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21. 发明申请

US20020163649A1 Film thickness measuring method and apparatus, and thin film device manufacturing method and manufacturing apparatus using same 审中-公开
标题翻译：薄膜厚度测量方法和装置以及薄膜装置的制造方法和使用该方法的制造装置
公开(公告)号：US20020163649A1
公开(公告)日：2002-11-07
申请号：US10081385
申请日：2002-02-20
申请人： Hitachi, Ltd.
发明人： Takenori Hirose , Mineo Nomoto
IPC分类号： G01B011/02
CPC分类号： G03F7/70483 , G01B11/0625
摘要： In order to be able to automatically define significant measurement points for measuring the film thickness of a transparent film on a circuit pattern buried under an optically transparent thin film, in a method for determining measurement points for measuring film thickness, whereby measurement points for measuring the film thickness of optically transparent thin film on a circuit pattern formed on a wafer beneath an optically transparent thin film, are determined automatically, light is irradiated onto the surface of the wafer, either intermittently or continuously, starting at a predetermined provisional reference measurement point in the region of a particular chip on the wafer, and following a predetermined path of travel in the vicinity of this provisional reference measurement point, the light reflected by the wafer is detected, and the measurement points for measuring film thickness are determined on the basis of spectral waveform data for the reflected light thus detected.
摘要翻译：为了能够自动定义用于测量掩模在光学透明薄膜下的电路图案上的透明膜的膜厚度的重要测量点，用于确定测量膜厚度的测量点的方法，由此测量测量点自动确定形成在光学透明薄膜下面的晶片上的电路图案上的光学透明薄膜的膜厚度，间歇地或连续地将光照射到晶片的表面上，从预定的临时参考测量点开始晶片上的特定芯片的区域，并且在该临时参考测量点附近的预定行进路径之后，检测由晶片反射的光，并且基于以下方式确定测量膜厚度的测量点因此检测到的反射光的光谱波形数据。

22. 发明申请

US20020159071A1 Method for producing time marks at any points on moving components 失效
标题翻译：移动部件上任何点产生时间标记的方法
公开(公告)号：US20020159071A1
公开(公告)日：2002-10-31
申请号：US09913873
申请日：2001-10-13
发明人： Roland Hessert , Michael Zieliski , Gerhard Ziller
IPC分类号： G01B011/02
CPC分类号： G01H9/00
摘要： The invention relates to a method for generating time markers of arbitrary points on moving components, and also to an optical trigger device for carrying out the method, as illustrated in FIG. 1. According to the invention, light from a broadband light source (1) with a correspondingly short coherence length is split into two paths, namely a measurement light path (3) and a reference light path (4), and is coupled into two optical waveguides (5, 6), the light of the reference light path (4) is at least partially coupled back and the light of the measurement light path (3) is focussed at a measurement point (11) and reflected by the component passing through the focus (11), wherein the light distances in the measurement light path (3) up to the focus (11) and in the reference light path (4) up to the coupling-back plane (12,18) are of the same length within the coherence length of the radiated light, wherein the coupled-back light from the reference light path (4) and the measurement light path (3) is brought to interference and detected by a detector (14), and wherein a short modulation event occurs at the detector (14) when the component (13) passes through the focus (11) (FIG. 1).
摘要翻译：本发明涉及一种用于生成移动部件上任意点的时间标记的方法，还涉及一种用于执行该方法的光学触发装置，如图1所示。 1 。根据本发明，具有相应短的相干长度的宽带光源（1）的光被分成两个路径，即测量光路（3）和参考光路（4），并被耦合到两个光波导（5,6）中，参考光路（4）的光至少部分地耦合回来，并且测量光路（3）的光聚焦在测量点（11）处并被穿过焦点（11），其中测量光路（3）中直到焦点（11）和参考光路（4）中的光距离直到耦合回平面（12,18）具有相同的长度在所述辐射光的相干长度内，来自所述参考光路（4）和所述测量光路（3）的耦合反射光受到检测器（14）的干涉和检测，并且其中短调制事件当组件（13）通过焦点（11）（图1）时，在检测器（14）处发生。 1）。

