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    • 21. 发明申请
    • VOLUME RESISTIVITY MEASUREMENT APPARATUS FOR DIELECTRIC LAYER OF ELECTROSTATIC CHUCK AND MEASUREMENT METHOD USING THE APPARATUS
    • 静电消除电介质层的体积电阻率测量装置和使用设备的测量方法
    • US20080143353A1
    • 2008-06-19
    • US11954386
    • 2007-12-12
    • Minoru YOKOTAKazuhiro NOBORI
    • Minoru YOKOTAKazuhiro NOBORI
    • G01R27/02
    • G01R27/00H01L21/6833
    • A pair of conductive rubber electrodes including measurement surfaces opposite to a surface of a dielectric layer of an electrostatic chuck as an objective of measurement, in which the measurement surfaces are arranged at an interval individually on the same plane, are provided. A direct-current power supply and an ammeter are connected to the pair of conductive rubber electrodes. The conductive rubber electrodes have resistance values equal to each other, and have a shape in which the measurement surfaces have areas equal to each other, in which volume resistivities are 1×105 Ω·cm or less, and hardness is within a range of 60 to 80 Hs in JIS-A hardness. An interval between the conductive rubber electrodes is six times or more a thickness of the dielectric layer of the electrostatic chuck as the objective of the measurement.
    • 提供了一对导电橡胶电极,其包括与作为测量对象的静电卡盘的电介质层的表面相对的测量表面,其中测量表面以单独的间隔布置在同一平面上。 直流电源和电流表连接到一对导电橡胶电极。 导电橡胶电极具有彼此相等的电阻值,并且具有其中体积电阻率为1×10 5Ω·cm或更小的测量表面具有彼此相等的面积的形状,以及硬度 在JIS-A硬度中在60〜80Hs的范围内。 导电橡胶电极之间的间隔是作为测量目的的静电卡盘的电介质层的厚度的六倍或更多。
    • 22. 发明申请
    • Security scanners with capacitance and magnetic sensor arrays
    • 带电容和磁传感器阵列的安全扫描仪
    • US20070159185A1
    • 2007-07-12
    • US11544391
    • 2006-10-06
    • Wuqiang YangA. Hennessey
    • Wuqiang YangA. Hennessey
    • G01R27/26
    • G01V3/08A61B5/0522G01N27/221G01R27/00
    • Security scanning devices based on electrical tomography, including tomography systems based on the measurement of capacitance (ECT) and electromagnetic tomography (EMT), in combination with knowledge-based image analysis and understanding. Each device comprises a sensing head or transducer, sensing electronics, image reconstruction and image analysis microprocessor (either microcontroller, DSP, laptop or desktop PC), a display unit and accompanying software for identifying dangerous materials and items. The security scanning devices enable enhancement of image resolution with ECT and EMT. More sensors, more sensitive circuits and flexible/optimal measurement protocols may be employed for obtaining more independent measurements and enable implementation of data fusion to combine the complementary sensitivity of ECT and EMT to different material properties, while providing architecture to implement image knowledge bases, which may characterize objects, whose image attributes are acquired from multiple sensors.
