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31. 发明授权

US07827657B2 Method of making an electrode assembly for plasma processing apparatus 有权
标题翻译：制造等离子体处理装置的电极组件的方法
公开(公告)号：US07827657B2
公开(公告)日：2010-11-09
申请号：US12436924
申请日：2009-05-07
申请人： William S. Kennedy , David E. Jacob
发明人： William S. Kennedy , David E. Jacob
IPC分类号： B21D33/00
CPC分类号： H01J37/3244 , H01J37/32009 , H01J37/32541 , H01J37/3255 , Y10T29/31 , Y10T29/49117 , Y10T29/49204 , Y10T29/49208 , Y10T29/4921
摘要： A method of making an electrode assembly for a plasma processing apparatus includes securing a backing member to an electrode wherein first fastener members mounted in apertures in the backing member cooperate with second fastener members to hold the electrode assembly to a support member, such as a temperature-controlled top plate in a plasma processing chamber.
摘要翻译：制造用于等离子体处理设备的电极组件的方法包括将背衬构件固定到电极，其中安装在背衬构件中的孔中的第一紧固件构件与第二紧固件构件协作以将电极组件保持在支撑构件上，例如温度在等离子体处理室中控制的顶板。

32. 发明授权

US06583064B2 Low contamination high density plasma etch chambers and methods for making the same 有权
公开(公告)号：US06583064B2
公开(公告)日：2003-06-24
申请号：US10101737
申请日：2002-03-21
申请人： Thomas E. Wicker , Robert A. Maraschin , William S. Kennedy
发明人： Thomas E. Wicker , Robert A. Maraschin , William S. Kennedy
IPC分类号： H01L21461
CPC分类号： H01J37/32477 , H01J37/321 , H01J2237/022 , Y10S156/914 , Y10S156/916 , Y10T428/12347
摘要： A plasma processing chamber having a chamber liner and a liner support, the liner support including a flexible wall configured to surround an external surface of the chamber liner, the flexible wall being spaced apart from the wall of the chamber liner. The apparatus can include a heater thermally connected to the liner support so as to thermally conduct heat from the liner support to the chamber liner. The liner support can be made from flexible aluminum material and the chamber liner comprises a ceramic material. The flexible wall can include slots which divide the liner support into a plurality of fingers which enable the flexible wall to absorb thermal stresses.

33. 发明授权

US06194322B1 Electrode for plasma processes and method for a manufacture and use thereof 有权
标题翻译：用于等离子体工艺的电极及其制造和使用方法
公开(公告)号：US06194322B1
公开(公告)日：2001-02-27
申请号：US09629457
申请日：2000-07-31
申请人： John Lilleland , Jerome S. Hubacek , William S. Kennedy
发明人： John Lilleland , Jerome S. Hubacek , William S. Kennedy
IPC分类号： H01L21302
CPC分类号： H01J37/32009 , H01J37/3244 , H01J37/32532
摘要： An electrode assembly for a plasma reaction chamber wherein processing of a semiconductor substrate such as a single wafer can be carried out, a method of manufacture of the electrode assembly and a method of processing a semiconductor substrate with the assembly. The electrode assembly includes a support member such as a graphite ring, an electrode such as a silicon showerhead electrode in the form of a circular disk of uniform thickness and an elastomeric joint between the support member and the electrode. The elastomeric joint allows movement between the support member and the electrode to compensate for thermal expansion as a result of temperature cycling of the electrode assembly. The elastomeric joint can include an electrically and/or thermally conductive filler and the elastomer can be a catalyst-cured polymer which is stable at high temperatures.
摘要翻译：一种用于等离子体反应室的电极组件，其中可以执行诸如单个晶片的半导体衬底的处理，电极组件的制造方法和使用该组件处理半导体衬底的方法。电极组件包括诸如石墨环的支撑构件，具有均匀厚度的圆盘形式的诸如硅喷头电极的电极以及支撑构件和电极之间的弹性体接头。弹性体接头允许支撑构件和电极之间的移动以补偿由于电极组件的温度循环导致的热膨胀。弹性接头可以包括导电和/或导热的填料，弹性体可以是在高温下稳定的催化剂固化的聚合物。

34. 发明授权

US6155203A Apparatus for control of deposit build-up on an inner surface of a plasma processing chamber 有权
标题翻译：用于控制在等离子体处理室的内表面上沉积物堆积的装置
公开(公告)号：US6155203A
公开(公告)日：2000-12-05
申请号：US451850
申请日：1999-12-01
申请人： William S. Kennedy , Albert J. Lamm , Thomas E. Wicker , Robert A. Maraschin
发明人： William S. Kennedy , Albert J. Lamm , Thomas E. Wicker , Robert A. Maraschin
IPC分类号： H01J37/32 , H01L21/205 , H01L21/302 , C23C16/00
CPC分类号： H01J37/32862 , H01J37/321 , H01J37/32174 , Y10S438/905
摘要： A method and apparatus for controlling deposit build-up on an interior surface of a dielectric member of a plasma processing chamber. The deposit build-up is controlled by selective ion bombardment of the inner surface by shifting location of a peak voltage amplitude of a voltage standing wave on an antenna such as a flat spiral coil of the plasma processing chamber. A region of high ion bombardment on the interior surface of the dielectric member is displaced by controlling the value of a termination capacitance over a range of values causing regions of low and high ion bombardment to move over the dielectric member in order to effect cleaning thereof.
摘要翻译：一种用于控制在等离子体处理室的电介质构件的内表面上的沉积物堆积的方法和装置。通过将电压驻波的峰值电压振幅的位置移动到诸如等离子体处理室的扁平螺旋线圈的天线上，通过选择性地离子轰击内表面来控制沉积物积聚。通过在低于和高的离子轰击区域的值的范围内控制终端电容的值来移动电介质构件的内表面上的高离子轰击区域，以移动电介质构件以便进行清洁。