23. 发明申请

US20020126293A1 Automated radius of curvature measurements 有权
标题翻译：自动曲率半径测量
公开(公告)号：US20020126293A1
公开(公告)日：2002-09-12
申请号：US09988891
申请日：2001-11-19
发明人： Leslie L. Deck
IPC分类号： G01B011/02
CPC分类号： G01B11/2441 , G01B11/255
摘要： An interferometric system for measuring the radius of curvature of a measurement object that includes a tunable coherent radiation source capable of emitting a radiant energy beam having a characteristic wavelength and of scanning the characteristic wavelength over a range of wavelengths; an unequal path interferometer which during operation includes a reference object and the measurement object and which receives a portion of the radiant energy beam from the tunable radiant energy source and generates an optical interference pattern; a detecting system including a detector for receiving the optical interference pattern; and a system controller connected to the tunable radiant energy source and the detecting system. The controller is programmed to cause the tunable radiant energy source to scan the characteristic wavelength over the range of wavelengths while concurrently monitoring the optical interference pattern via the detecting system and further programmed to calculate the radius of curvature of a surface of the measurement object from the monitored optical interference pattern.
摘要翻译：一种用于测量测量对象的曲率半径的干涉测量系统，其包括能够发射具有特征波长的辐射能量束并在波长范围上扫描特征波长的可调谐相干辐射源; 在操作期间包括参考对象和测量对象的不等径干涉仪，其接收来自可调谐辐射能源的辐射能量束的一部分并产生光学干涉图案; 检测系统，包括用于接收光学干涉图案的检测器; 以及连接到可调谐辐射能源和检测系统的系统控制器。控制器被编程为使得可调谐辐射能量源在波长范围上扫描特征波长，同时经由检测系统监测光学干涉图案，并进一步编程以从测量对象的表面计算曲率半径监测光干涉图。

24. 发明申请

US20020093663A1 Rotation and translation measurement 失效
标题翻译：旋转和平移测量
公开(公告)号：US20020093663A1
公开(公告)日：2002-07-18
申请号：US10053508
申请日：2001-11-10
发明人： John C. Tsai
IPC分类号： G01B011/02
CPC分类号： G01B9/02027 , G01B9/02019 , G01B9/02045 , G01B2290/15 , G11B5/5552 , G11B21/02 , G11B21/08 , G11B21/106
摘要： A position determining system (PDS)(100) or multiple parameters measurement system (MPMS)(300) particularly useful for translation and rotation measurement of objects having up to five degrees of freedom. A light source (122, 302) provides light beams (124, 304) into at least two channels. Each channel may include an interferometer (310), reflective target (110, 314), beam splitter (128, 312), detector (132, 316), and receiver (318). In concert, the detectors (132, 316) sense horizontal, vertical, and roll position and the receivers (318) sense longitudinal and yaw position change. Optionally, modulation can be imposed on the light beams (124, 304) and phase-sensitive synchronous demodulation used to enhance accuracy.
摘要翻译：位置确定系统（PDS）（100）或多参数测量系统（MPMS）（300），对于具有至多五个自由度的物体的平移和旋转测量特别有用。光源（122,302）将光束（124,304）提供到至少两个通道中。每个通道可以包括干涉仪（310），反射目标（110,314），分束器（128,312），检测器（132,316）和接收器（318）。一致地，检测器（132,316）感测水平，垂直和滚动位置，并且接收器（318）感测纵向和偏航位置变化。可选地，可以对光束（124,304）施加调制，并且用于提高精度的相敏同步解调。

25. 发明申请

US20020067488A1 Method for measuring the spin in an optical fibre 有权
标题翻译：光纤自旋测量方法
公开(公告)号：US20020067488A1
公开(公告)日：2002-06-06
申请号：US09986595
申请日：2001-11-09
申请人： DRAKE FIBRE TECHNOLOGY B.V.
发明人： Marco Groenewoud , Jozef Wilhelmus Quirinus Fianen
IPC分类号： G01B011/02
CPC分类号： C03B37/0253 , C03B2203/19 , C03B2205/06
摘要： The invention relates to a method for measuring the spin in an optical fibre by irradiating an optical fibre with light so as to form an interference pattern, wherein the ovality of the optical fibre, which results in a continuously changing interference pattern, is used for determining the spin in the optical fibre.
摘要翻译：本发明涉及一种通过用光照射光纤来测量光纤自旋以形成干涉图案的方法，其中导致连续变化的干涉图案的光纤的椭圆度用于确定光纤中的旋转。

