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    • 31. 发明授权
    • Arc detector for plasma processing system
    • 等离子体处理系统的电弧探测器
    • US07915563B2
    • 2011-03-29
    • US11906120
    • 2007-09-28
    • Ryohei Tanaka
    • Ryohei Tanaka
    • B23K10/00
    • H05H1/34H05H2001/3494
    • An arc detector is provided for a plasma processing system including a HF power source, a plasma processor, and a voltage/current signal detector. The arc detector includes a calculator for the phase difference between the AC voltage signal and the AC current signal, a calculator for an effective voltage based on the AC voltage signal, a calculator for an effective current based on the AC current signal, an FFT processor for the frequency spectrum of the AC voltage or current signal, and an arc analyzer connected to the phase difference calculator, effective voltage calculator, effective current calculator, and FFT processor. The arc analyzer calculates the plasma processor's impedance based on the calculated phase difference, effective voltage, and effective current. The arc analyzer monitors arcs in the plasma processor, based on the fluctuation rate of the calculated impedance and the output level of a frequency component in the spectrum.
    • 为包括HF电源,等离子体处理器和电压/电流信号检测器的等离子体处理系统提供电弧检测器。 电弧检测器包括用于AC电压信号和AC电流信号之间的相位差的计算器,基于AC电压信号的有效电压的计算器,基于AC电流信号的有效电流的计算器,FFT处理器 用于交流电压或电流信号的频谱,以及连接到相位差计算器,有效电压计算器,有效电流计算器和FFT处理器的电弧分析仪。 电弧分析仪根据计算出的相位差,有效电压和有效电流来计算等离子体处理器的阻抗。 电弧分析仪基于计算出的阻抗的波动率和频谱中的频率分量的输出电平来监测等离子体处理器中的弧。
    • 32. 发明授权
    • High-frequency power source
    • 高频电源
    • US07292047B2
    • 2007-11-06
    • US11391115
    • 2006-03-28
    • Ryohei TanakaHiroshi Matoba
    • Ryohei TanakaHiroshi Matoba
    • G01R27/00
    • H05H1/46H01J37/32082H01J37/32174H01J37/32935H03H7/40
    • A high-frequency power source supplies high-frequency power to a load whose reflection characteristic for the power varies with time. The power source includes a frequency-variable power generator, a power detector for detecting the power into the load and the power from the load, a reflection coefficient calculator for calculating a reflection coefficient based on the detection of the power into and from the load, a frequency detector causing the power generator to generate high-frequency powers at various frequencies within a predetermined frequency range for obtaining the frequency that gives a minimum value to the calculated reflection coefficient, and a power supply controller for causing the power generator to generate a high-frequency power of the frequency obtained by the frequency detector and for supplying the high-frequency power to the load.
    • 高频电源向负载的反射特性随时间变化的负载提供高频电力。 电源包括可变功率发生器,用于检测负载的功率和来自负载的功率的功率检测器,反射系数计算器,用于基于对负载的功率的检测来计算反射系数, 频率检测器,其使所述发电机在预定频率范围内以各种频率产生高频功率,以获得给出所计算的反射系数的最小值的频率;以及电源控制器,用于使所述发电机产生高电平 由频率检测器获得的频率的频率功率和用于向负载提供高频功率。
    • 33. 发明申请
    • Signal processing device for computing phase difference between alternating current signals
    • 信号处理装置,用于计算交流信号之间的相位差
    • US20060248138A1
    • 2006-11-02
    • US11406885
    • 2006-04-19
    • Ryohei TanakaToyokazu Kitano
    • Ryohei TanakaToyokazu Kitano
    • G06G7/00
    • G01R19/2506G01R25/00H03H21/0012
    • A signal processing device includes a converting unit, a filtering unit, a differential computing unit, and a phase difference computing unit. The converting unit samples two alternating signals with a predetermined period and converts the sampled level values into digital alternating signal data. The filtering unit filters the two digital alternating signal data generated by the converting unit so as to abstract digital alternating signal data having a predetermined frequency, and the filtering unit comprises an adaptive digital filter. The differential computing unit computes differentials of the digital alternating signal data generated by the filtering unit. The phase difference computing unit computes phase difference using the two digital alternating signal data generated by the filtering unit, and the two digital alternating signal data generated by the differential computing unit.
    • 信号处理装置包括转换单元,滤波单元,差分计算单元和相位差计算单元。 转换单元以预定周期对两个交替信号进行采样,并将采样的电平值转换为数字交替信号数据。 滤波单元对由转换单元产生的两个数字交替信号数据进行滤波,以抽出具有预定频率的数字交替信号数据,并且滤波单元包括自适应数字滤波器。 差分计算单元计算由滤波单元产生的数字交流信号数据的差分。 相位差计算单元使用由滤波单元生成的两个数字交替信号数据和由差分计算单元生成的两个数字交替信号数据来计算相位差。