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    • 31. 发明授权
    • Non-volatile memory device, method of manufacturing the same, and method of operating the same
    • 非易失性存储器件,其制造方法及其操作方法
    • US07602633B2
    • 2009-10-13
    • US11946737
    • 2007-11-28
    • Byung-Yong ChoiChoong-Ho LeeKyu-Charn Park
    • Byung-Yong ChoiChoong-Ho LeeKyu-Charn Park
    • G11C11/00
    • H01L29/685
    • A non-volatile memory device includes a substrate, resistance patterns, a gate dielectric layer, a gate electrode pattern, a first impurity region and a second impurity region. The substrate has recesses. The recesses are filled with the resistance patterns. The resistance patterns include a material having a resistance that is variable in accordance with a voltage applied thereto. The gate dielectric layer is formed on the substrate. The gate electrode pattern is formed on the gate dielectric layer. The first and second impurity regions are formed in the substrate. The first impurity region and the second impurity region contact side surfaces of the resistance patterns. Further, the resistance patterns, the first impurity region and the second impurity region define a channel region. Thus, the non-volatile memory device may store data using a variable resistance of the resistance patterns so that the non-volatile memory device may have excellent operational characteristics.
    • 非易失性存储器件包括衬底,电阻图案,栅极介电层,栅极电极图案,第一杂质区域和第二杂质区域。 基板有凹槽。 凹槽中填充有电阻图案。 电阻图案包括具有根据施加到其上的电压而可变的电阻的材料。 栅极电介质层形成在基板上。 栅极电极图案形成在栅极介电层上。 在衬底中形成第一和第二杂质区。 电阻图案的第一杂质区和第二杂质区接触侧表面。 此外,电阻图案,第一杂质区域和第二杂质区域限定沟道区域。 因此,非易失性存储器件可以使用电阻图案的可变电阻来存储数据,使得非易失性存储器件可以具有优异的操作特性。
    • 36. 发明授权
    • Non-volatile memory device and methods of forming the same
    • 非易失性存储器件及其形成方法
    • US07465985B2
    • 2008-12-16
    • US11580086
    • 2006-10-13
    • Byung-Yong ChoiChoong-Ho LeeDong-Gun Park
    • Byung-Yong ChoiChoong-Ho LeeDong-Gun Park
    • H01L21/334
    • H01L27/115H01L27/11519H01L27/11526H01L27/11529
    • A non-volatile memory device and a method of forming the same are provided. The non-volatile memory device may include a cell isolation pattern and a semiconductor pattern sequentially stacked on a predetermined or given region of a semiconductor substrate, a cell gate line on the semiconductor pattern and on a top surface of the semiconductor substrate on one side of the cell isolation pattern, a multi-layered trap insulation layer between the cell gate line and the semiconductor substrate, and the cell gate line and the semiconductor pattern, a first impurity diffusion layer in the semiconductor substrate on both sides of the cell gate line and a second impurity diffusion layer in the semiconductor pattern on both sides of the cell gate line.
    • 提供了一种非易失性存储器件及其形成方法。 非易失性存储器件可以包括依次层叠在半导体衬底的预定或给定区域上的单元隔离图案和半导体图案,半导体图案上的单元栅极线和半导体衬底的一侧的顶表面上的半导体图案 电池隔离图案,单元栅极线和半导体衬底之间的多层陷阱绝缘层,以及单元栅极线和半导体图案,在单元栅极线的两侧的半导体衬底中的第一杂质扩散层和 位于单元栅极线两侧的半导体图案中的第二杂质扩散层。
    • 38. 发明申请
    • NON-VOLATILE MEMORY DEVICE, METHOD OF MANUFACTURING THE SAME, AND METHOD OF OPERATING THE SAME
    • 非易失性存储器件,其制造方法及其操作方法
    • US20080130349A1
    • 2008-06-05
    • US11946737
    • 2007-11-28
    • Byung Yong CHOIChoong-Ho LEEKyu-Charn PARK
    • Byung Yong CHOIChoong-Ho LEEKyu-Charn PARK
    • G11C11/00H01L45/00
    • H01L29/685
    • A non-volatile memory device includes a substrate, resistance patterns, a gate dielectric layer, a gate electrode pattern, a first impurity region and a second impurity region. The substrate has recesses. The recesses are filled with the resistance patterns. The resistance patterns include a material having a resistance that is variable in accordance with a voltage applied thereto. The gate dielectric layer is formed on the substrate. The gate electrode pattern is formed on the gate dielectric layer. The first and second impurity regions are formed in the substrate. The first impurity region and the second impurity region contact side surfaces of the resistance patterns. Further, the resistance patterns, the first impurity region and the second impurity region define a channel region. Thus, the non-volatile memory device may store data using a variable resistance of the resistance patterns so that the non-volatile memory device may have excellent operational characteristics.
    • 非易失性存储器件包括衬底,电阻图案,栅极介电层,栅极电极图案,第一杂质区域和第二杂质区域。 基板有凹槽。 凹槽中填充有电阻图案。 电阻图案包括具有根据施加到其上的电压而可变的电阻的材料。 栅极电介质层形成在基板上。 栅极电极图案形成在栅极介电层上。 在衬底中形成第一和第二杂质区。 电阻图案的第一杂质区和第二杂质区接触侧表面。 此外,电阻图案,第一杂质区域和第二杂质区域限定沟道区域。 因此,非易失性存储器件可以使用电阻图案的可变电阻来存储数据,使得非易失性存储器件可以具有优异的操作特性。