26. 发明申请

US20020044289A1 Method for measuring the diameter of an elongated article of a circular cross section 有权
标题翻译：用于测量圆形横截面的细长制品的直径的方法
公开(公告)号：US20020044289A1
公开(公告)日：2002-04-18
申请号：US10008998
申请日：2001-12-04
发明人： Werner Blohm , Harald Sikora , Adrian Beining
IPC分类号： G01B011/02
CPC分类号： G01B11/105
摘要： A method for measuring the diameter of an elongated article approximately circular in cross section, in particular of a wire or of a cable, with the following method steps illumination of the article with a fan-shaped beam of at least one monochromatic light source approximately point shaped in the measuring plane, wherein the main beam direction stands preferably perpendicular on the longitudinal axis of the article receiving the light on a single or multiple lined light-sensitive sensor on the oppositely lying side of the article, wherein the axis of the sensor stands preferably perpendicular on the main beam direction measuring the distance of the article to the sensor or the light source determining a value corresponding to the article diameter by evaluating the intensity courses in the diffraction margins at the edges of the shadow caused by the article, and of the measured diameter the distance of the light source to the article or of the sensor to the article is selected such that the diffraction effect of oppositely lying edges of the article do not superimpose one another or only insignificantly superimpose one another in the plane of the sensor.
摘要翻译：用于测量截面中大致圆形，特别是线或电缆的细长制品的直径的方法，具有以下方法步骤用具有至少一个单色光源的扇形光束照射物品近似点形成在测量平面上，其中主光束方向优选地垂直于在物品的相对躺卧侧上的单个或多个衬里的感光传感器上接收光的物品的纵轴上，其中传感器座的轴优选地垂直于主波束方向，其通过评估由物品引起的阴影边缘处的衍射边缘中的强度级数，从而测量物品与传感器或光源的距离，从而确定与物品直径相对应的值，以及测量的直径是选择光源与制品或传感器到制品的距离在物品的相对的边缘的衍射效应不会彼此叠加或者彼此不显着地叠加在传感器的平面中。

27. 发明申请

US20020027661A1 Spatial and spectral wavefront analysis and measurement 失效
标题翻译：空间和光谱波前分析和测量
公开(公告)号：US20020027661A1
公开(公告)日：2002-03-07
申请号：US09829435
申请日：2001-04-09
申请人： NANO-OR TECHNOLOGIES INC.
发明人： Yoel Arieli , Shay Wolfling , Eyal Shekel
IPC分类号： G01B011/02
CPC分类号： G11B7/14 , G01J9/00 , G01N21/9506 , G11B20/10009
摘要： A method and apparatus for wavefront analysis including obtaining a plurality of differently phase changed transformed wavefronts corresponding to a wavefront being analyzed which has an amplitude and a phase, obtaining a plurality of intensity maps of the plurality of phase changed transformed wavefronts and employing the plurality of intensity maps to obtain an output indicating the amplitude and phase of the wavefront being analyzed.
摘要翻译：一种用于波前分析的方法和装置，包括获得对应于被分析的具有振幅和相位的波阵面的多个不同相位改变的变换波阵面，获得多个相变变换波阵面的多个强度图，并采用多个强度图以获得指示正在分析的波前的幅度和相位的输出。

28. 发明申请

US20020024331A1 Method of investigating vibrations and an apparatus therefor 失效
标题翻译：调查振动的方法及其设备
公开(公告)号：US20020024331A1
公开(公告)日：2002-02-28
申请号：US09834464
申请日：2001-04-13
发明人： Harvey Lewis , Andrew Rogoyski
IPC分类号： G01R031/00 , G01B011/02
CPC分类号： G01H9/00
摘要： In order to investigate and analyse vibrations of any object, light from a laser is split with part being emitted to an object and part being mixed with the light reflected from the object to create an interference signal. That interference signal is investigated to derive therefrom a signal representing the vibrations of the object If there is bulk movement of the object, the effect of that bulk movement may impose a popular shift on the reflected light. To eliminate this from the investigation of the vibrations of the object, an estimate of frequency corresponding to the effect of the bulk movement is derived from the signal, and that used to defuse a signal of reduced bandwidth encouraging the frequency due to the bulk movement and also the frequencies of vibration Thus, the vibrations can then be derived and investigated from analysis of that signal of reduced bandwidth.
摘要翻译：为了研究和分析任何物体的振动，来自激光器的光被分离，部分被发射到物体，部分与从物体反射的光混合以产生干涉信号。研究该干扰信号从而产生表示物体的振动的信号。如果物体发生大量运动，该体积运动的影响可能会对反射光产生普遍的偏移。为了从对物体的振动的调查中消除这一点，从信号导出对应于大块运动的影响的频率的估计，并且用于消除减小的带宽信号，从而促使由于大量运动引起的频率，振动频率也因此可以从降低带宽信号的分析中得出和研究振动。

