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21. 发明申请

US20130083384A1 OPTICAL PROBE 有权
标题翻译：光学探头
公开(公告)号：US20130083384A1
公开(公告)日：2013-04-04
申请号：US13611775
申请日：2012-09-12
申请人： Masaoki Yamagata , Kentaro Nemoto
发明人： Masaoki Yamagata , Kentaro Nemoto
IPC分类号： G02B26/02 , G02B26/00
CPC分类号： G02B26/0841 , G01B11/24 , G02B19/0052 , G02B27/0911 , G02B27/0916 , G02B27/0977
摘要： An optical probe includes a laser light source that emits laser light, a collimator lens that converts the laser light into parallel light, a light shape changing section that converts the parallel light into linear laser light, an irradiating section to irradiate an object with a selected part of the linear laser light, an image pickup section that picks up an image of the object based on the laser light reflected from the object, and a controller that controls irradiation of the linear laser light. The linear laser light is composed of a plurality of parts including one end part and the other end part; and the irradiating section irradiates the object with the parts of the linear laser light sequentially from the one end part to the other end part.
摘要翻译：光探头包括发射激光的激光源，将激光转换为平行光的准直透镜，将平行光转换为线性激光的光形变化部，照射部，对所选择的物体进行照射线性激光的一部分，基于从物体反射的激光拾取物体的图像的图像拾取部分和控制线性激光的照射的控制器。线性激光由包括一个端部和另一个端部的多个部分组成; 并且所述照射部从所述一个端部到另一个端部顺序地照射所述物体与所述线性激光的部分。

22. 发明授权

US08310766B2 Two-dimensional lensing arrangment for optical beam collimation and beam orientation 有权
标题翻译：用于光束准直和光束定向的二维透镜布置
公开(公告)号：US08310766B2
公开(公告)日：2012-11-13
申请号：US12456145
申请日：2009-06-12
申请人： Brent Baugh
发明人： Brent Baugh
IPC分类号： G02B27/30 , G02B27/10
CPC分类号： G02B1/02 , G02B6/4206 , G02B6/4214 , G02B6/4249 , G02B27/0911 , G02B27/0955 , G02B27/0977 , G02B27/30
摘要： An arrangement for collimating and turning an optical beam utilizing a pair of two-dimensional lenses to separate the collimation into separate one-dimensional operations, while using one of the two-dimensional lenses to also perform the turning operation. A first two-dimensional lensing surface is disposed at the endface of a launching waveguide. This first two-dimensional lensing surface provides collimation along one axis of the system (for example, the X axis). A second two-dimensional lensing surface is provided by introducing a defined curvature to a turning mirror in the system. The curvature of the turning mirror is designed to create collimation (or focusing, if desired) in the orthogonal beamfront (in this case, the Y axis beamfront), while also re-directing the propagating signal into the desired orientation.
摘要翻译：一种使用一对二维透镜来准直和转动光束的装置，以便在使用二维透镜中的一个也执行转动操作时将准直分离成单独的一维操作。第一个二维透镜表面设置在发射波导的端面。该第一二维透镜表面沿着系统的一个轴线（例如，X轴）提供准直。通过将限定的曲率引入系统中的转向镜来提供第二二维透镜表面。转向镜的曲率被设计成在正交光束前沿（在这种情况下，Y轴波前）中产生准直（或如果需要聚焦），同时还将传播信号重新引导到期望的取向。

23. 发明授权

US08159907B2 Optical pickup device 失效
标题翻译：光学拾取装置
公开(公告)号：US08159907B2
公开(公告)日：2012-04-17
申请号：US12821529
申请日：2010-06-23
申请人： Kenji Nagatomi
发明人： Kenji Nagatomi
IPC分类号： G11B7/135
CPC分类号： G02B5/001 , G02B27/0911 , G02B27/095 , G11B7/1359 , G11B7/1365 , G11B7/1381
摘要： An optical pickup device includes a photodetector which receives laser light reflected on a recording medium, and an optical system which guides laser light to the photodetector as convergent light. A light transmitting plate which imparts astigmatism to the laser light is disposed between the optical system and the photodetector with an inclination with respect to an optical axis of the laser light. The optical pickup device further includes an optical element which separates four light fluxes of the laser light from each other. The four light fluxes are obtained by dividing the laser light by two straight lines respectively in parallel to a first focal line direction of the laser light transmitted through the light transmitting plate, and a second focal line direction orthogonal to the first focal line direction.
摘要翻译：光拾取装置包括接收在记录介质上反射的激光的光电检测器和将激光引导到光电检测器作为会聚光的光学系统。在光学系统和光电检测器之间相对于激光的光轴倾斜地配置有向激光照射散光的透光板。光学拾取装置还包括将激光的四个光束彼此分离的光学元件。通过将激光与分别透过透光板的激光的第一焦线方向平行的激光和与第一焦线方向正交的第二焦线方向分开两条直线，得到四个光束。

