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31. 发明授权

US07602474B2 Exposure apparatus 失效
标题翻译：曝光装置
公开(公告)号：US07602474B2
公开(公告)日：2009-10-13
申请号：US11772437
申请日：2007-07-02
申请人： Kenichiro Mori , Akihiro Yamada , Noboru Osaka
发明人： Kenichiro Mori , Akihiro Yamada , Noboru Osaka
IPC分类号： G03B27/72 , G03B27/54
CPC分类号： G03F7/70566 , G03B27/72
摘要： An exposure apparatus which exposes a substrate to light. An illumination optical system illuminates a mask with illumination light, and a projection optical system projects a pattern of the mask onto the substrate. The illumination light contains a primary component of polarized light and a secondary component of the polarized light, which are perpendicular to each other, and the illumination optical system includes a phase difference adjusting unit configured to adjust a phase difference between the primary component of the polarized light and the secondary component of the polarized light, without changing a direction of the primary component of the polarized light.
摘要翻译：一种使基板曝光的曝光装置。照明光学系统用照明光照射面罩，并且投影光学系统将掩模的图案投射到基板上。照明光包含彼此垂直的偏振光的主要分量和偏振光的次要成分，照明光学系统包括相位差调整单元，被配置为调节偏振光的主要分量之间的相位差光和偏振光的次要分量，而不改变偏振光的主要分量的方向。

32. 发明申请

US20090027647A1 EXPOSURE APPARATUS AND DEVICE FABRICATION METHOD 审中-公开
标题翻译：曝光装置和装置制造方法
公开(公告)号：US20090027647A1
公开(公告)日：2009-01-29
申请号：US12172298
申请日：2008-07-14
申请人： Yoshiyuki Nagai , Kazuhiro Takahashi , Akihiro Yamada
发明人： Yoshiyuki Nagai , Kazuhiro Takahashi , Akihiro Yamada
IPC分类号： G03B27/72
CPC分类号： G03F7/70983 , G03B27/72 , G03F7/70066 , G03F7/70083 , G03F7/70091 , G03F7/70558
摘要： The present invention provides an exposure apparatus comprising an illumination optical system configured to illuminate a reticle including a pellicle with light from a light source, a projection optical system configured to project a pattern of the reticle onto a substrate, an obtaining unit configured to obtain information on a thickness of the pellicle, an adjusting unit configured to adjust an illuminance on the substrate, and a control unit configured to control the adjusting unit based on the information on the thickness of the pellicle obtained by the obtaining unit.
摘要翻译：本发明提供一种曝光装置，包括：照明光学系统，被配置为利用来自光源的光照射包含防护薄膜的掩模版;投影光学系统，被配置为将掩模版的图案投影到基板上;获取单元，被配置为获得信息在所述防护薄膜组件的厚度上，调整单元，被配置为调节所述基板上的照度;以及控制单元，被配置为基于由所述获取单元获得的所述防护薄膜的厚度的信息来控制所述调节单元。

33. 发明授权

US07474380B2 Projection optical system, exposure apparatus, and device fabrication method 失效
标题翻译：投影光学系统，曝光装置和装置制造方法
公开(公告)号：US07474380B2
公开(公告)日：2009-01-06
申请号：US12038026
申请日：2008-02-27
申请人： Akihiro Yamada
发明人： Akihiro Yamada
IPC分类号： G03B27/42 , G03B27/52 , G02B5/30
CPC分类号： G02B1/02 , G03F7/70341 , G03F7/70966
摘要： The present invention provides a projection optical system which projects an image on a first object plane onto a second object plane, comprising a plurality of optical members inserted in turn from a side of the second object plane, said plurality of optical members being made of an isotropic crystal and including a first optical member and second optical member in each of which crystal axes are oriented in a direction of an optical axis and a third optical member in which crystal axes are oriented in the direction of the optical axis, wherein maximum angles θ1, θ2, and θ3 between the optical axis and light beams passing through said first optical member, said second optical member, and said third optical member, respectively, satisfy |θi−θj|
摘要翻译：本发明提供了一种投影光学系统，其将第一物体平面上的图像投影到第二物平面上，包括从第二物平面侧依次插入的多个光学构件，所述多个光学构件由各向同性晶体，并且包括第一光学构件和第二光学构件，其中每个晶体轴在光轴方向上取向;以及第三光学构件，其中<100°>晶轴定向在光轴的方向，其中通过所述第一光学构件，所述第二光学构件和所述第三光学构件的光轴和光束之间的最大角度θ1，θ2和θ3分别满足|θt °（i，j = 1,2,3）。