29. 发明申请

US20010046053A1 Interferometric apparatus and method(s) for precision measurement of altitude above a surface 有权
标题翻译：用于精密测量表面高度的干涉仪和方法
公开(公告)号：US20010046053A1
公开(公告)日：2001-11-29
申请号：US09852898
申请日：2001-05-10
发明人： Henry Allen Hill
IPC分类号： G01B011/02
CPC分类号： G03F7/70775 , G03F9/7015 , G03F9/7049
摘要： Interferometric apparatus for measuring changes in altitude between a surface and a datum line where the apparatus comprises a dimensionally stable metrology frame and the datum line is defined in an object mounted for nominally plane translation with respect to the metrology frame in at least two orthogonal directions while experiencing relatively smaller changes in altitude in a direction nominally normal to said at least two orthogonal directions. Elongated reflector means are mounted with respect to either the metrology frame or the object to provide the surface, and at least one interferometer system is mounted at least in part on said object for movement therewith. The interferometer system is structured to provide a measurement beam that travels along at least one optical path to and from the elongated reflector means to provide a signal containing information that varies in accordance with changes in altitude between the surface and the datum line as the object moves, and is configured so that the signal is insensitive to variations in angular rotation of the object at least about one of the two orthogonal directions.
摘要翻译：用于测量表面和基准线之间的高度变化的干涉测量装置，其中所述装置包括尺寸稳定的计量框架，并且所述基准线被定义在相对于所述计量框架在至少两个正交方向上进行标称平面平移的物体中，在标称垂直于所述至少两个正交方向的方向上经历相对较小的高度变化。伸长的反射器装置相对于计量框架或物体安装以提供表面，并且至少一个干涉仪系统至少部分地安装在所述物体上以与其一起运动。干涉仪系统被构造成提供测量光束，该测量光束沿着至少一条光路行进到细长反射器装置，以提供包含当物体移动时根据表面和基准线之间的高度变化而变化的信息的信号并且被配置为使得信号对于在两个正交方向中的至少一个方向上的物体的角度旋转的变化不敏感。

30. 发明申请

US20040100637A1 Quantum optical coherence tomography data collection apparatus and method for processing therefor 失效
标题翻译：量子光学相干断层扫描数据采集装置及其处理方法
公开(公告)号：US20040100637A1
公开(公告)日：2004-05-27
申请号：US10304985
申请日：2002-11-26
申请人： Twin Photon, Inc.
发明人： Malvin C. Teich , Bahaa E. A. Saleh , Alexander V. Sergienko , Ayman F. Abouraddy , Magued B. Nasr
IPC分类号： G01B011/02
CPC分类号： G01B9/02088 , G01B9/02007 , G01B9/02091 , G01B2290/45 , G01B2290/55 , G01B2290/70
摘要： The disclosed Quantum Optical Coherence Tomography apparatus and method includes a source of quantum entangled photons and a quantum interference device. The pair of entangled photons is divided into two beams, one of which illuminates a semi-reflective object and the second of which is reflected from a variable optical time-delay element (VTE). The VTE is scanned and the quantum interference in the QID is recorded to build up a reflectance profile of the object. Areal scanning produces a full tomographic reflectance image. A method of processing the data to eliminate the effects of optical dispersion is disclosed.
摘要翻译：所公开的量子光学相干断层摄影装置和方法包括量子纠缠光子源和量子干涉装置。一对纠缠的光子被分成两束，其中一个照射半反射物体，其中一个光束从可变光学延迟元件（VTE）反射。扫描VTE，并记录QID中的量子干涉以建立物体的反射率分布。面层扫描产生全层断层反射图像。公开了一种处理数据以消除光学色散影响的方法。

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