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    • 23. 发明申请
    • SUPERCONDUCTING CABLE
    • 超级电缆
    • US20110203827A1
    • 2011-08-25
    • US13011661
    • 2011-01-21
    • Masayuki HiroseRyosuke Hata
    • Masayuki HiroseRyosuke Hata
    • H01B12/16
    • H01B12/14Y02E40/645
    • Provided is a superconducting cable capable of maintaining a predetermined thermal insulation property without having a vacuum thermal insulation structure. The superconducting cable of the present invention includes: a cable unit 100, in which a core having a superconductor layer and an electrical insulation layer is housed in a core-housing pipe; a thermal insulation member 200 which is provided outside the cable unit and maintained in a non-vacuum state; and a sealing member for preventing the permeation of moisture into the thermal insulation member. By equipping the outside of the cable unit with the thermal insulation member 200 which is maintained in a non-vacuum state, it is made possible to maintain the predetermined thermal insulation property without having a vacuum thermal insulation structure.
    • 提供一种能够在没有真空隔热结构的情况下保持预定的绝热性能的超导电缆。 本发明的超导电缆包括:电缆单元100,其中具有超导体层的芯和电绝缘层容纳在芯壳体管中; 隔热构件200,其设置在电缆单元的外部并保持在非真空状态; 以及密封构件,用于防止水分渗透到绝热构件中。 通过将电缆单元的外部装配成保持在非真空状态的隔热构件200,可以在没有真空隔热结构的情况下保持预定的绝热性。
    • 24. 发明授权
    • Control device of substrate processing apparatus and control program therefor
    • 基板处理装置的控制装置及其控制程序
    • US07987012B2
    • 2011-07-26
    • US12187956
    • 2008-08-07
    • Daisuke MorisawaMasayuki Hirose
    • Daisuke MorisawaMasayuki Hirose
    • G06F19/00G06F7/00H01L21/66H01L21/00
    • C23C16/52G05B19/41835G05B2219/45031H01L21/67248Y02P90/12Y02P90/20
    • A control device is provided that flexibly controls a substrate processing apparatus for each product process. Four process recipes PM 1 to PM 4 are stored in a first storage unit 255a. Corresponding to each of the process recipes, a high temperature, a medium temperature, and a low temperature pre-recipe are stored in a second storage unit 255b. A process recipe determination unit 260 determines, in response to a recipe specified by the operator, a process recipe corresponding to the specified recipe from the first storage unit 255a. A stage temperature acquisition unit 265 acquires, from the determined process recipe, a stage temperature. A pre-recipe selection unit 270 selects, from the three types of pre-recipes stored in the second storage unit 255b, one pre-recipe corresponding to the stage temperature. Before the wafer W is deposition-processed, therefore, the PM may be well-conditioned according to the selected pre-recipe.
    • 提供了一种控制装置,其灵活地控制每个产品处理的基板处理装置。 四个处理配方PM 1至PM 4存储在第一存储单元255a中。 对应于每个工艺配方,高温,中等温度和低温预处理存储在第二存储单元255b中。 处理配方确定单元260响应于操作者指定的食谱,确定来自第一存储单元255a的与指定食谱对应的处理食谱。 台阶温度获取单元265从确定的处理配方中获取阶段温度。 预处理选择单元270从存储在第二存储单元255b中的三种类型的预配制中选择与舞台温度相对应的一个预处理。 因此,在晶片W进行沉积处理之前,PM可以根据所选择的预配方式进行调节。
    • 25. 发明授权
    • Designing system of DC superconducting cable
    • 直流超导电缆设计系统
    • US07908124B2
    • 2011-03-15
    • US11791616
    • 2005-10-28
    • Masayuki Hirose
    • Masayuki Hirose
    • G06F17/50
    • H01B12/06H01B12/16Y02E40/642Y02E40/647
    • Provided is a designing system for designing a DC superconducting cable comprising a conductor layer and an outer-conductor layer arranged outside the conductor layer through an electrical insulation layer, the designing system comprising: First correlation-calculation means for calculating the relationship between a ratio Xf and a contraction amount Cf, the ratio Xf being a ratio between the winding diameter and the winding pitch of a superconducting wire constituting the conductor layer, and the contraction amount Cf being capable of absorbing the thermal contraction of the superconducting wire due to cooling; Second correlation-calculation means for calculating the relationship between the ratio Xf and a use quantity ratio Ufx of the superconducting wire in the conductor layer per unit length of the cable; and First selection means for extracting, from the calculation results of First correlation-calculation means and Second correlation-calculation means, data of the winding diameter and the winding pitch of the superconducting wire, the data enabling satisfying a given contraction amount Cfs and the use quantity ratio Ufxs of the superconducting wire.