34. 发明申请

US20080198412A1 Data processing device and data processing method 审中-公开
标题翻译：数据处理装置和数据处理方法
公开(公告)号：US20080198412A1
公开(公告)日：2008-08-21
申请号：US12071323
申请日：2008-02-20
申请人： Akihiro Yamada
发明人： Akihiro Yamada
IPC分类号： G06F15/00
CPC分类号： H04N1/00965 , G06F3/1204 , G06F3/1236 , G06F3/1237 , G06F3/128 , H04N1/32037 , H04N1/32496 , H04N2201/0094 , H04N2201/33307 , H04N2201/33342 , H04N2201/33378
摘要： There is provided a data processing device having a plurality of functions including at least a print function of forming an image on a recording medium and a facsimile function of transmitting facsimile data. The data processing device comprises: a connection unit to which a portable storage medium is detachably attached; a storage unit configured to store relationship information defining relationship between a data type and a function to be executed for data having the data type; a reading unit configured to read data from the portable storage medium attached to the connection unit; a judgment unit configured to judge a data type of the data read by the reading unit from the portable storage medium; and a function execution unit configured to execute one of the plurality of functions corresponding to the data type judged by the judgment unit.
摘要翻译：提供了一种数据处理装置，具有多个功能，其至少包括在记录介质上形成图像的打印功能和传真传真数据的传真功能。数据处理装置包括：便携式存储介质可拆卸地连接到的连接单元; 存储单元，被配置为存储定义关于数据类型和对具有数据类型的数据执行的功能的关系的关系信息; 读取单元，被配置为从附接到所述连接单元的便携式存储介质读取数据; 判断单元，被配置为从所述便携式存储介质判断由所述读取单元读取的数据的数据类型; 以及功能执行单元，被配置为执行与由所述判断单元判断的数据类型相对应的所述多个功能中的一个。

35. 发明申请

US20080123055A1 EXPOSURE APPARATUS 失效
标题翻译：曝光装置
公开(公告)号：US20080123055A1
公开(公告)日：2008-05-29
申请号：US11772437
申请日：2007-07-02
申请人： Kenichiro Mori , Akihiro Yamada , Noboru Osaka
发明人： Kenichiro Mori , Akihiro Yamada , Noboru Osaka
IPC分类号： G03B27/72 , G03F7/00
CPC分类号： G03F7/70566 , G03B27/72
摘要： An exposure apparatus which exposes a substrate to light includes an illumination optical system which illuminates a mask with illumination light, and a projection optical system which projects the pattern of the mask onto the substrate. The illumination light contains the primary component of polarized light and the secondary component of the polarized light, which are perpendicular to each other. The illumination optical system includes a phase difference adjusting unit including a function of continuously adjusting the phase difference between the primary component of the polarized light and the secondary component of the polarized light without changing the direction of the primary component of the polarized light.
摘要翻译：将基板曝光的曝光装置包括利用照明光照射掩模的照明光学系统和将掩模的图案投影到基板上的投影光学系统。照明光包含彼此垂直的偏振光的主要分量和偏振光的次要分量。照明光学系统包括相位差调整单元，其具有连续调整偏振光的主要成分与偏振光的次要成分之间的相位差而不改变偏振光的主要成分的方向的功能。

