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21. 发明申请

US20150067930A1 Method and Apparatus of Physical Property Measurement Using a Probe-Based Nano-Localized Light Source 有权
标题翻译：使用基于探针的纳米定位光源进行物理性能测量的方法和装置
公开(公告)号：US20150067930A1
公开(公告)日：2015-03-05
申请号：US14532926
申请日：2014-11-04
申请人： Bruker Nano, Inc.
发明人： Markus B. Raschke , Stefan B. Kaemmer , Stephen C. Minne , Chanmin Su
IPC分类号： G01Q10/00
CPC分类号： G01Q20/02 , G01Q10/00 , G01Q10/065 , G01Q60/06 , G01Q60/22 , G01Q60/38
摘要： An apparatus and method of performing physical property measurements on a sample with a probe-based metrology instrument employing a nano-confined light source is provided. In one embodiment, an SPM probe tip is configured to support an appropriate receiving element so as to provide a nano-localized light source that is able to efficiently and locally excite the sample on the nanoscale. Preferably, the separation between the tip apex and the sample during spectroscopic measurements is maintained at less than 10 nm, for example, using an AFM TR Mode control scheme.
摘要翻译：提供了一种使用采用纳米限制光源的基于探针的计量仪器对样品进行物理性能测量的装置和方法。在一个实施例中，SPM探针尖端被配置为支撑适当的接收元件，以便提供能够在纳米尺度上有效地和局部地激发样品的纳米局部光源。优选地，例如使用AFM TR模式控制方案，在光谱测量期间尖端顶点和样品之间的间隔保持在小于10nm。

22. 发明授权

US08887584B2 Load measuring apparatus 有权
标题翻译：负载测量仪
公开(公告)号：US08887584B2
公开(公告)日：2014-11-18
申请号：US13144862
申请日：2009-11-19
申请人： Hironori Tohmyoh , Md. Abdus Salam Akanda
发明人： Hironori Tohmyoh , Md. Abdus Salam Akanda
IPC分类号： G01L1/04 , G01L1/14 , G01Q20/02 , B82Y35/00
CPC分类号： G01Q20/02 , B82Y35/00 , G01L1/044 , G01L1/142
摘要： A high-accuracy load measuring apparatus capable of enlarging a measurement range includes a loading section provided at one end of a long and narrow beam. A support supports the beam at a side closer to the other end of the beam than the loading section. A displacement sensor includes a capacitive sensor and is provided to measure a displacement of the loading section. The beam includes a pair of long and narrow plate-like legs arranged in parallel while being spaced apart in a thickness direction and a connecting portion connecting ends of the plate-like legs at a side of the loading section. The beam is supported on the support to have a changeable length between a supported position by the support and the loading section. Each plate-like leg includes a slot, which is a long and narrow hole formed along a length direction in a widthwise central part.
摘要翻译：能够扩大测量范围的高精度负载测量装置包括设置在长而窄的梁的一端的装载部。支撑件在比装载部分更靠近梁的另一端的一侧支撑梁。位移传感器包括电容传感器，并且被提供以测量装载部分的位移。梁包括沿厚度方向间隔开的平行布置的一对长而窄的板状腿，以及连接部分，其在装载部分的一侧连接板状腿的端部。梁支撑在支撑件上，以在由支撑件支撑的位置和装载部分之间具有可变长度。每个板状腿包括狭槽，该狭槽是沿宽度方向的中心部分沿着长度方向形成的长而窄的孔。