24. 发明申请

US20110103073A1 BEAM SHAPER 审中-公开
标题翻译：光束形状
公开(公告)号：US20110103073A1
公开(公告)日：2011-05-05
申请号：US12880075
申请日：2010-09-11
申请人： Pavel JURIK
发明人： Pavel JURIK
IPC分类号： F21V17/02
CPC分类号： G02B27/0961 , F21V5/007 , F21V14/06 , F21W2131/406 , G02B27/0911
摘要： Described are an improved automated luminaire and luminaire systems employing a matching lenslet pair beam shaper. The beam shaper employs nesting lenslets that are articulated so that the degree of beam shaping modulation is continuously adjustable across a range of modulation.
摘要翻译：描述了使用匹配的小透镜对光束整形器的改进的自动化照明器和照明系统。光束整形器采用铰接的嵌套小透镜，使得光束整形调制的程度可在整个调制范围内连续调节。

25. 发明授权

US07899282B2 Beam homogenizer, laser irradiation apparatus, and method of manufacturing a semiconductor device 有权
标题翻译：光束均化器，激光照射装置和制造半导体器件的方法
公开(公告)号：US07899282B2
公开(公告)日：2011-03-01
申请号：US12007623
申请日：2008-01-14
申请人： Koichiro Tanaka
发明人： Koichiro Tanaka
IPC分类号： G02B6/26 , G02B6/00
CPC分类号： G02B19/0028 , B23K26/064 , B23K26/0643 , B23K26/0648 , B23K26/0665 , B23K26/0732 , B23K2101/40 , G02B19/0057 , G02B19/0095 , G02B27/09 , G02B27/0911 , G02B27/0927 , G02B27/0966 , G02B27/0977 , G02B27/0994 , H01L21/02532 , H01L21/02678 , H01L21/02686 , H01L21/32136 , H01L27/1285
摘要： The present invention provides a beam homogenizer being equipped with an optical waveguide having a pair of reflection planes provided oppositely, having one end surface into which the laser beam is incident, and having the other end surface from which the laser beam is emitted in the optical system for forming the beam spot. The optical waveguide is a circuit being able to keep radiation light in a certain region and to transmit the radiation light in such a way that the energy flow thereof is guided in parallel with an axis of the channel.
摘要翻译：本发明提供了一种光束均化器，其配备有光波导，该光波导具有相对设置的一对反射面，其具有激光束入射的一个端面，并且具有另一个端面，激光束从该端面发射到光学用于形成束斑的系统光波导是能够将辐射光保持在特定区域并且以这样的方式传输辐射光的电路，使得其能量流与通道的轴线平行地引导。

26. 发明申请

US20100002441A1 Aspherical lens for LED 审中-公开
标题翻译： LED非球面透镜
公开(公告)号：US20100002441A1
公开(公告)日：2010-01-07
申请号：US12230642
申请日：2008-09-03
申请人： Yen-Wei Ho
发明人： Yen-Wei Ho
IPC分类号： F21V14/06 , F21V5/04
CPC分类号： G02B27/0911 , F21L4/005 , F21V5/04 , F21Y2115/10 , G02B19/0014 , G02B19/0061 , G02B27/0955
摘要： An illuminate device with an optical lens includes an aspherical lens and a LED. The aspherical lens, which has a flat end and an aspheric convex end, is held at the distance between 13.5 to 16.3 mm from the light center of the LED to the vertex of the aspheric surface of the lens. Light emitted from the LED enters the flat end of the lens and is refracted by the aspheric end of the lens to create a zoomable spot. An axial cross-section curve of the aspherical lens contents with a set of rectangular coordinates, which are (12,8.00), (11,8.05), (10,8.20), (9,8.44), (8,8.79), (7,9.25), (6,9.82), (5,10.51), (4,11.33), (3,12.29), (2,13.42), (1,14.75), (0,16.30), (−1,14.75), (−2,13.42), (−3,12.29), (−4,11.33), (−5,10.51), (−6,9.82), (−7,9.25), (−8,8.79), (−9,8.44), (−10,8.20), (−11,8.05), (−12,8.00).
摘要翻译：具有光学透镜的照明装置包括非球面透镜和LED。具有平坦端和非球面凸起端的非球面透镜被保持在从LED的光中心到透镜的非球面的顶点的13.5至16.3mm之间的距离处。从LED发射的光进入透镜的平坦端，并被透镜的非球面折射以产生可变焦点。（12,8.00），（11,8.05），（10,8.20），（9,8.44），（8,8.79），（7,9.25），（6,9.82），（5,10.51），（4,11.33），（3,12.29），（2,13.42），（1,14.75），（0,16.30）（-2,13.42），（-3,12.29），（-4,11.33），（-5,10.51），（-6,9.82），（-7,9.25），（-8 ，8.79），（-9,8.44），（-10,8.20），（-11,8.05），（-12,8.00）。

