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31. 发明申请

US20110124186A1 APPARATUS AND METHOD FOR CONTROLLABLY IMPLANTING WORKPIECES 有权
标题翻译：用于控制工件的装置和方法
公开(公告)号：US20110124186A1
公开(公告)日：2011-05-26
申请号：US12947078
申请日：2010-11-16
申请人： Anthony Renau , Ludovic Godet , Timothy J. Miller , Joseph C. Olson , Vikram Singh , James Buonodono , Frank Sinclair , Deepak A. Ramappa , Russell Low , Atul Gupta , Kevin M. Daniels
发明人： Anthony Renau , Ludovic Godet , Timothy J. Miller , Joseph C. Olson , Vikram Singh , James Buonodono , Frank Sinclair , Deepak A. Ramappa , Russell Low , Atul Gupta , Kevin M. Daniels
IPC分类号： H01L21/265 , G21K5/10
CPC分类号： B01J19/081 , H01J37/3171 , H01J37/32357 , H01J37/32422 , H01J37/32623 , H01J2237/0453 , H01J2237/1205 , H01L21/2236 , H01L31/022425 , H01L31/068 , H01L31/08 , H01L31/1804 , Y02E10/547 , Y02P70/521
摘要： A plasma processing apparatus comprises a plasma source configured to produce a plasma in a plasma chamber, such that the plasma contains ions for implantation into a workpiece. The apparatus also includes a focusing plate arrangement having an aperture arrangement configured to modify a shape of a plasma sheath of the plasma proximate the focusing plate such that ions exiting an aperture of the aperture arrangement define focused ions. The apparatus further includes a processing chamber containing a workpiece spaced from the focusing plate such that a stationary implant region of the focused ions at the workpiece is substantially narrower that the aperture. The apparatus is configured to create a plurality of patterned areas in the workpiece by scanning the workpiece during ion implantation.
摘要翻译：等离子体处理装置包括等离子体源，其被配置为在等离子体室中产生等离子体，使得等离子体包含用于注入工件的离子。该装置还包括聚焦板装置，该聚焦板装置具有孔结构，其被配置为修改离开聚焦板附近的等离子体鞘的等离子体鞘的形状，使得离开孔结构的孔的离子限定聚焦离子。该设备还包括处理室，其包含与聚焦板间隔开的工件，使得在工件处的聚焦离子的固定注入区域基本上比孔更窄。该装置被配置为通过在离子注入期间扫描工件来在工件中产生多个图案化区域。

32. 发明申请

US20110117234A1 FLOATING SHEET PRODUCTION APPARATUS AND METHOD 审中-公开
标题翻译：浮选片生产设备和方法
公开(公告)号：US20110117234A1
公开(公告)日：2011-05-19
申请号：US12948248
申请日：2010-11-17
申请人： Peter L. Kellerman , Frank Sinclair
发明人： Peter L. Kellerman , Frank Sinclair
IPC分类号： C30B28/10 , B28B11/14
CPC分类号： H01L31/02 , C30B15/06 , C30B15/14 , C30B15/30 , C30B28/10 , C30B29/06
摘要： This sheet production apparatus comprises a vessel defining a channel configured to hold a melt. The melt is configured to flow from a first point to a second point of the channel. A cooling plate is disposed proximate the melt and is configured to form a sheet on the melt. A spillway is disposed at the second point of the channel. This spillway is configured to separate the sheet from the melt.
摘要翻译：该片材生产设备包括限定被配置为保持熔体的通道的容器。熔体构造成从通道的第一点流到第二点。冷却板靠近熔体设置并且被配置成在熔体上形成片材。溢流道设置在通道的第二点。该溢流道构造成将片材与熔体分离。

