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    • 33. 发明授权
    • Distance measuring system using superconducting quantum interference
device
    • 使用超导量子干涉装置的距离测量系统
    • US4912408A
    • 1990-03-27
    • US199706
    • 1988-05-27
    • Takeshi SawadaRyo KurodaNoriyuki NoseYukichi Niwa
    • Takeshi SawadaRyo KurodaNoriyuki NoseYukichi Niwa
    • G01B7/00G01D5/14G01D5/18H01L39/00
    • G01D5/145G01D5/18Y10S505/843Y10S505/872
    • Disclosed is a distance measuring system suitably usable in a semiconductor microcircuit manufacturing lithographic apparatus such as an aligner or a stepper, for measuring the position or the distance of movement of a movable object such as a mask stage or a wafer stage. The system includes a magnetic field producing portion such as a magnet for producing a predetermined magnetic field, a superconducting quantum interference device coupled to the mask stage or the wafer stage. Further, there are provided a magnetic flux detecting portion for outputting signals corresponding to changes in the magnetic flux, in the magnetic field, passing through the superconducting quantum interference device and a signal processing unit for processing the output signals of the magnetic flux detecting portion to detect the position or the distance of movement of the mask stage or the wafer stage. Also, a shielding member is provided to shield at least the magnetic field producing portion and the magnetic flux detecting portion against an external magnetic field, by use of a superconductor. The distance measuring system of the present invention assures accurate measurement with a high resolution, for a wide movable range of the movable member such as a range not less than 100 mm.
    • 公开了适用于半导体微电路制造光刻设备(例如对准器或步进器)中的距离测量系统,用于测量诸如掩模台或晶片台之类的可移动物体的位置或距离。 该系统包括磁场产生部分,例如用于产生预定磁场的磁体,连接到掩模台或晶片台的超导量子干涉装置。 此外,提供了一个磁通量检测部分,用于输出与通过超导量子干涉装置的磁场中的磁通量的变化相对应的信号,以及用于处理磁通检测部分的输出信号的信号处理单元 检测掩模台或晶片台的位置或移动距离。 此外,设置屏蔽构件,以通过使用超导体来抵御外部磁场来屏蔽至少磁场产生部分和磁通量检测部分。 本发明的距离测量系统可确保在可移动部件的宽的可移动范围内具有高分辨率的精确测量,例如不小于100mm的范围。
    • 35. 发明授权
    • Cold-roll forming stand
    • 冷轧成型台
    • US4176539A
    • 1979-12-04
    • US887251
    • 1978-03-16
    • Takeshi SawadaTakeshi Inoue
    • Takeshi SawadaTakeshi Inoue
    • B21D5/08B21D5/06
    • B21D5/08
    • A cold-roll forming stand for forming a flat metal strip into a desired section which includes a pair of upper and lower forming rolls for forming the metal strip lengthwise; a pair of intermediate longitudinal forming rolls for bending or curving the metal strip widthwise are mounted on intermediate vertical shafts, a pair of front longitudinal forming rolls mounted on vertical shafts upstream of the pair of intermediate longitudinal forming rolls and a pair of rear longitudinal forming rolls are mounted on vertical shafts downstream of the pair of intermediate longitudinal forming rolls, whereby the metal strip is subjected to the bending and/or curving lengthwise by the pair of upper and lower forming rolls and widthwise by the front, intermediate and rear pairs of longitudinal forming rolls.
    • 一种用于将扁平金属带形成到所需部分中的冷轧成形台,该部分包括一对纵向成形金属条的上下成形辊; 一对用于纵向弯曲或弯曲金属带的中间纵向成形辊安装在中间垂直轴上,一对前纵向成形辊安装在一对中间纵向成形辊上游的垂直轴上,一对后纵向成形辊 安装在一对中间纵向成形辊下游的垂直轴上,由此金属带通过一对上下成形辊纵向受到弯曲和/或弯曲的纵向和纵向的纵向 成型辊。
    • 38. 发明授权
    • System for detecting pneumatic pressure in tire
    • 轮胎气压检测系统
    • US5261273A
    • 1993-11-16
    • US735025
    • 1991-07-24
    • Yuichi ImaniTakeshi Sawada
    • Yuichi ImaniTakeshi Sawada
    • B60C23/00B60C23/04B60C23/02
    • B60C23/0425
    • The pneumatic pressure in a tire on a wheel of a vehicle is introduced into a pressure chamber positioned at a central axis about which the tire is rotatable through a communication passage defined in the wheel. When the pneumatic pressure in the pressure chamber varies, a diaphragm or bellows attached over the pressure chamber is elastically displaced, axially moving a slide bar extending axially through a wheel shaft on which the wheel is supported. The movement of the slide bar displaces a ferromagnetic member in a coil, whose inductance then varies. The change in the coil inductance is detected by an electronic control unit, which transmits a signal to a display unit.
    • 轮胎在车轮上的气压被引入定位在中心轴线处的压力室,轮胎可通过轮毂上限定的连通通道旋转。 当压力室中的气压变化时,附着在压力室上的隔膜或波纹管被弹性位移,轴向移动滑动杆,其轴向延伸通过其上支撑有轮的轮轴。 滑动杆的移动使线圈中的铁磁部件移位,线圈的电感随之变化。 线圈电感的变化由电子控制单元检测,电子控制单元向显示单元发送信号。