27. 发明授权

US07519252B2 Laser annealing apparatus 失效
标题翻译：激光退火装置
公开(公告)号：US07519252B2
公开(公告)日：2009-04-14
申请号：US11691131
申请日：2007-03-26
申请人： Keiko Morita, legal representative
发明人： Hiroyuki Morita
IPC分类号： G02B6/04
CPC分类号： G02B6/4296 , G02B27/0911 , G02B27/0927 , G02B27/0994 , H01L21/268 , H01S3/005
摘要： A laser annealing apparatus comprises a laser oscillator having a Q switching action, one or a plurality of partially reflective mirrors for split a laser beam emitted from the laser oscillator into a plurality of laser beams, a plurality of optical fibers which respectively transmit the plurality of laser beams split by the partially reflective mirrors, and whose respective emission ends are arranged linearly in one direction, a first optical system for synthesizing and homogenizing the plurality of laser beams emitted from the optical fibers, and a second optical system for focusing the laser beam emitted from the first optical system on the work piece surface as a rectangular laser beam whose beam shape is long in the lateral direction and short in the longitudinal direction. As a result, laser power transmission by means of slender optical fibers is possible even in cases in which a green laser such as the second harmonic of an Nd:YAG laser having a Q switching action or the like is used as a heating light source. Accordingly, a compact laser annealing apparatus that has a high-quality working performance and does not require a laser amplifier or high-frequency generating apparatus can be obtained.
摘要翻译：激光退火装置包括具有Q切换动作的激光振荡器，用于将从激光振荡器发射的激光束分成多个激光束的一个或多个部分反射镜，分别透射多个激光振荡器的多个光纤由部分反射镜分开的激光束，其各个发射端沿一个方向线性布置;第一光学系统，用于合成和均化从光纤发出的多个激光束;以及第二光学系统，用于聚焦激光束从工件表面上的第一光学系统发射的光束形状在横向方向上长并且在纵向方向上短的矩形激光束。结果，即使在使用诸如具有Q切换动作的Nd：YAG激光器的二次谐波的绿色激光等作为加热光源的情况下，也可以通过细长的光纤进行激光功率传输。因此，可以获得具有高质量工作性能并且不需要激光放大器或高频产生装置的紧凑型激光退火装置。

28. 发明申请

US20090021716A1 ILLUMINATION SYSTEM FOR A MICROLITHOGRAPHIC PROJECTION EXPOSURE APPARATUS 有权
标题翻译：微波投影曝光装置照明系统
公开(公告)号：US20090021716A1
公开(公告)日：2009-01-22
申请号：US12190308
申请日：2008-08-12
申请人： Johannes Wangler , Heiko Siekmann , Kenneth Weible , Ralf Scharnweber , Manfred Maul , Markus Deguenther , Michael Layh , Axel Scholz , Uwe Spengler , Reinhard Voelkel
发明人： Johannes Wangler , Heiko Siekmann , Kenneth Weible , Ralf Scharnweber , Manfred Maul , Markus Deguenther , Michael Layh , Axel Scholz , Uwe Spengler , Reinhard Voelkel
IPC分类号： G03B27/54
CPC分类号： G03F7/70191 , G02B3/0056 , G02B27/0911 , G03F7/70058 , G03F7/70075 , G03F7/70083 , G03F7/70158
摘要： Illumination systems for microlithographic projection exposure apparatus, as well as related systems, components and methods are disclosed. In some embodiments, an illumination system includes one or more scattering structures and an optical integrator that produces a plurality of secondary light sources.
摘要翻译：公开了用于微光刻投影曝光装置的照明系统，以及相关系统，组件和方法。在一些实施例中，照明系统包括一个或多个散射结构和产生多个次级光源的光学积分器。

