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    • 21. 发明申请
    • SEMICONDUCTOR DEVICE HAVING LATERAL DIODE
    • 具有横向二极管的半导体器件
    • US20140225234A1
    • 2014-08-14
    • US14258082
    • 2014-04-22
    • DENSO CORPORATION
    • Takao YAMAMOTONorihito TOKURAHisato KATOAkio NAKAGAWA
    • H01L29/868
    • H01L29/868H01L27/0664H01L29/0615H01L29/0692H01L29/0878H01L29/1095H01L29/405H01L29/42368H01L29/7394H01L29/7824
    • A semiconductor device having a lateral diode includes a semiconductor layer, a first semiconductor region in the semiconductor layer, a contact region having an impurity concentration greater than that of the first semiconductor region, a second semiconductor region located in the semiconductor layer and separated from the contact region, a first electrode electrically connected through the contact region to the first semiconductor region, and a second electrode electrically connected to the second semiconductor region. The second semiconductor region includes a low impurity concentration portion, a high impurity concentration portion, and an extension portion. The second electrode forms an ohmic contact with the high impurity concentration portion. The extension portion has an impurity concentration greater than that of the low impurity concentration portion and extends in a thickness direction of the semiconductor layer.
    • 具有横向二极管的半导体器件包括半导体层,半导体层中的第一半导体区域,具有大于第一半导体区域的杂质浓度的杂质浓度的接触区域,位于半导体层中并与该半导体层分离的第二半导体区域 接触区域,通过接触区域电连接到第一半导体区域的第一电极和与第二半导体区域电连接的第二电极。 第二半导体区域包括低杂质浓度部分,高杂质浓度部分和延伸部分。 第二电极与高杂质浓度部分形成欧姆接触。 延伸部分的杂质浓度大于低杂质浓度部分的杂质浓度,并且在半导体层的厚度方向上延伸。
    • 26. 发明授权
    • Method for manufacturing semiconductor substrate, and semiconductor device
    • 半导体基板的制造方法以及半导体装置
    • US08653536B2
    • 2014-02-18
    • US13965275
    • 2013-08-13
    • Semiconductor Energy Laboratory Co., Ltd.
    • Shunpei Yamazaki
    • H01L29/15
    • H01L29/1608H01L21/76254H01L21/8213H01L21/84H01L27/12H01L29/0696H01L29/41766H01L29/66068H01L29/7394H01L29/7812H01L29/7824H01L29/7833
    • An object is to provide a novel manufacturing method of a semiconductor substrate containing silicon carbide, and another object is to provide a semiconductor device using silicon carbide. A semiconductor substrate is manufactured through the steps of: adding ions to a silicon carbide substrate to form an embrittlement region in the silicon carbide substrate; bonding the silicon carbide substrate to a base substrate with insulating layers interposed therebetween; heating the silicon carbide substrate and separating the silicon carbide substrate at the embrittlement region to form a silicon carbide layer over the base substrate with the insulating layers interposed between therebetween; and performing heat treatment on the silicon carbide layer at a temperature of 1000° C. to 1300° C. to reduce defects of the silicon carbide layer. A semiconductor device is manufactured using the semiconductor substrate formed as described above.
    • 本发明的目的是提供一种含有碳化硅的半导体衬底的新颖制造方法,另一个目的是提供一种使用碳化硅的半导体器件。 通过以下步骤制造半导体衬底:向碳化硅衬底添加离子以在碳化硅衬底中形成脆化区; 将所述碳化硅衬底粘合到具有插入其间的绝缘层的基底衬底; 加热碳化硅衬底并在脆化区域分离碳化硅衬底以在基底衬底上形成碳化硅层,其间插入有绝缘层; 并在1000℃至1300℃的温度下对碳化硅层进行热处理以减少碳化硅层的缺陷。 使用如上所述形成的半导体衬底制造半导体器件。
    • 27. 发明申请
    • POWER DEVICE INTEGRATION ON A COMMON SUBSTRATE
    • 电源设备集成在通用基板上
    • US20140035102A1
    • 2014-02-06
    • US13939490
    • 2013-07-11
    • I/O Semiconductor Inc.