33. 发明申请

US20110003024A1 METHOD AND APPARATUS FOR PRODUCING A DISLOCATION-FREE CRYSTALLINE SHEET 审中-公开
标题翻译：用于生产无分离晶体薄片的方法和装置
公开(公告)号：US20110003024A1
公开(公告)日：2011-01-06
申请号：US12877753
申请日：2010-09-08
申请人： Peter L. KELLERMAN , Frank Sinclair , Frederick Carlson
发明人： Peter L. KELLERMAN , Frank Sinclair , Frederick Carlson
IPC分类号： B29D7/01
CPC分类号： C30B11/003 , C30B11/001 , C30B28/06 , C30B29/06 , C30B29/60
摘要： A dislocation-free sheet may be formed from a melt. A sheet of material with a first width is formed on a melt of the material using a cooling plate. This sheet has dislocations. The sheet is transported with respect to the cooling plate and the dislocations migrate to an edge of the sheet. The first width of the sheet is increased to a second width by the cooling plate. The sheet does not have dislocations at the second width. The cooling plate may have a shape with two different widths in one instance. The cooling plate may have segments that operate at different temperatures to increase the width of the sheet in another instance. The sheet may be pulled or flowed with respect to the cooling plate.
摘要翻译：可以由熔体形成无位错的片材。使用冷却板在材料的熔体上形成具有第一宽度的材料片。这张纸有位错。片材相对于冷却板输送，并且位错迁移到片材的边缘。片材的第一宽度通过冷却板增加到第二宽度。片材在第二个宽度上不具有位错。在一种情况下，冷却板可以具有两种不同宽度的形状。冷却板可以具有在不同温度下操作的段，以在另一种情况下增加片材的宽度。片材可以相对于冷却板拉动或流动。

34. 发明申请

US20100155593A1 TIME-OF-FLIGHT SEGMENTED FARADAY 有权
标题翻译：飞行时间划分的FARADAY
公开(公告)号：US20100155593A1
公开(公告)日：2010-06-24
申请号：US12618115
申请日：2009-11-13
申请人： Frank Sinclair
发明人： Frank Sinclair
IPC分类号： H01J49/04
CPC分类号： H01J49/025 , H01J49/48
摘要： This measurement device is used to determine energy for charged particles. The measurement device includes two segments and a plate that define two thresholds or gaps. The current as a charged particle passes through these thresholds or gaps is measured. The measurement device then calculates the energy of the charged particles. Energy contamination also may be determined.
摘要翻译：该测量装置用于确定带电粒子的能量。测量装置包括两个段和限定两个阈值或间隙的板。作为带电粒子的电流通过这些阈值或间隙被测量。然后测量装置计算带电粒子的能量。能量污染也可以确定。

35. 发明授权

US07700925B2 Techniques for providing a multimode ion source 有权
标题翻译：提供多模离子源的技术
公开(公告)号：US07700925B2
公开(公告)日：2010-04-20
申请号：US11966312
申请日：2007-12-28
申请人： Svetlana Radovanov , Bon Woong Koo , Frank Sinclair , Victor M. Benveniste
发明人： Svetlana Radovanov , Bon Woong Koo , Frank Sinclair , Victor M. Benveniste
IPC分类号： H01J37/08
CPC分类号： H01J27/08 , H01J27/16 , H01J37/08 , H01J37/3171 , H01J2237/022 , H01J2237/061 , H01J2237/0817 , H01J2237/082
摘要： Techniques for providing a multimode ion source are disclosed. In one particular exemplary embodiment, the techniques may be realized as an apparatus for ion implantation, the apparatus including an ion source having a hot cathode and a high frequency plasma generator, wherein the ion source has multiple modes of operation.
摘要翻译：公开了提供多模离子源的技术。在一个特定的示例性实施例中，可以将技术实现为用于离子注入的装置，该装置包括具有热阴极和高频等离子体发生器的离子源，其中离子源具有多种操作模式。