29. 发明申请

US20080266637A1 OPTICAL APPARATUS WITH REDUCED EFFECT OF MIRROR EDGE DIFFRACTION 有权
标题翻译：具有降低镜边缘衍射效应的光学装置
公开(公告)号：US20080266637A1
公开(公告)日：2008-10-30
申请号：US12107014
申请日：2008-04-21
申请人： Massimo Martinelli , Long Yang , Mark H. Garrett , Robert Ostrom , Joseph E. Davis
发明人： Massimo Martinelli , Long Yang , Mark H. Garrett , Robert Ostrom , Joseph E. Davis
IPC分类号： G02B26/08
CPC分类号： G02B6/29311 , G02B6/29383 , G02B6/352 , G02B6/356 , G02B6/3594 , G02B6/4246 , G02B26/0833 , G02B27/0911
摘要： A micromirror for use in an optical apparatus may comprise a reflective portion, configured to be rotatable about a switching axis and an attenuation axis that is different from the switching axis. The reflective portion may include an edge that is substantially parallel to the attenuation axis. The edge may include one or more edge features that protrude above a plane of the micromirror surface and/or are submerged below the plane of the micromirror surface, and/or have an edge shape that deviates from a straight line. Alternatively, an array of micromirrors may have mirrors characterized by sawtooth features disposed along edges that are substantially parallel to the attenuation axis.
摘要翻译：用于光学设备的微反射镜可以包括反射部分，其被配置为围绕开关轴线可旋转，并且衰减轴线与切换轴线不同。反射部分可以包括基本上平行于衰减轴线的边缘。边缘可以包括突出在微镜表面的平面上方和/或被浸没在微反射镜表面的平面之下的一个或多个边缘特征，和/或具有偏离直线的边缘形状。或者，微镜阵列可以具有以沿着基本上平行于衰减轴线的边缘设置的锯齿形特征的反射镜。

30. 发明授权

US07408144B2 Method for manufacturing semiconductor device including a multi-phase prism 有权
标题翻译：包括多相棱镜的半导体器件的制造方法
公开(公告)号：US07408144B2
公开(公告)日：2008-08-05
申请号：US11270640
申请日：2005-11-10
申请人： Shunpei Yamazaki , Koichiro Tanaka
发明人： Shunpei Yamazaki , Koichiro Tanaka
IPC分类号： H01J3/14
CPC分类号： B23K26/0738 , B23K26/0604 , B23K26/0732 , G02B27/09 , G02B27/0905 , G02B27/0911 , G02B27/0966 , G02B27/0972 , G02B27/0977 , H01L21/02422 , H01L21/02488 , H01L21/02532 , H01L21/02667 , H01L21/02672 , H01L21/02678 , H01L21/02686 , H01L21/02691 , H01L21/268 , H01L27/1285 , H01L29/66757
摘要： A laser illumination apparatus for illuminating a semiconductor film with a linear laser beam while scanning the semiconductor film with the linear laser beam. An optical system generates a linear laser beam having a beam width W by dividing a pulse laser beam that is emitted from a pulsed laser light source into a plurality of beams vertically and horizontally, and combines divisional beams after they have been processed into a linear shape individually. A mechanism is provided to move a substrate that is mounted with the semiconductor film. A condition W/20≦Δ(r)≦x≦W/5 or Δ(r)≦W/20≦x≦W/5 is satisfied, where r is a height difference of the surface of the semiconductor film, Δ(r) is a variation amount of the beam width W as a function of the height difference r, and x is a movement distance of the substrate during an oscillation period of the pulsed laser light source.
摘要翻译：一种用线性激光束照射半导体膜的激光照明装置，同时用线性激光束扫描半导体膜。光学系统通过将从脉冲激光光源发射的脉冲激光束垂直和水平地分离成多个光束来生成具有光束宽度W的线性激光束，并且在分割光束被处理成直线形状之后组合分割光束单独。提供了用于移动安装有半导体膜的衬底的机构。满足条件W / 20 <=Δ（r）<= x <= W / 5或Δ（r）<= W / 20 <= x <= W / 5，其中r是半导体膜，Delta（r）是作为高度差r的函数的光束宽度W的变化量，x是在脉冲激光光源的振荡周期期间的基板的移动距离。

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