23. 发明申请

US20140283229A1 Method and Apparatus of Operating a Scanning Probe Microscope 有权
标题翻译：操作扫描探针显微镜的方法和装置
公开(公告)号：US20140283229A1
公开(公告)日：2014-09-18
申请号：US14288180
申请日：2014-05-27
申请人： Bruker Nano, Inc.
发明人： Yan Hu , Shuiqing Hu , Chanmin Su
IPC分类号： G01Q20/00
CPC分类号： G01Q20/00 , B82Y35/00 , G01Q10/065 , G01Q20/02 , G01Q60/24 , G01Q60/30 , G01Q60/32 , G01Q60/34
摘要： An improved mode of AFM imaging (Peak Force Tapping (PFT) Mode) uses force as the feedback variable to reduce tip-sample interaction forces while maintaining scan speeds achievable by all existing AFM operating modes. Sample imaging and mechanical property mapping are achieved with improved resolution and high sample throughput, with the mode workable across varying environments, including gaseous, fluidic and vacuum.
摘要翻译： AFM成像（峰值力攻丝（PFT）模式）的改进模式使用力作为反馈变量来减少尖端 - 样本相互作用力，同时保持所有现有AFM操作模式可实现的扫描速度。通过改进的分辨率和高的样品通量实现样品成像和力学性能测绘，该模式可以在不同的环境中工作，包括气态，流体和真空。

24. 发明授权

US08776261B2 Tool tips with scanning probe microscopy and/or atomic force microscopy applications 失效
标题翻译：扫描探针显微镜和/或原子力显微镜应用的工具尖端
公开(公告)号：US08776261B2
公开(公告)日：2014-07-08
申请号：US12535586
申请日：2009-08-04
申请人： Victor B. Kley
发明人： Victor B. Kley
IPC分类号： G01Q20/02
CPC分类号： G01Q20/02 , G01Q30/02 , G01Q60/38 , G01Q70/10 , G01Q70/12
摘要： A micro-object is affixed to a mounting structure at a desired relative orientation. The micro-object may be a tool tip optimized to work with particular microscope objectives permitting the tip to be imaged along with the object surface and used to make measurements or modifications through a travel range along the microscope imaging axis equal to or nearly equal to the working distance of the given objective. The tool tip may have a lengths exceeding 80 microns, say up to several millimeters; even the longest tips can have widths of tens of microns.
摘要翻译：微物体以期望的相对取向固定到安装结构。微型物体可以是优化的工具尖端，以便与特定的显微镜物镜一起工作，允许尖端与物体表面成像，并且用于通过沿着显微镜成像轴的行进范围进行测量或修改等于或几乎等于给定目标的工作距离。刀尖可以具有超过80微米的长度，例如多达几毫米; 即使最长的尖端也可以具有几十微米的宽度。

25. 发明授权

US08689360B2 Probe head scanning probe microscope including the same 有权
标题翻译：探针头扫描探针显微镜包括相同
公开(公告)号：US08689360B2
公开(公告)日：2014-04-01
申请号：US13568768
申请日：2012-08-07
申请人： In-su Jeon
发明人： In-su Jeon
IPC分类号： G01Q70/02
CPC分类号： G01Q20/02 , G01Q70/02 , G01Q70/06
摘要： A probe head and a scanning probe microscope (SPM) including the probe head are provided. The probe head includes a plurality of cantilevers, each including a probe; and a holder on which the plurality of cantilevers are installed, wherein a cantilever facing a sample is changed by rotating the holder.
摘要翻译：提供了包括探头的探针头和扫描探针显微镜（SPM）。探头包括多个悬臂，每个悬臂包括探针; 以及其上安装有多个悬臂的保持器，其中通过旋转保持器来改变面向样品的悬臂。

26. 发明申请

US20140082775A1 Modular UHV Compatible Angle Physical Contact Fiber Connection for Transferable Fiber Interferometer Type Dynamic Force Microscope Head 审中-公开
标题翻译：模块化UHV兼容角度物理接触光纤连接可转换光纤干涉仪类型动态力显微镜头
公开(公告)号：US20140082775A1
公开(公告)日：2014-03-20
申请号：US14029168
申请日：2013-09-17
申请人： Brookhaven Science Associates, LLC
发明人： Percy Zahl
IPC分类号： G01Q20/02
CPC分类号： G01Q20/02 , G01Q30/16 , Y10T29/49826
摘要： A modular transferable ultra-high vacuum compatible device has a body with a tunnel through its thickness. An interferometric sensor is mounted above the body and has a brace on which a cantilever is disposed and through which an optical fiber passes so that the two may be aligned prior to installation in an atomic force measurement apparatus. The sensor-mounted body is coupled to a mount for engaging an atomic force measurement apparatus to act as the interferometric head of the apparatus.
摘要翻译：模块化可转移的超高真空兼容装置具有通过其厚度的隧道的主体。干涉测量传感器安装在主体上方，并具有一个支架，悬臂设置在支架上，光纤通过该支架，使得两者可以在安装在原子力测量装置之前对齐。传感器安装的主体联接到用于接合原子力测量装置以用作装置的干涉头部的安装件。