36. 发明申请

US20080080001A1 Image forming apparatus 有权
标题翻译：图像形成装置
公开(公告)号：US20080080001A1
公开(公告)日：2008-04-03
申请号：US11902825
申请日：2007-09-26
申请人： Akihiro Yamada
发明人： Akihiro Yamada
IPC分类号： G06K15/00
CPC分类号： G06F3/1218 , G06F3/1215 , G06F3/1273 , G06F3/128 , H04N1/00347 , H04N2201/0082 , H04N2201/0087 , H04N2201/3242 , H04N2201/3277
摘要： One aspect of the present invention can include an image forming apparatus having an access portion configured to access an external storage medium, a file specification portion configured to specify a file to be a printing object, from files stored in the storage medium, a printing portion configured to execute, in accordance with printing conditions, data development processing of the file specified by the file specification portion and execute processing of printing to a printing medium on the basis of the developed data obtained by the data development processing, a printing history storage portion configured to store printing conditions used in the printing processing executed by the printing portion as printing history information. This aspect of the present invention can further include an acceptance portion configured to accept a printing history use instruction, and a printing control portion configured to, when the printing history use instruction is received and a file is specified by the file specification portion, cause printing processing of the specified file to be executed by the printing portion in accordance with the printing conditions stored as the printing history information.
摘要翻译：本发明的一个方面可以包括：图像形成装置，具有被配置为访问外部存储介质的访问部分，被配置为从存储在存储介质中的文件指定作为打印对象的文件的文件指定部分，打印部分被配置为根据打印条件执行由文件指定部分指定的文件的数据开发处理，并且基于通过数据开发处理获得的显影数据执行打印到打印介质的处理;打印历史存储部分被配置为将由打印部执行的打印处理中使用的打印条件存储为打印历史信息。本发明的这一方面还可以包括：接受打印历史使用指令的接收部分;以及打印控制部分，被配置为当接收到打印历史使用指令并由文件指定部分指定文件时，导致打印根据作为打印历史信息存储的打印条件处理由打印部分执行的指定文件。

37. 发明申请

US20070070386A1 Image-forming device 有权
标题翻译：图像形成装置
公开(公告)号：US20070070386A1
公开(公告)日：2007-03-29
申请号：US11535168
申请日：2006-09-26
申请人： Akihiro Yamada
发明人： Akihiro Yamada
IPC分类号： G06K15/00
CPC分类号： G06K15/02 , G06F21/608 , G06K15/005 , G06K15/1817
摘要： An image-forming device includes a printing element for successively printing jobs in a printing queue, a holding element for removing at least one printing job from the printing queue and holding the at least one printing job, and a holding release element for returning the at least one printing job on hold to the printing queue.
摘要翻译：图像形成装置包括用于在打印队列中连续打印作业的打印元件，用于从打印队列中移除至少一个打印作业并保持至少一个打印作业的保持元件，以及用于将打印队列返回的保持释放元件打印队列中保留至少一个打印作业。

38. 发明申请

US20060268303A1 Image forming apparatus 有权
标题翻译：图像形成装置
公开(公告)号：US20060268303A1
公开(公告)日：2006-11-30
申请号：US11442256
申请日：2006-05-30
申请人： Akihiro Yamada
发明人： Akihiro Yamada
IPC分类号： G06K15/00 , G06F15/00
CPC分类号： H04N1/3873
摘要： An image forming apparatus that forms plural copies of images on a recording medium having divided areas N (>1) by arranging the images on the divided areas, respectively, includes: an input image data acquisition unit that acquires an input image data for one copy; an output image data generation unit that performs a first generation process to generate an output image data in which the images are consecutively arranged on the divided areas, respectively, without a blank divided area for the plural copies by employing the input image data for one copy acquired by the input image data acquisition unit repeatedly by a number of times corresponding to the plurality of copies; and an image forming unit that forms an image on the recording medium based on the output image data generated by the first generation process.
摘要翻译：一种图像形成装置，其分别通过在分割区域上排列图像而在具有划分区域N（> 1）的记录介质上形成多个图像的副本，包括：输入图像数据获取单元，其获取一个拷贝的输入图像数据 ; 输出图像数据生成单元，其通过采用用于一个副本的输入图像数据，分别在分割区域上分别连续地排列图像以输出多个副本的空白分割区域来生成输出图像数据由所述输入图像数据获取单元重复地对应于所述多个副本的次数获取; 以及图像形成单元，其基于由第一代处理产生的输出图像数据在记录介质上形成图像。

