming a polysilicon layer; a step to form crater layer under the straight pipe part layer by electroplating a metal; a step to form nozzle slope part by anisotropic etching after patterning the silicon wafer; a step to form straight pipe part of nozzle outlet part at the straight pipe part layer by dry etching of the straight pipe part layer; and a step to form crater at the crater layer by etching after patterning the crater layer or sequence that comprises a step to provide silicon wafer; a step to form straight pipe part layer under the silicon wafer by doping impurity component, electroplating a metal or forming a polysilicon layer; a step to form nozzle slope part by anisotropic etching after patterning the silicon wafer; a step to form straight pipe part of nozzle outlet part at the straight pipe part layer by dry etching of the straight pipe part layer; a step to form photoresist layer under the straight pipe part layer; a step to leave photoresist only at crater part by patterning the photoresist layer; a step to form crater layer by electroplating a metal under the straight pipe part layer; and a step to form crater by removing photoresist.
    • 公开了一种用于制造喷嘴板和制造的喷嘴板的方法,其中的方法是包括提供硅晶片的步骤的顺序, 通过掺杂杂质成分,电镀金属或形成多晶硅层,在硅晶片之下形成直管部分层的步骤; 通过电镀金属在直管部分层下形成凹坑层的步骤; 在硅晶片图案化之后通过各向异性蚀刻形成喷嘴斜面部分的步骤; 通过直管部分层的干蚀刻在直管部分层上形成喷嘴出口部分的直管部分的步骤; 以及在图案化包括提供硅晶片的步骤的火山口层或序列之后通过蚀刻在火山口层处形成凹坑的步骤; 通过掺杂杂质成分,电镀金属或形成多晶硅层,在硅晶片之下形成直管部分层的步骤; 在硅晶片图案化之后通过各向异性蚀刻形成喷嘴斜面部分的步骤; 通过直管部分层的干蚀刻在直管部分层上形成喷嘴出口部分的直管部分的步骤; 在直管部分层下形成光致抗蚀剂层的步骤; 通过图案化光刻胶层而在光刻胶部分留下光刻胶的步骤; 通过在直管部分层下电镀金属来形成火山口层的步骤; 以及通过去除光致抗蚀剂形成火山口的步骤。
    • 36. 发明授权
    • Manufacturing method of nozzle plate using silicon process and ink jet printer head applying the nozzle plate
    • 使用硅工艺的喷嘴板和使用喷嘴板的喷墨打印头的制造方法
    • US06378995B1
    • 2002-04-30
    • US09444119
    • 1999-11-19
    • Sang Kyeong YunSung June Park
    • Sang Kyeong YunSung June Park
    • B41J2045
    • B41J2/1628B41J2/162B41J2/1629B41J2/1631B41J2/1642B41J2/1646
    • The present invention relates to methods of manufacturing a nozzle plate using a silicon process comprising the steps of providing a silicon substrate; forming a silicon oxide film on one side of the silicon substrate; patterning the silicon oxide film; performing an anisotropic wet etching on the silicon substrate after shielding the surface of the silicon substrate where silicon oxide film has not been formed; forming a boron layer on surface where silicon oxide film has been formed in the silicon substrate; etching the silicon substrate where the boron layer has been formed; and removing the silicon oxide film and the boron layer formed on the silicon oxide film by etching the silicon oxide film, or comprising the steps of: providing a silicon substrate; forming a boron layer on one surface of the silicon substrate; masking another surface of the silicon substrate where boron layer is not formed, into a desired pattern; performing an anisotropic wet etching of the patterned silicon substrate; masking the boron layer into a desired pattern; and forming a straight part at the boron layer by way of dry etching of the masked boron layer, nozzle plates manufactured by the methods, and ink jet printer heads applying the nozzle plates.