    • 基于电断层扫描的安全扫描装置,包括基于电容测量(ECT)和电磁层析成像(EMT)的断层扫描系统,结合基于知识的图像分析和理解。 每个设备包括感测头或传感器,感测电子设备,图像重建和图像分析微处理器(微控制器,DSP,膝上型或台式PC),显示单元和用于识别危险材料和物品的附带软件。 安全扫描设备可以通过ECT和EMT增强图像分辨率。 可以使用更多的传感器,更灵敏的电路和灵活/最佳的测量协议来获得更独立的测量,并且能够实现数据融合,以将ECT和EMT的互补灵敏度与不同的材料属性相结合,同时提供架构来实现图像知识库, 可以表征对象,其图像属性从多个传感器获取。
    • 23. 发明授权
    • Apparatus for use in determining surface conductivity at microwave
frequencies
    • 用于确定微波频率下表面电导率的装置
    • US5594351A
    • 1997-01-14
    • US448286
    • 1995-05-23
    • Chase P. Hearn
    • Chase P. Hearn
    • G01R27/00G01R27/26F26B3/34
    • G01R27/2658G01R27/00
    • An apparatus is provided for use in determining surface conductivity of a flat or shaped conductive material at microwave frequencies. A plate has an electrically conductive surface with first and second holes passing through the plate. An electrically conductive material under test (MUT) is maintained in a spaced apart relationship with the electrically conductive surface of the plate by one or more non-conductive spacers. A first coupling loop is electrically shielded within the first hole while a second coupling loop is electrically shielded within the second hole. A dielectric resonator element is positioned between the first and second coupling loops, while also being positioned closer to the MUT than the electrically conductive surface of the plate. Microwave energy at an operating frequency f is supplied from a signal source to the first coupling loop while microwave energy received at the second coupling loop is measured. The apparatus is capable of measuring the Q-factor of the dielectric resonator situated in the "cavity" existing between the electrically conductive surface of the plate and the MUT. Surface conductivity of the electrically conductive surface can be determined via interpolation using: 1) the measured Q-factor with the electrically conductive surface in place, and 2) the measured Q-factor when the MUT is replaced with reference standards having known surface conductivities.
    • 提供一种用于确定微波频率下的平坦或成形导电材料的表面电导率的装置。 板具有导电表面,其中第一和第二孔穿过板。 受测试的导电材料(MUT)通过一个或多个非导电间隔物与板的导电表面保持间隔开的关系。 第一耦合回路在第一孔内被电屏蔽,而第二耦合回路在第二孔内被电屏蔽。 介质谐振器元件位于第一和第二耦合回路之间,同时被定位成比板的导电表面更靠近MUT。 在第二耦合回路接收的微波能量被测量时,工作频率f的微波能量从信号源提供给第一耦合回路。 该装置能够测量位于板的导电表面和MUT之间的“空腔”中的介质谐振器的Q因子。 导电表面的表面电导率可以通过以下方法通过插值确定:1)测量的Q因子与导电表面在适当位置,以及2)当MUT被具有已知表面电导率的参考标准替换时的测量Q因子。
    • 24. 发明授权
    • Non-contact resistivity measurement apparatus and method using
femtosecond laser pulses to create an electron flow
    • 非接触电阻率测量装置和使用飞秒激光脉冲产生电子流的方法
    • US5563508A
    • 1996-10-08
    • US414539
    • 1995-03-31
    • Abdelkrim Tatah
    • Abdelkrim Tatah
    • G01R27/00G01R31/265G01R31/28
    • G01R31/2656G01R27/00
    • Apparatus and method for measuring the resistivity of a material without contacting or damaging the material, using a current and voltage meter connected to a first probe and a second probe. The probes are placed adjacent the material and in spaced relation to the material, a first ultraviolet laser beam having femtosecond pulses is focused onto the first probe such that the first probe emits electrons toward the material, and a second ultraviolet laser beam having femtosecond pulses is focused onto the material such that the material emits electrons toward the second probe. A voltage and a closed current loop are thus created. The current and voltage meter measures the current and voltage to obtain current and voltage readings, and the current and voltage readings are used to determine the resistivity of the material.
