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    • 38. 发明授权
    • Display device
    • 显示设备
    • US08530898B2
    • 2013-09-10
    • US12912799
    • 2010-10-27
    • Takeshi NodaTakuo Kaitoh
    • Takeshi NodaTakuo Kaitoh
    • H01L29/04H01L29/10H01L31/00
    • H01L27/127H01L27/1214H01L29/78621H01L29/78627
    • A display device which uses a TFT having a gate electrode film thereof arranged on a light source side can also suppress the increase of parasitic capacitance while suppressing the generation of a light leakage current. On at least one end of the TFT, between a high concentration region which constitutes a source region or a drain region and a channel region, a first low concentration region which is arranged on a high concentration region side and exhibits low impurity concentration and a second low concentration region which exhibits impurity concentration even lower than the impurity concentration of the first low concentration region are provided in this order.
    • 使用其中设置在光源侧的具有栅电极膜的TFT的显示装置也可以抑制寄生电容的增加同时抑制漏光电流的产生。 在TFT的至少一端,在构成源极区域或漏极区域的高浓度区域和沟道区域之间,配置在高浓度区域侧且显示低杂质浓度的第一低浓度区域和第二 按照该顺序设置表现出比第一低浓度区域的杂质浓度更低的杂质浓度的低浓度区域。
    • 39. 发明授权
    • Display device and manufacturing method thereof
    • 显示装置及其制造方法
    • US08368077B2
    • 2013-02-05
    • US12578641
    • 2009-10-14
    • Takeshi KuriyagawaTakeshi NodaTakuo Kaitoh
    • Takeshi KuriyagawaTakeshi NodaTakuo Kaitoh
    • H01L27/14
    • H01L27/124H01L27/1248H01L29/66765
    • A second insulation layer which is formed by stacking a plurality of layers made of different materials in a mutually contact manner is formed such that the second insulation layer covers a source region and a drain region and also covers a gate electrode from above. A first contact hole which reaches one of the source region and the drain region and a recessed portion which is arranged above the gate electrode but is not communicated with the gate electrode are simultaneously formed on the second insulation layer by dry etching. A first line layer is formed so as to cover the first contact hole. After forming the first line layer, a bottom surface of the recessed portion is etched by dry etching thus forming a second contact hole which reaches the gate electrode in the first and second insulation layers. A second line layer is formed on the second contact hole.
    • 形成通过以相互接触的方式堆叠由不同材料制成的多个层而形成的第二绝缘层,使得第二绝缘层覆盖源极区域和漏极区域并且还从上方覆盖栅极电极。 通过干法蚀刻在第二绝缘层上同时形成到达源极区域和漏极区域中的一个的第一接触孔和设置在栅电极上方但不与栅电极连通的凹部。 第一线层形成为覆盖第一接触孔。 在形成第一线层之后,通过干蚀刻蚀刻凹陷部分的底表面,从而形成到达第一和第二绝缘层中的栅电极的第二接触孔。 在第二接触孔上形成第二线层。
    • 40. 发明授权
    • Light emitting device
    • 发光装置
    • US08362688B2
    • 2013-01-29
    • US12966157
    • 2010-12-13
    • Takeshi Noda
    • Takeshi Noda
    • H05B33/00
    • H01L33/26H01L51/5048H01L51/5203H01L51/5209H05B33/24
    • It is an object of the present invention to provide a light-emitting device in which, even when a material with high reflectivity such as aluminum is used for an electrode, a layer containing oxygen can be formed over the electrode without increasing contact resistance and a manufacturing method thereof. According to the present invention, a feature thereof is a light-emitting element having an electrode composed of a stacked structure where a conductive film having high reflectivity such as aluminum, silver, and an alloy containing aluminum or an alloy containing silver, and a conductive film composed of a refractory metal material is provided over the conductive film, or a light-emitting device having the light-emitting element.
    • 本发明的目的是提供一种发光装置,其中即使当具有诸如铝的高反射率的材料用于电极时,可以在电极上形成包含氧的层,而不增加接触电阻,并且 其制造方法。 根据本发明,其特征在于,具有由具有高反射率的导电膜如铝,银以及包含铝的合金或含有银的合金的叠层结构的电极和导电性的发光元件 在导电膜上设置由难熔金属材料构成的膜,或者具有发光元件的发光装置。