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    • 29. 发明申请
    • Low-current probe card
    • 低电流探头卡
    • US20050231226A1
    • 2005-10-20
    • US11148707
    • 2005-06-08
    • Randy Schwindt
    • Randy Schwindt
    • G01R1/073G01R1/18G01R31/02G01R31/28H01L21/66
    • G01R31/08G01R1/06G01R1/07342G01R1/07371G01R1/18G01R31/06G01R31/2822
    • A low-current probe card for measuring currents down to the femtoamp region includes a dielectric board, such as of glass-epoxy material, forming an opening. A plurality of probing devices, such as ceramic blades, are edge-mounted about the opening so that the probing elements or needles included thereon terminate below the opening in a pattern suitable for probing a test device. A plurality of cables are attached to the card for respectively connecting each device to a corresponding channel of a test instrument. The on-board portion of each cable is of coaxial type and includes an inner layer between the inner dielectric and outer conductor for suppressing the triboelectric effect. An inner conductive area and a conductive backplane that are respectively located below and on one side of each device are set to guard potential via the outer conductor of the corresponding cable so as to guard the signal path on the other side of the device. The lead-in portion of each cable, which is detachably connected to the corresponding on-board portion through a plug-in type connector, is of triaxial type and includes, besides the inner layer between the inner dielectric and outer conductor, a second inner dielectric and second outer conductor. A conductive cover and an outer conductive area that substantially enclose the components on the card are set to shield potential via the second outer conductor and connector.
    • 用于测量下降到毫微微区域的电流的低电流探针卡包括形成开口的介电板,例如玻璃环氧树脂材料。 诸如陶瓷刀片的多个探测装置围绕开口边缘安装,使得其中包括的探测元件或针以适合于探测测试装置的图案在开口下方终止。 多个电缆连接到卡,用于分别将每个设备连接到测试仪器的相应通道。 每个电缆的板上部分是同轴型的,并且包括用于抑制摩擦电效应的内部电介质和外部导体之间的内层。 分别设置在每个装置的一侧的一侧的内部导电区域和导电背板被设置为通过相应电缆的外部导体来保护电位,以便保护装置另一侧上的信号路径。 通过插入型连接器可拆卸地连接到相应的板上部分的每个电缆的引入部分是三轴型的,并且除了内部电介质和外部导体之间的内层之外还包括第二内部 电介质和第二外导体。 将导电盖和基本上包围卡上的部件的外部导电区域设置成通过第二外导体和连接器来屏蔽电位。