35. 发明授权

US6063234A Temperature sensing system for use in a radio frequency environment 失效
标题翻译：用于无线电频率环境的温度传感系统
公开(公告)号：US6063234A
公开(公告)日：2000-05-16
申请号：US927030
申请日：1997-09-10
申请人： Jian Janson Chen , William S. Kennedy
发明人： Jian Janson Chen , William S. Kennedy
IPC分类号： G01K7/00 , C23F1/02
CPC分类号： G01K7/00
摘要： The invention relates to a temperature sensing system that accurately measures temperatures of articles or areas using a contact sensor even in a high radio frequency environment. The temperature sensing system includes a sensor probe that contacts with an article or area that is to have its temperature monitored, and a control circuit to amplify signals from the sensor probe. When significant amounts of radio frequency (RF) interference are present, the temperature sensing can be provided with RF shielding, RF filtering, isolated amplifying and/or multiple stages of low pass filtering that suppress the RF interference. The temperature sensing system is particularly well suited for monitoring and measuring temperatures within semiconductor manufacturing equipment, such as etching, deposition, and other processing chambers.
摘要翻译：本发明涉及一种温度感测系统，即使在高频无线电频率环境中也能使用接触传感器精确测量物品或区域的温度。温度感测系统包括与要监测其温度的物品或区域接触的传感器探头，以及用于放大来自传感器探头的信号的控制电路。当存在大量的射频（RF）干扰时，可以提供RF屏蔽，RF滤波，隔离放大和/或抑制RF干扰的多级低通滤波的温度感测。温度感测系统特别适用于监测和测量半导体制造设备内的温度，例如蚀刻，沉积和其它处理室。

36. 发明授权

US6035868A Method and apparatus for control of deposit build-up on an inner surface of a plasma processing chamber 失效
标题翻译：用于控制在等离子体处理室的内表面上沉积物堆积的方法和装置
公开(公告)号：US6035868A
公开(公告)日：2000-03-14
申请号：US828507
申请日：1997-03-31
申请人： William S. Kennedy , Albert J. Lamm , Thomas E. Wicker , Robert A. Maraschin
发明人： William S. Kennedy , Albert J. Lamm , Thomas E. Wicker , Robert A. Maraschin
IPC分类号： H01J37/32 , H01L21/205 , H01L21/302 , C25F3/14
CPC分类号： H01J37/32862 , H01J37/321 , H01J37/32174 , Y10S438/905
摘要： A method and apparatus for controlling deposit build-up on an interior surface of a dielectric member of a plasma processing chamber. The deposit build-up is controlled by selective ion bombardment of the inner surface by shifting location of a peak voltage amplitude of a voltage standing wave on an antenna such as a flat spiral coil of the plasma processing chamber. A region of high ion bombardment on the interior surface of the dielectric member is displaced by controlling the value of a termination capacitance over a range of values causing regions of low and high ion bombardment to move over the dielectric member in order to effect cleaning thereof.
摘要翻译：一种用于控制在等离子体处理室的电介质构件的内表面上的沉积物堆积的方法和装置。通过将电压驻波的峰值电压振幅的位置移动到诸如等离子体处理室的扁平螺旋线圈的天线上，通过选择性地离子轰击内表面来控制沉积物积聚。通过在低于和高的离子轰击区域的值的范围内控制终端电容的值来移动电介质构件的内表面上的高离子轰击区域，以移动电介质构件以便进行清洁。

37. 发明授权

US4941349A Coaxial coiled-tubing cable head 失效
标题翻译：同轴线管油管头
公开(公告)号：US4941349A
公开(公告)日：1990-07-17
申请号：US368766
申请日：1989-06-20
申请人： Arnold M. Walkow , William S. Kennedy , Kenneth J. Wolfe
发明人： Arnold M. Walkow , William S. Kennedy , Kenneth J. Wolfe
IPC分类号： E21B17/02 , E21B17/20 , E21B47/01 , F16L39/00 , G01V1/52
CPC分类号： E21B47/01 , E21B17/023 , E21B17/028 , E21B17/203 , E21B17/206 , F16L39/00 , G01V1/52 , H01R2201/14
摘要： A cable head connector is provided for coupling a plurality of nested tubes, each one of which conducts a different fluid, to a downhole geophysical tool such as a seismic sound source. The device includes separate clamps for individually gripping the respective nested tubes. Conduits are furnished for fluidly bypassing the respective clamping devices. The fluid bypass conduits are fluidly coupled to a distribution module for delivering the different fluids individually to the downhole geophysical tool. Additional facilities are provided for sending electrical control signals to the tool.
摘要翻译：提供了一种电缆头连接器，用于将多个嵌套的管（每个都将不同的流体引导）连接到诸如地震声源的井下地球物理工具。该装置包括用于单独夹持相应的嵌套管的单独夹具。导管配备流体旁路各自的夹紧装置。流体旁路管道流体地联接到分配模块，用于将不同流体单独地输送到井下地球物理工具。提供额外的设施，用于向工具发送电气控制信号。