    • 使用连接到第一探针和第二探针的电流和电压计测量材料的电阻率而不接触或损坏材料的装置和方法。 探针被放置在与材料相邻并且与材料隔开的位置,具有飞秒脉冲的第一紫外激光束被聚焦到第一探针上,使得第一探针向材料发射电子,并且具有飞秒脉冲的第二紫外激光束是 聚焦到材料上,使得材料向第二探针发射电子。 因此产生电压和闭合电流环路。 电流和电压表测量电流和电压以获得电流和电压读数,并且使用电流和电压读数来确定材料的电阻率。
    • 26. 发明授权
    • Method of and apparatus for monitoring for electrode displacement in the
Joule effect heating of heat softenable material
    • 在热软化材料的焦耳效应加热中监测电极位移的方法和装置
    • US4063027A
    • 1977-12-13
    • US702543
    • 1976-07-06
    • Eugene C. VarrassoJohn F. Maddux
    • Eugene C. VarrassoJohn F. Maddux
    • G01R27/00G01R31/00H05B3/00C03B5/02
    • H05B3/0023G01R27/00G01R31/00
    • A method of detecting electrode displacement in an opaque melt of heat softenable material heated by Joule effect through said electrode by monitoring the current, voltage and electrical displacement characteristics of a body of heat softenable material and the electrodes. A relatively rapid change in monitored resistance is an indication of and often characteristic of given changes in the geometric relationships between an electrode the heat softenable material and other electrodes which can accelerate the failure of a system if corrective action is not taken. Alarm indicators, instruction print out, and/or process controls can be actuated in response to a given current voltage or resistance change. Slumping of electrodes and the direction of the slumping is indicated by the nature and magnitude of changes detected on a long term basis at least of the order of days in length. Plural electrodes and electrode pairs are monitored by multiplexing to provide a repetitive cyclic scan of the parameters between pairs. Distortion of current and voltage values is minimized, where selective portions of regular power pulses are gated for control of heating, and complex waveforms result by employing true r.m.s. values of current and voltage developed in true r.m.s. to d.c. converters. An approximation circuit for producing a d.c. voltage which is approximately proportional to the r.m.s. values of current and voltage resulting from phase controlled firing of controlled rectifiers into the electrode melt load.
    • 通过监测热可软化材料体和电极的电流,电压和电位移特性来检测通过所述电极通过焦耳效应加热的可热软化材料的不透明熔体中的电极位移的方法。 监测电阻的相对快速的变化是指示可变软化材料的电极与其他电极之间的几何关系的给定变化的特征,如果不采取纠正措施,可以加速系统的故障。 响应于给定的电流电压或电阻变化,可以启动报警指示器,指令打印输出和/或过程控制。 电极的坍落度和坍落度的方向由长期基础上检测到的变化的性质和大小表示,长度至少为几天。 通过多路复用来监视多个电极和电极对以提供对之间的参数的重复循环扫描。 电流和电压值的失真最小化,其中常规功率脉冲的选择性部分被选通以控制加热,并且通过使用真实的r.m.s导致复杂波形。 电流和电压值在真实r.m.s. 到达 转换器。 用于产生直流电的近似电路 大约与r.m.s.成正比的电压。 由受控整流器相控制烧结到电极熔体负载中的电流和电压值。
    • 30. 发明申请
    • METHOD FOR DETERMINING AT LEAST ONE PHYSICAL PARAMETER USING A SENSOR UNIT
    • US20170097438A1
    • 2017-04-06
    • US15311937
    • 2015-05-22
    • Gerd REIME
    • Gerd REIME
    • G01V3/10G01N27/02
    • G01V3/10G01N27/028G01N27/62G01N27/64G01R27/00G01R27/26G01R27/2611G01R27/267H01J41/00H01J41/02
    • In a method for determining at least one physical parameter, a sensor unit which is activated by at least one periodic excitation (1.4) is provided, wherein the sensor unit has at least one detection region in which changes of the parameter in the surroundings of the sensor unit lead to output signal (1.7) from the sensor unit. The sensor unit is wired such that if there are no changes of the parameter in the detection region the output signal (1.7) is a zero signal or virtually a zero signal at the output of the sensor unit, whereas if there are changes of the parameter in the detection region the output signal (1.7) is a signal that is not zero and has a specific amplitude and phase. In a closed control loop, the non-zero signal in the receive path is adjusted to zero using a control signal to achieve an adjusted state even in the presence of changes of the parameter in the detection region. The control signal is evaluated in order to determine the physical parameter. The output signal (1.7) from the sensor unit is reduced substantially to the fundamental wave of the excitation (1.4) and the output signal (1.7) is controlled to zero in the entire phase space by means of at least one pulse width modulation. A temperature-stable, fully digital measuring system is provided as a result of the fact that the at least one pulse width modulation itself generates a correction signal with a variable pulse width and possibly a variable phase which is then added to the output signal (1.7) from the sensor unit and the output signal is thereby controlled to zero in the entire phase space, wherein the pulse width of the correction signal and/or the phase of the correction signal is/are determined by the deviations of the output signal (1.7) from zero.