    • Jacek KorecBoyi Yang
    • H01L27/082
    • H01L27/082H01L27/1203H01L29/402H01L29/73H01L29/7391H01L29/7394H01L29/861H01L29/872H01L2224/11H01L2924/13091H01L2924/00
    • A semiconductor structure for facilitating an integration of power devices on a common substrate includes a first insulating layer formed on the substrate and an active region having a first conductivity type formed on at least a portion of the first insulating layer. A first terminal is formed on an upper surface of the structure and electrically connects with at least one other region having the first conductivity type formed in the active region. A buried well having a second conductivity type is formed in the active region and is coupled with a second terminal formed on the upper surface of the structure. The buried well and the active region form a clamping diode which positions a breakdown avalanche region between the buried well and the first terminal. A breakdown voltage of at least one of the power devices is a function of characteristics of the buried well.
    • 用于促进功率器件集成在公共衬底上的半导体结构包括形成在衬底上的第一绝缘层和形成在第一绝缘层的至少一部分上的具有第一导电类型的有源区。 第一端子形成在该结构的上表面上,并且与在活性区域中形成的具有第一导电类型的至少一个其它区域电连接。 在有源区域中形成具有第二导电类型的掩埋阱,并且与形成在结构的上表面上的第二端子耦合。 掩埋井和有源区域形成钳位二极管,其在掩埋井和第一端子之间定位击穿雪崩区域。 功率器件中的至少一个的击穿电压是掩埋阱的特性的函数。
    • 29. 发明授权
    • Semiconductor device and method of manufacturing the same
    • 半导体装置及其制造方法
    • US08610168B2
    • 2013-12-17
    • US13117498
    • 2011-05-27
    • Mitsuru Soma
    • Mitsuru Soma
    • H01L29/739
    • H01L21/84H01L21/76283H01L29/36H01L29/66325H01L29/7394
    • In a semiconductor device in which an IGBT, a control circuit for the IGBT and so on are formed on an SOI substrate divided by trenches, the invention is directed to providing the IGBT with a higher breakdown voltage, an enhanced turn-off characteristic and so on. An N type epitaxial layer is formed on a dummy semiconductor substrate, a trench is formed in the N type epitaxial layer, an N type buffer layer and then a P type embedded collector layer are formed on the sidewall of the trench and the front surface of the N type epitaxial layer, and the bottom of the trench and the P+ type embedded collector layer are covered by an embedded insulation film. The embedded insulation film is covered by a polysilicon film, and a P type semiconductor substrate is attached to the polysilicon film with an insulation film being interposed therebetween. Then the dummy semiconductor substrate is removed, thereby forming an SOI substrate having the embedded insulation film, the P+ type embedded collector layer, the N type buffer layer, the N type drift layer and so on that are exposed being almost flush with each other on the bottom of the trench. An IGBT and so on are formed on this SOI substrate.
    • 本发明涉及一种半导体器件,其中在由沟槽划分的SOI衬底上形成IGBT,IGBT等的控制电路,本发明涉及为IGBT提供更高的击穿电压,增强的截止特性等 上。 在虚拟半导体衬底上形成N型外延层,在N型外延层中形成沟槽,在沟槽的侧壁上形成N型缓冲层,然后形成P型嵌入集电极层, N型外延层和沟槽的底部以及P +型嵌入式集电极层被嵌入式绝缘膜覆盖。 嵌入式绝缘膜被多晶硅膜覆盖,并且P型半导体衬底附着在多晶硅膜上,隔着绝缘膜插入其中。 然后去除虚设半导体衬底,从而形成具有嵌入式绝缘膜,P +型嵌入式集电极层,N型缓冲层,N型漂移层等的SOI衬底,其被暴露几乎彼此齐平 沟渠的底部。 在该SOI衬底上形成IGBT等。