    • 本发明涉及使用硅工艺制造喷嘴板的方法,包括以下步骤:提供硅衬底; 在硅衬底的一侧上形成氧化硅膜; 图案化氧化硅膜; 在对未形成氧化硅膜的硅衬底的表面进行屏蔽之后,对硅衬底进行各向异性湿蚀刻; 在硅衬底中形成氧化硅膜的表面上形成硼层; 蚀刻形成有硼层的硅衬底; 或通过蚀刻氧化硅膜去除氧化硅膜和形成在氧化硅膜上的硼层,或者包括以下步骤:提供硅衬底; 在所述硅衬底的一个表面上形成硼层; 将未形成硼层的硅衬底的另一表面掩蔽成所需图案; 对图案化硅衬底进行各向异性湿蚀刻; 将硼层掩蔽成所需的图案; 以及通过干法蚀刻掩模的硼层,通过该方法制造的喷嘴板,以及喷涂喷嘴板的喷墨打印头,在硼层上形成直的部分。
    • 37. 发明授权
    • Microactuator for ink jet printer head using a shape memory alloy and manufacturing method thereof
    • 使用形状记忆合金的喷墨打印头用微致动器及其制造方法
    • US06343849B1
    • 2002-02-05
    • US09442513
    • 1999-11-18
    • Sang Kyeong YunSung June ParkMyung Song Jung
    • Sang Kyeong YunSung June ParkMyung Song Jung
    • B41J204
    • B41J2/14
    • The present invention relates a manufacturing method of a microactuator for an ink jet printer head using a shape memory alloy, the method comprising steps of: providing a silicon substrate; forming an insulating film on the surface of the silicon substrate; forming a shape memory alloy layer by independent repetitive molding of each layer of respective component element constituting the shape memory alloy on the insulation film; bestowing a shape memory property by thermally treating the shape memory alloy layer; and forming a lower space part by etching the silicon substrate, and a microactuator manufactured by the method, whereby it is easy to control the composition constituting the shape memory alloy layer so that shape memory property of shape memory alloy layer is enhanced; and also it makes effect that it is eminent in repetition uniformity of ingredient composition ratios compared to traditional methods in which simultaneous vapor deposition or sputtering of all formation components is carried out because now each component element thickness and film growth sequence are independently controlled.
    • 本发明涉及使用形状记忆合金的用于喷墨打印机头的微致动器的制造方法,该方法包括以下步骤:提供硅衬底; 在硅衬底的表面上形成绝缘膜; 通过在所述绝缘膜上独立地重复地形成构成所述形状记忆合金的各构成要素的各层来形成形状记忆合金层; 通过热处理形状记忆合金层赋予形状记忆性; 并且通过蚀刻硅衬底形成下部空间部分,以及通过该方法制造的微致动器,由此易于控制构成形状记忆合金层的组成,从而增强形状记忆合金层的形状记忆特性; 并且与其中进行同时气相沉积或全部形成成分的溅射的传统方法相比,其在成分组成比的重复均匀性方面是显着的,因为现在各组分元素厚度和膜生长顺序是独立控制的。
    • 40. 发明授权
    • Apparatus and method for calibrating a reflecting mirror
    • 用于校准反射镜的装置和方法
    • US07569805B2
    • 2009-08-04
    • US11449534
    • 2006-06-07
    • Sang Kyeong YunSeung Do An
    • Sang Kyeong YunSeung Do An
    • H01J3/14G01D5/34
    • G02B26/0808
    • An apparatus for measuring the position of the mirror of a diffractive light modulator and performing positional compensation, and a method of controlling the apparatus. A position measurement unit measures the position of a mirror of the diffractive light modulator. A control unit calculates the value of displacement from a reference position by evaluating a position value calculated by the position measurement unit, calculates a compensation value and outputs a compensation control signal. A compensation and actuation unit performs compensation on a drive voltage in response to the compensation control signal, and actuates the mirror of the diffractive light modulator using the compensated drive voltage.
    • 一种用于测量衍射光调制器的反射镜的位置并执行位置补偿的装置,以及控制该装置的方法。 位置测量单元测量衍射光调制器的反射镜的位置。 控制单元通过对位置测量单元计算出的位置值进行评价,计算出基准位置的位移值,计算出补偿值,输出补偿控制信号。 补偿和致动单元响应于补偿控制信号对驱动电压进行补偿,并且使用经补偿的驱动电压致动衍射光调制器的反射镜。