27. 发明申请

US20130312142A1 SYSTEM AND METHOD FOR HIGH-SPEED ATOMIC FORCE MICROSCOPY 有权
标题翻译：高速原子力显微镜的系统与方法
公开(公告)号：US20130312142A1
公开(公告)日：2013-11-21
申请号：US13875122
申请日：2013-05-01
申请人： Boise State University
发明人： Byung I. Kim
IPC分类号： G01Q20/02
CPC分类号： G01Q20/02 , B82Y35/00 , G01Q30/14 , G01Q60/32 , G01Q60/36 , G01Q60/38 , G01Q70/10
摘要： A high-speed atomic force microscope (HSAFM) is disclosed herein. The HSAFM includes a cantilever, a piezotube, an optical detector, a circuit element, and a feedback controller. The cantilever has a probe, and the piezotube is arranged in proximity to the probe. The optical detector is configured to detect deflection of the cantilever, and the circuit element is abutting a first end of the cantilever and is configured to exert a force on the cantilever to resist deflection of the cantilever. The circuit element is communicably connected to the optical detector by a first feedback loop. The feedback controller is communicably connected to the piezotube and configured to modulate the piezotube along the Z-axis towards and away from the probe. And the feedback controller is communicably connected to the optical detector through a second feedback loop.
摘要翻译：本文公开了高速原子力显微镜（HSAFM）。 HSAFM包括悬臂，压电管，光学检测器，电路元件和反馈控制器。悬臂具有探针，并且压电管布置在探头附近。光学检测器被配置为检测悬臂的偏转，并且电路元件邻接悬臂的第一端并且构造成在悬臂上施加力以阻止悬臂的偏转。电路元件通过第一反馈回路可通信地连接到光学检测器。反馈控制器可通信地连接到压电管并被配置成沿Z轴朝向和远离探头调制压电管。并且反馈控制器通过第二反馈回路可通信地连接到光学检测器。

28. 发明授权

US08443459B2 Fast-scanning SPM scanner and method of operating same 有权
标题翻译：快速扫描SPM扫描仪及其操作方法
公开(公告)号：US08443459B2
公开(公告)日：2013-05-14
申请号：US13435086
申请日：2012-03-30
申请人： Nghi Phan , Craig Cusworth , Craig Prater
发明人： Nghi Phan , Craig Cusworth , Craig Prater
IPC分类号： G01Q10/00 , G01Q20/02 , G01Q60/24
CPC分类号： G01Q10/02 , G01Q20/02 , G01Q30/025
摘要： A high-bandwidth SPM tip scanner includes an objective that is vertically movable within the scan head to increase the depth of focus for the sensing light beam. Movable optics also are preferably provided to permit targeting of the sensing light beam on the SPM's probe and to permit the sensing light beam to track the probe during scanning. The targeting and tracking permit the impingement of a small sensing light beam spot on the probe under direct visual inspection of focused illumination beam of an optical microscope integrated into the SPM and, as a result, permits the use of a relatively small cantilever with a commensurately small resonant frequency. Images can be scanned on large samples having a largest dimension exceeding 7 mm with a resolution of less than 1 Angstrom and while scanning at rates exceeding 30 Hz.
摘要翻译：高带宽SPM尖端扫描器包括在扫描头内可垂直移动的物镜，以增加感测光束的聚焦深度。优选地提供可移动光学器件以允许在SPM的探针上瞄准感测光束，并允许感测光束在扫描期间跟踪探针。瞄准和跟踪允许在直接目视检查集成在SPM中的光学显微镜的聚焦照明光束上的探针上的小感测光束点的撞击，结果允许使用相对较小的悬臂小谐振频率。可以在尺寸超过7 mm的大样品上扫描图像，分辨率小于1埃，扫描速度超过30赫兹。