36. 发明申请

US20090315220A1 MELT PURIFICATION AND DELIVERY SYSTEM 有权
标题翻译：熔融净化和输送系统
公开(公告)号：US20090315220A1
公开(公告)日：2009-12-24
申请号：US12487058
申请日：2009-06-18
申请人： Peter L. Kellerman , Frank Sinclair , Frederick Carlson
发明人： Peter L. Kellerman , Frank Sinclair , Frederick Carlson
IPC分类号： B29C39/02 , B67D5/54 , B22D29/00
CPC分类号： B22D39/02 , C30B11/001 , C30B11/003 , C30B29/02 , C30B29/06 , C30B29/08 , C30B29/403 , C30B29/60
摘要： An apparatus to pump a melt is disclosed. The pump has a chamber that defines a cavity configured to hold the melt. A gas source is in fluid communication with the chamber. A first valve is between the chamber and a first pipe and a second valve is between the chamber and a second pipe. The valves may be check valves in one embodiment.
摘要翻译：公开了一种用于泵送熔体的装置。泵具有限定被配置为保持熔体的腔的腔室。气体源与腔室流体连通。第一阀在腔室和第一管之间，第二阀在腔室和第二管之间。在一个实施例中，阀可以是止回阀。

37. 发明申请

US20090302281A1 METHOD AND APPARATUS FOR PRODUCING A DISLOCATION-FREE CRYSTALLINE SHEET 有权
标题翻译：用于生产无分离晶体薄片的方法和装置
公开(公告)号：US20090302281A1
公开(公告)日：2009-12-10
申请号：US12478513
申请日：2009-06-04
申请人： Peter L. Kellerman , Frank Sinclair , Frederick Carlson , Nicholas P.T. Bateman , Robert J. Mitchell
发明人： Peter L. Kellerman , Frank Sinclair , Frederick Carlson , Nicholas P.T. Bateman , Robert J. Mitchell
IPC分类号： H01B1/02 , C01B33/02 , B29C55/02 , B29C61/00
CPC分类号： C30B11/003 , C30B11/001 , C30B28/06 , C30B29/06 , C30B29/60
摘要： A dislocation-free sheet may be formed from a melt. A sheet of material with a first width is formed on a melt of the material using a cooling plate. This sheet has dislocations. The sheet is transported with respect to the cooling plate and the dislocations migrate to an edge of the sheet. The first width of the sheet is increased to a second width by the cooling plate. The sheet does not have dislocations at the second width. The cooling plate may have a shape with two different widths in one instance. The cooling plate may have segments that operate at different temperatures to increase the width of the sheet in another instance. The sheet may be pulled or flowed with respect to the cooling plate.
摘要翻译：可以由熔体形成无位错的片材。使用冷却板在材料的熔体上形成具有第一宽度的材料片。这张纸有位错。片材相对于冷却板输送，并且位错迁移到片材的边缘。片材的第一宽度通过冷却板增加到第二宽度。片材在第二个宽度上不具有位错。在一种情况下，冷却板可以具有两种不同宽度的形状。冷却板可以具有在不同温度下操作的段，以在另一种情况下增加片材的宽度。片材可以相对于冷却板拉动或流动。

38. 发明申请

US20090166554A1 TECHNIQUES FOR PROVIDING A MULTIMODE ION SOURCE 有权
标题翻译：提供多个离子源的技术
公开(公告)号：US20090166554A1
公开(公告)日：2009-07-02
申请号：US11966312
申请日：2007-12-28
申请人： Svetlana Radovanov , Bon Woong Koo , Frank Sinclair , Victor M. Benveniste
发明人： Svetlana Radovanov , Bon Woong Koo , Frank Sinclair , Victor M. Benveniste
IPC分类号： H01J27/00
CPC分类号： H01J27/08 , H01J27/16 , H01J37/08 , H01J37/3171 , H01J2237/022 , H01J2237/061 , H01J2237/0817 , H01J2237/082
摘要： Techniques for providing a multimode ion source are disclosed. In one particular exemplary embodiment, the techniques may be realized as an apparatus for ion implantation, the apparatus including an ion source having a hot cathode and a high frequency plasma generator, wherein the ion source has multiple modes of operation.
摘要翻译：公开了提供多模离子源的技术。在一个特定的示例性实施例中，可以将技术实现为用于离子注入的装置，该装置包括具有热阴极和高频等离子体发生器的离子源，其中离子源具有多种操作模式。