    • 提供一种设计系统,用于设计通过电绝缘层布置在导体层之外的导体层和外导体层的DC超导电缆,该设计系统包括:第一相关计算装置,用于计算Xf 和收缩量Cf,构成导体层的超导线的卷绕直径和卷绕间距之间的比率Xf以及能够吸收由于冷却引起的超导线的热收缩的收缩量Cf; 第二相关计算装置,用于计算电缆的每单位长度的导体层中的超导线的比Xf与使用量比Ufx之间的关系; 以及第一选择装置,用于从第一相关计算装置和第二相关计算装置的计算结果中提取超导线的绕组直径和绕组间距的数据,使得满足给定收缩量Cfs的数据和使用 超导线的数量比Ufxs。
    • 26. 发明申请
    • Dielectric Strength Test Method of Superconducting Cable
    • 超导电缆的绝缘强度测试方法
    • US20080039334A1
    • 2008-02-14
    • US11664608
    • 2005-10-12
    • Masayuki HiroseKen YatsukaHiroshi Takigawa
    • Masayuki HiroseKen YatsukaHiroshi Takigawa
    • G01R31/12
    • G01R31/1254
    • A dielectric strength test method of a superconducting cable that can evaluate the insulation characteristic of a superconducting cable in a state in which a refrigerant is filled without filling a refrigerant is provided. A tested superconducting cable is filled with gas in place of a refrigerant and a regular dielectric strength test is conducted at room temperature. Preferably, a preliminary dielectric strength test is conducted prior to the regular dielectric strength test. In the preliminary dielectric strength test, a first reference superconducting cable filled with a refrigerant at a predetermined pressure and a second reference superconducting cable filled with gas in place of a refrigerant at a predetermined pressure are provided. The preliminary dielectric strength test is conducted for the first reference superconducting cable at refrigerant temperature and the second reference superconducting cable at room temperature to find the correlation between the dielectric strength characteristics of the cables. At the time, the test voltage is determined based on the dielectric strength characteristic of the second reference superconducting cable. The regular dielectric strength test is conducted at the test voltage.
    • 提供了一种超导电缆的介电强度测试方法,其可以在不填充制冷剂的情况下填充制冷剂的状态下评估超导电缆的绝缘特性。 测试的超导电缆填充有气体代替制冷剂,并在室温下进行规则的介电强度试验。 优选地,在常规介电强度试验之前进行预介电强度试验。 在初步绝缘强度试验中,提供了填充有预定压力的制冷剂的第一参考超导电缆和填充有气体的第二参考超导电缆代替预定压力的制冷剂。 对于制冷剂温度下的第一参考超导电缆和室温下的第二参考超导电缆进行初步介电强度测试,以找出电缆的介电强度特性之间的相关性。 此时,基于第二参考超导电缆的介电强度特性确定测试电压。 在试验电压下进行常规绝缘强度试验。
    • 28. 发明申请
    • Superconducting cable line
    • 超导电缆线
    • US20070179062A1
    • 2007-08-02
    • US11597990
    • 2005-07-12
    • Masayuki HiroseYuichi Yamada
    • Masayuki HiroseYuichi Yamada
    • H02G15/34H01L39/24
    • H01B12/16Y02E40/647Y10S505/886Y10S505/888Y10T29/49014
    • A superconducting cable line includes a heat insulation pipe for a fluid for transporting liquid hydrogen, a superconducting cable housed in the heat insulation pipe for a fluid, and heat exchange means for performing a heat exchange between liquid hydrogen and a refrigerant of the cable. The superconducting cable includes a cable core inside a heat insulation pipe for a cable and is housed in the heat insulation pipe for a fluid to form a low temperature environment around the cable and a double heat insulation structure including the heat insulation pipe. Therefore, since heat intrusion into the superconducting cable is reduced and the refrigerant is cooled with liquid hydrogen, the line can reduce energy for cooling the refrigerant.
    • 超导电缆线包括用于输送液体氢的流体的隔热管,容纳在用于流体的隔热管中的超导电缆,以及用于在液体氢和电缆的制冷剂之间进行热交换的热交换装置。 超导电缆包括用于电缆的绝热管内的电缆芯,并且被容纳在用于流体的隔热管中以形成围绕电缆的低温环境和包括隔热管的双重隔热结构。 因此,由于降低了进入超导电缆的热量,并且用液体氢气冷却制冷剂,所以该线路可以减少用于冷却制冷剂的能量。