29. 发明申请

US20120327429A1 Displacement Measurement Method and Apparatus Thereof, Stage Apparatus, and Probe Microscope 失效
标题翻译：位移测量方法及装置，舞台装置和探头显微镜
公开(公告)号：US20120327429A1
公开(公告)日：2012-12-27
申请号：US13605395
申请日：2012-09-06
申请人： Toshihiko Nakata , Masahiro Watanabe , Shuichi Baba , Mineo Nomoto
发明人： Toshihiko Nakata , Masahiro Watanabe , Shuichi Baba , Mineo Nomoto
IPC分类号： G01B11/14
CPC分类号： G01Q20/02 , G01B9/02014 , G01B9/02057 , G01B9/02058 , G01B9/02076 , G01B2290/45 , G01B2290/70 , G01S17/50
摘要： A displacement measurement method, an apparatus thereof, and a probe microscope. which enable stable measure an amount of displacement and a moving distance of an object under measurement with an accuracy of the sub-nanometer order or below without being affected by disturbances such as fluctuations of air and mechanical vibration. A pulsed beam is split into two; one beam is reflected by an object under measurement and then inputted to a delay optical path equivalent to one pulse period; and the other beam is sent through the same delay optical path in the opposite direction up to the object under measurement with a delay of one pulse period, and then reflected by the object under measurement. An optical phase variation caused by the movement of the object under measurement is obtained by subjecting the two pulsed beams to interference.
摘要翻译：位移测量方法，其装置和探针显微镜。这使得能够以亚纳米级或更低的精度稳定地测量被测物体的位移量和移动距离，而不受诸如空气波动和机械振动之类的扰动的影响。脉冲束被分成两部分; 一个光束被测量对象反射，然后输入到等于一个脉冲周期的延迟光路; 并且另一个光束在相对的方向上通过相同的延迟光路被发送到被测物体的一个脉冲周期的延迟，然后被测量对象反射。通过对两束脉冲光束进行干涉而获得由测量对象的运动引起的光学相位变化。

30. 发明授权

US08314940B2 Probe microscope 有权
标题翻译：探头显微镜
公开(公告)号：US08314940B2
公开(公告)日：2012-11-20
申请号：US12831651
申请日：2010-07-07
申请人： Yoshimasa Suzuki , Kazuhiko Kawasaki , Satoshi Koga
发明人： Yoshimasa Suzuki , Kazuhiko Kawasaki , Satoshi Koga
IPC分类号： G01B11/24
CPC分类号： G01B9/02027 , G01B9/02007 , G01B2290/45 , G01Q20/02
摘要： A probe microscope includes a cantilever having a probe for contact with an object, first and second displacement detection optical systems, and an object lens. The first displacement detection optical system includes a first light source and a first displacement detecting section that detects displacement of the cantilever. The second displacement detection optical system includes a second light source and a second displacement detecting section that detects displacement of the object. The object lens is provided between the cantilever and the first light source and between the cantilever and the second light source. The object lens has a focal position for the light that is emitted from the first light source and has a first wavelength at the position of the cantilever and has a focal position for the light that is emitted from the second light source and has a second wavelength at the position of the object.
摘要翻译：探针显微镜包括具有用于与物体接触的探针的悬臂，第一和第二位移检测光学系统以及物镜。第一位移检测光学系统包括检测悬臂的位移的第一光源和第一位移检测部。第二位移检测光学系统包括第二光源和检测物体的位移的第二位移检测部。物镜设置在悬臂与第一光源之间以及悬臂与第二光源之间。物镜具有用于从第一光源发出的光的焦点位置，并且在悬臂的位置处具有第一波长，并且具有用于从第二光源发射的光的焦点位置，并具有第二波长在对象的位置。

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