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    • 32. 发明授权
    • Chemical mechanical polishing conditioner and manufacturing methods thereof
    • 化学机械抛光调理剂及其制造方法
    • US09259822B2
    • 2016-02-16
    • US14198162
    • 2014-03-05
    • Kinik Company
    • Jui-Lin ChouChia Chun WangChia-Feng ChiuChung-Yi Cheng
    • B24B53/00B24D3/06B24D7/18B24B53/017B24B53/12
    • B24B53/017B24B53/12B24D7/18
    • The present invention relates to a chemical mechanical polishing conditioner and manufacturing methods thereof. The chemical mechanical polishing conditioner comprises: a planar substrate having a leveling surface; a bonding layer disposed on the surface of the planar substrate; and a plurality of abrasive particles embedded in the surface of the bonding layer and fixed to the surface of the planar substrate by the binding layer; wherein the planar substrate is formed by a deformation compensation for the non-planar substrate during curing the binding layer, and thus the tips of the abrasive particles have a leveled height. Therefore, the present invention can effectively improve the problem of thermal deformation of the substrate of the chemical mechanical polishing conditioner during heating and curing process, and thereby enhancing the surface flatness of chemical mechanical polishing conditioner.
    • 化学机械抛光调理剂及其制造方法技术领域本发明涉及化学机械抛光调理剂及其制造方法。 所述化学机械抛光调理剂包括:具有平整表面的平面基板; 设置在所述平面基板的表面上的接合层; 以及嵌入在所述接合层的表面中的多个磨料颗粒,并通过所述粘合层固定在所述平面基板的表面上; 其中所述平面基板通过在固化所述粘合层期间对所述非平面基板进行变形补偿而形成,并且因此所述磨料颗粒的末端具有调平高度。 因此,本发明可以有效地改善加热和固化过程中化学机械抛光调理剂的基材的热变形问题,从而提高化学机械抛光调理剂的表面平整度。
    • 34. 发明申请
    • CHEMICAL MECHANICAL POLISHING CONDITIONER WITH OPTIMAL ABRASIVE EXPOSING RATE
    • 化学机械抛光调理器,具有最佳的磨耗率
    • US20150202735A1
    • 2015-07-23
    • US14539842
    • 2014-11-12
    • Kinik Company
    • I-Tsao LIAO
    • B24B53/017B24B53/12
    • B24B53/017B24B53/12
    • The present invention relates to a chemical mechanical polishing conditioner with optimal abrasive exposing rate, comprising a substrate; a bonding layer disposed on the substrate; and a plurality of abrasive particles placed on the bonding layer, and the abrasive particles are placed on the substrate by the bonding layer; wherein each abrasive particle has an abrasive exposing rate which is ¼ to ¾ of particle sizes of the abrasive particles and is measured by a height measuring device. Therefore, the chemical mechanical polishing conditioner with optimal abrasive exposing rate of the present invention can control the exposing rate of the abrasive particles to improve the cut rate of the conditioner.
    • 本发明涉及具有最佳研磨曝光速率的化学机械抛光调理剂,其包含基材; 设置在所述基板上的接合层; 以及多个磨料颗粒放置在粘合层上,并且磨料颗粒通过粘结层放置在基底上; 其中每个磨料颗粒的磨料暴露速率为研磨颗粒粒径的1/4至3/4,并由高度测量装置测量。 因此,具有本发明的最佳研磨曝光率的化学机械抛光调理剂可以控制研磨剂颗粒的曝光速率,以提高调理剂的切割速率。
    • 35. 发明申请
    • DETECTION METHOD AND APPARATUS FOR THE TIP OF A CHEMICAL MECHANICAL POLISHING CONDITIONER
    • 化学机械抛光调理器提示的检测方法及装置
    • US20140335624A1
    • 2014-11-13
    • US14274375
    • 2014-05-09
    • Kinik Company
    • Jui-Lin CHOUChia Chun WANGChia-Feng CHIUWen-Jen LIAO
    • G01N31/22
    • B24B53/017B24B49/12B24B49/18
    • The present invention relates to a detection method and apparatus for the tip of the chemical mechanical polishing conditioner, which comprises: providing a dyeing apparatus comprising a dyeing layer; providing a chemical mechanical polishing conditioner comprising a substrate, a binding layer, and a plurality of abrasive particles, the abrasive particles fixed on the substrate by the binding layer; making the abrasive particles of the chemical mechanical polishing conditioner toward the dyeing apparatus and provide a downward force, so that the chemical mechanical polishing conditioner is contacted with the dyeing layer; and separating the chemical mechanical polishing conditioner and the dyeing apparatus, so that the abrasive particles with a particular protruding height form dyeing abrasive particles adhered the dyeing layer on their surface, and the dyeing abrasive particles are determined as a defect of destroying the flatness of chemical mechanical polishing conditioner.
    • 本发明涉及化学机械抛光调理剂的尖端的检测方法和装置,其包括:提供包括染色层的染色装置; 提供一种化学机械抛光调理剂,其包含基材,粘合层和多个研磨颗粒,磨料颗粒通过粘合层固定在基材上; 使化学机械抛光调理剂的磨料颗粒朝向染色装置提供向下的力,使化学机械抛光调理剂与染色层接触; 并分离化学机械抛光调理剂和染色设备,使得具有特定突起高度的磨料颗粒形成染色磨料颗粒将染色层附着在其表面上,并且将染色磨料颗粒确定为破坏化学品的平整度的缺陷 机械抛光调理剂。
    • 36. 发明申请
    • CHEMICAL MECHANICAL POLISHING CONDITIONER AND MANUFACTURING METHODS THEREOF
    • 化学机械抛光调理器及其制造方法
    • US20140127983A1
    • 2014-05-08
    • US14063230
    • 2013-10-25
    • Kinik Company
    • Chia-Chun WANGKai-Hsiang CHANGChung-Yi CHENGWen-Jen LIAO
    • B24B53/017B24D18/00
    • B24B53/017B24D18/0009
    • The present invention relates to a method for manufacturing a chemical mechanical polishing conditioner, comprising: (A) providing a non-planar substrate; (B) providing a binding layer disposed on the surface of the non-planar substrate; (C) providing a plurality of abrasive particles embedded in a surface of the binding layer, and (D) heat curing the binding layer, such that the non-planar substrate is deformed into a planar substrate during curing the binding layer, and the abrasive particles are fixed to a surface of the planar substrate by the binding layer; wherein, after step (D), tips of the abrasive particles have a leveled height. Therefore, the present can effectively improve the problem of thermal deformation of the substrate of the chemical mechanical polishing conditioner during a heat curing process, and enhance surface flatness of the chemical mechanical polishing conditioner.
    • 本发明涉及一种化学机械抛光调理剂的制造方法,包括:(A)提供非平面基材; (B)提供设置在所述非平面基板的表面上的粘结层; (C)提供嵌入在所述粘合层的表面中的多个磨料颗粒,和(D)热固化所述粘合层,使得所述非平面基材在固化所述粘结层期间变形为平面基材, 颗粒通过粘合层固定在平面基底的表面上; 其中,在步骤(D)之后,磨料颗粒的尖端具有调平的高度。 因此,本发明可以有效地改善热固化过程中化学机械抛光调理剂的基材的热变形问题,并且增强化学机械抛光调理剂的表面平整度。