38. 发明授权

US4671379A Method and apparatus for generating seismic waves 失效
标题翻译：用于产生地震波的方法和装置
公开(公告)号：US4671379A
公开(公告)日：1987-06-09
申请号：US771719
申请日：1985-09-03
申请人： William S. Kennedy , Stephen J. Blumenkranz
发明人： William S. Kennedy , Stephen J. Blumenkranz
IPC分类号： G01V1/00 , G01V1/135 , G01V1/40
CPC分类号： G01V1/005 , G01V1/135 , Y10S181/401
摘要： A method and apparatus for generating a seismic wave in a borehole in the earth is disclosed. A portion of the borehole, which may be the bottom of the hole or any other point along its length, is selected as the site for seismic wave generation. A device is provided to oscillate the borehole fluid in a selected portion of the borehole to establish a resonant standing pressure wave of desired frequency within the fluid. The wave is maintained by continuing to supply energy to the fluid to replace losses due to fluid friction, structural losses and radiated acoustic energy. The standing wave thus created is radiated through the borehole wall into the earth and is eventually received by seismic detectors located on the surface.
摘要翻译：公开了一种在地球钻孔中产生地震波的方法和装置。选择钻孔的一部分，其可以是孔的底部或沿其长度的任何其它点，作为地震波产生的位置。提供了一种装置，用于在钻孔的选定部分中振荡井眼流体，以在流体内建立期望频率的共振站立压力波。通过继续向流体供应能量以代替由于流体摩擦，结构损耗和辐射声能造成的损失来维持波浪。由此产生的驻波通过钻孔壁被辐射到地球中并最终被位于表面上的地震探测器接收。

39. 发明授权

US4509587A Passive temperature control shipment container 失效
标题翻译：被动温度控制装运集装箱
公开(公告)号：US4509587A
公开(公告)日：1985-04-09
申请号：US412579
申请日：1982-08-30
申请人： Thomas S. Clark , William S. Kennedy
发明人： Thomas S. Clark , William S. Kennedy
IPC分类号： F25D3/06 , F25D31/00 , F25B29/00
CPC分类号： F25D3/06 , F25D2303/081 , F25D2331/804 , F25D2600/04 , F25D31/006
摘要： A passive temperature control shipment container is provided having a central chamber surrounding a sample or specimen wherein the central chamber has two conductive walls, one of which is in contact with a heat source and one with a heat sink to provide a specified temperature change profile and to maintain a specified temperature time relationship in the shipping container.
摘要翻译：提供了一种被动温度控制装运容器，其具有围绕样品或样品的中心室，其中中央室具有两个导电壁，其中一个与热源接触，一个与散热器接触，以提供特定的温度变化曲线; 在运输集装箱中保持指定的温度时间关系。

40. 发明授权

US4135493A Parabolic trough solar energy collector assembly 失效
标题翻译：抛物槽太阳能集热器
公开(公告)号：US4135493A
公开(公告)日：1979-01-23
申请号：US760155
申请日：1977-01-17
申请人： William S. Kennedy
发明人： William S. Kennedy
IPC分类号： F24J2/24 , F24J2/10 , F24J2/14 , F24J2/54 , G01S3/786 , F24J3/02
CPC分类号： F24J2/541 , F24J2/145 , F24J2/38 , F24J2/4636 , F24J2/52 , G01S3/7861 , F24J2002/5458 , Y02E10/45 , Y02E10/47
摘要： A parabolic trough solar energy collector including an elongated support with a plurality of ribs secured thereto and extending outwardly therefrom. One surface of said ribs is shaped to define a parabola and is adapted to receive and support a thin reflecting sheet which forms a parabolic trough reflecting surface. One or more of said collectors are adapted to be joined end to end and supported for joint rotation to track the sun. A common drive system rotates the reflectors to track the sun; the reflector concentrates and focuses the energy along a focal line. The fluid to be heated is presented along the focal line in a suitable pipe which extends therealong.
摘要翻译：一种抛物槽太阳能收集器，其包括具有固定到其上并从其向外延伸的多个肋的细长支撑件。所述肋的一个表面被成形为限定抛物线，并且适于接收和支撑形成抛物面槽反射表面的薄反射片。一个或多个所述收集器适于端对端地连接并被支撑以用于联合旋转以跟踪太阳。共同的驱动系统使反射器旋转以跟踪太阳; 反射器沿着焦线集中和聚焦能量。待加热的流体沿着焦线呈现在沿其延伸的合适管道中。

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