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31. 发明授权

US4680468A Particle detector 失效
标题翻译：粒子检测器
公开(公告)号：US4680468A
公开(公告)日：1987-07-14
申请号：US762291
申请日：1985-08-05
申请人： Claude Bouchard , Pierre Boulanger
发明人： Claude Bouchard , Pierre Boulanger
IPC分类号： H01J37/244 , G01N23/22
CPC分类号： H01J37/244 , H01J2237/2443 , H01J2237/2448 , H01J2237/2449 , H01J2237/24507
摘要： A detector for charged particles, i.e. secondary electons ir ions emitted from a bombardment area of a specimen in an instrument such as a scanning electron microscope or analytical instrument, consists of a collector, e.g. a scintillation surface highly charged with a voltage of the opposite polarity from that of the particles, for receiving the particles and providing an output proportional to the number thereof. A grid, charged with a voltage of the same sign as the scintillation surface, but to a lower value, is located between the scintillation surface and the bombardment area, and a probe in the form of a wire electrically connected to the grid projects into the vicinity of the bombardment area which is in a confined space between the specimen and the instrument. The result is to set up an electrostatic field around the wire, causing a significant number of the charged particles to orbit the wire and travel to the scintillation surface. The detector has better performance in situations requiring a relatively long "reach" into a confined space than has been attainable with previously known detectors. As a result, the detector is especially useful when the speciment under examination is relatively large, e.g. a large silicon wafer.
摘要翻译：用于带电粒子的检测器，即二次电极，诸如扫描电子显微镜或分析仪器的仪器中的样品的轰击区域发射的离子，由收集器，例如，闪烁表面高度充满与颗粒相反极性的电压，用于接收颗粒并提供与其数量成比例的输出。带有与闪烁面相同符号电压但较低值的电网位于闪烁表面和轰击区之间，并且电连接到电网的导线形式的探针投入到在被检样品与仪器之间的限制空间内的轰炸区附近。结果是在线周围设置静电场，导致大量带电粒子绕线并行进到闪烁表面。检测器在需要与先前已知的检测器可以达到的限制空间相对长的“距离”的情况下具有更好的性能。结果，当检查中的物质相对较大时，检测器特别有用。一个大的硅片。

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