39. 发明申请

US20090121149A1 TECHNIQUES FOR SHAPING AN ION BEAM 审中-公开
标题翻译：形成离子束的技术
公开(公告)号：US20090121149A1
公开(公告)日：2009-05-14
申请号：US11937849
申请日：2007-11-09
申请人： Svetlana Radovanov , Frank Sinclair , Peter L. Kellerman , Victor M. Benveniste , Robert Lindberg
发明人： Svetlana Radovanov , Frank Sinclair , Peter L. Kellerman , Victor M. Benveniste , Robert Lindberg
IPC分类号： H01J3/18
CPC分类号： H01J37/1477 , H01J37/12 , H01J37/1475 , H01J37/3171 , H01J2237/083 , H01J2237/0835 , H01J2237/24542 , H01J2237/31701
摘要： Techniques for shaping an ion beam are disclosed. In one particular exemplary embodiment, the techniques may be realized as an apparatus for shaping an ion beam. The apparatus may comprise an entrance electrode biased at a first voltage potential, wherein an ion beam enters the entrance electrode, an exit electrode biased at a second voltage potential, wherein the ion beam exits the exit electrode, and a first suppression electrode and a second suppression electrode positioned between the entrance electrode and the exit electrode, wherein the first suppression electrode and the second suppression electrode are independently biased to variably focus the ion beam.
摘要翻译：公开了用于成形离子束的技术。在一个特定的示例性实施例中，可以将技术实现为用于成形离子束的装置。该装置可以包括偏置在第一电压电位的入口电极，其中离子束进入入口电极，偏置在第二电压电位的出射电极，其中离子束离开出射电极，并且第一抑制电极和第二抑制电极位于所述入射电极和所述出射电极之间的抑制电极，其中所述第一抑制电极和所述第二抑制电极被独立地偏置以可变地聚焦所述离子束。

40. 发明授权

US5814819A System and method for neutralizing an ion beam using water vapor 失效
标题翻译：使用水蒸汽中和离子束的系统和方法
公开(公告)号：US5814819A
公开(公告)日：1998-09-29
申请号：US891688
申请日：1997-07-11
申请人： Frank Sinclair , Victor Benveniste , Jiong Chen
发明人： Frank Sinclair , Victor Benveniste , Jiong Chen
IPC分类号： H01J37/317 , C23C14/48 , G21K1/14 , H01J37/02 , H01J27/02
CPC分类号： H01J37/026 , H01J2237/31701
摘要： An improved ion beam neutralizer (22) is provided for neutralizing the electrical charge of an ion beam (28) output from an extraction aperture (50). The neutralizer comprises a source of water (52); a vaporizer (54) connected to the source of water; a mass flow controller (56) connected to the vaporizer; and an inlet (60) connected to the mass flow controller. The vaporizer (54) converts water from the source (52) from a liquid state to a vapor state. The mass flow controller (56) receives water vapor from the vaporizer (54) and meters the volume of water vapor output by a mass flow controller outlet (66). The inlet (60) is provided with an injection port (68) located proximate the ion beam extraction aperture (50) and receives the metered volume from the outlet (66). The injection port (68) is positioned near the extraction aperture so that the ion beam and the water vapor interact to neutralize the ion beam. The improved ion beam neutralizer (22) is especially effective in low energy (less than ten kilo-electron volts (10 KeV)) beam applications.
摘要翻译：提供改进的离子束中和器（22），用于中和从提取孔（50）输出的离子束（28）的电荷。中和器包括水源（52）; 连接到水源的蒸发器（54）; 连接到蒸发器的质量流量控制器（56）以及连接到质量流量控制器的入口（60）。蒸发器（54）将来自源（52）的水从液态转换为蒸汽状态。质量流量控制器（56）接收来自蒸发器（54）的水蒸汽并且测量由质量流量控制器出口（66）输出的水蒸汽的体积。入口（60）设置有靠近离子束提取孔（50）定位并从出口（66）接收计量体积的注射口（68）。注入口（68）位于提取孔附近，使得离子束和水蒸气相互作用以中和离子束。改进的离子束中和器（22）在低能量（小于十千伏电压（10KeV）））的应用中特别有效。

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