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    • 26. 发明授权
    • Substrate processing system, substrate processing method and storage medium
    • 基板处理系统,基板处理方法和存储介质
    • US08588952B2
    • 2013-11-19
    • US13008196
    • 2011-01-18
    • Kenichirou MatsuyamaTakeshi Matsumoto
    • Kenichirou MatsuyamaTakeshi Matsumoto
    • G06F19/00
    • H01L21/67178H01L21/67173H01L21/67745
    • A substrate processing system, which repeats a carrying cycle in which a substrate is carried sequentially in a carrying order indicated by module numbers assigned to the modules, respectively, from the module of a lower module number to that of a higher module number, and is capable of processing substrates at a high throughput even if some modules become unusable and, thereafter, become usable. A controller controls a carrier such that the carrier carries a substrate taken out from the module preceding a multimodule unit including a plurality of modules to the module nest in the carrying order to the module of the multimodule unit from which a substrate is carried out at time nearest to time when the substrate was carried out from the module preceding the multimodule.
    • 一种基板处理系统,其重复进行循环,其中分别以较低模块号的模块与较高模块编号的模块分别以由模块分配的模块号指示的承载顺序顺序地承载基板,并且是 能够以高产量处理基板,即使一些模块变得不可用,并且之后变得可用。 控制器控制载体,使得载体承载从包括多个模块的多模块单元之前的模块取出的基板到模块嵌套到载体序列到多模单元的模块,在该模块上,时间 最接近基板从多模块前面的模块执行的时间。
    • 27. 发明授权
    • Substrate processing apparatus and substrate processing method
    • 基板加工装置及基板处理方法
    • US08560108B2
    • 2013-10-15
    • US12971171
    • 2010-12-17
    • Kenichirou MatsuyamaTakeshi Matsumoto
    • Kenichirou MatsuyamaTakeshi Matsumoto
    • B65H1/00G06F19/00
    • H01L21/67225H01L21/67196
    • Even when a module constituting a multi-module becomes an unavailable module, transfer of substrates can be promptly performed, while restricting generation of inferior products. When a destination module of a multi-module becomes unavailable before a substrate is transferred to the destination module, a destination of the substrate is changed to a module to which a substrate subsequent to the substrate is to be loaded. Upon generation of an unavailable module, before the transfer unit accesses the module on an upstream end of the transfer cycle, the transfer cycle proceeds until a precedent substrate becomes ready to be unloaded from the changed destination module. Alternatively, upon generation of an unavailable module, when the transfer unit is located on an upstream side of the unavailable module in the transfer cycle, the transfer operation of the transfer unit is made standby until a precedent substrate becomes ready to be unloaded in the changed destination module.
    • 即使构成多模块的模块成为不可用模块,也可以迅速地进行基板的转印,同时限制劣质产品的产生。 当在将基板传送到目的地模块之前,多模块的目的地模块变得不可用时,将基板的目的地改变为要在基板之后的基板被加载到的模块。 在生成不可用模块之前,在传送单元在传送周期的上游端访问模块之前,传送周期继续进行,直到先前的基板准备好从改变的目的地模块卸载。 或者,当生成不可用模块时,当传送单元位于传送周期中的不可用模块的上游侧时,传送单元的传送操作被备用直到先前的基板准备好在改变后的装载中被卸载 目的地模块。