39. 发明授权

US07057708B2 Projection optical system, exposure apparatus and device fabrication method 失效
标题翻译：投影光学系统，曝光装置和装置制造方法
公开(公告)号：US07057708B2
公开(公告)日：2006-06-06
申请号：US11016420
申请日：2004-12-17
申请人： Akihiro Yamada
发明人： Akihiro Yamada
IPC分类号： G03B27/54 , G03B27/32 , G03B27/42 , G02F1/07
CPC分类号： G03F7/70225 , G02B1/02 , G03F7/70258 , G03F7/70966
摘要： A projection optical system includes a first optical element that orients an axis [1 1 1] as a crystal orientation in a cubic system crystal parallel to an optical axis, and a second optical element that orients an axis [1 0 0] as the crystal orientation in the cubic system crystal so that a minimum angle may be 30° or larger between the optical axis and an off-axis edge beam that passes through the second optical element, and a minimum angle may be 10° or smaller between the optical axis and an off-axis principal ray that passes through the second optical element.
摘要翻译：投影光学系统包括将平行于光轴的三次晶体晶体中的轴[111]定向为晶体取向的第一光学元件和将轴[110]定向为晶体的第二光学元件立方体晶体的取向，使得光轴与穿过第二光学元件的偏轴边缘光束之间的最小角度可以为30°或更大，并且最小角度可以在光轴之间为10°或更小以及穿过第二光学元件的离轴主光线。

40. 发明授权

US6063342A Catalyst unit and gas purifying apparatus 失效
标题翻译：催化剂单元和气体净化装置
公开(公告)号：US6063342A
公开(公告)日：2000-05-16
申请号：US48053
申请日：1998-03-26
申请人： Yasuyoshi Kato , Tomihisa Ishikawa , Yoshinori Nagai , Isato Morita , Masato Mukai , Akihiro Yamada , Takashi Michimoto , Masaharu Morii , Hiroshi Kuroda
发明人： Yasuyoshi Kato , Tomihisa Ishikawa , Yoshinori Nagai , Isato Morita , Masato Mukai , Akihiro Yamada , Takashi Michimoto , Masaharu Morii , Hiroshi Kuroda
IPC分类号： B01D53/34 , B01D53/38 , B01D53/86 , B01J35/02 , B01J35/04 , F01N3/28 , B01D50/00
CPC分类号： F01N3/2821 , B01D53/8631 , B01J35/02 , B01J35/04 , F01N3/2814 , F01N2330/42
摘要： A catalyst unit is constructed by alternately stacking rectangular catalyst elements (1) formed by cutting catalyst support plates coated with a catalytic material and having ribs (2) inclined at 45.degree. to one specified side edge (1a) of each thereof, and those turned upside down in a case, and the catalyst unit is disposed in a gas passage with the ribs (2) of the catalyst elements (1) inclined at an angle greater than 0.degree. and smaller than 90.degree. to the direction of the gas flow (6). When the catalyst unit comprising the catalyst elements (1) coated with a denitrating catalyst is placed in the gas passage, the ribs (2) of the catalyst elements (1) blocks the gas flow (6) and generate turbulent currents on the downstream side thereof to promote the contact of ammonia and NOx contained in the exhaust gas with the catalyst. When the gas flow (6) is disturbed, the thickness of laminar films covering the surface of the catalyst elements (1) is reduced, so that ammonia and NOx can be easily diffused and the catalytic activity can be enhanced. The catalyst elements exhibits their catalytic abilities effectively without entailing significant pressure loss in the gas flow.
摘要翻译：催化剂单元通过交替堆叠通过切割涂覆有催化材料的催化剂支撑板形成的矩形催化剂元件（1），并且具有倾斜45°的肋（2）与其每个的特定侧边（1a）并且催化剂单元设置在气体通道中，其中催化剂元件（1）的肋（2）相对于气流的方向倾斜大于0°且小于90°（ 6）。当包含涂有脱硝催化剂的催化剂元件（1）的催化剂单元被放置在气体通道中时，催化剂元件（1）的肋（2）阻挡气流（6）并在下游侧产生湍流以促进废气中所含的氨和NOx与催化剂的接触。当气流（6）被扰乱时，覆盖催化剂元件（1）表面的层状膜的厚度减小，使得氨和NOx容易扩散并且可以提高催化活性。催化剂元素显示出其催化能力，而不会在气流中产生明显的压力损失。

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